200810842 (1) 九、發明說明 【發明所屬之技術領域】 本發明係關於狹縫塗布機（slit coater)之預備吐出裝置 【先前技術】 使用狹縫塗布機在玻璃基板或半導體晶圓等的各種基 板表面連續塗布光阻或顯影液時，在塗布作業與塗布作業 之待機中，吐出噴嘴的前端會和空氣接觸而使塗布液的濃 度局部上昇。若在這種狀態下進行塗布作業，高濃度化之 塗布液會造成縱條紋之產生，或有發生膜斷裂之危險性。 爲了解決這些問題，既有的預備吐出裝置，係在塗布作業 之前，朝引液輥子（priming roller)上吐出微量的塗布液以 除去高濃度的塗布液（例如參照專利文獻1 )。 上述預備吐出裝置，係朝在洗淨槽內配置成可旋轉之 引液輥子上吐出塗布液，經由引液輥子之旋轉，利用刮除 器來除去吐出的塗布液。進一步使其通過洗淨槽內之洗淨 液中而將殘存於引液輥子上之塗布液除去。洗淨後之引液 輥子，經來自空氣噴嘴之乾燥空氣噴射後，再進行下次的 予備吐出。 〔專利文獻1〕日本特開2005-329340號公報 【發明內容】 上述既有的預備吐出裝置，係將洗淨液槽所排出之洗 -5- 200810842 (2) 淨液回收，將回收後的洗淨液經由再循環流路供給至噴淋 噴嘴以進行再利用。然而，由於刮除器之塗布液除去性能 不足，引液輥子是以表面殘存有塗布液的狀態通過洗淨槽 中，因此會污染洗淨槽內之洗淨液。因此，必須經常將洗 * 淨槽內之洗淨液更換成新的洗淨液，而有運轉成本高的缺 ' 點。 本發明之目的係提供一種預備吐出裝置，其能進一步 φ 提昇吐出至引液輥子表面之塗布液的除去性能，而有助於 洗淨液的再循環。 本發明之另一目的，係提供一能大幅減低新洗淨液的 使用量之預備吐出裝置。 本發明之預備吐出裝置係具備：用來收容洗淨液之洗 淨液槽、於洗淨槽內配置成可旋轉且讓來自狹縫噴嘴之塗 布液附著之引液輥子、朝該引液輥子噴射洗淨液之第1洗 淨液噴射噴嘴、沿著引液輥子之旋轉方向配置於較前述第 • 1洗淨液噴射噴嘴更後段側且用來刮除前述引液輥子上附 著的塗布液之刮除器、朝通過前述洗淨液槽內的洗淨液中 之後的引液輥子噴射洗淨液之第2洗淨液噴射噴嘴、朝通 過第2洗淨液噴射噴嘴後的引液輥子噴射乾燥空氣之空氣 噴嘴，而構成之預備吐出裝置，其特徵在於：用來排出前 述刮除器從引液輥子刮除的塗布液之排出路係鄰接刮除器 而設置，被前述刮除器刮除後的塗布液係經由前述排出路 排至廢液槽。 在本發明，係將吐出至引液輥子上的塗布液用刮除器 -6- 200810842 (3) 刮除，將刮除後的塗布液排至排出路，再經由排出路排至 與洗淨液槽分開設置之廢液槽，因此能解決用來收納引液 輥子之洗淨液槽內的洗淨液被塗布液污染的問題。結果， 能使洗淨液槽內的洗淨液維持較清淨的狀態，又藉由在再 ' 循環路設置過濾器而能將洗淨液槽內的洗淨液予以再利用 ' ，因此能減少洗淨液之消耗量。 本發明之預備吐出裝置之較佳實施例，係用可彈性變 φ 形之樹脂板片等來構成刮除器，且將刮除器配置成其前端 能和引液輥子的表面密合，藉此使存在於引液輥子表面之 塗布液被前述刮除器刮除，而將刮除後的塗布液經由前述 排出路排至廢液槽。關於刮除器，只要使用聚氨酯、聚乙 烯橡膠、矽橡膠等的可彈性變形橡膠板片，即可使彈性板 片之前端密合於引液輥子表面。在此密合狀態下使引液輥 子旋轉，吐出至引液輥子上的塗布液會藉由刮除器幾乎完 全刮除。接著，將刮除後的塗布液經由排出路排至廢液槽 Φ ，可大幅減低洗淨液槽內的洗淨液被塗布液污染的程度。 此外，作爲刮除器之構件，除彈性橡膠材料，也能使用 SUS、各種合成樹脂等之各種板片構件。 在本發明，將吐出至引液輥子上之塗布液用刮除器刮 除，並經由排出路排至廢液槽，因此可解決塗布液混入洗 淨液槽內的問題。結果，能將洗淨液槽內的洗淨液予以再 循環利用，可減少新洗淨液的消耗量而降低運轉成本。 【實施方式】 200810842 (4) 第1圖係採用本發明之預備吐出裝置之塗布裝置的俯 視圖，第2圖係該預備吐出裝置之截面圖。 如第1圖所示，塗布裝置係在基座上設置一對平行的 導軌R，R，在相當於該等導軌R，R中間位置之基座上面的 * 中央固定基板W之載台S，以跨越該基板載台S的方式架 ' 設能在導軌R，R間行進之移動機構M，M，在該等移動機構 M，M之前後架設梁柱而構成俯視框狀之框架F，在該框架 φ F上透過昇降裝置安裝狹縫噴嘴N。 此外，在底座B之一端側設置預備吐出裝置1。預備 吐出裝置1係由預備吐出部1與再循環部2所構成。預備 吐出部1具有洗淨液槽1 0，在洗淨液槽1 0內收容洗淨液 。在洗淨液槽1 〇內將引液輥子1 1配置成可旋轉。將引液 輥子11配置成能使其一部分浸漬於洗淨液中，經由朝箭 頭方向旋轉而用洗淨液槽內的洗淨液將其洗淨。引液輥子 1 1係由不鏽鋼、銘、欽、碳、鍍鉻等所構成，其直徑爲 # 30〜200mm，長度比狹縫噴嘴之長方向長度稍長。此外， 洗淨液噴射噴嘴，可使用包含2流體噴嘴方式之各種洗淨 液噴射噴嘴。 在進行預備吐出時，在引液輥子1 1上方配置狹縫噴 嘴N，由其下端朝引液輥子1 1上吐出微量的塗布液。在 引液輥子1 1的周圍，從狹縫噴嘴之吐出位置起，沿著箭 頭方向依序配置第1洗淨液噴射噴嘴1 2、第1刮除器13 。接下來，經過浸漬於洗淨液中的部位，依序配置第2洗 淨液噴射噴嘴1 4、第2刮除器1 5及空氣噴嘴1 6。 -8-。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 。 When the photoresist or the developer is continuously applied to the surface of the substrate, during the coating operation and the standby of the coating operation, the tip end of the discharge nozzle comes into contact with the air to locally increase the concentration of the coating liquid. When the coating operation is carried out in this state, the coating liquid having a high concentration causes the occurrence of vertical streaks or the risk of film breakage. In order to solve these problems, a conventional pre-discharge apparatus is required to discharge a small amount of the coating liquid onto a priming roller to remove a high-concentration coating liquid before the coating operation (see, for example, Patent Document 1). In the above-described preliminary discharge device, the coating liquid is discharged onto the liquid guiding roller which is arranged to be rotatable in the washing tank, and the discharged coating liquid is removed by the scraper by the rotation of the liquid guiding roller. Further, the coating liquid remaining on the liquid guiding roller is removed by washing the washing liquid in the tank. After the washing, the roller is sprayed by the dry air from the air nozzle, and then the next discharge is performed. [Patent Document 1] Japanese Laid-Open Patent Publication No. 2005-329340. SUMMARY OF THE INVENTION The above-mentioned conventional preliminary discharge device recovers the cleaned liquid discharged from the cleaning liquid tank, and recovers the recovered liquid. The cleaning liquid is supplied to the shower nozzle through the recirculation flow path for reuse. However, since the coating liquid removal performance of the scraper is insufficient, the liquid guiding roller passes through the washing tank in a state in which the coating liquid remains on the surface, so that the washing liquid in the washing tank is contaminated. Therefore, it is necessary to frequently replace the washing liquid in the washing tank with a new washing liquid, and there is a shortage of running costs. SUMMARY OF THE INVENTION An object of the present invention is to provide a preliminary discharge device which can further enhance the removal performance of a coating liquid discharged onto the surface of a liquid guiding roller and contribute to recycling of the cleaning liquid. Another object of the present invention is to provide a preliminary discharge device capable of greatly reducing the amount of use of a new cleaning liquid. The preliminary discharge device of the present invention includes a cleaning liquid tank for accommodating the cleaning liquid, a liquid guiding roller that is rotatably disposed in the cleaning tank and that allows the coating liquid from the slit nozzle to adhere, and the liquid guiding roller The first cleaning liquid spray nozzle for jetting the cleaning liquid is disposed on the rear side of the first cleaning liquid spray nozzle along the rotation direction of the liquid introduction roller, and is used for scraping the coating liquid adhering to the liquid introduction roller. The second cleaning liquid injection nozzle that ejects the cleaning liquid to the liquid-feeding roller that has passed through the cleaning liquid in the cleaning liquid tank, and the liquid-feeding roller that has passed through the second cleaning liquid injection nozzle a pre-discharging device configured to eject an air nozzle for drying air, wherein a discharge path for discharging a coating liquid scraped off from the liquid guiding roller by the scraper is disposed adjacent to the scraper, and is disposed by the scraper The coating liquid after scraping is discharged to the waste liquid tank through the above-described discharge path. In the present invention, the coating liquid discharged onto the liquid guiding roller is scraped off by a scraper-6-200810842 (3), and the coating liquid after the scraping is discharged to the discharge path, and then discharged and washed through the discharge path. Since the liquid tank is provided separately from the waste liquid tank, it is possible to solve the problem that the cleaning liquid in the washing liquid tank for accommodating the liquid guiding roller is contaminated by the coating liquid. As a result, the cleaning liquid in the cleaning liquid tank can be maintained in a relatively clean state, and the cleaning liquid in the cleaning liquid tank can be reused by providing a filter in the recirculation path, thereby reducing The consumption of washing liquid. In a preferred embodiment of the preliminary ejection device of the present invention, the scraper is formed by a resin plate or the like which is elastically deformable in a φ shape, and the scraper is disposed such that the front end thereof can be closely adhered to the surface of the liquid guiding roller. This causes the coating liquid existing on the surface of the liquid guiding roller to be scraped off by the scraper, and the coating liquid after the scraping is discharged to the waste liquid tank through the discharge path. Regarding the scraper, as long as an elastically deformable rubber sheet such as polyurethane, polyethylene rubber or silicone rubber is used, the front end of the elastic sheet can be brought into close contact with the surface of the liquid guiding roller. In this closed state, the liquid guiding roller is rotated, and the coating liquid discharged onto the liquid guiding roller is almost completely scraped off by the scraper. Then, the scraped coating liquid is discharged to the waste liquid tank Φ via the discharge path, and the degree of contamination of the cleaning liquid in the cleaning liquid tank by the coating liquid can be greatly reduced. Further, as the member of the scraper, various sheet members such as SUS and various synthetic resins can be used in addition to the elastic rubber material. In the present invention, the coating liquid discharged onto the liquid guiding roller is scraped off by a scraper and discharged to the waste liquid tank through the discharge path, so that the problem that the coating liquid is mixed into the cleaning liquid tank can be solved. As a result, the cleaning liquid in the cleaning liquid tank can be recycled, and the consumption of the new cleaning liquid can be reduced to reduce the running cost. [Embodiment] 200810842 (4) Fig. 1 is a plan view of a coating apparatus using a preliminary discharge device of the present invention, and Fig. 2 is a cross-sectional view of the preliminary discharge device. As shown in Fig. 1, the coating apparatus is provided with a pair of parallel guide rails R, R on the base, and a stage S for fixing the substrate W at the center of the base corresponding to the intermediate position of the guide rails R, R, The moving mechanism M, M that can travel between the guide rails R, R is disposed so as to span the substrate stage S. Before and after the moving mechanisms M, M, the beam-column is placed to form a frame F in a plan view. The frame φ F is mounted with a slit nozzle N through a lifting device. Further, a preliminary discharge device 1 is provided on one end side of the base B. The preliminary discharge device 1 is composed of a preliminary discharge unit 1 and a recirculation unit 2. The preliminary discharge unit 1 has a cleaning liquid tank 10, and contains a washing liquid in the cleaning liquid tank 10. The liquid guiding roller 1 1 is placed in the cleaning solution tank 1 to be rotatable. The liquid guiding roller 11 is disposed so as to be partially immersed in the cleaning liquid, and is rotated in the direction of the arrow to be washed by the cleaning liquid in the cleaning liquid tank. The liquid guiding roller 1 1 is made of stainless steel, Ming, Qin, carbon, chrome, etc., and has a diameter of 30 to 200 mm, and the length is slightly longer than the length of the slit nozzle. Further, as the cleaning liquid spray nozzle, various washing liquid spray nozzles including a two-fluid nozzle method can be used. At the time of preliminary discharge, the slit nozzle N is placed above the liquid guiding roller 1 1 , and a small amount of the coating liquid is discharged from the lower end toward the liquid guiding roller 1 1 . The first cleaning liquid injection nozzle 1 2 and the first scraper 13 are arranged in the direction of the arrow from the discharge position of the slit nozzles around the liquid guiding roller 1 1 . Next, the second cleaning liquid spray nozzle 14 , the second scraper 15 , and the air nozzle 16 are sequentially disposed in a portion immersed in the cleaning liquid. -8-
200810842 (5) 對吐出至引液輥子11上的塗 噴嘴12會噴射洗淨液。接著，經 移動至與第1刮除器13相對向的 塗布液會被第1刮除器13施以刮 除器1 3，例如係由聚氨酯、聚乙烯 所構成。將該彈性板片裝設成使其 的表面。藉此，可彈性變形的回復 利用該回復力能使彈性板片的前端 如此般，藉由彈性板片來構成刮除 引液輥子的表面會成爲毫無間隙之 刮除引液輥子表面上殘存的塗布液 被第1刮除器13刮除的塗布 器的上側表面之排出路1 7，經由| 1 8。在本實施例，爲了強制進行享J 係在排出路1 7的中段設有吸引機 液輥子上之塗布液，會被第1刮1¾ 出至與洗淨液槽分開設置之廢液H 內的洗淨液被塗布液污染的缺點。 然後，引液輥子通過洗淨液朽 淨液中的期間將殘存於引液輥子_ 進一步旋轉至與第2洗淨液噴射D 第2洗淨液噴射噴嘴14會對引液 洗淨液。藉由此噴射洗淨液而將歹ΐ 去。 布液，第1洗淨液噴射 由引液輥子之旋轉，當 f位置時，引液輥子上的 除。在本發明之第1刮 ί、矽橡膠等的彈性板片 前端壓接於引液輥子11 力會作用於彈性板片， 抵接於引液輥子表面。 器1 3，刮除器的前端與 密合狀態，而能確實地 〇 ί液，係排至開口於刮除 ξ排出路17排至廢液槽 丨向廢液槽1 8之排出， 構19。結果，存在於引 $器幾乎完全除去，而排 f，因此能解決洗淨液槽 ΐ內的洗淨液，在通過洗 :面之塗布液除去。接著 t嘴14相對向的位置。 輥子11表面強力地噴射 〖存的塗布液幾乎完全除 -9 - 200810842 (6) 引液輥子進一步旋轉，藉由第2刮除器1 5將殘存於 表面的洗淨液刮除。第2刮除器15，和第1刮除器13同 樣地係由彈性板片所構成。 接著，移動至與空氣噴嘴1 6相對向的位置，由空氣 噴嘴噴射乾燥空氣而對引液輥子表面實施乾燥處理。 ' 其次說明再循環手段。在洗淨液槽1 〇的底部設置排 出孔21，以將洗淨液槽內的洗淨液排至循環路。在洗淨液 • 槽1 0，設置用來調整洗淨液槽的液面之液面調整用廢液構 件22，以將溢出的洗淨液排至循環路。前述二個循環路係 結合於單一循環路，並連接於三通閥23之入口。三通閥 23之第1出口，係經由第1泵24連接於再循環箱25。再 循環箱2 5含有過濾器，藉由該過濾器來除去洗淨液中殘 存的塗布液，而以清淨洗淨液的狀態供給至第2泵26。三 通閥23之第2出口係經由管路連接於第2泵26。第2泵 26之出口連接於緩衝槽27。在本例中，雖是使用設於洗 # 淨液槽的底部之排出孔及液面調整用廢液構件雙方來進行 洗淨液的循環，但也能僅使從液面調整用廢液構件溢出的 洗淨液進行循環。 緩衝槽27，係貯藏著經再循環箱的過濾器清淨後的洗 淨液，並被供給未使用的洗淨液（新洗淨液）。因此，在緩 衝槽27中貯藏著更清淨的洗淨液。緩衝槽27具有二個出 口 27a、27b以及入口 27c。第1出口 27a係對第1洗淨液 噴射噴嘴12供給洗淨液，第2出口 2 7b係對第2洗淨液 噴射噴嘴1 4供給洗淨液，入口 2 7 c係供給狹縫噴嘴洗淨 -10- (7) (7)200810842 用的新鮮洗淨液。藉由設置該再循環系統，可將清淨液接 近新洗淨液狀態之洗淨液供給至各噴淋噴嘴，因此能使引 液輥子表面維持更清淨的狀態。 本發明並非限於上述實施例而能做各種不同的變形與 變更。例如，也能在用來刮除吐出至引液輥子上的塗布液 之刮除器設置吸引機構，將刮除器所刮除的塗布液經由吸 引機構排至排出路。藉由吸引塗布液，能在第1刮除器爲 止將可能附著於引液輥子之塗布液除去，而能防止污染的 發生原因。如此般，藉由設置吸引機構，能解決被刮除器 刮除的塗布液殘留於刮除器上之問題。 【圖式簡單說明】 第1圖係採用本發明之預備吐出裝置之塗布裝置的俯 視圖。 第2圖係該預備吐出裝置之截面圖。 【主要元件符號說明】 1 :預備吐出裝置 2 :再循環部 I 〇 :洗淨液槽 II :引液輥子 N :狹縫噴嘴 1 2 :第1洗淨液噴射噴嘴 13 :第1刮除器 -11 - 200810842 (8) 1 4 :第2洗淨液噴射噴嘴 1 5 :第2刮除器 16 :空氣噴嘴 1 7 :排出路 1 8 :廢液槽 • 19 :吸引機構 21 :排出孔 φ 22 :液面調整用廢液構件 2 3 :二通閥 24 :第1泵 2 5 :再循環箱 26 :第2泵 27 :緩衝槽200810842 (5) The washing liquid is sprayed onto the coating nozzle 12 which is discharged onto the liquid guiding roller 11. Then, the coating liquid that has moved to the first scraper 13 is applied to the first scraper 13 by the scraper 13, and is made of, for example, polyurethane or polyethylene. The elastic sheet is mounted to have its surface. Thereby, the elastically deformable recovery can use the restoring force to make the front end of the elastic plate piece so that the surface of the liquid-repellent roller formed by the elastic plate piece becomes a residual surface of the scraping-removing roller without gaps. The discharge path of the upper surface of the applicator scraped off by the first scraper 13 is passed through |1 8 . In the present embodiment, in order to forcibly carry out the coating liquid which is provided on the suction liquid roller in the middle portion of the discharge path 17, the first scraping material is discharged to the waste liquid H which is provided separately from the cleaning liquid tank. The disadvantage that the cleaning liquid is contaminated by the coating liquid. Then, the liquid guiding roller remains in the cleaning liquid during the passage of the cleaning liquid, and further rotates to the second cleaning liquid injection D, and the second cleaning liquid spraying nozzle 14 causes the liquid to be washed. By this, the washing liquid is sprayed and will be removed. The cloth liquid, the first washing liquid is sprayed by the liquid guiding roller, and when the f position is, the liquid removing roller is removed. In the tip end of the elastic sheet such as the first scraping or licking rubber of the present invention, the liquid guiding roller 11 is pressed against the elastic sheet to abut against the surface of the liquid guiding roller. The first end of the scraper is in a close state, and the liquid can be surely drained to the opening of the scraping discharge passage 17 to the waste liquid tank and discharged to the waste liquid tank 18. . As a result, the eliminator is almost completely removed, and the f is discharged, so that the washing liquid in the washing liquid tank can be solved and removed by the coating liquid which is washed. Then the position of the t-mouth 14 is opposite. The surface of the roller 11 is strongly ejected. The deposited coating liquid is almost completely removed. -9 - 200810842 (6) The liquid guiding roller is further rotated, and the cleaning liquid remaining on the surface is scraped off by the second scraper 15. The second scraper 15 is composed of an elastic plate similarly to the first scraper 13. Then, it moves to a position facing the air nozzle 16 and sprays dry air by the air nozzle to dry the surface of the liquid guiding roller. ' Next, explain the means of recycling. An outlet hole 21 is provided at the bottom of the cleaning solution tank 1 to discharge the cleaning liquid in the cleaning liquid tank to the circulation path. In the cleaning liquid tank 10, a liquid level adjusting waste liquid member 22 for adjusting the liquid level of the washing liquid tank is provided to discharge the overflowed washing liquid to the circulation path. The aforementioned two circulation paths are combined with a single circulation path and connected to the inlet of the three-way valve 23. The first outlet of the three-way valve 23 is connected to the recirculation tank 25 via the first pump 24. The recirculation tank 25 contains a filter, and the coating liquid remaining in the cleaning liquid is removed by the filter, and is supplied to the second pump 26 in a state where the cleaning liquid is cleaned. The second outlet of the three-way valve 23 is connected to the second pump 26 via a pipe. The outlet of the second pump 26 is connected to the buffer tank 27. In this example, the cleaning liquid is circulated by using both the discharge hole provided in the bottom of the washing liquid tank and the waste liquid member for liquid level adjustment. However, only the waste liquid member for liquid level adjustment can be used. The overflowed cleaning solution is circulated. The buffer tank 27 stores the cleaning liquid which has been cleaned by the filter of the recirculation tank, and is supplied with an unused washing liquid (new washing liquid). Therefore, a cleaner washing liquid is stored in the buffer tank 27. The buffer tank 27 has two outlets 27a, 27b and an inlet 27c. The first outlet 27a supplies the cleaning liquid to the first cleaning liquid injection nozzle 12, the second outlet 27b supplies the cleaning liquid to the second cleaning liquid injection nozzle 14, and the inlet 2 7 c supplies the slit nozzle to wash. Net -10- (7) (7) 200810842 used with fresh detergent. By providing the recirculation system, the cleaning liquid in which the cleaning liquid is brought close to the new cleaning liquid state can be supplied to each of the shower nozzles, so that the surface of the liquid guiding roller can be maintained in a cleaner state. The present invention is not limited to the above embodiments, and various modifications and changes can be made. For example, it is also possible to provide a suction mechanism for the scraper for scraping the coating liquid discharged onto the liquid guiding roller, and to discharge the coating liquid scraped off by the scraper to the discharge path via the suction mechanism. By suctioning the coating liquid, it is possible to prevent the coating liquid which may adhere to the liquid guiding roller from being removed by the first scraper, thereby preventing the occurrence of contamination. In this way, by providing the suction mechanism, it is possible to solve the problem that the coating liquid scraped off by the scraper remains on the scraper. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a plan view of a coating apparatus using a preliminary discharge device of the present invention. Fig. 2 is a cross-sectional view of the preliminary discharge device. [Description of main component symbols] 1 : Pre-discharge device 2 : Recirculation unit I 〇: Cleaning solution tank II : Priming roller N : Slit nozzle 1 2 : First cleaning liquid injection nozzle 13 : First scraper -11 - 200810842 (8) 1 4 : 2nd cleaning liquid spray nozzle 1 5 : 2nd scraper 16 : Air nozzle 1 7 : Discharge path 1 8 : Waste tank • 19 : Suction mechanism 21 : Discharge hole φ 22: liquid level adjusting waste liquid member 2 3 : two-way valve 24 : first pump 2 5 : recirculation box 26 : second pump 27 : buffer tank
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