JPH06255063A - Method and apparatus for closely bonding basal plate and film - Google Patents

Abstract

PURPOSE:To closely bond a film to a basal plate while the tension of the film is kept constant and to prevent the generation of static electricity. CONSTITUTION:One end of the self-adhesive surface of an optical film 14 is closely bonded to a liquid crystal cell 12 by a pressure roller 13 and the other end of the optical film 14 is held by a suction pad 15. A cell stage 11 is moved in an X-2 direction and, when the close bonding area of the optical film 14 and the liquid crystal cell 12 is widened, the height position of the suction pad 15 is controlled to always make the open angle theta of the liquid crystal cell 12 and the optical film 14 almost constant. The position of the cell stage 11 is controlled to always keep the tension T of the optical film 14 almost constant. By this method, no unreasonable tension acts on the optical film 14 closely bonded to the liquid crystal cell 12 and the optical film 14 is not wrinkled. No static electricity is generated in the optical film.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION The present invention requires gradually adhering a film such as a polarizing plate or other optical film (including a soft sheet having a certain thickness) to a substrate such as a liquid crystal cell. According to the present invention, the present invention relates to a contact method and a contact device between a substrate and a film for bonding the both.

[0002]

2. Description of the Related Art FIG. 5 shows an example of a conventional method and apparatus for bringing a substrate and a film into close contact with each other, in which an optical film 4 such as a polarizing plate is brought into close contact with and adhered to a liquid crystal cell 2. In FIG. 5, reference numeral 1 is a cell stage, and the liquid crystal cell 2 is fixed on the cell stage 1.
The optical film 4 has an adhesive layer (adhesive layer) formed on its surface and a release sheet 4A attached to its surface.

The suction table 5 is rotatable about a shaft 6 as a fulcrum from a position (a) indicated by a chain line to a position (b) indicated by a solid line, and a plurality of suction holes 5A are formed on one surface thereof. There is. A negative pressure supply unit (not shown) is connected to the suction hole 5A, and the optical film 4 is suction-held on the suction table 5. A pressing roller 3 is provided above the cell stage 1 and moves rightward in the drawing along the cell stage 1. In the adhesion method using the above device, first, the suction holes 5
The optical film 4 is suction-held on the suction table 5 by the suction force of A. When the suction table 5 is in the state shown in (a), the release sheet 4A is removed from the surface of the optical film 4 by a release mechanism (not shown).

Next, the suction table 5 is rotated counterclockwise around the shaft 6 as a fulcrum to take the posture shown by (B). The end portion (a) of the optical film 4 is made to protrude from the suction table 5 in advance, so that when the suction table 5 is rotated to the posture shown in (b), the end portion (a) is moved to the cell stage. It is installed at one end of the liquid crystal cell 2 on 1 via an adhesive layer, and this end (a) serves as a starting point of adhesion (adhesion). At this time, the pressing roller 3 is moved to the end portion (a), and the end portion (a) of the optical film 4 is pressed against the end portion of the liquid crystal cell 2 with a predetermined pressure P. After that, the shaft 6 is moved in the horizontal direction (X direction), and along with this, the pressing roller 3 is rolled to the right in the drawing. At this time, the pressing position of the liquid crystal cell 2 and the optical film 4 is moved rightward in the drawing by the movement of the pressing roller 3, and the contact area is increased. The optical film 4 held on the suction table 5 is gradually sandwiched between the pressure roller 3 and the liquid crystal cell 2 while sliding on the suction table 5.

[0005]

The above-described method and apparatus for adhering a substrate and a film have the following problems. (1) Since the optical film 4 slides away from the suction table 5, a large amount of static electricity is generated on the optical film 4, and dust or the like is adsorbed to the adhesive layer after the release sheet 4A is removed. . If this dust is present on the contact surface between the liquid crystal cell 2 and the optical film 4, the optical function will deteriorate at the boundary surface between the liquid crystal cell 2 and the optical film 4.

(2) The suction table 5 moves in the X direction together with the shaft 6, but the optical film 4 must be peeled off from the suction table 5 in opposition thereto, so
When an optical film of 0 mm square is used, the pressing roller 3 must press the optical film 4 and the liquid crystal cell 2 with a strong force P of about 10 kg. Therefore, when the pressing roller 3 is separated from the optical film 4 and the force P is released,
Static electricity is generated on the surface of the optical film 4, and dust or the like is easily attached to the surface of the optical film 4.

(3) As the axis 6 moves in the X direction and the contact area increases, the pulling force applied to the optical film 4 by the suction table 5 changes, and the liquid crystal is contracted when the pulling force is released. The optical film 4 adhered to the cell 2 is wrinkled, and due to this wrinkle, the liquid crystal cell 2
Bubbles may be present between the optical film 4 and the optical film 4.

(4) Since the axis 6 advances in the X direction and the adsorption area of the optical film 4 by the adsorption table 5 becomes small, the adsorption table 5
The optical film 4 is peeled off and easily falls. The optical film 4 in the separated portion is adhered to the liquid crystal cell 2 in a wrinkled or bent state.

The present invention is to solve the above-mentioned conventional problems, and it is possible to bring the film into close contact with the substrate while always providing a stable tension, and the film does not have a problem such as wrinkles. It is an object of the present invention to provide a contact method and a contact device for a substrate and a film in which static electricity is hardly generated.

[0010]

According to the method for adhering a substrate and a film according to the present invention, when the substrate and the film are aligned at the starting point of the adhesion and the pressing position between the substrate and the film is moved to expand the adhesion area. , Hold the film so that the tension applied to the film in the non-adhesive part is almost constant, and the substrate and the film in such a way that the opening angle of the opposing surface of the substrate and the film in the non-adhesive part is almost constant. It is characterized by changing the relative position of.

Alternatively, by holding the film on the peripheral surface having a predetermined curvature, aligning the surface of the film with the substrate at the starting point of contact, and moving the contact position between the peripheral surface and the substrate, the substrate and the film are moved. It is characterized by expanding the contact area with.

In the above, when the adhesive layer and the release sheet covering the adhesive layer are laminated on the surface of the substrate or the film, the adhesion between the substrate and the film is started from the start of the release of the release sheet. It is preferable to add a step of removing static electricity generated on the substrate or the film at any time up to.

Further, the close contact operation between the substrate and the film,
It is preferable to carry out in a reduced pressure atmosphere.

A substrate / film contact device according to the present invention is a film holding device for holding the edges of the film so that the tension applied to the stage on which the substrate is placed and the film in the part not in contact is substantially constant during the contact process. A holding member and a pressing member that widens the contact area between the substrate and the film from the starting point of contact are provided, and the stage is configured such that the opening angle of the facing surface of the substrate and the film in the non-contact portion is substantially constant. Characterized in that the relative position between the film holding member and

Alternatively, a film holding base for holding the film on the peripheral surface having a predetermined curvature, and the substrate is pressed against the film on the film holding base at the starting point of contact, and the pressing position between the substrate and the film is set on the film holding base of the film holding base. A pressing member that moves along the peripheral surface, and

Alternatively, at least one of the peripheral surfaces is provided with a pair of rollers for holding the film, and a driving means for rotationally driving the pair of rollers, the surface of the substrate being sent out by being sandwiched between the rollers. It is characterized in that the film is closely adhered to the.

[0017]

According to the above means, the substrate and the film are brought into close contact with each other while changing the relative positions of the substrate and the film so that the opening angle of the facing surface of the substrate and the film at the non-closed portion becomes substantially constant. The tension applied to the film is always constant while the contact area between the substrate and the film is increased by moving the contact position between the substrate and the peripheral surface holding the film. ,
Wrinkles are not formed on the film, and air bubbles are not present between the substrate and the film. In addition, since the sliding force does not act on the film, it is possible to suppress the generation of static electricity.

Further, by providing a step of removing the static electricity generated on the substrate or the film after the peeling sheet is peeled off, the generation of static electricity on the film can be prevented in all the steps of the adhesion work.

Further, by performing the close contact operation between the substrate and the film in a reduced pressure atmosphere, it is possible to completely prevent air bubbles from intervening between the substrate and the film, and also to prevent dust adsorption.

An apparatus for achieving the above method can be constructed by providing a stage on which a substrate is placed, a film holding member, and a pressing member, and controlling the relative position of the stage and the film holding member. . Or
It can be constituted by a film holding base for holding the film on the peripheral surface having a predetermined curvature and a pressing member, or by rotating a pair of rollers holding the film.

[0021]

EXAMPLES Examples of the present invention will be described below. FIG. 1 illustrates a method (adhesion) of a liquid crystal cell and an optical film as a first embodiment of the present invention and a contact device.
(A) is a device side view showing a state in which a contact start end of an optical film is brought into close contact with a liquid crystal cell, and (B) is a device side view showing a process of increasing a contact area. FIG. 2 is an enlarged sectional view showing the structure of the optical film.

In FIG. 1, reference numeral 11 is a cell stage in which a liquid crystal cell 12 as a substrate is fixed by means such as suction. This cell stage 11 includes X1 and X2.
Driven in the direction of. As an example of a mechanism for this movement, for example, the cell stage 11 is X1-X2 on the mount.
A feed screw 18 is provided that is movably supported in the direction, and the lower portion of the cell stage 11 is screwed. The feed screw 18 is configured to be driven by a motor Ma such as a servo motor or a stepping motor. . The optical film 14 that is in close contact with and adheres to the liquid crystal cell 12 is, for example, a film-shaped polarizing plate. As shown in an enlarged scale in FIG. 2, a protective sheet 14A is installed on the surface of the optical film 14, and an adhesive layer (adhesive layer) 14B such as a vinyl chloride system is laminated on the surface closely attached to the liquid crystal cell 12, Further, a release sheet 14C is attached to the surface thereof.

Reference numeral 15 is a suction pad for sucking the right end of the optical film 14 in the drawing from above. This suction pad 1
A suction hole is formed in 5, and the end portion of the optical film 14 is sucked by negative suction pressure from the suction hole. The suction pad 15 is supported by the lift table 17 by a shaft 15a, and a rotatable state and a fixed state can be selected as needed. If the suction pad 15 becomes too heavy, the shaft 15a
A weight member 1 that serves as a counterweight on the opposite side to
5b may be attached. This lift 17 is in the vertical direction (Y
It is designed to be driven up and down in the 1-Y2 direction). As an example of the mechanism for raising and lowering, for example, a raising and lowering stand 17
Is supported by a support member (not shown) so as to be able to move up and down in the Y1-Y2 direction, and a feed screw 19 on which the lift 17 is screwed is provided. This feed screw 19
Is a motor Mb such as a servo motor or a stepping motor
Driven by. And the two motors Ma and Mb
Is controlled by the controller 20.

Reference numeral 16 is a suction pad for transportation. The optical film 14 is adsorbed and held by the adsorption pad 16 at a plurality of places and is conveyed onto the cell stage 11. The optical film 14 is adsorbed by the suction pad 16 from the surface provided with the protective sheet 14A and conveyed. A mechanism for peeling the release sheet 14C from the optical film 14 is provided in the transportation path to the cell stage 11. Further, the optical film 1 is moved to a position above the cell stage 11 from the time when the release sheet 14C is released.
A process of removing static electricity is added to the route through which the 4 is conveyed. In the step of removing the static electricity, for example, antistatic chemicals are sprayed on the optical film 14, or a metal brush or the like having good electric conductivity wipes the surface of the protective sheet 14A of the optical film 14, or an antistatic blower or ion The charge of the optical film 14 is removed by using a bar or the like.

Reference numeral 13 is a pressing roller. The surface of the pressing roller 13 is formed of a material having a little elasticity such as rubber or plastic. The pressing roller 13 is
In the carrying-in process of the optical film 14, the optical film 14 is separated from above the cell stage 11, and when one end (a) of the optical film 14 is installed at one end of the liquid crystal cell 12, the optical film 13 is pressed with a predetermined pressure Pa. To be done. After that, the cell stage 11 is driven in the X2 direction while maintaining the pressure Pa, and the pressing roller 13 rolls along the surface of the optical film 14 that comes into close contact with the liquid crystal cell 12 while freely rotating about the shaft 13a. Since the pressure Pa is small and the film tension is almost constant, when a 150 mm square optical film is used,
It can be freely set from 5 kg to 100 g. It is preferable that the entire apparatus shown in FIG. 1A is installed in a decompression chamber and the contact work is performed in a decompression atmosphere.

Next, a method for adhering the liquid crystal cell 12 and the optical film 14 using the adhering device shown in FIG. 1 will be described. A plurality of locations of the optical film 14 are adsorbed by the adsorption pads 16 for transportation and are carried in above the cell stage 11. During this process, the release sheet 14C is released from the optical film 14 and the adhesive layer 14B is exposed on the lower surface side. In the static electricity removing process described above, the optical film 14
Is removed. The optical film 14 is the suction pad 1
6 is fed to the liquid crystal cell 12 in a tilted state, and the end portion on the left side in the drawing, which is the starting point of adhesion, is the adhesive layer 14B.
Thus, the liquid crystal cell 12 is adhered to the upper surface at the left end in the drawing. Further, the right end (b) of the optical film 14 in the drawing is
The suction pad 1 from the side where the protective sheet 14A is provided
Adsorbed by 5.

Next, the pressing roller 13 descends so that one end (a) of the optical film 14 is pressed against the end of the liquid crystal cell 12 by pressure Pa.
Is pressurized at. When an optical film of 150 mm square is used, the pressure Pa is preferably set in the range of 3 kg to 300 g, but as described above, 5 kg to 1
More preferably, it is set to about 00 g. In addition,
If this pressure Pa is too large, the generation of static electricity increases,
If it is too small, air bubbles will increase. At this time, the motors Ma and Mb are controlled by a command from the control unit 20, the vertical position of the suction pad 15 in the Y1-Y2 direction is determined, and the angle θ of the facing surface between the liquid crystal cell 12 and the optical film 14 is determined. It is determined to be a predetermined value. Further, a light driving force in the X2 direction is applied to the cell stage 11, and an appropriate tension T is applied to the optical film 14. Above angle θ
And the tension T are empirically determined according to the material of the optical film 14 used, the contact area between the optical film 14 and the liquid crystal cell 12, and the like. Then, the suction pad 16 for transportation
Releases the optical film 14 and retracts from above the cell stage 11.

Next, the cell stage 11 is driven in the X2 direction, and the pressure point between the optical film 14 and the liquid crystal cell 12 by the pressure Pa gradually moves in the X1 direction from the contact start point (a). At this time, the elevating table 17 is gradually lowered in the Y2 direction by the control of the motor Mb from the control unit 20, and the opposing surface of the optical film 14 held by the suction pad 15 and the liquid crystal cell 12 which are not yet in close contact with each other. The opening angle is controlled so that it is always maintained at the same value θ. Further, along with this, the drive of the motor Ma is controlled, and the cell stage 11 receives X-rays.
A light driving force is applied in one direction or the X2 direction, and the tension T of the optical film 14 is controlled to be always constant.

The descending speed of the elevating table 17 in the Y2 direction is geometrically calculated by the control unit 20 according to the moving speed of the cell stage 11 in the X2 direction. Further, the driving force of the cell stage 11 in the X1 direction or the X2 direction is controlled by detecting the tension T by detecting, for example, an upward lifting force acting on the pressing roller 13.
The end (b) of the optical film 14 is the liquid crystal cell 12
When it comes into close contact with the upper surface of the suction pad 15, the suction force of the suction pad 15 is removed, the suction pad 15 is raised by the motor Mb, and then the end portion (b) of the optical film 14 and the liquid crystal cell 12 are applied by the pressing roller 13. Press to complete the adhesion work.

In the above-described embodiment, the same tension T acts on the optical film 14 from beginning to end until the contact between the optical film 14 and the liquid crystal cell 12 is completed, and the opening angle θ with the liquid crystal cell 12 is constant. The liquid crystal cell 12 and the optical film 14 are pressed by the pressing roller 13 so that the contact area between the liquid crystal cell 12 and the optical film 14 gradually increases. Therefore, the liquid crystal cell 12
In the state in which the optical film 14 is in close contact with the optical film 14, undue tension does not act on the optical film 14 from beginning to end, and thus wrinkles do not occur. In addition, air bubbles do not intervene on the contact surface between the liquid crystal cell 12 and the optical film 14. Especially, if the above-mentioned adhesion work is performed in a reduced pressure atmosphere, the presence of the above-mentioned bubbles is completely eliminated, and the work can be performed in a dust-free atmosphere. Further, static electricity is removed from the optical film 14 in a state of being carried onto the cell stage 11, and since the sliding force does not act on the optical film 14 during the contacting work, the optical film 14 is not charged.

Although the mechanism in which the cell stage 11 moves is used in this embodiment, the shaft 13a of the pressing roller 13 may move so as to increase the contact area between the optical film 14 and the liquid crystal cell 12. Also in this case, the height position of the lift 17 is controlled so that the opening angle θ is always constant.
Further, the end portion (a) on the left side of the optical film 14 in the drawing is pressed by the pressing roller 13 onto the upper surface of the left end of the liquid crystal cell 12 in the drawing.
You may press and stick.

Next, FIG. 3 shows a second embodiment of the present invention. In this embodiment, as shown in FIG. 3A, the film holding table 21 having a peripheral surface 21B having a predetermined radius of curvature R is formed.
Is provided. The peripheral surface 2 of this film holding table 21
1B is provided with a plurality of suction holes 21A arranged side by side in the circumferential direction. The suction hole 21A is connected to an air negative pressure supply pipe (not shown), and the optical film 14 is suction-held on the peripheral surface 21B of the film holding table 21 by the suction force of the suction hole 21A. In the optical film 14, the protective sheet 14A is in close contact with the peripheral surface 21B, and the release sheet 14
It is adsorbed and held with C directed to the surface.

As shown in FIGS. 3B and 3C, the peripheral surface 21B of the film holder 21 is pressed against the liquid crystal cell 12 installed on the peripheral surface 21B by a predetermined pressure Pa. A pressure roller 13 is provided. The surface of the pressing roller 13 is also made of an elastic material, and is rotatably attached to the shaft 13a. The shaft 13a is mounted on the peripheral surface 2 while maintaining the pressure Pa by a drive mechanism (not shown).
It is driven so as to move along 1B, and accordingly, the pressing roller 13 can roll along the peripheral surface 21B. Reference numeral 22 is a suction pad for loading the liquid crystal cell 12. This device is also preferably operated in the decompression chamber.

Next, a liquid crystal cell 1 using the device shown in FIG.
The operation of adhering (adhesion) 2 and the optical film 14 will be described. The optical film 14 is installed on the peripheral surface 21B of the film holding table 21 and is held by the suction force from the suction holes 21A. The protective sheet 14A of the optical film 14 faces the peripheral surface 21B and is adsorbed and held along the peripheral surface 21B. A release sheet 14C is provided on the surface of the optical film 14.
Therefore, the release sheet 14C is first removed to expose the adhesive (adhesion) layer 14B. At this time,
Static electricity is removed by spraying antistatic chemicals.

Next, the pressing roller 13 is separated from the peripheral surface 21B, and the liquid crystal cell 1 is moved by the suction pad 22 for transportation.
2 is adsorbed, and the liquid crystal cell 12 is carried in at an angle shown in FIG. 3B, and the lower end of the liquid crystal cell 12 on the inclined side is brought into close contact with one end (a) of the optical film 14. At this time, the pressing roller 1
3 is applied to the surface of the liquid crystal cell 12, and pressure Pa is applied. Then, the shaft 13a is moved along the peripheral surface 21B while maintaining the pressure Pa, and the pressing roller 13 is moved while rolling on the surface of the liquid crystal cell 12. As a result, as shown in FIG. 3C, the contact area between the liquid crystal cell 12 and the optical film 14 expands from the contact start point shown in (a) above. At this time, when the suction of the suction holes 21A is stopped in order at the position where the close contact with the liquid crystal cell 12 is completed,
The optical film 14 adhered to the liquid crystal cell 12 has a peripheral surface 21.
Be sure to leave B.

The tilt angle of the liquid crystal cell 12 changes as the pressing roller 13 moves, that is, the liquid crystal cell 12 gradually rotates counterclockwise in the drawing. Moreover, since the liquid crystal cell 12 is unstable because it is supported only by the pressing roller 13, the liquid crystal cell 12 is sucked in accordance with the change in the inclination of the liquid crystal cell 12 while the liquid crystal cell 12 is being sucked by the suction pad 22, for example. The pad 22 may be lowered. Alternatively, the liquid crystal cell 12 may be supported by a supporting member other than the suction pad 22.

In this embodiment, since the liquid crystal cell 12 is always oriented in the tangential direction of the peripheral surface 21B of the film holding base 21, the contact area with the optical film 14 increases,
The facing relationship between the optical film 14 and the liquid crystal cell 12 at the bonded portion is always constant. Therefore, on the entire contact surface, the liquid crystal cell 12 and the optical film 14 are adhered (adhered) in the same state, and there is no problem that the optical film 14 is wrinkled. Also, no excessive tension acts on the optical film 14. Furthermore, no static electricity is generated. Especially when working in a reduced pressure atmosphere, the liquid crystal cell 12 and the optical film 14 are
There are no bubbles between and. In this embodiment, the pressing roller 13 is rolled so as to widen the contact area.
Conversely, the film holding table 21 may roll on the surface of the liquid crystal cell 12.

FIG. 4 shows a third embodiment of the present invention.
In this embodiment, two rollers 31 and 32 are opposed to each other, and a rotational force is applied to the shafts O1 and O2 that support the rollers 31 and 32, so that the rollers 31 and 32 are rotationally driven in the direction of the drawing. At least the surfaces of the rollers 31 and 32 are formed of an elastic material such as rubber that is elastically deformable. Then, with the liquid crystal cell 12 and the optical films 14 and 14 sandwiched between the rollers 31 and 32, the rollers 31 and 32 are
The surface of is elastically deformed, and this elastically deformed angle range (2.
At θ1), the liquid crystal cell 12 and the optical films 14 and 14 are pressed. In this pressing angle range,
The liquid crystal cell 12 and the optical films 14, 14 are pressed by a constant force.

Further, the liquid crystal cell 12 and the optical film 14 to be closely contacted with each other within the above pressing angle range (2 · θ1).
The opening angle θ between and is determined. These θ1 and θ are determined according to the material of the optical film 14 and the like. The factors that determine this angle value are the surface materials of the rollers 31 and 32, the diameter dimensions of the rollers 31 and 32, and the like. The optical film 14 is held on the surfaces of the rollers 31 and 32. In order to exert this holding force, the rollers 31 and 32
Although the suction film may be provided on the surface of the optical film 14 to suck the optical film 14 by negative pressure, the surfaces of the rollers 31 and 32 are made of rubber or the like having a weak adhesive force, and the protective sheet 14A of the optical film 14 is It may be lightly adhered to the roller surface.

It is also preferable to operate this apparatus in a reduced pressure atmosphere. In this apparatus, first, the optical film 14 is wound around the surfaces of both rollers 31 and 32 and held. At this time, since the release sheet 14C is directed to the surface, the release sheet 14C is first removed, and the charge removing process is further performed. The liquid crystal cell 12 is vertically inserted between the rollers 31 and 32 from above. At this time, one end (a) of the optical film 14 is brought into close contact with both surfaces of the lower end of the liquid crystal cell 12, and is pressed by a force F by both rollers 31 and 32.
Then, when the rollers 31 and 32 are rotationally driven, the liquid crystal cell 12 sandwiched between the rollers is sent downward, and the optical films 14, 14 are gradually brought into close contact (adhesion) with the force F on both surfaces thereof.
To be made.

Also in this embodiment, the optical film 14 is used.
Unreasonable tension does not act on. Further, when the contact area gradually expands, since the face-to-face relationship (opening angle θ) of the contact portion between the liquid crystal cell 12 and the optical film 14 is always constant, the contact (adhesion) is performed under the same conditions throughout. In the embodiment of FIG. 4, the optical film 14 is held by both rollers 31 and 32, and the optical film 14 is brought into close contact (adhesion) with both surfaces of the liquid crystal cell 12. However, using the device of FIG. The optical film 14 may be adhered to only one surface of the cell 12.

Although the liquid crystal cell 12 is used as the substrate and the optical film 14 is used as the film in the above-mentioned embodiments, the method and apparatus of the present invention are applied to the other work of adhesion between the substrate and the film. it can. Further, in the above-mentioned examples, the adhesive layer (adhesive layer) is formed on the film, but an adhesive (adhesive) layer may be formed on the substrate side. Further, it can be carried out even in the case where the adhesive layer is not provided and the substrate and the film are simply brought into close contact with each other.

[0043]

As described above, according to the invention of claim 1,
The tension of the film becomes substantially constant, and the opposing surfaces of the substrate and the film are brought into close contact with each other so that the opening angle becomes substantially constant. Further, in the invention according to claim 2, the contact position between the peripheral surface and the substrate is moved. By gradually increasing the contact area between the substrate and the film, the film can be adhered to the substrate without excessive tension of the film and without wrinkling. Moreover, static electricity is not generated on the film, and dust is not present on the contact surface.

According to the third aspect of the invention, by providing the static electricity removing step, it is possible to completely prevent the film from adsorbing dust and the like.

According to the fourth aspect of the present invention, since the work is performed in a reduced pressure atmosphere, air bubbles do not exist between the substrate and the film, and a dust-free atmosphere is obtained. There is no dust between them.

According to the invention described in claims 5 to 7, it becomes possible to carry out the above-mentioned adhesion method with a simple structure.

[Brief description of drawings]

1 (A) and 1 (B) are side views showing operation of a substrate / film contact device according to a first embodiment of the present invention.

FIG. 2 is an enlarged cross-sectional view showing an example of a film structure.

3 (A), (B), and (C) are side views showing, by operation, a substrate-film contact device according to a second embodiment of the present invention.

FIG. 4A is a side view showing a substrate-film contact device according to a third embodiment of the present invention, and FIG. 4B is a partially enlarged view of FIG.

FIG. 5 is an explanatory diagram showing a conventional contact device for a liquid crystal cell and an optical film.

[Explanation of symbols]

 11 Cell Stage 12 Liquid Crystal Cell 13 Pressing Roller 14 Optical Film 14B Adhesive Layer (Adhesive Layer) 14C Release Sheet 15 Adsorption Pad 16 Adsorption Pad 17 for Transport 17 Elevating Table 21 Film Holding Table 21A Adsorption Hole 21B Circumferential Surface 31, 32 Roller

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Kazuo Isobe 1-7 Yukiya Otsuka-cho, Ota-ku, Tokyo Alps Electric Co., Ltd.

Claims (7)

[Claims] 1. A substrate and a film are aligned at a contact starting point,
When the pressing position of the substrate and the film is moved to expand the contact area, hold the film so that the tension applied to the film in the non-adhered part becomes almost constant, and the substrate in the non-adhered part A method for adhering a substrate and a film, wherein the relative positions of the substrate and the film are changed so that the opening angle of the opposing surface of the film is substantially constant. 2. A film is held on a peripheral surface having a predetermined curvature, and the surface of the film and the substrate are aligned at a contact starting point,
A method for adhering a substrate and a film, wherein the contact area between the substrate and the film is expanded by moving the contact position between the peripheral surface and the substrate. 3. An adhesive layer and a release sheet covering the adhesive layer are laminated on the surface of the substrate or the film, and any time from the start of the release of the release sheet to the start of the adhesion between the substrate and the film. The method according to claim 1, further comprising a step of removing static electricity generated on the substrate or the film.
A method for adhering the described substrate and film. 4. The method for adhering a substrate and a film according to claim 1, wherein the operation of adhering the substrate and the film is performed in a reduced pressure atmosphere. 5. A stage for setting a substrate, a film holding member for holding an end portion of a film so that a tension applied to a film in a non-adhered portion becomes almost constant during a contacting step, and a substrate and a film from a contact starting point. A pressing member that expands the contact area with the film is provided, and the relative position between the stage and the film holding member is controlled so that the opening angle of the facing surface of the substrate and the film in the non-contact area is substantially constant. A device for adhering a substrate and a film, which is characterized in that 6. A film holder on which a film is held on a peripheral surface having a predetermined curvature, and a substrate is pressed against the film on the film holder at a starting point of contact, and a pressing position between the substrate and the film is set on the film holder. A contact device for a substrate and a film, which is provided with a pressing member that moves along the peripheral surface. 7. A surface of a substrate which is provided with a pair of rollers for holding a film on at least one peripheral surface and a driving means for rotationally driving the pair of rollers, and which is sandwiched between both rollers and sent out. An apparatus for adhering a substrate and a film, wherein the film is adhered to the substrate.