CN101130185A - Pre-spraying device - Google Patents
Pre-spraying device Download PDFInfo
- Publication number
- CN101130185A CN101130185A CNA2007101304339A CN200710130433A CN101130185A CN 101130185 A CN101130185 A CN 101130185A CN A2007101304339 A CNA2007101304339 A CN A2007101304339A CN 200710130433 A CN200710130433 A CN 200710130433A CN 101130185 A CN101130185 A CN 101130185A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- cleaning
- cleaning fluid
- squeegee
- primary coat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/10—Storage, supply or control of liquid or other fluent material; Recovery of excess liquid or other fluent material
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/6715—Apparatus for applying a liquid, a resin, an ink or the like
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Coating Apparatus (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Details Or Accessories Of Spraying Plant Or Apparatus (AREA)
Abstract
The present invention provides a beforehand ejecting device which is suitable for the recycle of washing liquid. Reaming coating liquid ejecting from a narrow gap nozzle (N) to a bottom coating roller (11) by a rubber reaming board (13), and discharging to a waste liquid pot (18) through an exhaust path (17). Due to most of the coating liquid ejecting to the bottom coating roller are removed by the rubber reaming board (13), the coating amount interfusing to the washing liquid tank is reduced, and the pollution degree of the washing liquid is decreased. Thus, reducing the wastage of the washing liquid and running cost.
Description
Technical field
The present invention relates to a kind of pre-spraying device of slit type coater.
Background technology
Use slit type coater; to the various substrate surfaces of glass substrate or semiconductor wafer, when being coated with diaphragm or developer solution continuously, in the standby between coating operation and coating operation; the front end of jetting nozzle contacts with air, and the concentration of coating fluid is partly risen.Be coated with when operation in this state, the coating fluid that has existed because of the high concentration change produces typhloscle, or intermembranous disconnected danger.In order to eliminate this shortcoming, known have a kind ofly before the coating operation, goes up the coating fluid of ejection trace to primary coat roller (primingroller), with the pre-spraying device (for example, with reference to patent documentation 1) of the coating fluid of removing high concentration.
In the above-mentioned pre-spraying device, rotatably spray coating fluid on the primary coat roller of configuration,, the coating fluid of ejection is removed by squeegee by the rotation of primary coat roller to cleaning in the liquid bath.And then make it by cleaning in the cleaning fluid in the liquid bath, remove coating fluid remaining on the primary coat roller thus.Primary coat roller after cleaning from the air of air nozzle jet drying, carries out pre-ejection next time.
Patent documentation 1: the Japan Patent spy opens the 2005-329340 communique
In the above-mentioned known pre-spraying device,,, the cleaning fluid that has reclaimed is fed to the fountain nozzle for utilizing again by the recirculation stream in case reclaim from cleaning the cleaning fluid that liquid bath is discharged.Yet, because it is abundant inadequately to remove the performance of coating fluid by squeegee, so have at primary coat roller surperficial remaining under the state of coating fluid, by cleaning in the liquid bath, therefore the contaminated unfavorable condition of cleaning fluid in the liquid bath takes place to clean.Therefore, the cleaning fluid and the new liquid that clean in the liquid bath must be changed the shortcoming that exists operating cost to uprise continually.
Summary of the invention
The objective of the invention is to, further improve the performance of the coating fluid that removes the ejection of whereabouts primary coat roller surface, realize being more suitable in the pre-spraying device of the recirculation of cleaning fluid.
In addition, other purposes of the present invention are, the pre-spraying device that provides the use amount that makes new liquid to reduce significantly.
The formation of the pre-spraying device that the present invention relates to is to comprise: the cleaning liquid bath of accommodating cleaning fluid; In cleaning liquid bath, rotatably be configured, and be attached with primary coat roller from the coating fluid of gap nozzle; Spray the first cleaning fluid injection nozzle of coating fluid towards this primary coat roller; Be configured in than the above-mentioned first cleaning fluid injection nozzle more by rear section side along the direction of rotation of primary coat roller, and scrape the squeegee of getting attached to the coating fluid on the above-mentioned primary coat roller; The second cleaning fluid injection nozzle of the primary coat roller jet cleaning liquid in the cleaning fluid in having passed through above-mentioned cleaning liquid bath; Towards the primary coat roller that has passed through the second cleaning fluid injection nozzle, the air nozzle of jet drying air, wherein, with squeegee the discharge road is set in abutting connection with ground, this discharge road is discharged and is scraped the coating fluid of getting by above-mentioned squeegee from the primary coat roller, will be discharged in the waste liquid tank by above-mentioned discharge road by the coating fluid that above-mentioned squeegee is removed.
Among the present invention, scrape the coating fluid that sprays on the orientation primary coat roller by squeegee, the scrape coating fluid of getting is discharged in the discharge road, be discharged to and clean liquid bath and separate in the waste liquid tank that is provided with by discharging the road, the unfavorable condition of therefore taking in the applied liquid pollution of cleaning fluid in the cleaning liquid bath of primary coat roller is eliminated.Its result because the cleaning fluid that cleans in the liquid bath is kept cleaner state, so only need filter is set, just can utilize the cleaning fluid that cleans in the liquid bath again on recirculation circuit, reduce the consumption of cleaning fluid.
In preferred embodiment based on pre-spraying device of the present invention, squeegee is made of resin plate of elastically deformable etc., and be configured in the mode that the surface of the front end of squeegee and primary coat roller is adjacent to, scrape by above-mentioned squeegee and to get the coating fluid that is present in primary coat roller surface, be discharged in the waste liquid tank by above-mentioned discharge road scraping the coating fluid of getting.As squeegee,, the front end of elastic plate and the surface of primary coat roller are adjacent to if use the elastic plate of the rubber of elastically deformables such as polyurethane rubber, polyethylene rubber, silicone rubber.By make the rotation of primary coat roller under this state that is adjacent to, the coating fluid that sprays on the primary coat roller is almost completely scraped by squeegee.And, being discharged in the waste liquid tank through discharging the road by scraping the coating fluid of getting, the degree that the applied liquid of the cleaning fluid in the rinse bath pollutes significantly reduces.In addition, in the component parts of squeegee,, also can use the various sheet materials of SUS or various synthetic resin etc. as the material beyond the elastic rubber material.
Among the present invention, scrape the coating fluid that sprays on the orientation primary coat roller, and be discharged in the waste liquid tank, so the unfavorable condition that coating fluid is blended in the cleaning liquid bath is eliminated by discharging the road by squeegee.Its result can recycle by the cleaning fluid in the wash cycles liquid bath, has reduced the consumption of new liquid, has reduced operating cost.
Description of drawings
Fig. 1 is the plane of the apparatus for coating that has been suitable for pre-spraying device that the present invention relates to.
Fig. 2 is the cutaway view of this pre-spraying device.
Symbol description is as follows:
1... pre-spraying device 2... recirculation portion 10... cleans liquid bath
11... the primary coat roller N... gap nozzle 12... first cleaning fluid injection nozzle
13... the first squeegee 14..., the second cleaning fluid injection nozzle
15... the second squeegee 16... air nozzle 17... discharges the road
18... waste liquid tank 19... aspirating mechanism 21... tap
22... liquid level adjustment waste liquid parts 23... triple valve
24... the first pump 25... recycling tank 26..., second pump
27... surge tank N... gap nozzle
The specific embodiment
Fig. 1 is the plane of the apparatus for coating that has been suitable for pre-spraying device that the present invention relates to, and Fig. 2 is the cutaway view of this pre-spraying device.
As shown in Figure 1, apparatus for coating pedestal B is provided with pair of parallel track R, R, become the centre above the pedestal in centre position of these tracks R, R, be fixed with the microscope carrier S of substrate W, to cross over the mode of this baseplate carrier S, between track R, R, set up the M of travel mechanism movably, M, these travel mechanisms set up crossbeam in the front and back between M, M, overlook and see, constitute the framework F that is the frame shape, on this framework F, gap nozzle N is installed by lowering or hoisting gear.
In addition, at the distolateral pre-spraying device 1 that is provided with of pedestal B.Pre-spraying device is made up of pre-ejection portion 1 and recirculation portion 2.Standby discharge opeing portion 1 has the liquid bath 10 of cleaning, accommodates cleaning fluid in cleaning liquid bath 10.In cleaning liquid bath 10, dispose rotatable primary coat roller 11.Primary coat roller 11 is configured to its part and is immersed in the cleaning fluid, and by rotation in the direction of arrows, is cleaned by the cleaning fluid that cleans in the liquid bath.Primary coat roller 11 is made of stainless steel, aluminium, titanium, carbon, chromium plating etc., and it is sized to, and diameter is 30～200mm, and length is longer a little than the length of the length direction of gap nozzle.In addition, as the cleaning fluid injection nozzle, can use the various cleaning fluid injection nozzles of the two fluid tip modes that contain.
During pre-the ejection, gap nozzle N is positioned at the top of primary coat roller 11, sprays the coating fluid of trace to primary coat roller 11 from its lower end.Around primary coat roller 11, along the direction of arrow, dispose the first cleaning fluid injection nozzle 12, first squeegee 13 successively from the ejection position of gap nozzle.In addition, after being immersed in the position in the cleaning fluid, dispose the second cleaning fluid injection nozzle 14, second squeegee 15 and air nozzle 16 successively.
For the coating fluid of ejection on primary coat roller 11, from the first cleaning fluid injection nozzle, 12 jet cleaning liquid.Secondly, by the rotation of primary coat roller, move to and first squeegee, 13 opposed positions, the coating fluid on the primary coat roller is scraped by first squeegee 13 and is got.Among the present invention, first squeegee 13, for example the elastic plate by polyurethane, polyethylene, silicone rubber etc. constitutes.These elastic plates are installed into the surperficial crimping of its front end and primary coat roller 11.Thus, effect has the recuperability of elastically deformable on the elastic plate, makes the surperficial crimping of the relative primary coat roller of front end of elastic plate by this recuperability.Like this,, become the state that the surface of the front end of squeegee and primary coat roller seamlessly is adjacent to, can scrape the coating fluid of getting the surface that remains in the primary coat roller reliably by constitute squeegee 13 by elastic plate.
Scrape the coating fluid of getting by first squeegee, be discharged in the discharge road 17 of the uper side surface opening of squeegee, be discharged in the waste liquid tank 18 through discharging road 17.In this embodiment, owing to forcibly discharge, in the way of discharging road 17, be provided with aspirating mechanism 19 to waste liquid tank 18.Its result, the coating fluid that exists on the primary coat roller is almost removed by first squeegee, and is discharged in the waste liquid tank that is arranged with the rinse bath branch, and the shortcoming of therefore cleaning the applied liquid pollution of cleaning fluid in the liquid bath is eliminated.
Secondly, the primary coat roller is by cleaning in the cleaning fluid in the liquid bath, and the coating fluid that remains in primary coat roller surface during by cleaning fluid is removed.And then when rotation, move to and the second fountain nozzle, 14 opposed positions.The second cleaning fluid injection nozzle 14 is towards the surface of primary coat roller 11 powerful ground jet cleaning liquid.By the injection of this cleaning fluid, remaining coating fluid almost is removed.
The primary coat roller continues rotation, is scraped the cleaning fluid that remains in the surface by second squeegee 15.Second squeegee 15 and first squeegee are same, also are made of elastic plate.
Secondly, move to and air nozzle 16 opposed positions, eject dry air, drying is carried out on the surface of primary coat roller handle from air nozzle.
Secondly, recirculation is described.In the bottom of cleaning liquid bath 10 tap 21 is set, the cleaning fluid that cleans in the liquid bath is discharged in the closed circuit.In addition, cleaning liquid bath 10, be provided with the liquid level adjustment waste liquid parts 22 that are used to adjust the liquid level that cleans liquid bath, and the cleaning fluid that will overflow is being discharged in the closed circuit.These two closed circuits are combined into a closed circuit, are connected with the inlet of triple valve 23.First outlet of triple valve 23 is connected with recycling tank 25 through first pump 24.Recycling tank 25 comprises filter, removes coating fluid remaining in the cleaning fluid by this filter, is supplied to second pump 26 as the cleaning fluid that cleans.Second outlet of triple valve 23 is connected with second pump 26 through pipeline.The outlet of second pump 26 is connected with surge tank 27.In addition, in this example, though adopt the tap and the liquid level adjustment that are arranged at the cleaning fluid trench bottom to make the cleaning fluid circulation with these two parts of waste liquid parts,, also can only make and circulate with the cleaning fluid that the waste liquid parts overflow from the liquid level adjustment.
The present invention is not limited to the above embodiments, also can carry out various distortion or change.For example, also can on the squeegee of scraping the coating fluid that sprays on the orientation primary coat roller, aspirating mechanism be set, scrape the coating fluid of getting by squeegee and be discharged in the discharge road by aspirating mechanism.By the suction coating fluid, can remove and go to first squeegee, may be attached to the coating fluid of primary coat roller, can prevent to produce the reason of rubbish.Like this, by aspirating mechanism is set, scrapes the unfavorable condition that the coating fluid of getting residues on the squeegee by squeegee and be eliminated.
Claims (6)
1. a pre-spraying device comprises: the cleaning liquid bath of accommodating cleaning fluid; In cleaning liquid bath, rotatably be configured, and be attached with primary coat roller from the coating fluid of gap nozzle; The first cleaning fluid injection nozzle towards this primary coat roller jet cleaning liquid; Be configured in than the above-mentioned first cleaning fluid injection nozzle more by rear section side along the direction of rotation of primary coat roller, and scrape the squeegee of getting attached to the coating fluid on the above-mentioned primary coat roller; The second cleaning fluid injection nozzle of the primary coat roller jet cleaning liquid in the cleaning fluid in having passed through above-mentioned cleaning liquid bath; Towards the primary coat roller that has passed through the second cleaning fluid injection nozzle, the air nozzle of jet drying air, this pre-spraying device be characterised in that,
With squeegee the discharge road is set in abutting connection with ground, this discharge road is discharged and is scraped the coating fluid of getting by above-mentioned squeegee from the primary coat roller, will be discharged in the waste liquid tank by above-mentioned discharge road by the coating fluid that above-mentioned squeegee is removed.
2. pre-spraying device according to claim 1 is characterized in that, constitutes above-mentioned squeegee by the plate of the synthetic resin material of elastically deformable.
3. pre-spraying device according to claim 1 and 2, it is characterized in that, suction is set near above-mentioned squeegee scrapes the aspirating mechanism of the coating fluid of getting, will be discharged in the waste liquid tank by above-mentioned discharge road by the coating fluid of this aspirating mechanism suction by squeegee.
4. require 1 any described pre-spraying device according to profit to claim 3, it is characterized in that, has the surge tank that is connected in above-mentioned cleaning liquid bath, this surge tank is connected with above-mentioned first and second cleaning fluid injection nozzle, to be contained in the cleaning fluid of above-mentioned cleaning liquid bath by this surge tank, and be fed to above-mentioned first and second cleaning fluid injection nozzle and recycle.
5. pre-spraying device according to claim 4, it is characterized in that, gentle at above-mentioned cleaning liquid bath towards between the jar, connect the recycling tank that comprises the filter of removing pollutant, after will being filtered into the cleaning fluid of cleaning by filter from the cleaning fluid that above-mentioned cleaning liquid bath is discharged, be fed to first and second cleaning fluid injection nozzle.
6. according to claim 4 or the described pre-spraying device of claim 5, it is characterized in that, supply untapped cleaning fluid to above-mentioned surge tank, to reclaim and the cleaning fluid and the untapped cleaning fluid that have passed through above-mentioned filter mixes by above-mentioned cleaning liquid bath, and be fed to above-mentioned first and second cleaning fluid injection nozzle.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2006225550A JP2008049226A (en) | 2006-08-22 | 2006-08-22 | Preliminary discharge device |
| JP2006225550 | 2006-08-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101130185A true CN101130185A (en) | 2008-02-27 |
Family
ID=39127682
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007101304339A Pending CN101130185A (en) | 2006-08-22 | 2007-07-19 | Pre-spraying device |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP2008049226A (en) |
| KR (1) | KR100890503B1 (en) |
| CN (1) | CN101130185A (en) |
| TW (1) | TW200810842A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101905209A (en) * | 2009-06-05 | 2010-12-08 | 东京毅力科创株式会社 | Start the filling processing method and start the filling treating apparatus |
| CN102378653A (en) * | 2009-03-30 | 2012-03-14 | 丰田自动车株式会社 | Coating die and coating apparatus comprising the same |
| CN102707585A (en) * | 2011-11-25 | 2012-10-03 | 京东方科技集团股份有限公司 | Photoresist recovery system |
| CN103645607A (en) * | 2013-12-19 | 2014-03-19 | 合肥京东方光电科技有限公司 | Gluing system |
| CN109365210A (en) * | 2018-11-29 | 2019-02-22 | 江苏远华轻化装备有限公司 | A kind of scraper mechanism of fast positioning and adjustment |
| CN110712428A (en) * | 2018-07-11 | 2020-01-21 | 京瓷办公信息系统株式会社 | Ink jet recording apparatus |
| CN114146873A (en) * | 2021-12-06 | 2022-03-08 | 中铜(昆明)铜业有限公司 | SCR continuous casting and rolling production line pole waxing device capable of preventing wax liquid from flowing back |
| CN118122576A (en) * | 2024-05-07 | 2024-06-04 | 德沪涂膜设备(苏州)有限公司 | Precoating device and precoating detection method |
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| KR101062208B1 (en) | 2009-04-29 | 2011-09-05 | 주식회사 디지아이 | Inspection device for print head |
| JP5121778B2 (en) * | 2009-06-26 | 2013-01-16 | 東京エレクトロン株式会社 | Priming processing method and priming processing apparatus |
| JP6127571B2 (en) * | 2013-02-20 | 2017-05-17 | 凸版印刷株式会社 | Letterpress printing apparatus and organic EL element manufacturing method |
| CN106423755B (en) * | 2016-11-22 | 2019-06-25 | 京东方科技集团股份有限公司 | Coating apparatus, the method and its clean method that coating fluid is recycled using it |
| CN113457917A (en) * | 2021-06-30 | 2021-10-01 | 无锡极电光能科技有限公司 | Coating equipment and method for preparing perovskite light absorption film by using same |
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Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004121980A (en) * | 2002-10-02 | 2004-04-22 | Toppan Printing Co Ltd | Method and apparatus for preliminary discharge |
| JP3877719B2 (en) * | 2002-11-07 | 2007-02-07 | 東京応化工業株式会社 | Pre-discharge device for slit coater |
| JP4429073B2 (en) * | 2004-05-20 | 2010-03-10 | 東京応化工業株式会社 | Pre-discharge device for slit coater |
-
2006
- 2006-08-22 JP JP2006225550A patent/JP2008049226A/en active Pending
-
2007
- 2007-05-09 TW TW096116519A patent/TW200810842A/en unknown
- 2007-07-19 CN CNA2007101304339A patent/CN101130185A/en active Pending
- 2007-08-20 KR KR1020070083177A patent/KR100890503B1/en active IP Right Grant
Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102378653A (en) * | 2009-03-30 | 2012-03-14 | 丰田自动车株式会社 | Coating die and coating apparatus comprising the same |
| CN101905209A (en) * | 2009-06-05 | 2010-12-08 | 东京毅力科创株式会社 | Start the filling processing method and start the filling treating apparatus |
| CN101905209B (en) * | 2009-06-05 | 2014-03-19 | 东京毅力科创株式会社 | Priming processing method and priming processing device |
| CN102707585A (en) * | 2011-11-25 | 2012-10-03 | 京东方科技集团股份有限公司 | Photoresist recovery system |
| CN103645607A (en) * | 2013-12-19 | 2014-03-19 | 合肥京东方光电科技有限公司 | Gluing system |
| CN103645607B (en) * | 2013-12-19 | 2016-09-07 | 合肥京东方光电科技有限公司 | coating system |
| CN110712428A (en) * | 2018-07-11 | 2020-01-21 | 京瓷办公信息系统株式会社 | Ink jet recording apparatus |
| CN109365210A (en) * | 2018-11-29 | 2019-02-22 | 江苏远华轻化装备有限公司 | A kind of scraper mechanism of fast positioning and adjustment |
| CN109365210B (en) * | 2018-11-29 | 2024-04-02 | 江苏远华轻化装备有限公司 | Scraper mechanism of quick location regulation |
| CN114146873A (en) * | 2021-12-06 | 2022-03-08 | 中铜(昆明)铜业有限公司 | SCR continuous casting and rolling production line pole waxing device capable of preventing wax liquid from flowing back |
| CN114146873B (en) * | 2021-12-06 | 2023-02-24 | 中铜(昆明)铜业有限公司 | SCR continuous casting and rolling production line pole waxing device capable of preventing wax liquid from flowing back |
| CN118122576A (en) * | 2024-05-07 | 2024-06-04 | 德沪涂膜设备(苏州)有限公司 | Precoating device and precoating detection method |
Also Published As
| Publication number | Publication date |
|---|---|
| KR100890503B1 (en) | 2009-03-26 |
| KR20080019165A (en) | 2008-03-03 |
| TWI327488B (en) | 2010-07-21 |
| TW200810842A (en) | 2008-03-01 |
| JP2008049226A (en) | 2008-03-06 |
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| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20080227 |