KR100852626B1 - Inspection Apparatus for Display Panel, Probe Unit and Probe Assembly - Google Patents

Abstract

The present invention provides a probe assembly for an inspection apparatus capable of cleaning an electrode immediately before inspection at an inspection stage without requiring a dedicated driving source for cleaning the electrode of the liquid crystal panel. A probe assembly capable of contacting an electrode of an inspected object, the probe assembly being capable of moving relatively in a direction approaching and away from the inspected object for contact between the probe and an electrode corresponding to the probe. Cleaning means for the electrode and a rocking arm for supporting the cleaning means. The rocking arm is rocked by the relative movement of the test object and the probe assembly approaching each other, and the cleaning means writes on the electrode according to the rocking motion.

Probe, probe assembly, liquid crystal panel, electrode, cleaning means, rocking arm

Description

Inspection Apparatus for Display Panel, Probe Unit and Probe Assembly

1 is a front view showing the appearance of the inspection apparatus according to the present invention.

FIG. 2 is a right side view of the inspection apparatus shown in FIG.

FIG. 3 is a perspective view showing the probe assembly disposed in the inspection apparatus shown in FIG.

4 is a partial view of the probe assembly seen in the direction of arrow A shown in FIG.

Fig. 5 is an explanatory view showing the operation of the cleaning bar supported on the rocking arm of the probe assembly according to the present invention, and Fig. 5 (a) shows the state before the relative movement of the probe assembly and the subject under test, Fig. 5 (b). Indicates a cleaning process during relative movement, and FIG. 5C shows a contact state between the probe of the probe assembly and the electrode of the inspected object after the completion of the cleaning process by relative movement.

FIG. 6 is a view similar to FIG. 5 (b) showing an enlarged process of cleaning an electrode by a cleaning bar.

7 is a perspective view of a probe assembly representing another embodiment of the present invention.

Figure 8 is a front view of a probe assembly showing another embodiment of the present invention.

Figure 9 is a side view of a probe assembly representing another embodiment of the present invention.

Figure 10 shows another embodiment of the present invention, Figure 10 (a) is a perspective view of a probe assembly with a probe block detachably coupled to a support mechanism, and Figure 10 (b) shows the probe block being separated from the support mechanism. It is a perspective view which shows the state.

11 is the same view as FIG. 7 showing yet another embodiment of the present invention.

12 is the same view as FIG. 5 showing yet another embodiment of the present invention.

Description of the main symbols in the drawings

10: inspection device 12: liquid crystal panel (test object)

34: probe unit 36: support member

38 (38a, 38b): probe assembly 40: probe

42: probe blocks 46, 70: cleaning means

52: rocking arm 56, 58: foreign body

62: spacer member 64: biasing means

66: suction device 68a: suction port

Field of invention

The present invention relates to an inspection apparatus, a probe unit and a probe assembly of a display panel, and more particularly, to an inspection apparatus suitable for lighting inspection of a display panel, a probe unit and a probe assembly for the inspection apparatus.

Background of the Invention

In the manufacture of the liquid crystal panel, an alignment film subjected to, for example, a rubbing treatment is formed on one surface of each of the pair of glass plates. In an active matrix liquid crystal panel, one glass plate is provided with a plurality of transparent pixel electrodes and thin film transistors (TFTs) between the glass plate and the alignment film. The other glass plate is provided with a transparent common electrode between the glass plate and the alignment film, and in a color liquid crystal panel, a color filter is provided between the glass plate and the common electrode. The pair of glass plates are pasted together through a seal member so that their alignment films face each other at intervals. The glass assemblies are cut into a plurality of desired glass assemblies for liquid crystal panels so that the bonded glass assemblies are made of mother glass and the seal member of the mother glass is divided. By this cutting operation, a plurality of glass assemblies are formed from one mother glass. Then, a liquid crystal is inject | poured between a pair of glass plates of each glass assembly, and the liquid crystal is sealed, and a some liquid crystal panel is formed efficiently.

The liquid crystal panel is inspected such as a lighting test for detecting a defect using, for example, an inspection apparatus. In the lighting test, it is necessary to supply a drive signal to each liquid crystal panel. Therefore, the probe assembly provided with the many probe which can contact the electrode of a liquid crystal panel is provided in the test | inspection stage of the said inspection apparatus (refer patent document 1).

However, when non-conductive foreign substances such as debris of the glass plate and debris of the seal member in the manufacturing process of the liquid crystal panel are left on the electrodes of the liquid crystal panel to which the probes of the probe assembly of the inspection apparatus come into contact with each probe, Since reliable electrical connection with the electrode corresponding to the probe is hindered, it is necessary to clean the electrode of the liquid crystal panel to be inspected before contacting each probe in the inspection stage of the inspection apparatus.

Therefore, in the invention of patent document 1, the cleaning apparatus which has a cleaning tape for cleaning the electrode of a liquid crystal panel is provided in the set stage which arrange | positions the liquid crystal panel sent to an inspection stage beforehand. According to this, each electrode of the liquid crystal panel examined by an inspection stage can be cleaned by a cleaning tape in a set stage before an inspection.

[Patent Document 1] Japanese Patent Application Laid-Open No. 2005-147948

However, in the above-mentioned conventional inspection apparatus, since the cleaning apparatus which provided the dedicated drive source in the set stage is needed, the structure of an inspection apparatus becomes complicated. Moreover, even if the electrode is cleaned at the set stage, foreign matter may adhere to the cleaned electrode during or after the transfer to the inspection stage. Therefore, as far as possible, it has been required to clean the electrode immediately before the probe contacts the electrode.

SUMMARY OF THE INVENTION An object of the present invention is to provide an inspection apparatus capable of cleaning an electrode immediately before inspection at an inspection stage, a probe unit and a probe assembly for the inspection apparatus, without requiring a dedicated driving source for cleaning the electrodes of the liquid crystal panel. have.

The above and other objects of the present invention can be achieved by the present invention described below.

Summary of the Invention

The probe assembly according to the present invention is provided with a probe capable of contacting an electrode of an object under test, and relatively movable in a direction approaching the object under test for contact between the probe and the electrode corresponding to the probe. The probe assembly has cleaning means for the electrode and a rocking arm for supporting the cleaning means. When the test subject and the probe assembly move closer to each other, either the swinging arm or the cleaning means may contact the test subject so that the swinging arm swings according to its relative motion. When the rocking arm swings, the cleaning means supported on the rocking arm according to the rocking motion of the rocking arm writes on the electrode.

In the probe assembly according to the present invention, when the inspected object and the probe assembly approach each other for contact between the electrode of the inspected object and each probe of the probe assembly corresponding thereto, the cleaning means is supported by the relative movement. The rocking arm swings without using a dedicated drive source for rocking. Since the cleaning means supported on the rocking arm sweeps on the electrode according to the rocking of the rocking arm, it is possible to clean the electrode on the electrode immediately before contacting the probe and the electrode, without using a dedicated driving source for cleaning. Can be.

In the probe assembly, probe blocks for supporting the plurality of the probes can be detachably attached to the support mechanism. By the installation of the probe block to the support mechanism, the probes are arranged so as to project the needle line of each probe toward the test subject from the front edge of the probe block supported by the support mechanism. In this case, for each probe assembly, a pair of swinging arms can be arranged on both sides of the probe block, and the cleaning means is supported by the respective swinging arms corresponding at both ends between the swinging arms.

Both the swinging arms can be swingably supported by the support mechanism. In addition, the both rocking arms can be swingably supported by the probe block.

As the cleaning means, a rod-shaped cleaning bar whose central axis is supported by the swinging arm can be used. In such a cleaning bar, for example, a roller member may be used to combine with a foreign material on the electrode to remove the foreign material from the electrode. In addition, if necessary, in order to protect the electrode surface due to the folding bar movement, a protective means such as an elastic layer, a felt layer, or hair is provided on the surface of the cleaning bar.

The cleaning means may use a cleaning brush whose central axis is supported by the swinging arm.

By appropriately setting the length of the swinging arm, when the cleaning means supported on the swinging arm cleans the electrode, foreign matter adhering to the needle tip of the probe can be removed by the cleaning means. In this case, in order to prevent damage to the needle tip of the probe due to contact with the cleaning means, it is preferable to set the respective swing arm lengths so that the cleaning means contacts the foreign matter attached to the needle tip of the probe but does not contact the needle tip. In this case, it is preferable to use a cleaning brush such as a rotary brush as the cleaning means in order to reliably prevent damage to the needle tip of the probe due to contact.

The cleaning means may be supported at the end of the rocking arm, and the edge portion of the end may protrude beyond the cleaning means in the radially outward direction thereof. By contacting the rocking arm with the test subject at its edge, the cleaning means supported by the rocking arm can be prevented from being folded and moved on the electrode during rocking of the rocking arm. Thereby, since the foreign material on the electrode can be wiped out without rubbing the electrode with the cleaning means, it is possible to reliably prevent damage to the electrode surface by the cleaning means.

The force of the biasing means such as a spring member can be applied to the swinging arm in order to reliably wipe the foreign matter on the electrode with the cleaning means supported on the swinging arm.

The probe assembly may be provided with a suction mechanism having a suction port for suctioning the needle needle of the probe or the foreign matter on the electrode. Since the foreign matter removed on the needle line of the electrode or the probe can be sucked by the suction mechanism, it is possible to reliably prevent the reattachment of the foreign material swept away from the electrode to the test subject. Moreover, according to the setting of a suction force, the foreign material on the said electrode can be directly sucked. In this case, the suction mechanism functions as an aid of the cleaning means.

The plurality of probe assemblies each having the rocking arm and the cleaning means supported on the rocking arm can be installed in the probe unit of the inspection apparatus. In the probe unit, a plurality of the probe assemblies are supported on the support member such that each probe contacts the corresponding electrode of the test object, above the test table that supports the test object in a liftable manner.

Moreover, in the probe unit which concerns on this invention, a pair of rocking arms are arrange | positioned at both sides of the said probe assembly group for every probe assembly group which consists of several probe assembly arrange | positioned on the said support member, and the one The pair of rocking arms may support the cleaning means for the electrodes of the inspected object corresponding to each probe of the plurality of probe assemblies between the rocking arms. In this case, the swinging arm is swingably supported by the support member.

In addition, in the inspection apparatus according to the present invention, the probe unit is provided above the inspection table for supporting the object to which the electrode is provided to be elevated.

Detailed description of the invention

1 and 2 show the appearance of the inspection apparatus 10 according to the present invention. The inspection apparatus 10 is used for the lighting inspection of the liquid crystal panel 12 having a rectangular planar shape. The inspection apparatus 10 is provided with an inspection stage 14 for lighting inspection, and a conventional well-known set stage 16 which sequentially exchanges the liquid crystal panel 12 as an inspection object between the inspection stage and the inspection stage. It is provided in parallel with the stage 14. In the illustrated example, in order to facilitate the observation of the display screen of the liquid crystal panel 12 by the naked eyes of the operator in the lighting inspection, the liquid crystal panel 12 faces the front in the inspection stage 14 and the set stage 16. It is kept inclined toward.

On the surface of the rectangular liquid crystal panel 12, as will be described later, a plurality of electrodes 12a (see Fig. 4) are arranged along one long side edge thereof, and a plurality of same electrodes (along side short edges) 12a) is arranged. In the liquid crystal panel 12 to be inspected by the inspection stage 14, the electrodes are disposed on the support 22 of the set stage 16 from the entrance and exit 20 provided in the front of the housing 18 to face the front side. In the set stage 16, the liquid crystal panel 12 is positioned on the support 22 by a conventionally well known centering mechanism having a centering pin 24 provided on the support 22. Although not shown, the liquid crystal panel 12 of the set stage 16 is interchanged with the liquid crystal panel 12 inspected by the inspection stage 14 through a well-known panel handling mechanism, and the inspected liquid crystal panel ( 12 is taken out from the inspection apparatus 10 via the entrance and exit 20 of the set stage 16.

As shown in Figs. 1 and 3, the inspection stage 14 has a rectangular observation window in its entirety which is inclined and aligned with the doorway 20 of the set stage 16 in front of the housing 18 ( 26) is formed. In addition, the inspection stage 14 is provided with a chuck top 28 for holding the liquid crystal panel 12 in a predetermined posture. The stopper pin 30 and the pusher 32 which presses the edge of the liquid crystal panel 12 on the chuck top 28 toward the stopper pin are provided in the chuck top 28. As is well known in the art, the liquid crystal panel 12 on the chuck top 28 is formed by the stopper pin 30 and the pusher 32, and the long side and the short side of the liquid crystal panel 12 are respectively observed. The attitude is adjusted to follow the X-axis direction and the Y-axis direction of. The attitude-adjusted liquid crystal panel 12 is held on the chuck top by a suction pressure lower than the atmospheric pressure of the chuck saw 28. As is well known in the art, the chuck saw 28 is provided on the xyzθ band. As a result, the liquid crystal panel 12 on the chuck top 28 can be moved integrally with the chuck top 28 in the Z-axis direction perpendicular to the X-axis direction, the Y-axis direction, and the XY plane. It can be rotated around the axis.

As shown in Fig. 3, the chuck saw 28 is inclined upwardly, that is, in front of the chuck saw 28 along the Z-axis direction, at intervals from the chuck saw 28 in the Z-axis direction. The probe unit 34 is arranged. The probe unit 34 includes a support member 36 having a rectangular frame disposed at a distance from the chuck saw 28 on a plane parallel to the chuck saw 28, and a plurality of probe assemblies 38 supported by the support member. 38a, 38b)).

The support member 36 is fixedly supported by the frame member not shown in the housing in the housing 18. In addition, in the example shown in FIG. 3, four probe assemblies 38a are mutually extended in the longitudinal direction of the long side part 36a on one long side part 36a along the X-axis direction of the support member 36. Moreover, as shown in FIG. They are arranged in parallel at intervals. Further, three probe assemblies 38b are arranged in parallel on the one short side portion 36b along the Y-axis direction of the supporting member 36 at intervals mutually spaced in the longitudinal direction of the short side portion 36b. It is.

Each probe assembly 38 (38a, 38b) has a probe block 42 provided with a plurality of probes 40, as shown in Figs. Each probe 40 is maintained by projecting a needle line downward from the front edge of the probe block 42 in which the probe is installed. Each probe assembly 38 (38a, 38b) is supported by a support member 36 via a suspension mechanism 44, which is a support mechanism, such that the needle line of the probe 40 corresponds to the corresponding electrode 12a. On the long side part 36a and the short side part 36b of, it is supported by mutual space | interval. Thereby, the probe 40 of each probe assembly 38 (38a, 38b) spaces the needle line from the corresponding electrode 12a of the liquid crystal panel 12 arrange | positioned below.

The liquid crystal panel 12 transferred from the set stage 16 to the chuck top 28 of the inspection stage 14 is positioned as described above on the chuck top 28, and positioned in the X and Y directions and around the Z axis. Understand posture adjustment. By this adjustment, when each electrode 12a is accurately positioned at the needle line of the corresponding probe 40 of the probe assembly 38 (38a, 38b), the chuck saw 28 is moved to the liquid crystal panel (the liquid crystal panel (on the chuck top). Toward the support member 36 along the Z axis in the lowered position shown in Fig. 5 (a) so that 12 approaches each probe assembly 38 (38a, 38b) supported by the support member 36 from above. Driven.

When the chuck top 28 moves to the contact position shown in Fig. 5 (c) by the movement toward the probe assemblies 38 (38a, 38b) of the liquid crystal panel 12, each electrode of the liquid crystal panel 12 12a contacts the needle tip of the corresponding probe 40. In this contact state, as is well known in the art, by the elasticity of the suspension mechanism 44 or the elasticity of the probe 40 itself, the needle needle of the probe is pressed to an appropriate pressure on each corresponding electrode 12a. In the contact state of the probe 40, the liquid crystal panel 12 includes, for example, an electrical signal or a driving signal for black display of the liquid crystal panel 12 for inspection, and a tester main body (not shown). ) Is supplied via the probe 40 and each electrode 12a corresponding to the probe.

When the inspection for the presence of a defect (for example, a white defect) on the black display screen is finished, the chuck saw 28 moves away from the support member 36 along the Z axis toward a predetermined lowered position. Driven. The inspected liquid crystal panel 12 is transferred to the set stage 16 at the predetermined lowered position of the chuck saw 28 as described above.

In the probe unit 34 according to the present invention, both the probes 40 of the probe assemblies 38 (38a and 38b) and the electrodes 12a for contacting each electrode 12a of the liquid crystal panel 12 are provided. Cleaning means 46 are provided for cleaning each electrode 12a in relation to the relative motion of 38).

In the example shown in FIG. 1, a first probe group consisting of four probe assemblies 38a provided on the long side portion 36a of the support member 36 and three probes provided on the short side portion 36b of the support member 36. The cleaning means 46 is provided for every group of the 2nd probe group which consists of granules 38b. Each cleaning means 46 is comprised of the cleaning bar which consists of the rod-shaped member extended in the arrangement direction of each probe 40 of a corresponding probe group. The rod-like member constituting the cleaning bar 46 may be formed of, for example, a roller member made of a synthetic resin material.

In order to support each cleaning bar 46, as shown in Figs. 3 and 4, at both sides of each probe group, a fixing arm 48 fixes one end thereof to the supporting member 36. Doing. Each stationary arm 48 extends above the chuck saw 28, spaced apart and parallel to the probe block 42 of each corresponding probe assembly 38. In the vicinity of the distal end portion of the fixed arm 48 paired with each probe group, a pair of swinging arms 52 are provided at one end thereof through a horizontal axis 50, respectively.

Said cleaning bar 46 is arrange | positioned between the pair of rocking arms 52 provided for every probe group, respectively. Each cleaning bar 46 is fixedly installed in the vicinity of the other end of the corresponding rocking arm 52 at each end portion through the horizontal shaft 54 arranged in correspondence with the central axis thereof.

The other end, or tip, of each rocking arm 52 provided with the cleaning means 46 is the probe 40 and the electrode shown in FIG. 5 (c) at the lowered position of the chuck saw 28 shown in FIG. 5 (a). When the chuck saw 28 moves toward the contact position with 12a, as shown in FIG. 5 (b) in the process, it contacts the edge of the liquid crystal panel 12 on the chuck saw 28. As shown in FIG. When the rocking arms 52 and the liquid crystal panel 12 come into contact with each other, the tip portion of the rocking arm 52 is pushed up through the liquid crystal panel 12 as the chuck top 28 continues to rise, whereby the tip portion is a liquid crystal. The swinging arm 52 swings about the axis 50 so as to be folded and moved over the panel 12. At this time, as shown in an enlarged manner in FIG. 4, the tip end portion of the swinging arm 52 maintains a sufficient distance in the longitudinal direction of the cleaning means 46 from the row of electrodes 12a. ), The swing arm 52 does not fold and move on each electrode 12a.

Moreover, since the edge part of each said front-end | tip part of the rocking arm 52 protrudes radially outward of the said cleaning means beyond the cleaning means 46, the rocking | swing of the pair of rocking arms 52 mentioned above, The cleaning means 46 between the arms does not contact the surface of the liquid crystal panel 12 and each electrode 12a on the surface.

Therefore, when the pair of swinging arms 52 swings around the axis 50 from the lowered position of FIG. 5 (a) to the posture of the contacted position of FIG. 5 (c), the pair of rocking arms ( The cleaning means 46 supported therebetween are close to each electrode 12a along an arcuate trajectory whose radius is the distance between the axis of axis 50 and the axis of horizontal axis 54 as a radius. As shown in Fig. 4, the cleaning means 46 is not folded and moved over the electrodes by being spaced apart from the electrodes 12a.

As enlarged in Fig. 6, the cleaning means 46 which moves on the electrode in proximity to each electrode 12a in response to the rocking of the rocking arm 52 described above is shown in Figs. In the cleaning process shown in Fig. 6, the foreign material passes through the rows of the electrodes 12a so that the foreign materials are combined with the foreign materials 56 on the electrodes 12a, and the foreign materials are wiped out from the electrodes 12a.

Immediately after the cleaning step of sweeping the foreign matter 56 out of the electrode 12a, each probe 40 contacts the corresponding electrode 12a at the contact position shown in Fig. 5C. The contact between the probe 40 and the electrode 12a is after the cleaning means 46 has passed through the rows of electrodes 12a so that the probe 40 and the electrode ( Contact with 12a) is not disturbed.

In addition, as shown by the virtual line in FIG. 6, by selecting the arm length of the rocking arm 52, that is, the distance between the shafts 50 and 54, according to the radius of the cleaning means 46, a pair of rocking arms ( According to the swing of 52, the foreign matter 58 attached to the needle line of the probe 40 can also be removed by sweeping the cleaning means 46.

After the inspection, the chuck saw 28 moves toward the lowered position shown in Fig. 5A. According to this movement, the rocking arm 52 swings downward while the tip portion of the rocking arm 52 is folded over the liquid crystal panel 12 by the respective weights of the rocking arm and the cleaning means 46. The swinging of the rocking arm 52 downward can be regulated by the stopper pin 60 provided in the side wall portion 42a of the probe block 42. Due to the restricting action of the stopper pin 60, the tip portion of the swinging arm 52 does not swing out beyond the corresponding area of the liquid crystal panel 12 to the side.

In the inspection apparatus 10 according to the present invention, each pair of rocking arms 52 swings in accordance with the lifting movement of the chuck saw 28 supporting the liquid crystal panel 12. The cleaning means 46 supported on the swinging arm 52 cleans the needle line of each electrode 12a and the probe 40 when the swinging arm 52 swings toward the contact position of Fig. 5C. do. Therefore, each electrode 12a can be cleaned without using a dedicated drive source for the cleaning means 46. In addition, since the needle tip of the probe 40 contacts the corresponding electrode 12a at the contact position shown in Fig. 5 (c) immediately after cleaning, the probe 40 to the electrode after cleaning of each electrode 12a It is difficult for new foreign matter to adhere on each electrode 12a until the contact with. Therefore, the poor contact by the adhesion of new foreign material after cleaning as before can be prevented reliably.

In order to ensure that the cleaning means 46 is folded over each electrode 12a so as to prevent damage to the electrodes due to movement, hair is formed on the surface of the cleaning bar such as a roller member constituting each cleaning means 46 as necessary. ) Can be performed. In addition, an elastic membrane such as rubber or a protective layer such as felt may be formed on the surface of the roller member. In addition, by providing such protection means to the cleaning means 46, instead of allowing the tip end of the swinging arm 52 to be folded over the liquid crystal panel 12, the cleaning means 46 is placed on each electrode 12a. It can be folded to move on the liquid crystal panel 12 including.

In addition, instead of providing the cleaning means 46 for each group of probe assemblies consisting of a plurality of probe assemblies 38 (38a, 38b), as shown in FIG. 7, each probe assembly 38 (38a, 38b) is provided. Individual cleaning means 46 can be installed in the.

In the example shown in FIG. 7, the spindle 50 of each pair of rocking arms 52 is supported by the side wall portion 42a of the probe block 42 for each probe assembly 38 (38a, 38b). . 8, the spacer member 62 can be fixedly provided on the outer side of the front-end | tip part of each rocking arm 52 which supports the cleaning means 46. As shown in FIG. Each spacer member 62 is in contact with the liquid crystal panel 12 and is folded and moved on the liquid crystal panel. Without using the spacer member 62, the edge portion of the tip of the rocking arm 52 can project radially outward of the cleaning means 46 as described above, but the cleaning supported between the rocking arms 52 is supported. It is advantageous to use the spacer member 62 in keeping the distance between the means 46 and each electrode 12a at a desired appropriate value.

As shown in FIG. 9, the pivot 50 of the swinging arm 52 can be supported by the support 44a of the suspension mechanism 44 in which the probe block 42 is provided. In addition, in the example shown in FIG. 9, the convenience means 64 which consists of elastic members, such as a coil spring which applies the rocking arm 52 to the stopper pin 60, is provided. One end of the convenience means 64 is attached to the swinging arm 52, and the other end thereof is attached to the support 44a. The convenience means 64 provides the rocking arm 52 with a force directed to the stopper pin 60, thereby preventing the cleaning means 46 from being unnecessarily heard from each electrode 12a, and by the cleaning means 46 Increase the cleaning action.

The above-mentioned convenience means 64 can be provided in the rocking arm 52 shown in FIGS. 1-6, or the rocking arm 52 shown in FIG. 1-6, the other end of the biasing means 64 can be attached to a fixed arm 48. In the example shown in Fig. 7, the other end of the biasing means 64 can be attached to the side wall portion 42a of the probe block 42 or to the support 44a of the suspension mechanism 44.

As shown in Figs. 10 (a) and 10 (b), in connection with supporting the pair of swinging arms 52 at the support 44a of the suspension mechanism 44, the support of the suspension mechanism 44 ( 44a) and the probe block 42 provided on the support can be separated.

In this case, the mounting part 42b is provided in the upper surface of the probe block 42, and the engaging part 44b which receives the mounting part 42b is formed in the lower surface of the support stand 44a, Although not shown, a conventionally well-known clamp mechanism is provided between 44a) and the mounting portion 42b. In this way, the swing arm 52 is swingably supported by the support base 44a, and the probe blocks 42 are detachable from the respective suspension mechanisms 44, whereby some probes 40 of the probe blocks 42 If a defect occurs, the probe block 42 can be replaced without replacing the cleaning means 46 and the swinging arm 52. Therefore, it is possible to prevent waste of resources and make effective use of it.

In the example shown in FIG. 11, a suction mechanism 66 is provided by the cleaning means 46 for sucking the foreign material 56 or 58 sweeped out from the needle bar of each electrode 12a or the probe 40. As shown in FIG. The suction mechanism 66 has a suction nozzle 68 having a suction port 68a that opens toward the bottom of the front edge of the probe block 42 on which the probe 40 is installed. A suction pressure from the negative pressure source (vacuum pump) of the chuck saw 28 is introduced into the suction nozzle 68 via the hose 68b, for example. By the suction pressure, the foreign substances 56 and 58 sweeped over the probe 40 or each electrode 12a by the cleaning means 46 are sucked from the suction port 68a, and the trap provided in the hose 68b. can be captured in a trap (not shown).

By providing such a suction mechanism 66, it is possible to reliably prevent the foreign substances 56 and 58 that have been wiped out from being reattached to the electrode 12a or the probe 40. In addition, by adjusting the suction force appropriately, the foreign substances 56 and 58 scraped off by the cleaning means 46 can be sucked directly from the probe 40 or the electrode 12a. In this case, the suction device 66 functions as an auxiliary means for the cleaning means 46. In addition, the suction mechanism 66 sucks and removes the foreign matter of the needle tip of the probe 40 of the probe assembly 38 (38a, 38b), so that the period of the periodic maintenance inspection work of the needle needle can be set relatively long. Moreover, maintenance work becomes easy.

In the above-mentioned bar, the example which comprises the cleaning means 46 by the rod-like member like a roller member was shown. Instead, as shown in Figs. 12 (a) to 12 (c), the cleaning means 46 can be constituted by the rotary brush 70.

The hair of the rotary brush 70 can be formed, for example with a fibrous resin member having moderate elasticity. The rotary brush 70 rotatably supports both ends of the pair of swinging arms 52 so that the hair tip of the rotating brush 70 is rotated from the end of each swinging arm between the swinging arms 52. It protrudes radially outward. In such a rotary brush 70, even if the hair tip contacts the needle 12 of the electrode 12a or the probe 40, there is no fear of damaging them. In this case, therefore, the rotary brush 70 can be brought into contact with the liquid crystal panel 12 between the lowered position shown in Fig. 12 (a) and the contact position shown in Fig. 12 (c), and the swinging arm 52 makes liquid crystal. Contact with the panel 12 can be prevented. Moreover, by combining the suction mechanism 66 with the rotary brush 70, the foreign material 58 attached to the needle bar of the probe 40 can be removed more reliably from the needle bar.

The present invention is not limited to the above embodiments, and various modifications can be made without departing from the spirit thereof. For example, instead of allowing the chuck saw 28 supporting the liquid crystal panel 12 to be moved toward and away from the probe assemblies 38 (38a, 38b), the chuck top 28 is fixed. And the support member 36 for supporting the probe assemblies 38 (38a, 38b) can be moved toward and away from the liquid crystal panel 12 on the chuck saw 28.

According to the present invention, the rocking arm can be rocked in relation to the relative movement of the inspected object and the probe assembly for inspecting the inspected object, and the rocking arm is rocked by the cleaning means supported by the rocking arm. The foreign material can be swept away from the electrode. This makes it possible to clean the electrodes of the inspected object immediately before contacting the probes without installing a dedicated drive source for cleaning, and thus without complicating the configuration of the inspection apparatus by installing the dedicated drive source. The electrode of the subject can be cleaned immediately before the inspection, and stable inspection can be performed without being affected by foreign substances.

Simple modifications and variations of the present invention can be readily used by those skilled in the art, and all such variations or modifications can be considered to be included within the scope of the present invention.

Claims (20)

A probe assembly which is provided in contact with an electrode of an object under test and which is relatively movable in a direction approaching the object under test for contact between the probe and the electrode corresponding to the probe. A cleaning means for sweeping the surface of the electrode, and a swinging arm capable of swinging around an axis and supporting the cleaning means, and moving the object under test and the probe assembly to approach each other according to the relative movement. A probe assembly capable of contacting the subject under test so that the rocking arm swings, and the cleaning means supported on the rocking arm according to the rocking motion of the rocking arm writes on the electrode. . The probe assembly of claim 1, wherein the probe assembly includes a probe block for supporting a plurality of the probes, and a support mechanism for detachably supporting the probe block, wherein the probe is configured to support the probe block. The needles of the probes are aligned and supported so as to project toward the test subject from the leading edge, the rocking arms are arranged in pairs on both sides of each probe block, and the cleaning means is disposed between both rocking arms. A probe assembly whose both ends are supported by corresponding respective swing arms. The probe assembly according to claim 2, wherein the two swinging arms are rockably supported by the support mechanism. The probe assembly according to claim 2, wherein the both rocking arms are rockably supported by the probe block. The probe assembly according to claim 1 or 2, wherein the cleaning means is a rod-shaped cleaning bar whose central axis is supported by the swinging arm between the pair of swinging arms. The probe assembly according to claim 1 or 2, wherein the cleaning means is a cleaning brush whose central axis is supported by the swinging arm between the pair of swinging arms. The rocking arm according to any one of claims 1 to 4, wherein the rocking arm has a length dimension that allows the cleaning means to contact the foreign matter attached to the needle and the needle of the electrode and the probe to remove the foreign matter. Probe assembly, characterized in that set. The cleaning means according to any one of claims 1 to 3, wherein the cleaning means is circumferential in its entirety, a central axis thereof is supported at the end of the rocking arm, and an edge portion of the end portion is beyond the cleaning means. Protruding radially outwardly so that the rocking arm is in contact with the object under test at the edge portion. The probe assembly according to any one of claims 1 to 3, wherein a spacer member protruding from the end portion in contact with the test object is fixed to an end portion supporting the cleaning means of the rocking arm. . The said at least one rocking arm is receiving the force which directs the said cleaning means to the said electrode by the convenience means provided between the rocking arm and the said support mechanism or the said probe block. A probe assembly. The probe assembly according to any one of claims 1 to 3, wherein the probe assembly is provided with a suction mechanism having a suction port for sucking a needle of the probe or a foreign material on the electrode. A plurality of probe assemblies of claim 1; And A support member supporting the probe assembly such that the probe of the probe assembly is in contact with a corresponding electrode of the object under test, on an inspection table for supporting the object under test; Probe unit comprising a. A plurality of probe assemblies disposed above an inspection table for supporting a test object with an electrode installed thereon, the plurality of probe assemblies provided with a probe corresponding to the electrode; A probe unit having a support member for aligning and supporting the probe assembly such that each probe of the probe assembly contacts the corresponding electrode, Cleaning means for sweeping a surface of the electrode corresponding to each probe of the plurality of probe assemblies to align; And a pair of swinging arms disposed on both sides of the probe assembly group consisting of the plurality of probe assemblies to align the cleaning means, and supported on the support member so as to be swingable around the axis. The oscillating arm or the cleaning means is in contact with the inspected object so that the oscillating arm oscillates with movement of the inspected object on the examination table when the oscillator moves toward the support member. A probe unit, characterized in that a cleaning means writes on the electrode. The probe unit of claim 13, wherein the cleaning means is a rod-shaped cleaning bar whose central axis is supported by the swinging arm between the pair of swinging arms. The probe unit of claim 13, wherein the cleaning means is a cleaning brush whose central axis is supported by the swinging arm between the pair of swinging arms. The pair of rocking arms of claim 13, wherein the pair of rocking arms are set to a length dimension that allows the cleaning means to contact the foreign matter attached to the needles of the electrode and the probe to remove the foreign matter. Probe unit characterized in that. 14. The cleaning means according to claim 13, wherein the cleaning means is circumferential in its entirety, a central axis thereof is supported at the end of the rocking arm, and an edge portion of the end protrudes radially outward of the cleaning means beyond the cleaning means. And the rocking arm is in contact with the object under test at the edge portion. 18. The at least one swinging arm is biased by the cleaning means directed to the electrode by a biasing means provided between the swinging arm and the support mechanism or the probe block. Probe unit. The probe unit according to claim 13, wherein each of the probe assemblies is provided with a suction mechanism having a suction port for sucking needles of the probe or foreign matter on the electrode. An inspection table for supporting the inspection object provided with an electrode to be elevated; And Probe unit according to claim 13 installed above the inspection table Inspection device characterized in that it comprises a.

Images