CN108212616A - pre-coating device and method - Google Patents
pre-coating device and method Download PDFInfo
- Publication number
- CN108212616A CN108212616A CN201810050102.2A CN201810050102A CN108212616A CN 108212616 A CN108212616 A CN 108212616A CN 201810050102 A CN201810050102 A CN 201810050102A CN 108212616 A CN108212616 A CN 108212616A
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- China
- Prior art keywords
- slot room
- paint roller
- coating
- slot
- outlet pipe
- Prior art date
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- Pending
Links
- 238000000576 coating method Methods 0.000 title claims abstract description 67
- 239000011248 coating agent Substances 0.000 title claims abstract description 51
- 238000000034 method Methods 0.000 title abstract description 7
- 239000003973 paint Substances 0.000 claims abstract description 65
- 239000007788 liquid Substances 0.000 claims abstract description 57
- 238000004140 cleaning Methods 0.000 claims abstract description 47
- 239000004744 fabric Substances 0.000 claims abstract description 33
- 239000000463 material Substances 0.000 claims abstract description 28
- 239000012528 membrane Substances 0.000 claims abstract description 26
- 230000008676 import Effects 0.000 claims description 6
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 239000000243 solution Substances 0.000 description 34
- 239000000758 substrate Substances 0.000 description 10
- 238000004519 manufacturing process Methods 0.000 description 9
- 229920002120 photoresistant polymer Polymers 0.000 description 9
- 230000003749 cleanliness Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 239000004973 liquid crystal related substance Substances 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000006210 lotion Substances 0.000 description 1
- 238000010422 painting Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/16—Rigid blades, e.g. scrapers; Flexible blades, e.g. wipers
- B08B1/165—Scrapers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/20—Cleaning of moving articles, e.g. of moving webs or of objects on a conveyor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/041—Cleaning travelling work
Landscapes
- Coating Apparatus (AREA)
Abstract
The present invention provides a kind of pre-coating device and method.The precoating cloth apparatus includes：Rinse bath, pre- paint roller, the first input duct, the first outlet pipe, the second outlet pipe and the first scraper；Demarcation strip is equipped in rinse bath, rinse bath is divided into the first slot room and the second slot room by demarcation strip, and the height of demarcation strip is less than the height of rinse bath；First input duct accesses the inlet of the first slot room；First outlet pipe and the second outlet pipe are respectively connected to the liquid outlet of the first slot room and the liquid outlet of the second slot room；Pre- paint roller is set in rinse bath and is contacted with the indoor cleaning solution of the first slot, and the first scraper is set on the side wall of the first slot room and is contacted with pre- paint roller.Do not stop into the first slot room by the first input duct to be passed through new cleaning solution during pre-coating, the cleaning solution for containing the membrane material scraped in first slot room is pushed into the second slot room, so as to which cleaning solution in the first slot room be kept to be in clean state always, it avoids occurring membrane material residual in pre- paint roller, it is bad to reduce coating.
Description
Technical field
The present invention relates to display technology field more particularly to a kind of pre-coating device and methods.
Background technology
With the development of display technology, liquid crystal display (Liquid Crystal Display, LCD) and organic light emission two
The flat display apparatus such as pole pipe display (Organic Light Emitting Display, OLED) are because with high image quality, saving
Electricity, fuselage are thin and the advantages that have a wide range of application, and be widely used in mobile phone, TV, personal digital assistant, digital camera,
The various consumer electrical products such as laptop, desktop computer, become the mainstream in display device.
Coating process is often used in the manufacturing process of flat display apparatus, as shown in Figure 1, common coating process
Method is：The coated film on substrate 100 ' of nozzle 200 ' is coated with using one and the isometric slit-shaped in 100 ' side of substrate to be coated
Material, and with the coating of nozzle 200 ', mechanical part drive nozzle 200 ' with certain speed from the side of substrate 100 ' sweep to
The opposite side of substrate completes the coating process of entire substrate 100 ', and this coating method is in coating process, and nozzle 200 ' is in length
It is easily blocked after time use, causes blocked position that can not spray membrane material, forming one on substrate 100 ' does not have
The line defect region of membrane material, causes to be coated with bad, influences product yield.
Nozzle blocks in order to prevent, causes to be coated with bad, and the prior art on substrate 100 ' formally when being coated, meeting
Pre-coating is first carried out to observe whether the nozzle 200 ' blocks, as shown in Figure 1, the method for pre-coating is：Nozzle 200 ' is moved
It moves the top of pre- paint roller 300 ', and is coated in pre- paint roller 300 ' membrane material and whether observe the membrane material complete, to determine institute
State whether nozzle 200 ' blocks, while pre- paint roller 300 ' rotates, the scraper 400 ' scrapes the membrane material in pre- paint roller 300 '
In the rinse bath 500 ' for filling cleaning solution, to keep the cleaning of pre- paint roller 300 ', prevent the membrane material in pre- paint roller 300 ' from remaining, shadow
The judgement that nozzle 200 ' blocks is rung, with the increase of pre-coating number, the membrane material fallen into rinse bath 500 ' is also more and more, clearly
Washing lotion increasingly in membrane material concentration it is higher and higher, at this time with the rotation of pre- paint roller 300 ', membrane material is inevitable in cleaning solution
Residual to pre- paint roller 300 ' on, and then pre- paint roller 300 ' is caused to cannot keep cleaning, causes coating bad, and frequent shutdown is more
The cleaning solution renewed can influence the production efficiency of producing line again.
Invention content
The purpose of the present invention is to provide a kind of precoating cloth apparatus, can improve the cleanliness factor of pre- paint roller, avoid coating not
It is good, improving production efficiency.
The present invention also aims to provide a kind of pre-coating method, the cleanliness factor of pre- paint roller can be improved, avoid being coated with
It is bad, improving production efficiency.
To achieve the above object, the present invention provides a kind of precoating cloth apparatus, including：Rinse bath, pre- paint roller, the first feed liquor
Pipeline, the first outlet pipe, the second outlet pipe and the first scraper；
Demarcation strip is equipped in the rinse bath, the rinse bath is divided into the first slot room and the second slot by the demarcation strip
Room, the height of the demarcation strip are less than the height of the rinse bath；
First input duct accesses the inlet of the first slot room；First outlet pipe and the second outlet tube
Road is respectively connected to the liquid outlet of the first slot room and the liquid outlet of the second slot room；
The pre- paint roller is set in the rinse bath and is contacted with the indoor cleaning solution of the first slot, first scraper
It is contacted on the side wall of the first slot room and with the pre- paint roller.
The precoating cloth apparatus further includes：Second scraper, second scraper be set on the second slot room side wall on and
It is contacted with the pre- paint roller.
The precoating cloth apparatus further includes：Liquid feed valve, the liquid feed valve include：Import and first outlet, the import connect
Enter cleaning solution, the first outlet is connected with first input duct.
The precoating cloth apparatus further includes：First liquid valve and the second liquid valve, first liquid valve and second go out liquid
Valve is respectively arranged in first outlet pipe and the second outlet pipe.
The precoating cloth apparatus is installed on coating machine platform.
The coating machine platform includes：Baseplate carrier and the coating nozzle above the baseplate carrier, the pre-coating
Device is installed on the side of the baseplate carrier.
First scraper and the second scraper are tangent with the peripheral surface of the pre- paint roller.
The present invention also provides a kind of pre-coating methods, applied to above-mentioned precoating cloth apparatus, include the following steps：
Pre-coating is carried out in the pre- paint roller；
Membrane material in pre-coating to the pre- paint roller is scraped described first by the pre- paint roller rotation, first scraper
Slot room, while first input duct does not stop to be passed through new cleaning solution into the first slot room, will contain in the first slot room
The cleaning solution for having the membrane material scraped is pushed into the second slot room；
After completing a pre-coating, the first input duct is closed, second outlet pipe is opened and empties second slot
Room.
The pre-coating method further includes：
Liquid condition is changed according to preset, the first outlet pipe is opened and empties the first slot room.
The preset liquid condition of changing reaches preset operating time for the precoating cloth apparatus or completes preset times
Pre-coating.
Beneficial effects of the present invention：The present invention provides a kind of precoating cloth apparatus, including：Rinse bath, pre- paint roller, the first feed liquor
Pipeline, the first outlet pipe, the second outlet pipe and the first scraper；Demarcation strip is equipped in the rinse bath, the demarcation strip will
The rinse bath is divided into the first slot room and the second slot room, and the height of the demarcation strip is less than the height of the rinse bath；It is described
First input duct accesses the inlet of the first slot room；First outlet pipe and the second outlet pipe are respectively connected to
The liquid outlet of one slot room and the liquid outlet of the second slot room；The pre- paint roller be set on the rinse bath in and in the first slot room
Cleaning solution contact, first scraper is set on the side wall of the first slot room and contacts with the pre- paint roller.During pre-coating
Do not stop into the first slot room to be passed through new cleaning solution by the first input duct, the film scraped will be contained in the first slot room
The cleaning solution of material is pushed into the second slot room, so as to which cleaning solution in the first slot room be kept always in clean state, to avoid in pre- paint roller
There is membrane material residual, reduce and be coated with bad, improving production efficiency.The present invention also provides a kind of pre-coating methods, can improve pre-
The cleanliness factor of paint roller avoids being coated with bad, improving production efficiency.
Description of the drawings
For further understanding of the features and technical contents of the present invention, it please refers to below in connection with the detailed of the present invention
Illustrate and attached drawing, however, the drawings only provide reference and explanation, is not intended to limit the present invention.
In attached drawing,
Fig. 1 is existing coating machine platform and the structure chart for precoating cloth apparatus；
Fig. 2 is the coating machine platform of the present invention and the structure chart for precoating cloth apparatus；
Fig. 3 is the flow chart of the pre-coating method of the present invention.
Specific embodiment
The technological means and its effect taken further to illustrate the present invention, below in conjunction with the preferred implementation of the present invention
Example and its attached drawing are described in detail.
Referring to Fig. 2, the present invention provides a kind of precoating cloth apparatus, including：Rinse bath 1, pre- paint roller 2, the first input duct
3rd, the first outlet pipe 4, the second outlet pipe 5 and the first scraper 7；
Specifically, it is equipped with demarcation strip 101 in the rinse bath 1, the rinse bath 1 is divided into the by the demarcation strip 101
One slot room 12 and the second slot room 13.
It should be noted that the height of the demarcation strip 101 is less than the height of the rinse bath 1, so as to first slot
When the cleaning solution contained in room 12 overflows, the demarcation strip 101 can be crossed and flowed into the second slot room 13, and will not be from institute
It states and is overflowed in rinse bath 1.
Specifically, first input duct 3 accesses the inlet of the first slot room 12；First outlet pipe 4
And second outlet pipe 5 be respectively connected to the liquid outlet of the first slot room 12 and the liquid outlet of the second slot room 13, wherein, described first into
Liquid pipe road 3 is used to inject cleaning solution to the first slot room 12, and 4 and second outlet pipe 5 of the first outlet pipe is used respectively
It is discharged outside the rinse bath 1 in by the cleaning solution in the 12 and second slot room 13 of the first slot room.
It is noted that in some embodiments of the invention, the precoating cloth apparatus further includes：Second input duct
6, second input duct 6 accesses the inlet of the second slot room 13, for injecting cleaning solution to the second slot room 13.
Preferably, the liquid outlet of the first slot room 12 and the liquid outlet of the second slot room 13 be located at respectively the first slot room 12 with
The inlet of the bottom of second slot room 13, the inlet of the first slot room 12 and the second slot room 13 is located at the first slot room 12 respectively
With the top of the second slot room 13.
Further, in order to control flowing in and out for the cleaning solution in the 12 and second slot room 13 of the first slot room, this
The precoating cloth apparatus of invention further includes：Liquid feed valve 9, the first liquid valve 10 and the second liquid valve 11, wherein, the liquid feed valve 9 wraps
It includes：Import, first outlet and second outlet, the import are used to access the liquid storage outside cleaning solution, such as access one from outside
Obtain cleaning solution in pond, the first outlet and second outlet respectively with 3 and second input duct of the first input duct, 6 phase
Even, 10 and second liquid valve 11 of the first liquid valve is respectively arranged in 4 and second outlet pipe 5 of the first outlet pipe.
In a non-operative state, the liquid feed valve 9, the first liquid valve 10 and the second liquid valve 11 are turned off,
Specifically, the pre- paint roller 2 is set in the rinse bath 1 and is contacted with the cleaning solution in the first slot room 12,
First scraper 7 is set on the side wall of the first slot room 12 and is contacted with the pre- paint roller 2, so as in the pre-coating
When, the membrane material of the pre-coating in the pre- paint roller 2 can be scraped by the first scraper 7 into the first slot room 12.
Further, in order to which promote the membrane material of the pre-coating in pre- paint roller 2 scrapes effect, further improve pre- paint roller 2
Cleannes, in some embodiments of the invention, it is described precoating cloth apparatus can further include：Second scraper 8, it is described
Second scraper 8 is set on the side wall of the second slot room 13 and is contacted with the pre- paint roller 2, at this point, pre- in the pre- paint roller 2
The membrane material of coating can by the first scraper 7 it is preliminary strike off after, the supplement that can also pass through the second scraper 8 be struck off, and pass through company
It is continuous to strike off twice, ensure not having in pre- paint roller 2 membrane material of pre-coating to remain.
Specifically, 7 and second scraper 8 of the first scraper is tangent with the peripheral surface of the pre- paint roller 2, further,
The length struck off width and be more than or equal to the pre- paint roller 2 of first scraper, 7 and second scraper 8, it is described pre- effectively to strike off
Membrane material in paint roller 2.
Specifically, as shown in Fig. 2, the precoating cloth apparatus is installed on coating machine platform, the coating machine platform includes：Substrate
Microscope carrier 100 and the coating nozzle 200 above the baseplate carrier 100.The precoating cloth apparatus is installed on the substrate and carries
The side of platform 100, the baseplate carrier 100 are used to carry substrate 300 to be coated.
Preferably, length and to be coated base of the length of the spraying slit of the coating nozzle 200 with the pre- paint roller 2
The equal length of the long side of plate 300, the membrane material that the coating nozzle 200 sprays is photoresist.
Specifically, the course of work of the precoating cloth apparatus is：The coating nozzle 200 is moved in the pre- paint roller 2,
The first outlet of the liquid feed valve 9 is opened, the first input duct 3 injects cleaning solution, the coating into the first slot room 12
Whether photoresist of the nozzle 200 in pre- 2 coating photoresist of paint roller, the observation pre- paint roller 2 be complete, to determine the painting
Whether cloth nozzle 200 blocks, while the pre- paint roller 2 rotates, and first scraper 7 scrapes the photoresist in the pre- paint roller 2
It falls in the first slot room 12, the first outlet of the liquid feed valve 9 is persistently opened, and the first input duct 3 continues to described the
The new cleaning solution of injection in one slot room 12 so that the cleaning solution containing photoresist overflows into the second slot room 13 in the first slot room 12
It is interior, with keep the cleaning solution of the first slot room 12 always without photoresist or a small amount of photoresist is contained only, with described pre-
Paint roller 2 rotates, and second scraper 8 strikes off the pre- paint roller 2 for the second time, and further removing the pre- paint roller 2 may
Remaining photoresist, these possible remaining photoresists fall directly into the second slot room 13, after a pre-coating is completed, close
The first outlet of the liquid feed valve 9 is closed, stops injecting cleaning solution to the first slot room 12, opens simultaneously the second liquid valve 11,
Cleaning solution in the second slot room 13 is all discharged.
In addition, reach it is preset change liquid condition when, can also open the first liquid valve 10, will be in the first slot room 12
Cleaning solution excludes, and the preset liquid condition of changing can be that the precoating cloth apparatus reaches preset operating time or completes pre-
If the pre-coating of number, such as first liquid valve 10 was opened every 1 month, discharge the cleaning in the first slot room 12
Liquid, the cleaning solution more renewed can continuously work long hours without being replaced and cleaned so as to the precoating cloth apparatus of the present invention
Liquid, improving production efficiency.
As spare selection, when some necessity, the second outlet of the liquid feed valve 9 can be opened, to described the
Injection cleaning solution in two slot rooms 13.
Please refer to Fig. 3 and with reference to Fig. 2, the present invention also provides a kind of pre-coating methods, are arranged applied to precoating as described above
It puts, includes the following steps：
Step S1, pre-coating is carried out in the pre- paint roller 2；
Step S2, described pre- paint roller 2 rotates, and first scraper 7 scrapes the membrane material in pre-coating to the pre- paint roller 2
To the first slot room 12, while first input duct 3 does not stop to be passed through new cleaning solution into the first slot room 12, by institute
It states the cleaning solution containing the membrane material scraped in the first slot room 12 and is pushed into the second slot room 13；
Step S3, after completing a pre-coating, the first input duct 3 is closed, second outlet pipe 5 is opened and empties institute
State the second slot room 13.
Specifically, the pre-coating method further includes：
Step S4, liquid condition is changed according to preset, opens the first outlet pipe 4 and empty the first slot room 12.
Preferably, in the step S4 it is preset change liquid condition for the precoating cloth apparatus reach preset operating time or
The pre-coating of preset times is completed, such as first liquid valve 10 was opened every 1 month, is discharged in the first slot room 12
Cleaning solution.
In conclusion the present invention provides a kind of precoating cloth apparatus, including：Rinse bath, pre- paint roller, the first input duct,
One outlet pipe, the second outlet pipe and the first scraper；It is equipped with demarcation strip in the rinse bath, the demarcation strip is by the cleaning
Slot is divided into the first slot room and the second slot room, and the height of the demarcation strip is less than the height of the rinse bath；First feed liquor
Pipeline accesses the inlet of the first slot room；First outlet pipe and the second outlet pipe are respectively connected to the first slot room
Liquid outlet and the liquid outlet of the second slot room；The pre- paint roller be set on the rinse bath in and with the indoor cleaning solution of the first slot
Contact, first scraper are set on the side wall of the first slot room and are contacted with the pre- paint roller.Pass through first during pre-coating
Input duct does not stop to be passed through new cleaning solution into the first slot room, the cleaning of membrane material scraped will be contained in the first slot room
Liquid is pushed into the second slot room, so as to which cleaning solution in the first slot room be kept always in clean state, to avoid membrane material occur in pre- paint roller
Residual reduces and is coated with bad, improving production efficiency.The present invention also provides a kind of pre-coating methods, can improve the clean of pre- paint roller
Cleanliness avoids being coated with bad, improving production efficiency.
The above, for those of ordinary skill in the art, can according to the technique and scheme of the present invention and technology
Other various corresponding changes and deformation are made in design, and all these changes and deformation should all belong to the claims in the present invention
Protection domain.
Claims (10)
1. a kind of precoating cloth apparatus, which is characterized in that including：Rinse bath (1), pre- paint roller (2), the first input duct (3), first
Outlet pipe (4), the second outlet pipe (5) and the first scraper (7)；
Demarcation strip (101) is equipped in the rinse bath (1), the rinse bath (1) is divided into the first slot by the demarcation strip (101)
Room (12) and the second slot room (13), the height of the demarcation strip (101) are less than the height of the rinse bath (1)；
First input duct (3) accesses the inlet of the first slot room (12)；First outlet pipe (4) and second
Outlet pipe (5) is respectively connected to the liquid outlet of the first slot room (12) and the liquid outlet of the second slot room (13)；
The pre- paint roller (2) contacts in the rinse bath (1) and with the cleaning solution in the first slot room (12), and described the
One scraper (7) contacts on the side wall of the first slot room (12) and with the pre- paint roller (2).
2. precoating cloth apparatus as described in claim 1, which is characterized in that further include：Second scraper (8), second scraper
(8) it is contacted on the side wall of the second slot room (13) and with the pre- paint roller (2).
3. precoating cloth apparatus as described in claim 1, which is characterized in that further include：Liquid feed valve (9), liquid feed valve (9) packet
It includes：Import and first outlet, the import access cleaning solution, and the first outlet is connected with first input duct (3).
4. precoating cloth apparatus as claimed in claim 3, which is characterized in that further include：First liquid valve (10) and second goes out liquid
Valve (11), first liquid valve (10) and the second liquid valve (11) are respectively arranged on first outlet pipe (4) and second go out
On liquid pipe road (5).
5. precoating cloth apparatus as described in claim 1, which is characterized in that the precoating cloth apparatus is installed on coating machine platform.
6. precoating cloth apparatus as claimed in claim 5, which is characterized in that the coating machine platform includes：Baseplate carrier (100) and
Coating nozzle (200) above the baseplate carrier (100), the precoating cloth apparatus are installed on the baseplate carrier
(100) side.
7. precoating cloth apparatus as claimed in claim 2, which is characterized in that first scraper (7) and the second scraper (8) with
The peripheral surface of the pre- paint roller (2) is tangent.
A kind of 8. pre-coating method, which is characterized in that arranged applied to the precoating of such as 1 to 7 any one of them of the claims
It puts, includes the following steps：
Pre-coating is carried out on the pre- paint roller (2)；
Membrane material in pre-coating to the pre- paint roller (2) is scraped institute by pre- paint roller (2) rotation, first scraper (7)
The first slot room (12) is stated, while first input duct (3) does not stop to be passed through new cleaning solution into the first slot room (12), it will
Cleaning solution containing the membrane material scraped in the first slot room (12) is pushed into the second slot room (13)；
After completing a pre-coating, the first input duct (3) is closed, opens the second outlet pipe (5) emptying described second
Slot room (13).
9. pre-coating method as claimed in claim 8, which is characterized in that further include：
Liquid condition is changed according to preset, the first outlet pipe (4) is opened and empties the first slot room (12).
10. pre-coating method as claimed in claim 9, which is characterized in that the preset liquid condition of changing is the pre-coating
Device reaches preset operating time or completes the pre-coating of preset times.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810050102.2A CN108212616A (en) | 2018-01-18 | 2018-01-18 | pre-coating device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810050102.2A CN108212616A (en) | 2018-01-18 | 2018-01-18 | pre-coating device and method |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN108212616A true CN108212616A (en) | 2018-06-29 |
Family
ID=62667658
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810050102.2A Pending CN108212616A (en) | 2018-01-18 | 2018-01-18 | pre-coating device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN108212616A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111687003A (en) * | 2020-06-29 | 2020-09-22 | 上海德沪涂膜设备有限公司 | Coating device and coating method for high-viscosity material |
| CN118122576A (en) * | 2024-05-07 | 2024-06-04 | 德沪涂膜设备(苏州)有限公司 | Precoating device and precoating detection method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3033021B2 (en) * | 1998-07-07 | 2000-04-17 | 井上金属工業株式会社 | Cleaning equipment for coating equipment |
| KR20030011463A (en) * | 2001-08-03 | 2003-02-11 | 도쿄 오카 고교 가부시키가이샤 | Pre-discharging apparatus and method for a slit coater |
| TW200413103A (en) * | 2002-11-07 | 2004-08-01 | Tokyo Ohka Kogyo Co Ltd | A pre-discharging apparatus for a slit coater |
| CN1799707A (en) * | 2004-12-31 | 2006-07-12 | Lg.菲利浦Lcd株式会社 | Slit coater with a service unit for a nozzle and a coating method using the same |
| CN206613643U (en) * | 2016-12-19 | 2017-11-07 | K.C.科技股份有限公司 | Precoat unit and the liquid nozzle managing device including this |
-
2018
- 2018-01-18 CN CN201810050102.2A patent/CN108212616A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3033021B2 (en) * | 1998-07-07 | 2000-04-17 | 井上金属工業株式会社 | Cleaning equipment for coating equipment |
| KR20030011463A (en) * | 2001-08-03 | 2003-02-11 | 도쿄 오카 고교 가부시키가이샤 | Pre-discharging apparatus and method for a slit coater |
| TW200413103A (en) * | 2002-11-07 | 2004-08-01 | Tokyo Ohka Kogyo Co Ltd | A pre-discharging apparatus for a slit coater |
| CN1799707A (en) * | 2004-12-31 | 2006-07-12 | Lg.菲利浦Lcd株式会社 | Slit coater with a service unit for a nozzle and a coating method using the same |
| CN206613643U (en) * | 2016-12-19 | 2017-11-07 | K.C.科技股份有限公司 | Precoat unit and the liquid nozzle managing device including this |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111687003A (en) * | 2020-06-29 | 2020-09-22 | 上海德沪涂膜设备有限公司 | Coating device and coating method for high-viscosity material |
| CN111687003B (en) * | 2020-06-29 | 2021-09-14 | 上海德沪涂膜设备有限公司 | Coating device and coating method for high-viscosity material |
| CN118122576A (en) * | 2024-05-07 | 2024-06-04 | 德沪涂膜设备(苏州)有限公司 | Precoating device and precoating detection method |
| CN118122576B (en) * | 2024-05-07 | 2024-08-16 | 德沪涂膜设备(苏州)有限公司 | Precoating device and precoating detection method |
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