JPH10109075A - Cleaning method for glass plate and cleaning device therefor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cleaning method for glass plates capable of sufficiently cleaning the glass plates by easily and surely removing foreign matter on the glass plate surfaces and a cleaning device therefor. SOLUTION: The blade edges of plural sheets of radially arranged squeegees 52 are brought into contact with the surface of the glass plate P placed on an X-Y stage 10 and the squeegees are rotated in this state by a motor 14 around the axis of rotation intersecting nearly orthogonally with the glass plate surface. The X-Y stage 10 is then moved and the glass plate surface is scanned along a prescribed direction by the rotating squeegees. The foreign matter sticking to the glass plate surface is removed by the squeegees.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for cleaning a glass plate for removing glass cullet and various foreign substances attached to the surface of the glass plate.

[0002]

2. Description of the Related Art As a glass plate, for example, a glass plate used for manufacturing a liquid crystal display panel has various thin film layers such as electrodes and insulating films formed on the surface thereof. Therefore, it is necessary that the surface of the glass plate is sufficiently cleaned without foreign matter or the like attached thereto.

[0003] A liquid crystal display panel is constructed by bonding a pair of glass plates via a liquid crystal layer. In the manufacture of the liquid crystal display panel, a glass substrate sufficiently larger than the external dimensions of the liquid crystal display panel is used. Unnecessary portions of the glass plate are cut and removed on the way to be processed into a desired shape. For this reason, glass cullet and the like mainly adhere to the outer surface of the liquid crystal display panel and the like, which causes a problem when an optical film such as a polarizing plate is attached to the outer surface.

Therefore, in general, the main surface of the glass plate and the main surface of the liquid crystal panel are cleaned by a cleaning device to remove foreign substances adhering to the surfaces. The cleaning device used for cleaning the glass plate has an elongated squeegee, and scans the surface of the glass plate along a predetermined direction with the cutting edge of the squeegee applied to the surface of the glass plate, so that the surface of the glass plate is scanned. The glass cullet and various foreign substances adhered are scraped and physically removed.

Conventionally, such a squeegee scans the surface of a glass plate, for example, in Japanese Patent Application Laid-Open No. 4-93816.
As disclosed in Japanese Unexamined Patent Publication No.
Has been repeated one or more times.

[0006]

However, when the glass plate is cleaned by scanning the squeegee along the same direction as described above, the cutting edge of the squeegee is always the same as the foreign matter on the surface of the glass plate. , And foreign matter on the surface of the glass plate is also subjected to only one-way scraping force. Also, during one scan, the squeegee blade tip can contact the foreign matter only once.

For this reason, depending on the type of foreign matter on the surface of the glass plate and the state of adhesion, the foreign matter may not be removed by scanning with a squeegee, and it becomes difficult to sufficiently clean the surface of the glass plate. A method of increasing the number of scans of the squeegee or changing the scan direction and performing a plurality of scans is also conceivable. However, in this case, the processing operation takes time and the manufacturing efficiency is reduced.

SUMMARY OF THE INVENTION The present invention has been made in view of the above points, and an object of the present invention is to provide a method for cleaning a glass plate capable of easily and reliably removing foreign substances on the surface of the glass plate and sufficiently cleaning the glass plate. A cleaning device is provided.

[0009]

To achieve the above object, a method for cleaning a glass plate according to claim 1 of the present invention comprises:
With the cutting edge of the squeegee in contact with the surface of the glass plate, rotate the squeegee around a rotation axis extending in a direction substantially orthogonal to the surface of the glass plate, and rotate the squeegee in a predetermined direction with the rotating squeegee. , And the foreign substances adhering to the glass plate surface are removed by the squeegee.

Further, according to the cleaning method of the present invention, while rotating a plurality of squeegees radially arranged with respect to the rotation axis, the upper surface of the glass plate is rotated by the plurality of squeegees. The scanning is characterized by

According to a fifth aspect of the present invention, there is provided a cleaning method, wherein the cutting edge of a squeegee is sequentially pressed from a plurality of directions against a foreign substance adhering to the surface of a glass plate to remove the foreign substance.

According to a sixth aspect of the present invention, there is provided a glass sheet cleaning apparatus according to the present invention, wherein the squeegee has a supporting means for supporting the glass sheet, a cutting edge capable of contacting the surface of the glass sheet supported by the supporting means, and the supporting means. A rotating means for rotating the squeegee around a rotation axis extending in a direction substantially orthogonal to the surface of the glass plate supported by the glass plate; and Scanning means for scanning the plate surface along a predetermined path.

Further, according to a seventh aspect of the present invention, there is provided a glass sheet cleaning apparatus, comprising: a supporting means for supporting the glass sheet; and a drive shaft extending in a direction substantially perpendicular to the surface of the glass sheet supported by the supporting means. A plurality of squeegees extending radially from the drive shaft and each having a cutting edge capable of contacting the surface of the glass plate supported by the support means,
A squeegee unit comprising: a rotating means for rotating the squeegee unit around the drive shaft; and Scanning means for scanning along a predetermined path.

According to the cleaning method and the cleaning apparatus having the above-described structure, the entire surface of the glass plate is scanned while rotating the squeegee having the cutting edge in contact with the surface of the glass plate, so that foreign substances adhering to the surface of the glass plate can be physically removed. It is removed by the action. At this time, the rotating squeegee hits the foreign matter on the glass plate a plurality of times by one scan,
The foreign substance is brought into contact with the foreign substance from different directions, and vectors in a plurality of directions are applied. Therefore, it is possible to reliably remove foreign matter on the surface of the glass plate in a relatively short time. Note that the glass plate in the present invention includes a quartz substrate and the like together with various glass substrates.

[0015]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a glass plate cleaning apparatus according to an embodiment of the present invention will be described in detail with reference to the drawings. As shown in FIG. 1, the glass plate cleaning device includes an XY stage 10 that functions as a support unit and a scanning unit that support the glass plate P, a squeegee unit 12 that is rotatably provided, and a drive that rotationally drives the squeegee unit. Motor 14 as means and XY stage 10
Squeegee unit 1 for glass plate P supported above
2 and a lifting mechanism 16 for raising and lowering the motor 14.

The XY stage 10 has a flat base 2
0, a Y stage 22, and an X stage 24. A pair of guide rails 25 extending in the Y-axis direction are fixed on the base 20, and the Y stage 22 is supported on the base 20 movably along these guide rails 25. The Y stage 22 includes a step motor 26 and a lead screw 27 provided on the base 20.
Are reciprocated in the Y-axis direction by a Y-axis drive mechanism 28 having

On the Y stage 22, a pair of guide rails 30 extending in the X-axis direction is fixed.
4 is supported on the Y stage 22 movably along these guide rails 30. And X stage 2
Reference numeral 4 denotes a step motor 3 provided on the Y stage 22.
X-axis drive mechanism 34 having lead screw 33 and lead screw 33
, Thereby reciprocatingly driving in the X-axis direction.

A large number of suction holes 36 are formed in the X stage 24 and open on the surface of the X stage 24. These suction holes 36 communicate with a vacuum pump (not shown) via a vacuum line 38. Therefore, by operating the vacuum pump with the glass plate P placed on the X stage 24, the glass plate P can be suction-fixed to the surface of the X stage 24.

A motor 14 for rotating and driving the squeegee unit 12 is disposed above the X stage 24. The rotation axis of the motor 14 extends in a direction perpendicular to the surface of the glass plate P, that is, in the Z-axis direction. ing. And the motor 14
Is supported by a lifting mechanism 16 so as to be able to move up and down along the Z-axis direction.

The elevating mechanism 16 has a support post 40 erected along the Z direction, and a guide rail 41 extending in the Z direction is fixed to the support post 40, and is movable up and down along the guide rail 41. A moving block 42 is provided. Then, the motor 14 is
And is attached to the moving block 42 via.

A lead screw 44 extending in the Z direction and meshing with the moving block 42 and a step motor 46 for driving the lead screw are attached to the support post 40. By driving the step motor 46, the motor 14 can be moved up and down together with the moving block 42.

As shown in FIGS. 1 to 3, the squeegee unit 12 is connected to a rotating shaft 14a of
A drive shaft 50 extending in the axial direction, and a plurality of, for example, four squeegees 52 connected to the drive shaft 50 and capable of contacting the surface of the glass plate P mounted on the X stage 24.
And

More specifically, the squeegee unit 12
Has four support arms 54 extending radially from the lower end of the drive shaft 50, and a holder 56 is attached to the extension end of each support arm. Each holder 56 is attached to the support arm 54 so as to be movable along the Z-axis direction and rotatable around a pivot 57 extending in a direction parallel to the surface of the X stage 24. Furthermore, each holder 56
Is urged downward, that is, toward the X stage 24 by a compression spring 60 provided between the support arm 54 and the support arm 54.

On the other hand, each squeegee 52 is formed of a material having a lower hardness than the glass plate P, for example, stainless steel, ceramic, or the like, in an elongated rectangular shape. In the present embodiment, as a stainless steel squeegee, for example, NT
L-50 made by cutter is used. Ceramic squeegees have high hardness and thus have excellent durability and are easy to remove foreign substances such as glass materials, but stainless steel squeegees are advantageous in view of cost and workability.

Each squeegee 52 is detachably attached to a holder 56, and a cutting edge 52a is formed at a lower end edge thereof. Thereby, the four squeegees 52
They extend radially with respect to the drive shaft 50 and are provided at equal intervals along the circumferential direction. Each squeegee 52 has a cutting edge 5 formed at the lower edge thereof.
The holder 2a is held by the holder 56 in a state of being inclined by a predetermined angle so that the surface 2a is in contact with the surface of the glass plate P while being inclined in the rotation direction.

As shown in FIG. 2, when the angle between the surface of the glass plate P and the squeegee 52 is θ, the angle θ is 2
The acute angle is set to 0 to 50 degrees, preferably 20 to 45 degrees. This is because if the angle θ is too large, the squeegee slides poorly, and if the angle θ is too small, it becomes difficult to design an accurate machine. In the present embodiment, the angle θ is set to, for example, 30 degrees.

The squeegee unit 12 configured as described above is moved up and down in the Z-axis direction together with the motor 14 by the elevating mechanism 16, and the drive shaft 5 is driven by the motor 14.
It is driven to rotate around zero. Each squeegee 52 attached to the holder 56 is urged toward the X stage 24 together with the holder 56 by the compression spring 60, and
7 is rotatable.

Above the squeegee unit 12, an injection nozzle 61 for jetting the grinding liquid toward the squeegee unit 12 and the glass plate P is provided. The injection nozzle 61 is attached to the motor 14,
It is possible to go up and down with.

As shown in FIG. 4, the control system of the cleaning device includes a control unit 62 for controlling the operation of the entire device. The step motors 26 and 32 of the XY stage 10 are connected to the control unit 62 via a driver 63, and the step motor 46 of the elevating mechanism 16 is connected via a driver 64. The motor 14 for driving the squeegee unit 12 is connected to the control unit 62 via a driver 66.

Further, the control system has a RAM 68 in which a control program for the entire apparatus is stored, and an operation panel 70 for inputting control data by an operator. In addition, a vacuum pump 72 connected to the vacuum line 38 and functioning as a suction unit, and a discharge pump 74 for supplying grinding water to the injection nozzle are connected to the control unit 62.

Next, a method of cleaning the surface of the glass plate P by using the cleaning device configured as described above will be described. First, as shown in FIG.
The glass plate P to be cleaned is placed on the stage 24 and set so that a predetermined position, for example, a side edge of the glass plate P is parallel to the X axis or the Y axis. The glass plate P is, for example, a glass substrate used for manufacturing a liquid crystal display panel, and a foreign substance such as a glass cullet, an adhesive, and a sealant adheres to the surface thereof.

When setting the glass plate P on the X stage 24, the squeegee unit 12 and the motor 14 are moved to a high position sufficiently away from the X stage 24 so as not to hinder the work of placing the glass plate P. Have been. After the setting of the glass plate P, the vacuum pump 72 is operated, and the glass plate P is suction-fixed on the X stage 24 by the suction force acting on the glass plate P via the vacuum line 38 and the suction hole 36.

After fixing the glass plate P, the XY stage 10 is driven so that the drive shaft 50 of the squeegee unit 12 is located above the scanning start position S of the glass plate P as shown in FIG. Then, the position of the glass plate P with respect to the squeegee unit 12 is adjusted.

In this state, the squeegee unit 12 is rotated by the motor 14 and the four squeegees 52 are driven by the drive shaft 5.
It is driven to rotate around 0. At this time, the rotation direction A of the squeegee 52 matches the inclination direction of the squeegee 52. Subsequently, the cutting edge 52a of each squeegee 52 is
The motor 1 is moved by the elevating mechanism 16 until it comes into contact with the surface of the motor 1.
4. Lower the squeegee unit 12 and the injection nozzle 61.

Here, each squeegee 52 is moved by the support arm 54 of the squeegee unit 12 in the Z-axis direction,
It is supported movably along the direction perpendicular to the surface of the glass plate P, and is supported rotatably around a pivot 57 parallel to the surface of the glass plate. Therefore, the cutting edge 52a of each squeegee 52 comes into contact with the surface of the glass plate P without any gap, and the urging force of the compression spring 60 causes the glass plate P
It is pressed against the surface with a predetermined pressure.

Thereafter, the Y-axis moving mechanism 28 of the XY stage 10 is controlled in accordance with the control program stored in the RAM 68.
And the X-axis drive mechanism 34 to drive the squeegee unit 1
The Y stage 22 is moved so that the extension line of the second drive shaft 50 moves on the surface of the glass plate P along the rectangular scanning path B.
And the X stage 24 is moved. At this time, the squeegee 52 of the squeegee unit 12 is
Inject grinding water to cool.

Thus, the four squeegees 52 of the squeegee unit 12 scan the surface of the glass plate along the scanning path B while rotating about the drive shaft 50. At this time, the cutting edge 52a of each squeegee 52 slides on the surface of the glass plate P, and scrapes off foreign matter such as glass cullet, adhesive, and sealant adhered to the surface of the glass plate by removing it from the surface of the glass plate. I do.

The scanning path B is such that the entire surface of the glass plate P is rubbed by the squeegee 52 and the driving shaft 50
In addition, the squeegee 52 is set such that the central portion in the longitudinal direction is always located on the surface of the glass plate P. Therefore, the surface of the glass plate P is covered with the four rotating squeegees 52.
As a result, the squeegee 52 rubs the entire surface of the glass plate and the foreign matter adhering to the surface of the glass plate a plurality of times from different directions. As a result, foreign substances adhering to the surface of the glass plate P are removed, and the entire surface of the glass plate is cleaned.

If the rotation speed of the squeegee unit 12 is too high, the edge of the squeegee fluctuates during cleaning around the substrate, and the edge of the glass plate P may be damaged. Therefore, the rotation speed of the squeegee unit 12 is 50 to 200 r.
pm, preferably in the range of 80 to 120 rpm. In the present embodiment, the rotation speed of the squeegee unit 12 is, for example, about 100 rpm, and the relative movement speed between the squeegee unit 12 and the glass plate P is about 25 mm /
Set to sec.

When the foreign matter adhering to the surface of the glass plate P is an adhesive or a sealant, the foreign matter is dissolved to some extent using an organic alcohol or the like before being cleaned by a cleaning device. Is desirable.

According to the cleaning device constructed as described above, while the squeegee is rotated, for example, a Corning 7059 glass plate is used to scan the surface of the squeegee to make the cleaning time the same as the conventional one. The number of times a squeegee hits a foreign substance to be removed
In addition, since the squeegee hits each foreign substance from different directions as well as 10 times, the vector of the removing force acting on the foreign substance is diversified. Therefore, the foreign matter adhering to the glass plate can be surely removed, and the removal efficiency can be improved by about 20% as compared with the related art. For this reason, it is possible to stably clean the glass plate in a shorter time as compared with the related art.

In the above-described embodiment, the case where the surface of the glass plate P is cleaned has been described. However, the cleaning device and the cleaning method described above can clean the surface of a liquid crystal display panel having a liquid crystal layer held between a pair of substrates. Also applies when cleaning. That is, a liquid crystal display device having an effective display area of 12.1 inches in diagonal size, which is configured using the above-described glass plate, is mounted on the XY stage 10, and the two main devices are arranged in the same manner as in the above embodiment. The surface was cleaned.

Thereafter, a pair of polarizing plates, for example, were attached as optical films to the outer surfaces of the respective substrates to complete a liquid crystal display panel. In the liquid crystal display panel thus obtained, no foreign matter is observed between the substrate and the optical film,
The occurrence of display defects was extremely low. Also, the processing time was sufficiently reduced as compared with the conventional case.

Next, a squeegee unit 12 according to another embodiment of the present invention will be described with reference to FIGS. The configuration other than the squeegee unit 12 is the same as that of the above-described embodiment, and a detailed description thereof will be omitted.

A holding ring 80 is fixed to the lower end of the drive shaft 50 connected to the rotating shaft 14a of the motor 14. On the outer peripheral surface of the holding ring 80, three fitting grooves 81 are formed at regular intervals in the circumferential direction, and each of the driving grooves 5 is formed.
It extends along the 0 axis direction (Z direction). A squeegee assembly 82 is attached to each fitting groove 81.

The squeegee assembly 82 has a rectangular plate-shaped base 84, which is screwed to the holding ring 80 by screws 85 with the upper end of the side edge fitted in the fitting groove 81. ing. Thereby, the base 84 is
It extends radially with respect to the drive shaft 50 and extends downward from the holding ring 80 in the Z direction.

A guide rail 86 extending in the Z direction is fixed to the base 84, and a rectangular plate-like elevating block 88 is movably supported in the Z direction by the guide rail 86. A support arm 90 is fixed to the upper end of the base 84 and extends above the lifting block 88. A guide shaft 92 is fixed to the extension end of the support arm 90.

The guide shaft 92 extends in the Z direction and extends upward and downward from the support arm 90. The lower end of the guide shaft 92 is slidably inserted into a hole (not shown) formed at the upper end of the lifting block 88. A compression coil spring 93 is mounted on the outside of the lower end of the guide shaft 92, and is disposed between the lifting block 88 and the support arm 90. The lifting block 88 is urged downward by the compression coil spring 93.

A pivot 95 is projected from the elevating block 88 and extends in parallel with the surface of the glass plate P. A pivot plate 96 is attached to the pivot 95 via a bearing 94, and is supported so as to be rotatable around the pivot. A tension spring 98 is provided between the upper end of the rotating plate 96 and the upper end of the guide shaft 92, and elastically holds the rotating plate 96 at a neutral position. The rectangular plate-shaped squeegee 52 is attached to the lower end of the rotating plate 96 via the holder 100.

The holder 100 includes a holder body 102 fixed to the lower end of the rotating plate 96 by a pair of screws 101,
And a clamper 104 screwed to the holder body with a pair of screws 103. And squeegee 5
2 is attached to the holder 100 while being sandwiched between the holder main body 102 and the clamper 104. The inclination of the squeegee 52 with respect to the surface of the glass plate P, that is, FIG.
Is adjustable by the screw 103, and is set to 20 to 50 degrees, for example, 30 degrees.

According to the squeegee unit 12 having the above-described structure, the squeegee 52 of each squeegee assembly 82 is moved in the Z-axis direction,
Are supported so as to be movable along a direction perpendicular to the surface of the glass plate, and are rotatably supported around a pivot 94 parallel to the surface of the glass plate. Therefore, the cutting edge 52 a of each squeegee 52 comes into contact with the surface of the glass plate P without any gap, and is pressed against the surface of the glass plate P with a predetermined pressure by the urging force of the compression coil spring 93.

While rotating the squeegee unit 12 at a predetermined rotation speed, for example, about 100 rpm,
By moving the surface of the glass plate P along a predetermined scanning path, the cutting edge 52a of each squeegee 52 slides on the surface of the glass plate P, and the glass cullet, the adhesive, the sealant adhered to the glass plate surface. Foreign substances such as a stopper are scraped off from the surface of the glass plate and removed.

Even when the squeegee unit 12 configured as described above is used, the same operation and effect as those of the above-described embodiment can be obtained. The present invention is not limited to the above-described embodiment, but can be variously modified within the scope of the present invention. For example, the scanning path of the squeegee unit is not limited to a rectangle, but can be set arbitrarily as needed or according to the size of the glass plate.

The squeegee unit has at least one squeegee unit.
If the number of squeegees is provided, the same operation and effect as in the above-described embodiment can be obtained, and the number of squeegees can be increased or decreased as needed. In addition, the material of the squeegee, the rotational speed, the moving speed, and the like can be variously modified as needed.

Further, it goes without saying that the cleaning method and the cleaning apparatus of the present invention can be applied not only to cleaning of a glass plate used for manufacturing a liquid crystal display panel but also to cleaning of other glass plates.

[0056]

As described above in detail, according to the present invention, since the surface of the glass plate is scanned while rotating the squeegee, foreign matters on the surface of the glass plate can be easily and reliably removed. A glass plate cleaning method and a cleaning device capable of sufficiently cleaning the plate can be provided.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a glass plate cleaning device according to an embodiment of the present invention.

FIG. 2 is a side view showing a squeegee unit of the cleaning device.

FIG. 3 is a plan view of the squeegee unit and a glass plate.

FIG. 4 is a block diagram schematically showing a configuration of a control system of the cleaning device.

FIG. 5 is a perspective view showing a squeegee unit according to another embodiment of the present invention.

FIG. 6 is a side view showing a squeegee assembly of the squeegee unit.

FIG. 7 is a front view of the squeegee assembly.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 10 ... XY stage 12 ... Squeegee unit 14 ... Motor 16 ... Elevation mechanism 22 ... Y stage 24 ... X stage 28 ... Y axis drive mechanism 32 ... X axis drive mechanism 36 ... Suction hole 50 ... Drive shaft 52 ... Squeegee 52a ... Cutting edge 54 ... Support arm 57 ... Holder 82 ... Squeegee assembly 88 ... Elevating block 96 ... Rotating plate 100 ... Holder P ... Glass plate

Claims (15)

[Claims] The squeegee is rotated about a rotation axis extending in a direction substantially perpendicular to the surface of the glass plate while the blade edge of the squeegee is in contact with the surface of the glass plate. A method for cleaning a glass plate, comprising scanning a surface of the glass plate along a predetermined direction, and removing foreign matter adhering to the surface of the glass plate by the squeegee. 2. The method for cleaning a glass plate according to claim 1, wherein the squeegee is scanned while the rotating shaft is always positioned on the surface of the glass plate. 3. The squeegee cutting edge according to claim 1, wherein
The method for cleaning a glass sheet according to claim 2 or 3, wherein the surface of the glass sheet is scanned while being constantly positioned on the surface of the glass sheet. 4. The glass plate upper surface is scanned by the plurality of squeegees while rotating a plurality of squeegees radially arranged with respect to the rotation axis. The method for cleaning a glass plate according to any one of the preceding claims. 5. A method for cleaning a glass plate, in which a blade of a squeegee is brought into contact with foreign matter adhering to the surface of the glass plate to remove the foreign matter, the blade of the squeegee being sequentially pressed against the foreign matter from a plurality of directions. A method for cleaning a glass plate, comprising removing the foreign matter. 6. A supporting means for supporting a glass sheet, a squeegee having a cutting edge capable of contacting a surface of the glass sheet supported by the supporting means, and substantially orthogonal to a surface of the glass sheet supported by the supporting means. Rotating means for rotating the squeegee about a rotation axis extending in the direction, and scanning the rotating squeegee along a predetermined path with respect to the glass plate surface with the cutting edge in contact with the glass plate surface. A glass sheet cleaning apparatus, comprising: 7. A supporting means for supporting a glass plate, a driving shaft extending in a direction substantially perpendicular to the surface of the glass plate supported by the supporting means, and a support shaft extending radially from the driving shaft and supporting the glass plate. A squeegee unit having a plurality of squeegees each having a cutting edge capable of contacting a surface of a glass plate supported by a means; rotating means for rotating the squeegee unit around the drive shaft; and the rotating squeegee unit. Scanning means for scanning the surface of the glass plate along a predetermined path in a state where the cutting edge of each squeegee is in contact with the surface of the glass plate. 8. The squeegee unit includes a plurality of support arms extending radially from the drive shaft, and a holder provided on each of the support arms and holding the squeegee detachably. 7. The method according to claim 7, wherein
The glass plate cleaning apparatus according to any one of the above. 9. Each of the holders is movable along a direction substantially parallel to the drive shaft, and is rotatable about an axis substantially parallel to the surface of the glass plate supported by the support means. 9. The glass sheet cleaning apparatus according to claim 8, wherein the apparatus is attached to the support arm. 10. The squeegee unit is provided with a plurality of squeegee assemblies attached to the drive shaft and arranged at equal intervals along the circumferential direction. Each squeegee assembly is separated from the drive shaft. A base extending radially, an elevating block movably attached to the base along a direction substantially parallel to the drive shaft, and a surface substantially parallel to a surface of the glass plate supported by the support means. A rotating plate attached to the lifting block so as to be rotatable around an axis, and a holder holding the squeegee and fixed to the rotating plate. 8. The glass plate cleaning device according to 7. 11. A supporting means, comprising: a stage on which a glass plate is placed, and movable in two directions parallel to the surface of the placed glass plate and orthogonal to each other; The glass plate cleaning apparatus according to any one of claims 6 to 10, further comprising: a driving mechanism for moving in a direction, wherein the supporting means constitutes the scanning means. 12. The supporting means comprises a plurality of suction holes opened on the surface of the stage, and suction means for sucking the glass plate onto the stage through the suction holes. The glass sheet cleaning device according to claim 11. 13. The squeegee unit according to claim 13, wherein the rotating means includes a motor connected to a drive shaft of the squeegee unit to rotate the squeegee unit, and a cutting edge of each squeegee comes into contact with a surface of the glass plate supported by the supporting means. The glass sheet cleaning apparatus according to claim 7, further comprising a lifting mechanism that raises and lowers the squeegee unit and the motor between a position and a position separated from the surface of the glass sheet. 14. The squeegee according to claim 6, wherein each of the squeegees is disposed so as to be inclined such that an angle between the glass plate surface and the squeegee is 20 to 50 degrees.
4. The glass plate cleaning device according to any one of 3. 15. The rotation speed of the squeegee unit is 5
The glass sheet cleaning apparatus according to any one of claims 6 to 14, wherein the glass sheet cleaning apparatus is set within a range of 0 to 200 rpm.