JPH07275805A - Surface-cleaning device for sheet-shaped body - Google Patents

Abstract

PURPOSE:To adhesively remove foreign matter on the surface securely by applying a sufficient pressing force without fear of damaging a fragile sheet such as a glass substrate. CONSTITUTION:This device comprises a support table 1 for suction retaining a sheet-shaped body W, a cleaning rotating body 2 with an adhesive surface being brought into contact with the surface of the sheet-shaped body W retained on the table 1, and a driving mechanism for moving relatively the support table 1 and the cleaning rotating body 2 in the direction along a table surface.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a device for cleaning and removing fine dust, dust and the like adhering to the surface of a thin plate member such as a glass substrate used for a liquid crystal display.

[0002]

2. Description of the Related Art Conventionally, as means for cleaning the surface of a thin plate, a means for manually pressing and rolling an adhesive roll on the surface of the thin plate placed on a work table, or for transporting the thin plate by a belt. A device for passing between adhesive rolls is known.

[0003]

In the surface cleaning means by manual work, it is difficult to uniformly apply the pressure-sensitive adhesive roll to the entire surface of the thin plate-like member, and uneven cleaning easily occurs, and the work efficiency is low. Is. Further, the cleaning device that passes between the adhesive rolls can be processed with high efficiency and is easy to develop into automation, but when passing between the adhesive rolls, the biased load locally acts on the thin plate-shaped body. By the way, in the case of an extremely fragile thin plate-like body such as a glass substrate, breakage is likely to occur.

The present invention has been made paying attention to such a point, and even a fragile thin plate-like member can be reliably adhered and removed by applying sufficient pressing force without fear of damage. The purpose is to do so.

[0005]

In order to achieve the above object, the present invention has the following constitution. That is, the surface cleaning device for a thin plate according to the present invention has a support table that sucks and holds the thin plate in a fixed posture, and an adhesive surface that is pressed against the surface of the thin plate held on the table. The cleaning rotary body is provided with a driving means for relatively moving the support table and the cleaning rotary body in a direction along the table surface.

[0006]

According to the above structure, the cleaning rotary member is pressed against the surface of the thin plate member with a predetermined pressure in a state where the thin plate member is adsorbed and held on the support table in a fixed posture. By moving the support table in the direction along the table surface, the cleaning rotator rolls while being pressed against the surface of the thin plate member, and the foreign matter on the surface of the thin plate member is adhesively removed. At this time, since the thin plate member is stably adsorbed and held on the support table, the thin plate member is less likely to be locally deformed and deformed by the local load applied by the cleaning rotary member, which is necessary for adhering foreign matter. There is no risk of damage even if sufficient pressing force is applied.

[0007]

EXAMPLES Some examples of the present invention will be described below.

[Embodiment 1] FIG. 1 shows a side surface of a basic configuration of the apparatus of this embodiment, and FIG. 2 shows a front surface thereof. This cleaning device includes a support table 1 fixed horizontally, a cleaning rotator 2 formed by rolling an adhesive tape with its adhesive surface facing outward, and a drive for moving this cleaning rotator 2. It is composed of the mechanism 3 and is incorporated in the device case 5 having the openable / closable cover 4. A blower static eliminator (not shown) is provided on the inner surface of the carver 4 to remove static electricity from the thin plate member W on the support table 1 and prevent dust from adhering thereto.

As shown in FIG. 5, the support table 1
Is provided with a mounting surface having an area larger than that of a thin plate W such as a thin glass plate to be mounted, and a large number of suction holes 6 formed in the thin plate mounting region are connected to a suction means (not shown) by a pipe. It is connected to the connected suction chamber 7. Further, a center table 8 is provided in the center of the support table 1 so as to be able to move up and down, and is raised when loading and unloading the thin plate member W, and is lowered during cleaning processing so as to be flush with the table upper surface. There is. It is also possible to incorporate a suction holding mechanism in the center table 8.

As shown in FIGS. 3 and 4, the cleaning rotary member 2
Is rotatably supported by a pair of left and right support frames 10 erected from the movable base 9 via bearing brackets 11 so as to be rotatable about a horizontal axis and vertically movable. More specifically, a guide groove 12 that is open upward is formed in the support frame 10, and a bearing bracket 11 is fitted into the guide groove 12 so that it can move up and down.
The coil spring 13 is wound around and constantly urged downward. Further, a support arm 15 vertically driven by an air cylinder 14 provided in the support frame 10 supports each bearing bracket 11 from below, and when the air cylinder 14 is driven and extended, the bearing bracket 11 causes the coil spring 13 to extend as illustrated. When the air cylinder 14 is shortened by a lifting operation against the biasing force of the bearing bracket 11, the bearing bracket 11 is lowered by the biasing force of the coil spring 13.

The coil spring 13 has one end 13a fixed to the support frame 10 and the other end 13b fixed to the support frame 1.
It is connected to one end of a swing arm 17 which is attached to 0 so that the balance can swing about a fulcrum 16. The swing arm 17 itself is biased by a spring 18 stronger than the coil spring 13 in the counterclockwise direction in FIG. 3 with a large force, and the swing of the swing arm 17 causes the coil spring 1 to move.
The other end 13b of No. 3 is urged to pull down, and a downward force of the bearing bracket 11 is generated.

At the other end of the swing arm 17, there is provided a follow-up roller 19 which comes into pressure contact with the outer peripheral surface of the cleaning rotary member 2, and the follower roller contacts the outer peripheral surface of the cleaning rotary member 2. By doing so, the posture of the swing arm 17 is restricted,
The position of the other end 13b of the coil spring 13 is determined, and the descending force of the bearing bracket 11 is determined.

As shown in FIGS. 1 and 2, the movable base 9 is supported by a pair of guide shafts 20 so as to be horizontally movable back and forth in parallel with the surface of the support table 1, and is wound around the lower part thereof. The drive mechanism 3 is connected to the belt 21 and is configured to move the movable base 9 forward and backward horizontally by a predetermined stroke by driving the belt 21 to rotate forward and backward.

The surface cleaning apparatus of this embodiment is constructed as described above, and its operation will be described below.

When the thin plate W is carried in above the support table 1 by a robot hand or the like, the center table 8 which has been standing by ascent receives it and descends, so that the thin plate W is held on the support table 1 in a fixed posture. Hold by adsorption.

The movable table 9 moves to the front end of the support table 1 with the cleaning rotary body 2 being lifted and supported.

When the air cylinder 14 is shortened and the bearing bracket 11 is urged and lowered, the cleaning rotary body 2 is pressed onto the front end of the support table 1.

As the movable table 9 moves forward, the cleaning rotator 2 rolls on the surface of the thin plate W on the support table 1, and the foreign matter on the surface of the thin plate lands on the surface of the cleaning rotator 2. Adhered and removed.

When the movable base 9 returns to the original standby position, the air cylinder 14 extends and the bearing bracket 11 returns to the original raised position.

The adsorption of the support table 1 is released, the center table 8 is raised, the processed thin plate W is lifted, and is carried out by a robot hand or the like. With the above, one cleaning process is completed, and thereafter, this process is repeated.

At this time, after a predetermined number of cleaning processes have passed or every cleaning process, the adhesive tape of the cleaning rotary member 2 is cut and removed by one turn to expose a new adhesive surface. Then, by turning over and removing the adhesive tape of the cleaning rotator 2 with the progress of the cleaning process, the diameter of the cleaning rotator 2 gradually becomes smaller, and the cleaning rotator 2 becomes smaller. The height of the cleaning rotary member 2 when pressed against the surface of the thin plate member W on the support table 1 becomes low. As a result, the pressing force of the coil spring 13 is reduced,
Although the pressing force of the cleaning rotary body 2 against the surface of the thin plate-like body W is reduced, the swing arm 17 is strong due to the follow-up displacement of the follow-up roller 19 accompanying the decrease in the diameter of the cleaning rotary body 2. The spring 18 pulls down the other end 13b of the coil spring 13, which compensates for the decrease in the tension of the coil spring 13, and thus the pressing force of the cleaning rotary body 2 against the surface of the thin plate member W is stably maintained.

[Embodiment 2] FIG. 6 shows a second embodiment of the present invention. In the case of this example, the support table 1 is horizontally mounted so as to be capable of reciprocating back and forth, and the adhesive tape 32 fed from the original roll 31 is attached to the idle roller 33.
Also, the cleaning rotary body 2 configured by being wound around the guide roller 34 is supported by the movable frame 35 that is moved up and down, and the cleaning rotary body 2 is pressed against the surface of the thin plate W on the support table 1 by a predetermined amount. By moving the support table 1 in a state of being brought into contact with the pressure, the cleaning rotator 2 rolls along the surface of the thin plate member W, and foreign matter on the surface is attached to and removed from the adhesive tape 32. At this time, the original adhesive roll 31 and the take-up roll 36 are driven to rotate synchronously so that a new adhesive surface always acts on the thin plate W.

[Third Embodiment] FIG. 7 shows a third embodiment of the present invention. In the case of this example, the support table 1 is fixedly arranged, and a cleaning rotary body 2 composed of an adhesive rubber roller is mounted on a movable frame that is vertically moved and horizontally driven back and forth, and contacts the cleaning rotary body 2. The strong adhesion roller 41 is mounted on the movable frame 42, and the foreign matter on the surface is adhered to the cleaning rotary body 2 by the rolling of the cleaning rotary body 2 along the surface of the thin plate W, and the foreign matter is strongly adhered. By transferring to the roller 41, it is possible to always apply a clean adhesive surface to the thin plate W.

[Fourth Embodiment] FIG. 8 shows a fourth embodiment of the present invention. In the case of this example, the support table 1 is fixedly arranged, and the cleaning rotator 2 composed of an adhesive rubber roller is vertically moved and horizontally movable back and forth.
Is mounted on the movable frame 51, and a strong adhesive tape roll 52 that is in contact with the cleaning rotary body 2 is mounted on the movable frame 51. Can be adhered to the cleaning rotator 2 and the foreign matter can be transferred to the strong adhesive tape roll 52 so that a clean adhesive surface can always act on the thin plate W. In this case, the strong pressure-sensitive adhesive tape roll 52 is timely removed by turning one turn around.

[Other Embodiments] As the drive mechanism 3 for relatively moving the support table 1 and the cleaning rotary body 2, a screw feed mechanism or other linear drive means may be arbitrarily selected.

In each of the above-described embodiments, the movement relationship between the support table 1 and the cleaning rotary member 2 may be reversed.

In the third embodiment, the strong adhesive roller 41 may be omitted. in this case,
It is advisable to arrange the plurality of adhesive rubber rollers in the front and rear to configure the cleaning rotary body 2.

As shown in FIG. 9, the suction surface of the support table 1 may be configured by forming a thin groove 6 a communicating with the suction hole 6.

As shown in FIG. 10, the support table 1
A suction hole 6 that acts only on the peripheral portion of the thin plate-like body W is formed on the upper surface of the plate, and a space 60 that supplies a positive pressure is formed on the upper surface of the support table 1. It is also possible to carry out a mode in which the thin plate-like body W is pushed up and supported by the air pressure of the space 60 in a state of adsorbing and holding, and the deformation of the thin plate-like body W due to the pressing of the cleaning rotary body 2 not shown is prevented. .

[0030]

As is apparent from the above description, according to the thin plate surface cleaning apparatus of the present invention, the posture of the thin plate is stabilized by the support table with high accuracy, so that the cleaning rotary member and the table are rotated. By relative movement in the direction along the surface, the cleaning rotor can be made to act uniformly along the surface of the thin plate member with sufficient pressing force, while avoiding local deformation of the thin plate member. As a result, the surface of a fragile thin plate-like body such as a glass substrate can be reliably cleaned.

[Brief description of drawings]

FIG. 1 is a schematic side view of a first embodiment.

FIG. 2 is a schematic front view of the first embodiment.

FIG. 3 is a side view of a main part of the first embodiment.

FIG. 4 is a plan view of a main part of the first embodiment.

FIG. 5 is a vertical sectional side view of a support table.

FIG. 6 is a schematic side view of a second embodiment.

FIG. 7 is a schematic side view of a third embodiment.

FIG. 8 is a schematic side view of the fourth embodiment.

FIG. 9 is a partial perspective view showing another embodiment of the support table.

FIG. 10 is a vertical sectional side view showing still another embodiment of the support table.

[Explanation of symbols]

 1 Support table 2 Rotating body for cleaning W Thin plate

Claims (1)

[Claims] 1. A support table for adsorbing and holding a thin plate member, a cleaning rotary member having an adhesive surface pressed against the surface of the thin plate member held on the table, the support table and the cleaning member. A surface cleaning device for a thin plate-shaped body, comprising: a driving unit that relatively moves a rotating body in a direction along a table surface.