1335840 • 第94115978號專利申請案 … 中文說明書修正頁 民國99年7月27曰修正 ； (1) 九、發明說明 【發明所屬之技術領域】 . 本發明係有關一種在玻璃基板或半導體晶圓等的板狀' 被處理物表面，使抗蝕劑液或顯影液、彩色濾光片等的塗 佈液從狹縫狀開口部流下並予以塗佈的狹縫塗佈機之預備 吐出裝置。 【先前技術】 使用狹縫塗佈機連續對多數個基板表面供給塗佈液 時，在塗佈作業與塗佈作業之間的待機時間，藉由與空氣 的接觸，使吐出噴嘴前端部之一部分的濃度上升。然後， 在該狀態下，對下一個基板繼續塗佈時’將因已經高濃度 化的塗佈液產生縱紋，而產生膜裂。 爲解決上述不良狀況，已知在專利文獻1，在保持洗 淨液的洗淨槽內配置塗底輥子，使該塗底輥子的上部比洗 淨液更突出於上方，使狹縫塗佈機的吐出噴嘴近接於已突 出的塗底輥子表面，從吐出噴嘴引出多餘的塗佈液，附著 在塗底輥子的表面然後除去的習知技術。 又，已知在專利文獻2，以提升洗淨效率的目的，在 平流的方式中，使用二流體噴嘴，進行省空間、省力且有 效率之不會有洗淨不均的噴水（blow)洗淨處理之習知技 術。 再者，在專利文獻3，記載有在塗底輥子噴出新液的 新液噴淋噴嘴的上方，配置噴出乾燥氣體的氣體噴出噴 -5- 1335840 (2) π年q月叫日修先4換3：{ 嘴，使塗底輥子表面乾燥的內容。 [專利文獻1]日本特開2001-310147號公報 [專利文獻2]日本特開2002-145064號公報 [專利文獻3]日本特願2003-361347號 【發明內容】 [發明所欲解決之課題] 在專利文獻1及專利文獻2所揭示的預備吐出裝置 中，雖具備朝向塗底輥子的表面噴出洗淨液之噴嘴，但使 從該噴淋噴嘴噴出的洗淨液回收至回收槽的洗淨液循環， 加以使用。 然而，以往由於從噴嘴噴出已使用過一次的洗淨液， 因此在洗淨能力的點上與供給新液之情況相比較差。反 之，在供給新液時，不利於成本。 又，在習知例中，雖然藉由排氣進行洗淨後的塗底輥 子表面的乾燥，但是乾燥相當花時間，亦有附著在塗底輥 子表面，已濃縮的塗佈液難以剝離的問題。 再者，記載於專利文獻3的氣體噴出噴嘴，由於乾燥 氣體的噴出方向不是正下方，因此與塗底輥子表面接觸的 乾燥氣體朝向狹縫輥子的吐出噴嘴，有助長吐出噴嘴前端 部的塗佈液乾燥之慮。 [用以解決課題之手段] 爲了解決上述課題，本發明之狹縫塗佈機之預備吐出 -6- (3) 13358401335840 • Patent application No. 94115978... Chinese manual revision page Amendment of July 27, 1999. (1) IX. Invention Description [Technical field of invention] The present invention relates to a glass substrate or a semiconductor wafer. The plate-shaped material on the surface of the object to be processed is a preliminary discharge device of a slit coater that applies a coating liquid such as a resist liquid, a developing solution, or a color filter from the slit-like opening. [Prior Art] When a coating liquid is continuously supplied to a plurality of substrate surfaces by a slit coater, a part of the front end portion of the discharge nozzle is discharged by contact with air during a standby time between the coating operation and the coating operation. The concentration rises. Then, in this state, when the coating is continued on the next substrate, a longitudinal crack is generated due to the coating liquid which has been highly concentrated, and a film crack occurs. In order to solve the above-described problem, it is known that in Patent Document 1, a primer roller is disposed in a cleaning tank in which a cleaning liquid is held, and an upper portion of the primer roller protrudes upward from the cleaning liquid to form a slit coater. The discharge nozzle is closely attached to the surface of the protruding bottom roller, and the excess coating liquid is taken out from the discharge nozzle to adhere to the surface of the coating roller and then removed. Further, in Patent Document 2, in order to improve the cleaning efficiency, in the advection mode, a two-fluid nozzle is used to perform space-saving, labor-saving, and efficient blow washing without uneven washing. A well-known technique for net handling. Further, Patent Document 3 discloses that a gas discharge jet for discharging a dry gas is disposed above a new liquid shower nozzle in which a new liquid is sprayed from a bottom roller. 5-1335840 (2) π年月月叫日修先4 Change 3: { mouth, the content of the surface of the coated roller is dry. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2001-145064 (Patent Document 3) Japanese Patent Application No. 2003-361347 [Summary of the Invention] [Problems to be Solved by the Invention] In the preliminary discharge device disclosed in Patent Document 1 and Patent Document 2, the nozzle for discharging the cleaning liquid toward the surface of the coating roller is provided, but the cleaning liquid discharged from the shower nozzle is collected and washed in the recovery tank. The liquid is circulated and used. However, in the past, since the cleaning liquid that has been used once has been ejected from the nozzle, it is inferior to the case where the new liquid is supplied at the point of the cleaning ability. Conversely, when supplying new liquid, it is not conducive to cost. Moreover, in the conventional example, although the surface of the coating roller after washing is exhausted by the exhaust gas, it takes a long time to dry, and there is a problem that the surface of the coating roller adheres to the surface of the coating roller, and the concentrated coating liquid is difficult to peel off. . Further, in the gas discharge nozzle described in Patent Document 3, since the discharge direction of the dry gas is not directly below, the drying gas that is in contact with the surface of the undercoating roller faces the discharge nozzle of the slit roller, and contributes to the application of the tip end portion of the discharge nozzle. Liquid drying considerations. [Means for Solving the Problem] In order to solve the above problems, the preliminary discharge of the slit coater of the present invention -6-(3) 1335840
裝置，係使：保持洗淨液的洗淨槽、使來自配置於該洗淨The device is configured to: maintain the cleaning tank of the cleaning liquid, and arrange the cleaning from the cleaning
槽內的狹縫塗佈機的吐出噴嘴之塗佈液附著在表面然後去 除的塗底輥子、以塗底輥子的旋轉方向爲基準，讓朝向塗 底輥子的表面噴出新液的新液噴淋噴嘴、以及噴出循環液 的循環液噴淋噴嘴，以位於比循環液噴淋噴嘴更前方之位 置的狹縫塗佈機之預備吐出裝置，其特徵爲：在前述新液 噴淋噴嘴的上方，且比塗底輥子的鉛直方向中心線更靠近 前述新液噴淋噴嘴的位置上，配置噴出乾燥氣體的噴出 嘴，藉著將該氣體噴出嘴設爲鉛直方向，可使乾燥氣體從 正上方傾斜噴在塗底輥子表面。 又，在上述狹縫塗佈機之預備吐出裝置中，在前述新 液噴淋噴嘴或循環液噴淋噴嘴的下方，利用彈簧而可調整 地配置有用來將附著在塗底輥子的表面的塗佈液刮落的刮 除器亦可，從前述新液噴淋噴嘴及乾燥氣體噴出嘴的後方 開設有取出前述洗淨槽全體的排氣之排氣孔亦可。 再者，在狹縫塗佈機之預備吐出裝置中，前述新液噴 淋噴嘴及循環液噴淋噴嘴爲二流體噴嘴亦可，前述新液噴 淋噴嘴、循環液噴淋噴嘴、刮除器、乾燥氣體噴出嘴、及 排氣口的長度，係與前述塗底輥子之長邊方向的長度相 同，或長若干長度亦可。 [發明之效果] 根據本發明，從氣體噴出噴嘴朝正下方噴出的乾燥氣 體，由於傾斜地抵接在塗底輥子的表面，因此可有效吹散 1335840 (4)押年》1月>»1日修(更)又,.;.'換g 11 -u—------ : 塗底輥子上的洗淨液，且可有效乾燥。 又，在新液噴淋噴嘴或循環液噴淋噴嘴的下方，刮落 附著在塗底輥子的表面之塗佈液的刮除器，利用彈簧可調 整地配置，由於可自由改變與塗底輥子抵接之刮除器的位 置，因此皆不會在刮除器及塗底輥子任一方施加負載，而 可刮落不均勻地附著在塗底輥子的塗佈液。 再者，藉由從新液噴淋噴嘴及乾燥氣體噴嘴的後方開 口用來取出前述洗淨槽全體的排氣之排氣口，由於從乾燥 氣體噴出噴嘴及新液噴淋噴嘴的後方吸引洗淨槽全體的排 氣，因此也促進附著在洗淨後的塗底輥子表面之洗淨液的 乾燥。 又，藉著將新液噴淋噴嘴、循環液噴淋噴嘴、刮除 器、乾燥氣體噴嘴、排氣口的長度設爲與前述塗底輥子的 長邊方向的長度大致相同或長若干長度，可均勻處理塗底 輥子。 【實施方式】 以下，依據添附圖面說明本發明之實施形態。第1圖 係本發明之預備吐出裝置的剖面圖。第2圖係使蓋體上升 的狀態圖。第3圖係該乾燥氣體噴嘴的噴出方向之圖。第 4圖係其他實施例的預備吐出裝置之剖面圖》 預備吐出裝置係在儲存洗淨液的洗淨槽1內，旋轉自 如地配置圓筒狀的塗底輥子2。該圓筒狀的塗底輥子2以 不銹鋼、鋁、鈦等形成，其尺寸係直徑30至100mm，長 -8- 1335840The coating liquid of the discharge nozzle of the slit coater in the tank adheres to the surface and then removes the coating roller, and the new liquid spray which sprays the new liquid toward the surface of the coating roller is based on the rotation direction of the coating roller. a nozzle and a circulating liquid spray nozzle that discharges the circulating liquid, and a preliminary discharge device of the slit coater located further forward than the circulating liquid shower nozzle, characterized in that: above the new liquid shower nozzle And the discharge nozzle for discharging the dry gas is disposed closer to the new liquid shower nozzle than the center line of the vertical direction of the bottom roller, and the dry gas is inclined from the upper side by setting the gas discharge nozzle to the vertical direction. Spray on the surface of the coated roller. Further, in the preliminary discharge device of the slit coater, under the new liquid shower nozzle or the circulating liquid shower nozzle, a coating for adhering to the surface of the undercoating roller is adjustably disposed by a spring. The scraper for scraping off the cloth may be provided with an exhaust hole for taking out the exhaust gas of the entire washing tank from the rear of the new liquid spray nozzle and the dry gas discharge nozzle. Further, in the preliminary discharge device of the slit coater, the new liquid spray nozzle and the circulating liquid spray nozzle may be a two-fluid nozzle, and the new liquid spray nozzle, the circulating liquid spray nozzle, and the scraper The length of the dry gas discharge nozzle and the exhaust port may be the same as the length of the coated roller in the longitudinal direction or may be longer. [Effects of the Invention] According to the present invention, the dry gas discharged from the gas discharge nozzle toward the immediately below is obliquely abutted on the surface of the undercoating roller, so that it can effectively blow off 1335840 (4) The Year of the Baptist" January> Daily repair (more), .;.'Change g 11 -u------- : Wash the liquid on the bottom roller and dry it effectively. Further, under the new liquid spray nozzle or the circulating liquid spray nozzle, the scraper that scrapes off the coating liquid adhering to the surface of the coat roller is arbitrarily arranged by the spring, and can be freely changed and coated with the bottom roller. Since the position of the scraper is abutted, no load is applied to either the scraper or the undercoating roller, and the coating liquid unevenly attached to the coating roller can be scraped off. Further, the exhaust port of the exhaust gas from the entire washing tank is taken out from the rear opening of the new liquid spray nozzle and the dry gas nozzle, and is sucked and washed from the rear of the dry gas discharge nozzle and the new liquid spray nozzle. The exhaust of the entire tank also promotes the drying of the washing liquid adhering to the surface of the bottom roller after washing. Moreover, the length of the new liquid spray nozzle, the circulating liquid spray nozzle, the scraper, the dry gas nozzle, and the exhaust port is set to be substantially the same as or longer than the length in the longitudinal direction of the undercoating roller. The bottom roller can be processed evenly. [Embodiment] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. Fig. 1 is a cross-sectional view showing a preliminary discharge device of the present invention. Fig. 2 is a view showing a state in which the lid is raised. Fig. 3 is a view showing the direction in which the dry gas nozzle is ejected. Fig. 4 is a cross-sectional view of the preliminary discharge device of the other embodiment. The preliminary discharge device is disposed in the cleaning tank 1 for storing the cleaning liquid, and the cylindrical coating roller 2 is rotatably disposed. The cylindrical coating roller 2 is formed of stainless steel, aluminum, titanium, or the like, and has a diameter of 30 to 100 mm and a length of -8 to 1335840.
MI 度設爲比狹縫噴嘴3的長邊方向之長度還大若干，在預備 吐出時，與狹縫噴嘴3下端（噴嘴孔）的間隔形成25至300 y m。 又，在已開放的洗淨槽1上面與洗淨槽1相對設置蓋 體4、5，使此等蓋體4、5的內端與圓筒狀的塗底輥子2 接近，盡可能防止洗淨液的蒸發。然後，在蓋體4設置噴 出循環的洗淨液之循環液噴淋噴嘴6，在蓋體5設置新液 噴淋噴嘴7、及用來噴出空氣、氮氣等乾燥氣體之噴嘴 如第3圖所示，乾燥氣體噴出噴嘴8的氣體噴出方向 成爲正下方（鉛直方向）。如此，藉著在正下方供給氣體， 使乾燥氣體從斜上方吹抵於塗底輥子2的表面，可有效吹 散塗底輥子表面的洗淨液，並使之乾燥。 又，在前述循環噴淋噴嘴6及新液噴淋噴嘴7的下方 配置有與塗底輥子2的表面接觸的刮除器9、10。此等刮 除器9、10安裝於前述洗淨槽1側，對於塗底輥子2的表 面之抵接壓及突出量可以彈簧9a、10a加以調整。 如此，當藉由彈簧進行位置調整時，其動作具可撓 性’可保持一定的力量與在塗底輥子2不均勻附著的塗佈 液接觸。不會如已固定的刮除器，刮不乾淨或反之因爲刮 除器本身，傷及塗底輥子。 又，洗淨槽1的側部設置有排氣槽1 1，該排氣槽11 的開口 11a係位於前述新液噴淋噴嘴7及乾燥氣體噴出噴 嘴8的後方（背面側）。如此，藉著從乾燥氣體噴出噴嘴8 -9- 1335840The MI degree is set to be larger than the length of the slit nozzle 3 in the longitudinal direction, and the interval from the lower end (nozzle hole) of the slit nozzle 3 is 25 to 300 μm at the time of preliminary discharge. Moreover, the lid bodies 4 and 5 are provided on the upper surface of the opened washing tank 1 opposite to the washing tank 1, and the inner ends of the lid bodies 4 and 5 are brought close to the cylindrical coating roller 2 to prevent washing as much as possible. Evaporation of the clean liquid. Then, a circulating liquid shower nozzle 6 for discharging the circulating cleaning liquid is provided in the lid body 4, and a new liquid shower nozzle 7 and a nozzle for discharging a dry gas such as air or nitrogen gas are provided in the lid body 5 as shown in Fig. 3. The gas discharge direction of the dry gas discharge nozzle 8 is directly below (vertical direction). Thus, by supplying the gas directly below, the drying gas is blown obliquely upward from the surface of the coating roller 2, and the cleaning liquid on the surface of the coating roller can be effectively blown off and dried. Further, scrapers 9, 10 which are in contact with the surface of the coating roller 2 are disposed below the circulating shower nozzle 6 and the new liquid shower nozzle 7. These scrapers 9, 10 are attached to the side of the washing tank 1, and the abutting pressure and the amount of protrusion of the surface of the bottoming roll 2 can be adjusted by the springs 9a, 10a. Thus, when the position is adjusted by the spring, the action is flexible, and a certain amount of force is maintained in contact with the coating liquid which is unevenly attached to the undercoat roller 2. It will not be as clean as a fixed scraper, or it will not be cleaned or vice versa because the scraper itself will hurt the bottom roller. Further, the side of the cleaning tank 1 is provided with an exhaust groove 1 1 which is located behind the rear surface (back side) of the fresh liquid shower nozzle 7 and the dry gas discharge nozzle 8. Thus, by ejecting the nozzle from the dry gas 8 -9 - 1335840
代年η月叫日修(吏;正杳換頁I (^3) _ - . .，———^ 與新液噴淋噴嘴7的後方吸引洗淨槽全體的排氣，可促進 塗底輥子表面的乾燥。 又，在洗淨槽1內臨接有連接於回收路的液面調整用 排液構件1 2。該液面調整用排液構件1 2將上端設爲排液 口，並且設爲可調整上下位置，在最上位的位置，使洗淨 液的液面比塗底輥子2的下端更上面，在最下位的位置， 使洗淨液的液面比塗底輥子2的下端更下面。然後，在洗 淨液爲乾淨時，將液面調整用排液構件12設在高的位 置，將塗底輥子2的下端直接浸漬在洗淨液中，在洗淨液 中增加塗佈液濃度等時，使液面調整用排液構件12下 降，從洗淨液的液面使塗底輥子2上浮，以噴嘴等洗乾淨 塗底輥子2的表面。 前述循環液噴淋噴嘴6及新液噴淋噴嘴7亦可使用二 流體噴嘴。前述循環液噴淋噴嘴6不只一個，也可以改變 位置，分爲上部循環液噴嘴與下部循環液噴嘴。 又，由於循環液噴淋噴嘴6若可對於塗底輥子2供給 循環液較佳，因此其位置亦不嚴密。噴嘴開口不需設爲狹 縫狀，因爲即使形成一些不均不會有太大問題，因此亦可 爲點狀。 循環液如第1圖所示，從設置於洗淨槽1的底面之循 環液取入口 13，介由栗浦加以吸引’通過過爐器14供給 到循環液噴淋噴嘴6時，如第4圖所示，亦可考慮從液面 調整用排液構件1 2介由泵浦加以吸引，通過過濾器1 5供 給到循環液噴淋噴嘴6之情況。 -10- 1335840In the year of the next year, it is called the Japanese repair (吏; 杳 杳 I (^3) _ - . . , ———^ The rear of the new liquid spray nozzle 7 attracts the exhaust of the entire washing tank, which promotes the bottom roller. Further, the liquid level adjusting liquid discharge member 1 2 connected to the recovery path is provided in the cleaning tank 1. The liquid level adjusting liquid discharge member 1 2 has an upper end as a liquid discharge port, and is provided. In order to adjust the upper and lower positions, the liquid level of the washing liquid is higher than the lower end of the coating roller 2 at the uppermost position, and the liquid level of the washing liquid is higher than the lower end of the coating roller 2 at the lowermost position. Then, when the cleaning liquid is clean, the liquid level adjusting liquid discharge member 12 is set at a high position, and the lower end of the bottom coating roller 2 is directly immersed in the cleaning liquid to increase the coating in the cleaning liquid. When the liquid concentration is the same, the liquid level adjusting liquid discharge member 12 is lowered, the coating roller 2 is floated from the liquid surface of the cleaning liquid, and the surface of the coating roller 2 is cleaned by a nozzle or the like. The new liquid spray nozzle 7 can also use a two-fluid nozzle. The above-mentioned circulating liquid spray nozzles 6 can be changed in more than one position. The upper circulating liquid nozzle and the lower circulating liquid nozzle. Further, since the circulating liquid shower nozzle 6 can supply the circulating liquid to the coating roller 2, the position thereof is not tight. The nozzle opening does not need to be slit-shaped because Even if some unevenness is formed, there is no problem, and therefore it may be in the form of a dot. As shown in Fig. 1, the circulating liquid takes the inlet 13 from the circulating liquid provided on the bottom surface of the washing tank 1, and is sucked by the Lipu. When it is supplied to the circulating liquid shower nozzle 6 through the pulverizer 14, as shown in Fig. 4, it is also conceivable that the liquid level adjusting drain member 12 is sucked by the pump and supplied to the filter 15 through the filter 15. The condition of circulating liquid spray nozzle 6. -10- 1335840
又，各噴嘴或乾燥氣體噴出噴嘴、排氣口、刮除器分 . 別以與塗底輥子的長邊方向的長度大致相同，但以設爲長 . 若干長度的程度較佳。藉此，對塗底輥子可進行均勻的處 理。 再者，由於新液噴淋噴嘴7係進行最後的加工，因此 其位置甚爲重要。當新液噴淋噴嘴過於接近塗底輥子時， 新液彈回輥子，而導致新液噴淋噴嘴本身受到污染，反 φ 之，當速度過快時，無法對塗底輥子供給充分的新液，導 致施加比需要的液量還多的液量。因此，新液噴淋噴嘴的 位置盡可能接近塗底輥子，且以可將液滴彈濺抑制在最小 限度的位置最佳。新液噴淋噴嘴的開口從均勻地對塗底輥 子供給洗淨液之點來看，亦以狹縫狀較佳。 以上，當附著塗佈液的塗底輥子2在順時針方向旋轉 時，藉由噴淋噴嘴6對於塗底輥子表面供給循環液，藉由 刮除器9予以刮落，沉入原本儲存的洗淨液中，藉由第二 Φ 個刮除器1 〇，削落頑固的附著物。最後，以新液噴淋噴 嘴7乾淨的清洗掉。然後，從乾燥氣體噴出噴嘴8吹附乾 燥氣體，吹散洗淨液，使塗底輥子表面乾燥。此時，由於 亦吸引排氣，因此藉由排氣也可以促進乾燥。 [產業上利用的可能性] 本發明的預備吐出裝置係例如可組裝入玻璃基板或半 導體晶圓等的製造裝置。 -11 - 1335840 (8) —一~ -- 【圖式簡要說明】 第1圖係本發明之預備吐出裝置的剖面圖。 第2圖係使該裝置的蓋體上升的狀態之圖。 第3圖係乾燥氣體噴嘴的放大剖面圖。 第4圖係其他實施例的預備吐出裝置之剖面圖。 【主要元件符號說明】 1 洗 淨 槽 2 塗 底 輥 子 3 狹 縫 噴 嘴 4、5 蓋 體 6 循 壞 液 噴 淋 噴 嘴 7 新 液 噴 淋 噴 嘴 8 乾 燥 氣 體 噴 出 噴 嘴 9、10 刮 除 器 9a、 10a 彈 簧 11 排 氣 槽 11a 開 P 12 液 面 調 整 用 排 液 構件 13 循 環 液 取 入 □ 14' 15 過 濾 器Further, each of the nozzles, the dry gas discharge nozzle, the exhaust port, and the scraper is substantially the same as the length in the longitudinal direction of the undercoating roller, but is preferably long. Thereby, the undercoating roller can be uniformly treated. Furthermore, since the new liquid spray nozzle 7 performs the final processing, its position is very important. When the new liquid spray nozzle is too close to the bottom roller, the new liquid springs back to the roller, which causes the new liquid spray nozzle itself to be contaminated. In contrast, when the speed is too fast, it is impossible to supply a sufficient new liquid to the bottom roller. , resulting in the application of more liquid than the amount of liquid required. Therefore, the position of the new liquid spray nozzle is as close as possible to the bottom roller, and it is optimal in that the droplet splash can be suppressed to a minimum. The opening of the new liquid spray nozzle is preferably in the form of a slit from the viewpoint of uniformly supplying the washing liquid to the coating roller. As described above, when the coating roller 2 to which the coating liquid is attached is rotated in the clockwise direction, the circulating liquid is supplied to the surface of the coating roller by the shower nozzle 6, and is scraped off by the scraper 9 to sink into the original storage. In the clean liquid, the stubborn deposits are cut off by the second Φ scraper 1 〇. Finally, the new liquid spray nozzle 7 is cleaned cleanly. Then, the dry gas is blown from the dry gas discharge nozzle 8, and the washing liquid is blown off to dry the surface of the undercoating roller. At this time, since the exhaust gas is also attracted, drying can be promoted by the exhaust. [Case of Industrial Use] The preliminary discharge device of the present invention can be incorporated, for example, into a manufacturing apparatus such as a glass substrate or a semiconductor wafer. -11 - 1335840 (8) - 1 - -- [Brief Description] Fig. 1 is a cross-sectional view of the preliminary discharge device of the present invention. Fig. 2 is a view showing a state in which the lid of the apparatus is raised. Figure 3 is an enlarged cross-sectional view of the drying gas nozzle. Fig. 4 is a cross-sectional view showing a preliminary discharge device of another embodiment. [Description of main components] 1 Washing tank 2 Bottom roller 3 Slot nozzle 4, 5 Cover 6 Circulating liquid spray nozzle 7 New liquid spray nozzle 8 Dry gas spray nozzle 9, 10 Scrapors 9a, 10a Spring 11 Exhaust groove 11a Open P 12 Level adjustment drain member 13 Circulating fluid intake □ 14' 15 Filter
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