JP2008045937A - Probe assembly, probe unit and apparatus for inspecting display panel - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a probe assembly used for an inspection apparatus capable of cleaning an electrode of a liquid crystal panel just before the inspection at its inspection stage, without the need for any dedicated drive source to clean the electrode. <P>SOLUTION: The probe assembly has a probe capable of contacting with an electrode of an object to be inspected and is configured to be able to relatively move in both directions in which it gets close to and away from the object to be inspected in order to contact the probe with the electrode corresponding to the probe. Furthermore, a cleaning means for the electrode and a swing arm for supporting the cleaning means are included. The swing arm is swung by a relative motion of the object to be inspected and the probe assembly, which get close to each other, whereby the cleaning means sweeps the surface of the electrode along with the swing arm being swung. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a display panel inspection apparatus, a probe unit, and a probe assembly, and more particularly, to an inspection apparatus suitable for lighting inspection of a display panel, a probe unit for the inspection apparatus, and a probe assembly thereof.

  In the manufacture of a liquid crystal panel, an alignment film subjected to, for example, a rubbing process is formed on one surface of each of a pair of glass plates. In an active matrix type liquid crystal panel, a large number of transparent pixel electrodes and thin film transistors (TFTs) are incorporated in one glass plate between the glass plate and an alignment film. The other glass plate incorporates a transparent common electrode between the glass plate and the alignment film. Further, in a color liquid crystal panel, a color filter is incorporated between the glass plate and the common electrode. ing. The pair of glass plates are bonded to each other via a seal member so that the alignment films are opposed to each other with a space therebetween. The glass assembly thus bonded is used as mother glass, and the glass assembly is cut into a number of desired glass assemblies for liquid crystal panels so as to sever the sealing member of the mother glass. By this cutting operation, a plurality of glass assemblies are formed from one mother glass. Thereafter, liquid crystal is injected between a pair of glass plates of each glass assembly, and the liquid crystal is sealed, whereby a plurality of liquid crystal panels are efficiently formed.

  The liquid crystal panel is subjected to an inspection such as a lighting inspection for detecting a defect using an inspection apparatus, for example. In this lighting inspection, it is necessary to supply a drive signal to each liquid crystal panel. For this reason, the inspection stage of the inspection apparatus is provided with a probe assembly provided with a large number of probes capable of contacting the electrodes of the liquid crystal panel (see, for example, Patent Document 1).

  By the way, non-conductive foreign substances such as chips on the glass plate and chips on the sealing member in the manufacturing process of the liquid crystal panel described above are applied to the electrodes of the liquid crystal panel to which the probe of the probe assembly of the inspection apparatus contacts. If the probe remains, reliable electrical connection between each probe and the electrode corresponding to the probe is hindered. Therefore, the electrodes of the liquid crystal panel undergoing inspection prior to contact of each probe at the inspection stage of the inspection apparatus Need to be cleaned.

Therefore, in the invention described in Patent Document 1, a cleaning device having a cleaning tape for cleaning the electrodes of the liquid crystal panel is provided on a set stage in which the liquid crystal panel to be sent to the inspection stage is arranged in advance. According to this, each electrode of the liquid crystal panel to be inspected at the inspection stage can be cleaned with the cleaning tape at the set stage prior to the inspection.
JP 2005-147948 A

  However, the conventional inspection apparatus requires a cleaning apparatus in which a dedicated drive source is incorporated in the set stage, and thus the configuration of the inspection apparatus is complicated. Further, even if the electrodes are cleaned on the set stage, there is a possibility that new foreign substances may adhere to the cleaned electrodes during or after transfer to the inspection stage. Therefore, it has been desired to clean the electrode as much as possible just before the probe contacts the electrode.

  Therefore, an object of the present invention is to provide an inspection apparatus capable of cleaning an electrode immediately before inspection at an inspection stage without requiring a dedicated drive source for cleaning the electrode of the liquid crystal panel, and the inspection apparatus for the inspection apparatus. It is to provide a probe unit and a probe assembly.

  The probe assembly according to the present invention is provided with a probe capable of contacting an electrode of an object to be inspected, and is relatively moved in a direction approaching the object to be inspected for contact between the probe and the electrode corresponding to the probe. Is possible. The probe assembly includes a cleaning unit for the electrode and a swing arm that holds the cleaning unit. When the object to be inspected and the probe assembly move so as to approach each other, either the rocking arm or the cleaning means is moved by the relative movement to cause the rocking arm to rock. The test object can be contacted. When the swing arm swings, the cleaning means supported by the swing arm sweeps on the electrode as the swing arm swings.

  In the probe assembly according to the present invention, when the inspection object and the probe assembly come close to each other due to contact between the electrode of the inspection object and each probe of the probe assembly corresponding thereto, the relative movement thereof Thus, the swing arm that supports the cleaning means swings without using a dedicated drive source for swing. As the swinging arm swings, the cleaning means supported by the swinging arm sweeps the electrode, so that there is no need to use a dedicated drive source for cleaning, and the probe, the electrode, The electrode can be cleaned immediately before contact.

  In the probe assembly, probe blocks that support the multiple probes can be detachably attached to the support mechanism. By attaching the probe block to the support mechanism, the probes protrude from the front edge of the probe block supported by the support mechanism toward the object to be inspected. Arranged in line. In this case, for each probe assembly, a pair of swing arms can be arranged on both sides of the probe block, and the cleaning means is supported by the swing arms corresponding to both ends between the swing arms. Is done.

  Both the swing arms can be swingably supported by the support mechanism. Alternatively, both the swing arms can be swingably supported on the probe block.

  As the cleaning means, a bar-shaped cleaning bar having a central axis supported by the swing arm can be used. For such a cleaning bar, for example, a roller member for engaging with foreign matter on the electrode and removing the foreign matter from the electrode can be used. Further, if necessary, a protective means such as an elastic layer, a felt layer, or flocking can be provided on the surface of the cleaning bar in order to protect the electrode surface by sliding the cleaning bar.

  As the cleaning means, a cleaning brush whose center axis is supported by the swing arm can be used.

  By appropriately setting the length of the swing arm, when the cleaning means supported by the swing arm cleans the electrode, the cleaning means adheres to the probe tip in addition to the electrode. Foreign matter can also be removed. In this case, in order to prevent damage to the probe tip due to contact with the cleaning means, the length of each swing arm is set so that the cleaning means comes into contact with the foreign matter attached to the probe tip but does not come into contact with the needle tip. It is desirable to set In this case, it is preferable to use a cleaning brush such as a rotating brush as the cleaning means in order to reliably prevent the probe tip from being damaged by contact.

  The cleaning means can be supported on the end of the swing arm, and the edge portion of the end can protrude outward in the radial direction beyond the cleaning means. By bringing the swing arm into contact with the object to be inspected at the edge portion, the cleaning means supported by the swing arm is prevented from sliding on the electrode when the swing arm swings. Can do. Thereby, since the foreign material on this electrode can be swept out without rubbing an electrode with a cleaning means, the damage to the electrode surface by a cleaning means can be prevented reliably.

  A biasing force of a biasing means such as a spring member can be applied to the swing arm in order to surely remove the foreign matter on the electrode by the cleaning means supported by the swing arm.

  The probe assembly may be provided with a suction mechanism having a suction port for sucking foreign matter on the probe tip or the electrode. By this suction mechanism, foreign matter removed from the tip of the electrode or probe can be sucked, so that foreign matter swept out from the electrode can be reliably prevented from reattaching to the object to be inspected. Further, the foreign matter on the electrode can be directly sucked by setting the suction force. In this case, the suction mechanism functions as an auxiliary to the cleaning means.

  The plurality of probe assemblies each having the swing arm and the cleaning means supported by the swing arm can be incorporated into a probe unit of an inspection apparatus. In this probe unit, a plurality of the probe assemblies can be brought into contact with the corresponding electrodes of the object to be inspected above the inspection table that holds the object to be inspected up and down. And supported on a support member.

  In the probe unit according to the present invention, a pair of swing arms is provided on both sides of the probe assembly group for each probe assembly group including a plurality of probe assemblies arranged in alignment on the support member. And the cleaning means for the electrodes of the object to be inspected corresponding to the probes of the plurality of probe assemblies between the swing arms can be supported by the pair of swing arms. In this case, the swing arm is swingably supported by the support member.

  Furthermore, in the inspection apparatus according to the present invention, the probe unit is provided above an inspection table that holds an object to be inspected provided with electrodes so as to be movable up and down.

  According to the present invention, the swing arm can be swung in relation to the relative movement between the test object and the probe assembly for inspecting the test object. By swinging the swing arm, Foreign matter can be swept out from the electrode by the cleaning means supported by the swing arm. As a result, the electrode of the object to be inspected is cleaned immediately before contact with the probe without incorporating a dedicated drive source for cleaning, and thus without complicating the configuration of the inspection apparatus by incorporating this dedicated drive source. Therefore, the electrode of the object to be inspected can be reliably cleaned immediately before the inspection at a relatively low cost, and a stable inspection can be performed without being affected by the foreign matter.

  1 and 2 show the appearance of an inspection apparatus 10 according to the present invention. This inspection apparatus 10 is used for, for example, lighting inspection of a liquid crystal panel 12 having a rectangular planar shape. The inspection apparatus 10 is provided with an inspection stage 14 for lighting inspection, and a well-known set stage 16 for sequentially exchanging the liquid crystal panel 12 as an inspection object with the inspection stage is an inspection stage 14. It is provided side by side. In the illustrated example, the liquid crystal panel 12 is tilted forward and held by the inspection stage 14 and the set stage 16 in order to facilitate the observation of the display screen of the liquid crystal panel 12 by the operator's visual inspection in the lighting inspection. ing.

  On the surface of the rectangular liquid crystal panel 12, as will be described later, a large number of electrodes 12a (see FIG. 4) are arranged along one long side edge, and along one short side edge. A number of similar electrodes 12a are arranged. The liquid crystal panel 12 to be inspected at the inspection stage 14 is disposed on the support base 22 of the set stage 16 from the loading / unloading opening 20 provided on the front surface of the housing 18 with the electrodes facing the front surface. The liquid crystal panel 12 is adjusted in posture on the support stage 22 by a well-known centering mechanism having a centering pin 24 provided on the support stage 22 in the set stage 16. The liquid crystal panel 12 of the set stage 16 is exchanged with the liquid crystal panel 12 that has been inspected by the inspection stage 14 via a well-known panel handling mechanism (not shown). Is taken out from the inspection apparatus 10 through the entrance / exit 20 of the set stage 16.

  As shown in FIGS. 1 and 3, the inspection stage 14 is formed with a rectangular observation window 26 that is inclined and aligned with the entrance / exit 20 of the set stage 16 in front of the housing 18. The inspection stage 14 is provided with a chuck top 28 for holding the liquid crystal panel 12 in a predetermined posture. The chuck top 28 is provided with a stopper pin 30 and a pusher 32 that presses the edge of the liquid crystal panel 12 on the chuck top 28 toward the stopper pin. As is well known, the liquid crystal panel 12 on the chuck top 28 has a long side and a short side of the liquid crystal panel 12 in the X-axis direction and the Y-axis direction of the observation window 26 by the stopper pins 30 and the pushers 32, respectively. The posture is adjusted to follow. The liquid crystal panel 12 whose posture has been adjusted is held on the chuck top by a suction pressure lower than the atmospheric pressure of the chuck top 28. As is well known, the chuck top 28 is provided on the xyzθ stage. As a result, the liquid crystal panel 12 on the chuck top 28 can move in the X-axis direction, the Y-axis direction, and the Z-axis direction perpendicular to the XY plane integrally with the chuck top 28, and around the Z-axis. Can be rotated.

  As shown in FIG. 3, the probe unit 34 according to the present invention is disposed obliquely above the chuck top 28, that is, obliquely forward of the chuck top 28 along the Z-axis direction, with an interval from the chuck top 28 in the Z-axis direction. Is arranged. The probe unit 34 includes a support member 36 formed of a rectangular frame disposed on a plane parallel to the chuck top 28 and spaced from the chuck top 28, and a plurality of probe assemblies 38 (38a) supported by the support member. 38b).

  The support member 36 is fixedly supported in the housing 18 by a frame member (not shown). Further, in the example shown in FIG. 3, four probe assemblies 38a are arranged in parallel on the long side portion 36a along the X-axis direction of the support member 36 at intervals in the longitudinal direction of the long side portion 36a. Are arranged. In addition, three probe assemblies 38b are arranged in parallel on the short side portion 36b along the Y-axis direction of the support member 36 at intervals in the longitudinal direction of the short side portion 36b.

  Each probe assembly 38 (38a, 38b) includes a probe block 42 provided with a large number of probes 40, as shown in FIGS. Each probe 40 is held with a needle tip protruding downward from a front edge of a probe block 42 provided with the probe. Each probe assembly 38 (38a, 38b) has a long side portion 36a and a long side portion 36a of the support member 36 via a suspension mechanism 44, which is a support mechanism, so that the needle tips of the probes 40 correspond to the corresponding electrodes 12a. On the short side part 36b, it hold | maintains at intervals. Accordingly, the probe 40 of each probe assembly 38 (38a, 38b) is spaced from the corresponding electrode 12a of the liquid crystal panel 12 disposed below the needle tip.

The liquid crystal panel 12 transferred from the set stage 16 onto the chuck top 28 of the inspection stage 14 is subjected to position adjustment in the X and Y directions and posture adjustment around the Z axis as described above on the chuck top 28. As a result of this adjustment, when each electrode 12a is accurately positioned at the needle tip of the corresponding probe 40 of the probe assembly 38 (38a, 38b), the chuck top 28 is supported by the liquid crystal panel 12 on the chuck top. The probe assembly 38 (38a, 38b) supported by the member 36 is driven toward the support member 36 along the Z-axis from the lowered position shown in FIG.

  When the chuck top 28 moves to the contact position shown in FIG. 5C due to the movement of the liquid crystal panel 12 toward the probe assembly 38 (38a, 38b), each electrode 12a of the liquid crystal panel 12 is moved to the corresponding probe. Contact 40 needle tips. In this contact state, as is well known in the art, the tip of the probe is pressed against the corresponding electrode 12a with an appropriate pressing force by the elasticity of the suspension mechanism 44 or the elasticity of the probe 40 itself. In the contact state of the probe 40, the liquid crystal panel 12 receives, for example, an electrical signal or a drive signal for black display of the liquid crystal panel 12 from the tester body (not shown) necessary for inspection. And it supplies through each electrode 12a corresponding to this probe.

  When the inspection about the presence or absence of a defect (for example, a white defect) on the black display screen is completed, the chuck top 28 is driven in a direction away from the support member 36 along the Z axis toward a predetermined lowered position. The liquid crystal panel 12 that has been inspected is transferred to the set stage 16 as described above at a predetermined lowered position of the chuck top 28.

  The probe unit 34 according to the present invention relates to the relative movement of the probes 12 and 38 for contact between the probes 40 of the probe assembly 38 (38a and 38b) and the electrodes 12a of the liquid crystal panel 12. A cleaning means 46 for cleaning each electrode 12a is provided.

  In the example shown in FIG. 1, a first probe group including four probe assemblies 38 a provided on the long side portion 36 a of the support member 36 and three probe assemblies provided on the short side portion 36 b of the support member 36. A cleaning means 46 is provided for each second probe group consisting of 38b. Each cleaning means 46 is constituted by a cleaning bar made of a rod-like member extending in the arrangement direction of the probes 40 of the corresponding probe group. The rod-shaped member constituting the cleaning bar 46 can be formed by a roller member made of, for example, a synthetic resin material.

  In order to hold each cleaning bar 46, as shown in FIGS. 3 and 4, one end of a fixing arm 48 is fixed to the support member 36 on the outer side of each probe group. Each fixed arm 48 extends above and above the chuck top 28 in parallel with and spaced from the probe block 42 of each corresponding probe assembly 38. A pair of oscillating arms 52 are pivotally attached at one end thereof via a horizontal pivot shaft 50 in the vicinity of the distal end portion of the fixed arm 48 paired for each probe group.

  The cleaning bar 46 described above is disposed between a pair of swing arms 52 provided for each probe group. Each cleaning bar 46 is fixedly attached, for example, in the vicinity of the other end of each corresponding swing arm 52 at each end portion via a horizontal shaft 54 arranged in alignment with the central axis thereof.

  The other end, that is, the tip of each swing arm 52 to which the cleaning means 46 is attached is the contact position between the probe 40 and the electrode 12a shown in FIG. 5 (c) from the lowered position of the chuck top 28 shown in FIG. 5 (a). When the chuck top 28 moves toward, it contacts the edge of the liquid crystal panel 12 on the chuck top 28 in the process, as shown in FIG. When each swing arm 52 and the liquid crystal panel 12 come into contact with each other, the tip end portion of the swing arm 52 is pushed up through the liquid crystal panel 12 as the chuck top 28 continues to rise, so that the tip end portion is brought into contact with the liquid crystal panel 12. The swing arm 52 swings about the pivot 52 so as to slide on the top. At this time, as shown in an enlarged view in FIG. 4, the distal end portion of the swing arm 52 is supported by the fixed arm 48 so as to maintain a sufficient distance from the electrode 12 a row in the longitudinal direction of the cleaning means 46. Therefore, each swing arm 52 does not slide on each electrode 12a.

  In addition, since the edge portion of each tip of the swing arm 52 protrudes radially outward of the cleaning means beyond the cleaning means 46, the swing of the pair of swing arms 52 described above The cleaning means 46 between the swing arms does not contact the surface of the liquid crystal panel 12 and each electrode 12a on the surface.

  Therefore, when the pair of swing arms 52 swings around the pivot 50 from the lowered position in FIG. 5A to the contact position in FIG. 5C, the pair of swing arms 52 The cleaning means 46 supported between 52 moves close to each electrode 12a along an arcuate trajectory centered on the pivot 50 and having a radius between the pivot and the horizontal axis 54. FIG. As shown in FIG. 5, the cleaning means 46 does not slide on the electrodes by being spaced from the electrodes 12a.

  Further, as shown in FIG. 6 in an enlarged manner, the cleaning means 46 that moves on the electrodes in proximity to each electrode 12a as the swing arm 52 swings is shown in FIGS. In the cleaning step shown in FIG. 4, the electrode 12a passes across the row of electrodes 12a, so that it engages with the foreign matter 56 on the electrode 12a and sweeps out the foreign matter from the electrode 12a.

  Immediately after the cleaning step of sweeping out the foreign matter 56 from the electrode 12a, each probe 40 comes into contact with the corresponding electrode 12a at the contact position shown in FIG. Since the contact between the probe 40 and the electrode 12a is after the cleaning means 46 has passed across the electrode 12a row, the cleaning means 46 does not prevent the contact between the probe 40 and the electrode 12a. .

  In addition, as indicated by phantom lines in FIG. 6, the arm length of the swing arm 52, that is, the distance between the pivots (50, 54) is appropriately selected according to the radius of the cleaning means 46, thereby Along with the swinging of 52, the foreign matter 58 adhering to the probe tip of the probe 40 can also be removed by sweeping out the cleaning means 46.

  After the inspection, the chuck top 28 moves toward the lowered position shown in FIG. Along with this movement, the swing arm 52 swings downward while the tip of the swing arm 52 slides on the liquid crystal panel 12 due to its own weight. . The downward swing of the swing arm 52 can be regulated by a stopper pin 60 provided on the side wall portion 42a of the probe block 42 as shown in FIG. Due to the restricting action of the stopper pin 60, the tip end portion of the swing arm 52 does not protrude beyond the corresponding area of the liquid crystal panel 12 and swing.

  In the inspection apparatus 10 according to the present invention, each pair of swing arms 52 swings as the chuck top 28 holding the liquid crystal panel 12 moves up and down. The cleaning means 46 held by the swing arm 52 cleans the electrodes 12a and the probe tips of the probes 40 when the swing arm 52 swings toward the contact position in FIG. Therefore, each electrode 12a can be cleaned without using a dedicated drive source for the cleaning means 46. Moreover, since the probe tip of the probe 40 contacts the corresponding electrode 12a at the contact position shown in FIG. 5C immediately after cleaning, between the cleaning of each electrode 12a and the contact of the probe 40 with the electrode 12a. In addition, new foreign matter hardly adheres to each electrode 12a. Therefore, it is possible to reliably prevent contact failure due to adhesion of new foreign matters after cleaning as in the prior art.

  In order to reliably prevent damage to the electrodes due to the cleaning means 46 sliding on the electrodes 12a, if necessary, flocking is applied to the surface of a cleaning bar such as a roller member constituting each cleaning means 46. Can be applied. An elastic film such as rubber or a protective layer such as felt can be formed on the surface of the roller member. Further, by providing such protection means on the cleaning means 46, the cleaning means 46 can be replaced with the liquid crystal panel including each electrode 12a instead of sliding the tip of the swing arm 52 on the liquid crystal panel 12. 12 can be slid.

  Further, instead of providing the cleaning means 46 for each group of probe assemblies comprising a plurality of probe assemblies 38 (38a, 38b), as shown in FIG. 38b) can be provided with individual cleaning means 46.

  In the example shown in FIG. 7, the pivot shaft 50 of each pair of swing arms 52 is supported on the side wall portion 42a of the probe block 42 for each probe assembly 38 (38a, 38b). Further, as shown in FIG. 8, a spacer member 62 can be fixedly provided on the outer side of the distal end portion of each swing arm 52 that supports the cleaning means 46. Each spacer member 62 contacts the liquid crystal panel 12 and slides on the liquid crystal panel. Without using the spacer member 62, the edge portion of the tip of the swing arm 52 can be protruded radially outward of the cleaning means 46 as described above, but the cleaning means held between the swing arms 52. The spacer member 60 is advantageous in that the distance between the electrode 46 and each electrode 12a is maintained at a desired appropriate value.

Further, as shown in FIG. 9, the pivot 50 of the swing arm 52 can be supported on a support base 44a of a suspension mechanism 44 to which the probe block 42 is attached. Further, in the example shown in FIG. 9, a biasing means 64 made of an elastic member such as a coil spring that biases the swing arm 52 toward the stopper pin 60 is provided. One end of the biasing means 64 is locked to the swing arm 52, and the other end is locked to the support base 44a. The biasing means 64 applies an urging force toward the stopper pin 60 to the swing arm 52, thereby preventing the cleaning means 46 from being lifted unnecessarily from the respective electrodes 12a and enhancing the cleaning action by the cleaning means 46.
The

  The biasing means 64 as described above can also be provided on the swing arm 52 shown in FIGS. 1 to 6 or the swing arm 52 shown in FIG. In the example shown in FIGS. 1 to 6, the other end of the biasing means 64 can be locked to the fixed arm 48. In the example shown in FIG. 7, the other end of the biasing means 64 can be locked to the side wall portion 42 a of the probe block 42 or the support base 44 a of the suspension mechanism 44.

  As shown in FIGS. 10A and 10B, the support base 44a of the suspension mechanism 44 and the support are related to the support of the pair of swing arms 52 by the support base 44a of the suspension mechanism 44. The probe block 42 attached to the base can be removable.

  In this case, an attachment portion 42b is provided on the upper surface of the probe block 42, and a fitting portion 44b for receiving the attachment portion 42b is formed on the lower surface of the support base 44a, so that the support base 44a and the attachment portion 42b are connected to each other. Although not shown, a well-known clamping mechanism is provided between them. As described above, the swing arm 52 is swingably supported on the support base 44a, and the probe block 42 is removable from each suspension mechanism 44, so that a part of the probes 40 of the probe block 42 is deficient. In this case, the probe block 42 can be replaced without replacing the cleaning means 46 and the swing arm 52. Therefore, it is possible to prevent waste of resources and effectively use them.

  In the example shown in FIG. 11, a suction mechanism 66 is provided for sucking the foreign matter 56 or 58 that has been swept away from the needle tip of each electrode 12 a or the probe 40 by the cleaning means 46. The suction mechanism 66 includes a suction nozzle 68 having a suction port 68a that opens toward the lower front edge of the probe block 42 on which the probe 40 is provided. For example, a suction pressure from a negative pressure source (vacuum pump) of the chuck top 28 is introduced into the suction nozzle 68 via the hose 68b. With this suction pressure, the foreign matter 56 and 58 swept out of the probe 40 or each electrode 12a by the cleaning means 46 can be sucked from the suction port 68a and captured in a trap (not shown) provided in the hose 68b. it can.

  By providing such a suction mechanism 68, it is possible to reliably prevent the swept out foreign matter 56, 58 from reattaching to the electrode 12a or the probe 40. In addition, by appropriately adjusting the suction force, the foreign matters 56 and 58 left after being cleaned by the cleaning means 46 can be directly sucked from the probe 40 or the electrode 12a. In this case, the suction mechanism 66 functions as an auxiliary unit for the cleaning unit 46. Further, the suction mechanism 66 sucks and removes the foreign matter at the needle tip of the probe 40 of the probe assembly 38 (38a, 38b), thereby setting the period of the periodic maintenance and inspection work for the needle tip to be relatively long. And maintenance work becomes easy.

  As described above, the example in which the cleaning unit 46 is configured by a rod-shaped member such as a roller member is shown. Instead, as shown in FIGS. 12A to 12C, the cleaning means 46 can be constituted by a rotating brush 70.

  The bristles of the rotating brush 70 can be formed of, for example, a fibrous resin member having moderate elasticity. The rotating brush 70 is supported at both ends by a pair of swing arms 52 so that the ends of the swing brush 70 can be moved between the swing arms 52 from the ends of the swing arms. Projects greatly outward in the radial direction. In such a rotating brush 70, even if the hair tip contacts the electrode 12a or the needle tip of the probe 40, there is no risk of damaging them. Accordingly, in this case, the rotating brush 70 can be brought into contact with the liquid crystal panel 12 between the lowered position shown in FIG. 12A and the contact position shown in FIG. Can be prevented from touching. Further, by combining the rotary brush 70 with the suction mechanism 66, the foreign matter 58 attached to the needle tip of the probe 40 can be more reliably removed from the needle tip.

  The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit of the present invention. For example, instead of allowing the chuck top 28 supporting the liquid crystal panel 12 to move toward and away from the probe assembly 38 (38a, 38b), the chuck top 28 is fixedly held, and the probe assembly The support member 36 that supports 38 (38a, 38b) can be moved toward and away from the liquid crystal panel 12 on the chuck top 28.

It is a front view which shows the external appearance of the inspection apparatus which concerns on this invention. It is a right view of the inspection apparatus shown in FIG. It is a perspective view which shows the probe assembly arrange | positioned inside the test | inspection apparatus shown in FIG. FIG. 4 is a partial view of the probe assembly as viewed in the direction of arrow A shown in FIG. 3. FIG. 5 is an explanatory view showing the operation of the cleaning bar supported by the swing arm of the probe assembly according to the present invention. FIG. 5 (a) shows a state before the relative motion between the probe assembly and the object to be inspected is started. (B) shows the cleaning process during the relative motion, and 5 (c) shows the contact state between the probe of the probe assembly and the electrode of the device under test after the cleaning process by the relative motion. It is drawing similar to FIG.5 (b) which expands and shows the cleaning process of the electrode by a cleaning bar. It is a perspective view of the probe assembly which shows the other Example of this invention. It is a front view of the probe assembly which shows the further another Example of this invention. It is a side view of the probe assembly which shows the further another Example of this invention. FIG. 10A is a perspective view of a probe assembly including a probe block detachably coupled to a support mechanism, and FIG. 10B is a perspective view of the probe block from the support mechanism. It is a perspective view which shows the state from which was removed. FIG. 9 is a view similar to FIG. 7 showing still another embodiment of the present invention. 6 is a view similar to FIG. 5 showing still another embodiment of the present invention.

Explanation of symbols

10 Inspection device 12 Liquid crystal panel (inspected object)
34 Probe unit 36 Support member 38 (38a, 38b) Probe assembly 40 Probe 42 Probe block 46, 70 Cleaning means 52 Swing arm 56, 58 Foreign matter 62 Spacer member 64 Biasing means 66 Suction mechanism 68a Suction port

Claims (20)

A probe assembly is provided with a probe capable of contacting an electrode of an object to be inspected, and capable of relative movement at least in a direction approaching the object to be inspected for contact between the probe and the electrode corresponding to the probe. And
A cleaning means for the electrode; and a swinging arm for holding the cleaning means. When the object to be inspected and the probe assembly move so as to approach each other, the swinging motion is accompanied by the relative movement. Either the swing arm or the cleaning means can contact the object to be inspected so that the arm swings, and the cleaning means is supported by the swing arm as the swing arm swings. Sweeping over the electrode.   The probe assembly includes a probe block that supports a number of the probes, and a support mechanism that removably supports the probe blocks, and the probe is formed from a front edge of the probe block that is supported by the support mechanism. The probe tips of the probes are aligned and supported so as to protrude toward the object to be inspected, and the swinging arms are arranged on both sides of each probe block in a pair. 2. The probe assembly according to claim 1, wherein the means are supported by the respective swing arms corresponding to both ends between the swing arms.   The probe assembly according to claim 2, wherein the both swing arms are swingably supported by the support mechanism.   The probe assembly according to claim 2, wherein the both swing arms are swingably supported by the probe block.   3. The probe assembly according to claim 1, wherein the cleaning means is a rod-shaped cleaning bar whose central axis is supported by the swing arm between the pair of swing arms. 4.   3. The probe assembly according to claim 1, wherein the cleaning means is a cleaning brush whose central axis is supported by the swing arm between the pair of swing arms. 4.   3. The length of the swing arm is set to a length that allows the cleaning means to come into contact with the foreign matter attached to the electrode and the probe tip by removing the swing, thereby removing the foreign matter. The probe assembly according to any one of the above.   The cleaning means has a cylindrical shape as a whole, and the cleaning means has a central axis supported by the end of the swing arm, and an edge portion of the end extends beyond the cleaning means. 3. The probe assembly according to claim 1, wherein the probe assembly projects outward in a radial direction, and the swing arm is capable of contacting the object to be inspected at the edge portion.   The spacer member which protrudes from the said edge part so that it can contact | abut to the to-be-inspected object is being fixed to the edge part which supports the said cleaning means of the said rocking | swiveling arm. The probe assembly as described.   At least one of the swinging arms receives a force for biasing the cleaning unit toward the electrode by a biasing unit provided between the swinging arm and the support mechanism or the probe block. The probe assembly according to claim 9.   The probe assembly according to claim 1, wherein the probe assembly is provided with a suction mechanism having a suction port for sucking foreign matter on the probe tip or the electrode. Solid.   The plurality of probe assemblies according to claim 1 and an inspection table that holds the object to be inspected up and down, the probe of the probe assembly can contact the corresponding electrode of the object to be inspected. And a support member for holding the probe assembly. A plurality of probe assemblies disposed above an inspection table for holding an object to be inspected provided with electrodes so as to be movable up and down, and a plurality of probe assemblies provided with probes corresponding to the electrodes; A probe unit comprising: a support member that aligns and holds the probe assembly so that each of the three-dimensional probes can come into contact with the corresponding electrode;
Further, cleaning means for the electrodes corresponding to the probes of the plurality of aligned probe assemblies, and both sides of a probe assembly group consisting of the plurality of aligned probe assemblies for holding the cleaning means And a pair of swing arms supported by the support member so as to be swingable. When the inspection table moves toward the support member, the inspection object moves on the inspection table. The swing arm or the cleaning means can contact the object to be inspected so that the swing arm swings, and the cleaning means sweeps the electrode by swinging the swing arm. Probe unit.   14. The probe unit according to claim 13, wherein the cleaning means is a rod-shaped cleaning bar whose central axis is supported by the swing arm between the pair of swing arms.   The probe unit according to claim 13, wherein the cleaning means is a cleaning brush whose central axis is supported by the swing arm between the pair of swing arms.   14. The pair of swing arms is set to a length that allows the cleaning means to contact the foreign matter attached to the electrode and the needle tip of the probe by swinging the pair of swing arms and to remove the foreign matter. The probe unit described in 1.   The cleaning means has a cylindrical shape as a whole, and the cleaning means has a central axis supported by the end of the swing arm, and an edge portion of the end extends beyond the cleaning means. The probe assembly according to claim 13, wherein the probe assembly protrudes radially outward, and the swing arm is capable of contacting the object to be inspected at the edge portion.   At least one of the swinging arms receives a force for biasing the cleaning unit toward the electrode by a biasing unit provided between the swinging arm and the support mechanism or the probe block. The probe assembly according to claim 17.   The probe unit according to claim 13, wherein each probe assembly is provided with a suction mechanism having a suction port for sucking foreign matter on the probe tip or the electrode.   An inspection apparatus comprising: an inspection table for holding an object to be inspected provided with electrodes so as to be movable up and down; and the probe unit according to claim 13 provided above the inspection table.

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