JP2008014633A5 - - Google Patents

Download PDF

Info

Publication number
JP2008014633A5
JP2008014633A5 JP2006182745A JP2006182745A JP2008014633A5 JP 2008014633 A5 JP2008014633 A5 JP 2008014633A5 JP 2006182745 A JP2006182745 A JP 2006182745A JP 2006182745 A JP2006182745 A JP 2006182745A JP 2008014633 A5 JP2008014633 A5 JP 2008014633A5
Authority
JP
Japan
Prior art keywords
vibration
support substrate
gyro sensor
sensor according
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
JP2006182745A
Other languages
English (en)
Japanese (ja)
Other versions
JP2008014633A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2006182745A priority Critical patent/JP2008014633A/ja
Priority claimed from JP2006182745A external-priority patent/JP2008014633A/ja
Priority to PCT/JP2007/063160 priority patent/WO2008001908A1/ja
Priority to US12/306,860 priority patent/US20090320593A1/en
Priority to EP07767944A priority patent/EP2040033A1/en
Priority to KR1020087031823A priority patent/KR20090024208A/ko
Priority to CNA2007800248221A priority patent/CN101484776A/zh
Publication of JP2008014633A publication Critical patent/JP2008014633A/ja
Publication of JP2008014633A5 publication Critical patent/JP2008014633A5/ja
Abandoned legal-status Critical Current

Links

JP2006182745A 2006-06-07 2006-06-30 振動型ジャイロセンサ Abandoned JP2008014633A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2006182745A JP2008014633A (ja) 2006-06-07 2006-06-30 振動型ジャイロセンサ
PCT/JP2007/063160 WO2008001908A1 (fr) 2006-06-30 2007-06-29 Gyro-capteur d'oscillations
US12/306,860 US20090320593A1 (en) 2006-06-30 2007-06-29 Vibration type gyro sensor
EP07767944A EP2040033A1 (en) 2006-06-30 2007-06-29 Oscillation gyro sensor
KR1020087031823A KR20090024208A (ko) 2006-06-30 2007-06-29 진동형 자이로 센서
CNA2007800248221A CN101484776A (zh) 2006-06-30 2007-06-29 振动型陀螺仪传感器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2006159033 2006-06-07
JP2006182745A JP2008014633A (ja) 2006-06-07 2006-06-30 振動型ジャイロセンサ

Publications (2)

Publication Number Publication Date
JP2008014633A JP2008014633A (ja) 2008-01-24
JP2008014633A5 true JP2008014633A5 (enrdf_load_stackoverflow) 2009-08-13

Family

ID=39071808

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006182745A Abandoned JP2008014633A (ja) 2006-06-07 2006-06-30 振動型ジャイロセンサ

Country Status (1)

Country Link
JP (1) JP2008014633A (enrdf_load_stackoverflow)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009192459A (ja) * 2008-02-18 2009-08-27 Panasonic Corp 角速度センサ
JP5417737B2 (ja) * 2008-04-23 2014-02-19 パナソニック株式会社 慣性力センサ
WO2011074056A1 (ja) * 2009-12-14 2011-06-23 トヨタ自動車株式会社 半導体慣性センサ及びその製造方法
JP5729551B2 (ja) * 2011-03-22 2015-06-03 セイコーエプソン株式会社 慣性センサー
JP2013113776A (ja) * 2011-11-30 2013-06-10 Tdk Corp 角速度センサ
JP6443058B2 (ja) * 2015-01-13 2018-12-26 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
EP3356286B1 (en) 2015-09-30 2022-12-21 TDK Corporation Resiliently mounted sensor system with damping
JP6942517B2 (ja) * 2017-04-27 2021-09-29 キヤノン株式会社 撮像装置およびその製造方法
JP7283140B2 (ja) * 2019-03-11 2023-05-30 セイコーエプソン株式会社 振動デバイス、電子機器および移動体

Similar Documents

Publication Publication Date Title
JP2008014633A5 (enrdf_load_stackoverflow)
CN1841020B (zh) 角速度传感器
US8646332B2 (en) Inertia force sensor
JP2006284551A5 (enrdf_load_stackoverflow)
JP5070778B2 (ja) 力学量センサ
US20090320593A1 (en) Vibration type gyro sensor
JP2008096420A5 (enrdf_load_stackoverflow)
JP2012193971A (ja) センサーモジュール、センサーデバイス、センサーデバイスの製造方法及び電子機器
JPWO2006132277A1 (ja) 複合センサ
JPWO2010032818A1 (ja) Ｍｅｍｓセンサ及び検出装置
JP2007040961A5 (enrdf_load_stackoverflow)
US20090260436A1 (en) Angular velocity sensor element
JP2008014633A (ja) 振動型ジャイロセンサ
JP2009210324A (ja) 加速度スイッチ
US20200072607A1 (en) Sensor device and electronic apparatus
CN116953283A (zh) 惯性传感器及惯性计测装置
JP7352797B2 (ja) センサ装置及びセンサ
CN116358510A (zh) 传感器模块
JP2023066602A (ja) 物理量センサー及び慣性計測装置
JP2013201638A (ja) 振動デバイス
JP6094034B2 (ja) センサーモジュールおよび電子機器
JP7308065B2 (ja) 感震センサ
US20240142491A1 (en) MEMS Device And Inertial Measurement Unit
JP2007071672A (ja) 角速度センサ
CN101135562A (zh) 振动传感器