CN206613643U - Precoat unit and the liquid nozzle managing device including this - Google Patents
Precoat unit and the liquid nozzle managing device including this Download PDFInfo
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- CN206613643U CN206613643U CN201720106086.5U CN201720106086U CN206613643U CN 206613643 U CN206613643 U CN 206613643U CN 201720106086 U CN201720106086 U CN 201720106086U CN 206613643 U CN206613643 U CN 206613643U
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70908—Hygiene, e.g. preventing apparatus pollution, mitigating effect of pollution or removing pollutants from apparatus
- G03F7/70925—Cleaning, i.e. actively freeing apparatus from pollutants, e.g. using plasma cleaning
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70691—Handling of masks or workpieces
- G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70808—Construction details, e.g. housing, load-lock, seals or windows for passing light in or out of apparatus
- G03F7/70825—Mounting of individual elements, e.g. mounts, holders or supports
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/708—Construction of apparatus, e.g. environment aspects, hygiene aspects or materials
- G03F7/70991—Connection with other apparatus, e.g. multiple exposure stations, particular arrangement of exposure apparatus and pre-exposure and/or post-exposure apparatus; Shared apparatus, e.g. having shared radiation source, shared mask or workpiece stage, shared base-plate; Utilities, e.g. cable, pipe or wireless arrangements for data, power, fluids or vacuum
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7096—Arrangement, mounting, housing, environment, cleaning or maintenance of apparatus
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Health & Medical Sciences (AREA)
- Epidemiology (AREA)
- Public Health (AREA)
- Environmental & Geological Engineering (AREA)
- Life Sciences & Earth Sciences (AREA)
- Atmospheric Sciences (AREA)
- Plasma & Fusion (AREA)
- Computer Networks & Wireless Communication (AREA)
- Inking, Control Or Cleaning Of Printing Machines (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
- Coating Apparatus (AREA)
Abstract
The purpose of this utility model is to provide a kind of following precoating unit and the liquid nozzle managing device including this：It is equipped with weight saving and prevents pre- paint roller that is sagging and improving linearity and circularity.In order to realize this, precoating unit of the present utility model possesses the pre- paint roller for making decoction be discharged in advance from liquid nozzle, and the pre- paint roller is formed by the axle portion of roller portion and the both sides for being incorporated into the roller portion, and the roller portion and the axle portion are fabricated separately and be bonded to each other.
Description
Technical field
The utility model is related to a kind of precoating unit and the liquid nozzle managing device including this, more particularly to one kind has
Pre- discharge, the precoating unit of the cleaning of liquid nozzle and purification function and the liquid nozzle management including the precoating unit of decoction
Device.
Background technology
Generally, in semiconductor equipment or flat-panel monitor (FPD；Flat panel display) manufacturing process in, hold
It is about to the coating processes being coated on the photosensitive liquid that light source reacts on film, so as to perform specific function on processed substrate
Film, such as oxide film, metallic film, semiconductive thin film are patterned into desired shape.
As described above, processed substrate film in the way of constituting predetermined circuit pattern painting photosensitive liquid and coat
Light-sensitive surface, and the light-sensitive surface is exposed with corresponding to circuit pattern, so that by the position being exposed or the portion not being exposed
Position development treatment and a series of process that removes is referred to as photoetching process or photetching technique (Photolithography).
Especially, in the photoetching process, only light-sensitive surface is equably generated with predetermined thickness to manufacture work
Do not produced in sequence bad.For example, light-sensitive surface it is thicker than a reference value generate in the case of, desired part in film may
It can not be etched, and in the case where light-sensitive surface is than the generation of a reference value unfertile land, film may be eclipsed than desired etch quantity
Carve more.
Therefore, to the light-sensitive surface of uniform thickness is generated in processed substrate, it is necessary to first on processed substrate with
Uniform thickness painting photosensitive liquid (hereinafter referred to as " decoction ").
In addition, with the maximization of display base plate size, utilizing gap nozzle (Slit Nozzle) slot coated mode
It is widely used as decoction coating method.
Slot coated mode is by the way that length to be corresponded to the gap nozzle of the width of processed substrate along base plate transfer
And the mode sprayed decoction and be coated with.
Equipped with following precoating unit in the slot coated device using the gap nozzle, on processed substrate
It is coated with before decoction, so that the pearl (bead) of decoction will in the way of outlet side in gap nozzle of uniform concentration and flow knot
Decoction is discharged in advance.
Prior art on this precoating unit is disclosed Korean granted patent the 10-0840528th, Korean granted
In patent the 10-1206776th, Korean granted patent the 10-0781771st etc..
The problem of existing precoating unit has following.
The pre- paint roller of existing precoating unit is provided to by cylinder roller portion and is attached to the axle portion of its both sides and is formed, its
In, it is configured to carry out the roller processing in roller portion in the roller portion and axle portion after being manufactured into integral structure by welding, because
The processing stage of this roller therefore is existed and is difficult to the linearity in roller portion (circle by the considerable influence of the processing stage of axle portion
Post degree) and the error range of circularity while subtly manage the problem of be processed.
Also, conventional precoating unit is the list of the decoction cleaning of the lateral surface for pre- discharge to be sticked in into pre- paint roller
Member, it is single due to cleaning and drying equipped with foam jet machine (bubble jet), air knife (air knife) etc. in rinse bath
Member, produces excessive smog (fume) and makes the problem of cleaning efficiency of pre- paint roller is reduced so existing.
Also, conventional precoating unit is combined with as rotating respectively in the rotary shaft of motor and the axle portion of pre- paint roller
The driving of pre- paint roller and the pulley of power transfer unit, and power between pulley by timing belt (timing belt)
It is passed, so that the problem of producing foreign matter due to the bifurcated of band when there is driving.
Also, conventional precoating unit by adjust level (level) and make pre- paint roller turn into horizontality when, due to
Be formed as whole precoating unit carrying out the structure of horizontal adjustment operation as object, therefore there is the horizontal adjustment of pre- paint roller
The problem of operation is difficult.
Also, the purposes of conventional precoating unit is defined as the pre- discharge of decoction, separates to remove and remains in pre- paint roller
The purposes of the residue of decoction and cleaning fluid, and the conventional precoating unit be configured to the cleaning of nozzle and purify operation by
The device that is individually equipped with and perform so that the pre- discharge of decoction and the cleaning of gap nozzle and purification operation are spatially separated from
Position separately carry out, therefore there is the problem of maintenance management of device is inconvenient.
Utility model content
The utility model proposes that its object is to provide a kind of precoating list for being equipped with pre- paint roller in order to solve the above problems
Member, the precoating unit by weight saving and can prevent sagging, so as to improve linearity and circularity.
Another object of the present utility model is that there is provided a kind of liquid nozzle managing device, the liquid nozzle management dress
The pre- discharge that decoction is rapidly and continuously performed in neighbouring region, the cleaning of liquid nozzle and purification operation are put, and is simplified
The structure of device.
For realizing that the precoating unit of the present utility model of above-mentioned purpose is characterised by, equipped with decoction from liquid nozzle
The pre- paint roller discharged in advance, the pre- paint roller is formed by the axle portion of roller portion and the both sides for being incorporated into the roller portion, and the roller portion
It is fabricated separately and is bonded to each other with the axle portion.
The inside in the roller portion can be formed as hollow type.
The rinse bath that can also be equipped with as follows：Cleaning fluid is internally housed, and with the periphery of the pre- paint roller
Face bottom is impregnated in the cleaning fluid, and the roller portion is propped up in the state of virtue of buoyancy is swum on cleaning fluid
Support, so as to prevent the sagging of the pre- paint roller.
The bottom of the rinse bath can be formed as surrounding the flexure mode structure of the outer peripheral face part of the pre- paint roller.
It can also include：Level sensing unit, the water level for sensing the cleaning fluid for being contained in the rinse bath, the water level
Detecting part is made up of the high water level sensor and low water level sensor for being separated by up and down and being equipped with.
It can also include：Extrusion, the state that the outer peripheral face of the pre- paint roller is touched with end is equipped with, and is struck off by thing
Mode the decoction of outer peripheral face and the residue of cleaning fluid that remain in the pre- paint roller are separated and removed.
The extrusion can be formed by chemical resistance silicon or quality of rubber materials.
It can also include：Drive division is there is provided the power for making the pre- paint roller rotation, and the drive division is by motor and shaft coupling
Formed, the shaft coupling passes the axle portion of the rotary shaft of the motor and the pre- paint roller with reference in both sides to the pre- paint roller
Pass the revolving force of the motor.
It can also include：Supporting part, the axle portion of the pre- paint roller can be pivotally supported；Horizontality adjustment portion, is used
In the support supporting part and the pre- paint roller is adjusted to horizontality.
The horizontality adjustment portion can include：First piece, for placing the supporting part, so that lifting shifting can be carried out
Dynamic mode is equipped with；Second piece, for placing described first piece, matched somebody with somebody in the way of it can be moved back and forth along horizontal direction
It is standby, the contact surface of described first piece and described second piece be formed as on the basis of horizontal plane and to the inclined inclined plane in side.
It can also include：Adjustment unit, the horizontal direction amount of movement for adjusting described second piece.
The adjustment unit can be equipped with the way of it can in two directions be rotated in home position, and by screw thread knot
Constituted together in described second piece of bolt.
Also include：A pair of support blocks, be provided to described first piece of both sides, for can be moved along vertical direction
Mode supports described first piece.
Bullport is could be formed with the support block, the bullport can be along vertical direction liter with described first piece
The mode of drop houses described first piece of two side ends.
Liquid nozzle managing device of the present utility model can include：As described in any one in claim 1 to 14
Precoating unit；Megasonic cleaning unit, is provided to the side of the precoating unit and utilizes ultrasonic activation to clean the medicine
Nozzle for liquid；Clean unit, is provided to the opposite side of the precoating unit and collects the decoction discharged from the liquid nozzle.
According to precoating unit of the present utility model by by the axle portion list in the roller portion of pre- paint roller He the both sides for being incorporated into roller portion
Solely make and constitute in combination with one another, so as to corrector roll portion and the mismachining tolerance of axle portion, therefore can improve
The linearity and circularity of pre- paint roller, so as to prevent technique bad.
Also, by the way that the roller portion of pre- paint roller is configured into hollow type, and it is configured to swim in rinse bath due to buoyancy
State on cleaning fluid, so as to by the weight saving of pre- paint roller and prevent sagging.
And it is possible to the bottom of rinse bath is configured into flexure mode structure, so as to reduce the cleaning being contained in rinse bath
The usage amount of liquid.
And it is possible to be ready for use on sensing rinse bath in water level level sensing unit, so as to by management incite somebody to action
The capacity for the cleaning fluid being contained in rinse bath maintains the capacity of setting.
Also, it is equipped with the residue separation of the decoction and cleaning fluid of the outer peripheral face that pre- paint roller will be residued in the way of striking off
And the extrusion removed, so as to prevent the pollution of pre- paint roller and the surface of pre- paint roller is maintained dry state, therefore can
In the pre- discharging operation of decoction, to prevent the jet hole of liquid nozzle by foreign substance pollution, and it will can tie in liquid nozzle
The pearl amount of decoction of jet hole equably maintain.
Also, in the case where cleaning and drying by pre- paint roller by extrusion, compared to the conventional bubble jet of utilization
The cleaning penetrated and the drying mode using air knife, the smog institute produced by dry air can be removed from root can be caused dirty
Contaminate reason.
Also, when constituting the drive division for the rotation of pre- paint roller, by being configured to the rotary shaft of motor and precoating
The axle portion of roller is directly connected to by shaft coupling, can be greatly decreased compared to the power transmission structure of conventional utilization timing belt
The generation of foreign matter.
Also, in the past when adjusting the level of pre- paint roller, it have adjusted the overall level of precoating unit, but the utility model
In horizontal adjustment to being limited only to pre- paint roller and supporting its supporting part, therefore can more easily carry out pre- paint roller
Horizontal adjustment operation.
Also, according in liquid nozzle managing device of the present utility model, by the way that ultrasonic wave is cleaned in precoating unit
Unit and clean unit are equipped with as integral structure, can promptly perform pre- discharge, the cleaning of liquid nozzle of decoction
And purification operation, and liquid nozzle managing device is compactly constituted.
Brief description of the drawings
Fig. 1 is the setting state diagram of liquid nozzle managing device of the present utility model.
Fig. 2 is the profile of liquid nozzle managing device of the present utility model.
Fig. 3 a are the stereograms of pre- paint roller, and Fig. 3 b are the profiles of pre- paint roller.
Fig. 4 is the stereogram for the flexure mode structure for showing rinse bath.
Fig. 5 is the figure for illustrating the effect of extrusion.
Fig. 6 is the profile for showing to precoat the structure of the drive division of unit.
Fig. 7 a and Fig. 7 b are respectively the pie graph and working state figure of the horizontal adjustment section of pre- paint roller.
Symbol description
1：Slot coated device (slit coater) 10：Liquid nozzle managing device
20：Base 30：Platform
40：Liquid nozzle 41：Jet hole (nozzle lip)
50：Door frame (gantry) device 60：Cylinder
100：Precoat (priming) unit 110：Pre- paint roller
111：Roller portion 111a：Hollow bulb
112、113：Axle portion 120：Rinse bath
121：Flexure mode structure 130：Extrusion
140：Level sensing unit 141：High water level sensor
142：Low water level sensor 150：Drive division
151：Motor 151a：Rotary shaft
152：Shaft coupling (coupling) 160：Supporting part
170：Horizontality adjustment portion 171：First piece
172：Second piece of 171a, 172b：Inclined plane
171b：First piece of two side ends 173：Adjustment unit
174：Support block 174a：Bullport
200：Megasonic cleaning unit 300：Clean unit
C：Decoction G：Substrate
R：Residue W：Cleaning fluid
Embodiment
Hereinafter, referring to the drawings and composition and effect to preferred embodiment of the present utility model are illustrated.
Reference picture 1, is constituted as follows using slot coated device 1 of the present utility model, equipped with flat on base 20
Platform 30, is mounted with coating object substrate G on platform 30.Liquid nozzle 40 is as illustrated by the arrows in fig. 1 from the one of platform 30
Lateral opposite side is moved along mast apparatus 50, and is coated with decoction to substrate G surface based fashion with slot coated.
The mast apparatus 50 is provided to the both sides (front and back in the paper direction on the basis of Fig. 1) of platform 30,
And be set in the way of supporting the both sides of liquid nozzle 40 and can move, and mast apparatus 50 includes being used for decoction
The cylinder 60 of the lifting driving of nozzle 40.
The liquid nozzle managing device 10 can be in the transfer of liquid nozzle 40 be interval with positioned at the side of platform 30
Mode be equipped with.
Referring to Figures 1 and 2, it is performed for being provided to slit painting according to liquid nozzle managing device 10 of the present utility model
One composition of pre- discharge, cleaning and the purification run of the liquid nozzle 40 of cloth device 1, including precoating unit 100, ultrasonic wave cleaning list
Member 200 and clean unit 300.The precoating unit 100, megasonic cleaning unit 200 and clean unit 300 are to be used for liquid medicine jet
The Component units of the maintenance management of mouth 40.
Before decoction to be coated on to the process on substrate G surface for execution, the precoating unit 100 is performed decoction walkthrough
The function of going out, equably to maintain knot to be measured in the pearl (Bead) of the decoction of the jet hole 41 (reference picture 5) of liquid nozzle 40.
The megasonic cleaning unit 200 performs the function that liquid nozzle 40 is cleaned using ultrasonic activation, described net
Change unit 300 and perform the cleaning action for preventing the liquid medicine contamination inside liquid nozzle 40 and the decoction for discharging bubble
Catharsis.
Decoction in the precoating unit 100 is discharged in advance to be performed before being coated every time to substrate, and ultrasonic wave
The purification run of the cleaning of the liquid nozzle 400 of cleaning unit 200 and clean unit 300 can be carried out with predetermined period, or
Carry out when necessary.
As described above, will precoat unit 100, ultrasonic wave according to liquid nozzle managing device 10 of the present utility model cleans single
Member 200 and the integration of clean unit 300 and be provided to adjacent position, so as to the rapid pre- discharge for performing decoction and decoction
The cleaning and purification run of nozzle 40, and the setting sky of the device for liquid nozzle 40 maintain management can be reduced
Between and compactly constitute.
Hereinafter, composition and effect of the reference picture 2 to Fig. 7 b to precoating unit 100 of the present utility model are illustrated.
Reference picture 2, Fig. 3 a and Fig. 3 b, precoating unit 100 include pre- paint roller (Priming roller) 110, and decoction is from medicine
Nozzle for liquid 40 is discharged to the pre- paint roller 110 in advance.The pre- paint roller 110 is by the roller portion 111 of drum and is incorporated into described
The axle portion 112,113 of the both sides in roller portion 111 is formed, and the roller portion 111 and axle portion 112,113 are separately manufactured simultaneously
It is bonded to each other.Combination between the roller portion 111 and axle portion 112,113 can be realized by welding, but not limited to this, can be with
Independent fastening unit is combined as medium.
As described above, carrying out the processing of roller after axle portion to be welded on to the roller portion of pre- paint roller in the prior art and having manufactured pre-
Paint roller, but in the case, the problem of having following：Shadow of the processing stage of roller by sizable axle portion processing stage
Ring, therefore, it is difficult to accurately manage the linearity (cylindricity) and circularity in roller portion.
In contrast to this, such as the utility model, in the case where only independently carrying out roller processing to roller portion 111 itself,
It is processed in the state of the two sides center in roller portion 111 is fixed, therefore with the mismachining tolerance in roller portion 111 can be reduced
And realize the effect accurately processed.
Also, as described above, the roller portion 111 of pre- paint roller 110 and axle portion 112,113 are being manufactured into the situation of divergence type
Under, when assembling roller portion 111 and axle portion 112,113, the sagging equal error in roller portion 111 may be produced according to assembling degree, but
It is conversely to have the advantages that mismachining tolerance can be made up.Also, the roller portion 111 and axle portion 112,113 are being manufactured into separation
In the case of type, processing operation is easy, and can reduce the mismachining tolerance in roller portion 111, therefore with the pre- of progress decoction
The effect of the decoction pearl amount of the jet hole 41 of liquid nozzle 40 can be equably maintained during discharging operation.
Reference picture 2, Fig. 3 a, Fig. 3 b and Fig. 6, the roller portion 111 of the pre- paint roller 110 are configured to internally be formed with as sky
The hollow structure of hollow bulb 111a between being empty.
In addition, in the downside of the pre- paint roller 110 equipped with rinse bath 120.
Contain cleaning fluid W in the inside of the rinse bath 120, and pre- paint roller 110 outer peripheral face bottom to be impregnated in
The mode stated in cleaning fluid W is arranged.The cleaning fluid W is used for what cleaning was discharged to the lateral surface of pre- paint roller 110 and was stained with advance
Decoction.
By making the roller portion 111 be formed as hollow structure, the weight saving of pre- paint roller 110 can be reduced into
This, and the roller portion 111 is supported in the state of virtue of buoyancy is floated on cleaning fluid W, therefore, it is possible to effectively
Prevent the sagging of pre- paint roller 110 and maintain the linearity in the range of allowable error.Therefore, it can omit is used to make up precoating
The sagging extra manufacturing procedure of roller 110.
Reference picture 2 and Fig. 4, the bottom of the rinse bath 120 are configured to surround the curved of an outer peripheral face part for pre- paint roller 110
Curved structure 121.According to above-mentioned composition, it is possible to reduce the usage amount for the cleaning fluid W being contained in rinse bath 120.
I.e., by being configured to the Local Phase of the bottom in the roller portion 111 of the pre- paint roller 110 of drum every preset space length
The flexure mode structure 121 of encirclement, roller portion 111 can rotate in the state of being impregnated in cleaning fluid W, therefore, it is possible to carry out
The volume minimization of the rinse bath 120 of cleaning, so as to reduce cleaning fluid W usage amount.
In addition, reference picture 2, the clear of rinse bath 120 is contained in the side of the precoating unit 100 equipped with for sensing
The level sensing unit 140 of washing lotion W water level.
High water level sensor 141 and the low water level sensing for the position that the level sensing unit 140 is separated by up and down by being provided to
Device 142 is constituted.It can make to be contained in clearly on the basis of the water level information sensed by the level sensing unit 140 by management
The capacity of cleaning fluid W in washing trough 120 maintains predetermined capacity.
Reference picture 2 and Fig. 5, the precoating unit 100 can also include extrusion (squeeze) 130.The extrusion
130 are contacted with the state of the outer peripheral face of pre- paint roller 110 in end and are equipped with, so as to will residue in institute by way of striking off
State the decoction C and cleaning fluid W of the outer peripheral face of pre- paint roller 110 residue R separation and remove, so as to prevent pre- paint roller 110
Pollution and maintain dry state, therefore carry out decoction C pre- discharging operation when, the nozzle of liquid nozzle 40 can be prevented
Mouth 41 can equably maintain decoction C pearl amount by foreign substance pollution.
Also, in the case where pre- paint roller 110 is cleaned using extrusion 130 as described above and dried, compared to
The cleaning of conventional utilization foam jet machine and the drying mode using air knife, can be eliminated from root may be due to from clear
The pollution factor of pre- paint roller 110 and liquid nozzle 40 caused by smog (fume) produced by washing lotion and dry air.
The extrusion 130 can be made up of chemical resistance silicon or quality of rubber materials.
Reference picture 6, the precoating unit 100 also includes providing power and making the drive division 150 of the pre- rotation of paint roller 110.
The drive division 150 includes following key element and constituted：Motor 151；And shaft coupling 152 (152a, 152b), two
Side is combined with the rotary shaft 151a of the motor 151 and the axle portion 112 of the pre- paint roller 110 and passes the revolving force of motor 151
It is delivered to pre- paint roller 110.
As described above, when constituting the drive division 150 for the rotation of pre- paint roller 110, being configured to motor 151
The axle portion 112 of rotary shaft 151a and pre- paint roller 110 is directly connected to by shaft coupling 152 (152a, 152b), thus compared to
Toward utilization timing belt power transmission structure in the structure of foreign matter is produced by the bifurcated of band, foreign matter production can be greatly decreased
Raw amount.
Reference picture 7a and Fig. 7 b, the precoating unit 100 include the level for being used to being adjusted to pre- paint roller 110 into horizontality
State adjustment portion 170.
The supported portion 160 of axle portion 112 of the pre- paint roller 110 is pivotably supported, and the horizontality adjustment portion 170 is matched somebody with somebody
For in the lower section of supporting part 160.The supporting part 160 can include by the axle portion 112 of pre- paint roller 110 be pivotably supported it is many
Individual bearing and constitute.
The horizontality adjustment portion 170 includes：First piece 171, for placing the supporting part 160, and liftable
Movably it is equipped with；And second piece 172, described first piece 171 is placed, and can be moved back and forth along horizontal direction
Mode is equipped with, wherein, described first piece 171 and described second piece 172 contact surface 171a, 172a are formed as using horizontal plane as base
It is accurate and to the inclined inclined plane in side.
Also, it can also include being used to adjust the adjustment unit 173 of the amount of movement of described second piece 172 of horizontal direction.
In one embodiment, the adjustment unit 173 is equipped with the way of it can in two directions be rotated in home position, and can be with
It is made up of the bolt for being threaded into described second piece 172.
Also, described first piece 171 of both sides equipped with a pair of support blocks 174, the support block 174 can be along Vertical Square
To movably supporting described first piece 171, bullport 174a, the bullport 174a are could be formed with the support block 174
The described first piece 171 two side ends 171b for housing first piece 171 up and down along vertical direction can be made.
Therefore, described second piece 172 can be interlocked with the rotation in the positive/negative direction of the adjustment unit 173 and in level
Under state to the left or right side movement, and first piece 171 can be by means of described second piece 172 of movement along upper and lower
To moving, accordingly, the supporting part 160 and the height of axle portion 112 that can be supported by adjusting on first piece 171 and make
Pre- paint roller 110 is adjusted to horizontality.
When adjusting the level of pre- paint roller in the past, the overall level of precoating unit is have adjusted, but in the utility model
The object of horizontal adjustment is limited only to pre- paint roller 110 and supports its supporting part 160, therefore can more easily carry out pre- paint roller
110 horizontal adjustment operation.
As described above, the utility model is not limited to above-described embodiment, and the sheet asked in claims are not departed from
In the case of the technological thought of utility model, the personnel with ABC can in the technical field belonging to the utility model
Obvious deformation implementation is carried out, and these deformation implementations belong in the range of the utility model.
Claims (15)
1. one kind precoating unit, it is characterised in that
The pre- paint roller discharged in advance from liquid nozzle equipped with decoction,
The pre- paint roller is formed by the axle portion of roller portion and the both sides for being incorporated into the roller portion, and the roller portion and the axle portion quilt
It is separately made and be bonded to each other.
2. unit is precoated as claimed in claim 1, it is characterised in that
The roller portion is internally formed as hollow type.
3. unit is precoated as claimed in claim 2, it is characterised in that
Also include the rinse bath being equipped with as follows：Cleaning fluid is internally housed, and with the outer peripheral face of the pre- paint roller
Portion is impregnated in the cleaning fluid,
The roller portion is supported in the state of virtue of buoyancy is swum on cleaning fluid, so as to prevent under the pre- paint roller
Hang down.
4. unit is precoated as claimed in claim 3, it is characterised in that
The bottom of the rinse bath is formed as surrounding the flexure mode structure of the outer peripheral face part of the pre- paint roller.
5. unit is precoated as claimed in claim 3, it is characterised in that
Also include：Level sensing unit, the water level for sensing the cleaning fluid for being contained in the rinse bath,
The level sensing unit is made up of the high water level sensor and low water level sensor for being separated by up and down and being equipped with.
6. unit is precoated as claimed in claim 3, it is characterised in that
Also include：Extrusion, the state that the outer peripheral face of the pre- paint roller is touched with end is equipped with, will by way of thing strikes off
The decoction of outer peripheral face and the residue of cleaning fluid for remaining in the pre- paint roller are separated and removed.
7. unit is precoated as claimed in claim 6, it is characterised in that
The extrusion is formed by chemical resistance silicon or quality of rubber materials.
8. unit is precoated as claimed in claim 1, it is characterised in that
Also include：Drive division there is provided the power for making the pre- paint roller rotation,
The drive division is formed by motor and shaft coupling, and the shaft coupling is by the axle of the rotary shaft of the motor and the pre- paint roller
Portion is with reference to the revolving force for transmitting the motor to the pre- paint roller in both sides.
9. unit is precoated as claimed in claim 1, it is characterised in that also included：
Supporting part, supports the axle portion of the pre- paint roller, so that the axle portion can rotate；
Horizontality adjustment portion, for supporting the supporting part and the pre- paint roller being adjusted into horizontality.
10. unit is precoated as claimed in claim 9, it is characterised in that
The horizontality adjustment portion includes：First piece, for placing the supporting part, and so that the side of lifting moving can be carried out
Formula is equipped with；Second piece, it is equipped with for placing described first piece, and in the way of it can be moved back and forth along horizontal direction,
The contact surface of described first piece and described second piece be formed as on the basis of horizontal plane and to the inclined inclined plane in side.
11. unit is precoated as claimed in claim 10, it is characterised in that
Also include：Adjustment unit, the horizontal direction amount of movement for adjusting described second piece.
12. unit is precoated as claimed in claim 11, it is characterised in that
The adjustment unit is equipped with the way of it can in two directions be rotated in home position, and described by being threaded into
Second piece of bolt is constituted.
13. unit is precoated as claimed in claim 12, it is characterised in that
Also include：A pair of support blocks, are provided to described first piece of both sides, for supporting described first piece, so that described first
Block can be moved along vertical direction.
14. unit is precoated as claimed in claim 13, it is characterised in that
Bullport is formed with the support block, the bullport houses described first piece of two side ends, so that described first piece
It can be lifted along vertical direction.
15. a kind of liquid nozzle managing device, it is characterised in that including：
Precoating unit as described in any one in claim 1 to 14；
Megasonic cleaning unit, is provided to the side of the precoating unit and utilizes ultrasonic activation to clean the liquid nozzle；
Clean unit, is provided to the opposite side of the precoating unit and collects the decoction discharged from the liquid nozzle.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| KR10-2016-0173866 | 2016-12-19 | ||
| KR1020160173866A KR20180071079A (en) | 2016-12-19 | 2016-12-19 | Priming unit and Maintenance apparatus for chemical nozzle having the same |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206613643U true CN206613643U (en) | 2017-11-07 |
Family
ID=60230358
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720106086.5U Active CN206613643U (en) | 2016-12-19 | 2017-01-26 | Precoat unit and the liquid nozzle managing device including this |
Country Status (2)
| Country | Link |
|---|---|
| KR (1) | KR20180071079A (en) |
| CN (1) | CN206613643U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108212616A (en) * | 2018-01-18 | 2018-06-29 | 武汉华星光电技术有限公司 | pre-coating device and method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20220045627A (en) | 2020-10-06 | 2022-04-13 | 세메스 주식회사 | Apparatus for dispensing droplet |
-
2016
- 2016-12-19 KR KR1020160173866A patent/KR20180071079A/en not_active Application Discontinuation
-
2017
- 2017-01-26 CN CN201720106086.5U patent/CN206613643U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108212616A (en) * | 2018-01-18 | 2018-06-29 | 武汉华星光电技术有限公司 | pre-coating device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR20180071079A (en) | 2018-06-27 |
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Effective date of registration: 20180507 Address after: Korea city Daoan Patentee after: K.C.TECH Co.,Ltd. Address before: Korea city Daoan Patentee before: KC Limited by Share Ltd. |
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