JP2007527112A5 - - Google Patents
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- Publication number
- JP2007527112A5 JP2007527112A5 JP2006544148A JP2006544148A JP2007527112A5 JP 2007527112 A5 JP2007527112 A5 JP 2007527112A5 JP 2006544148 A JP2006544148 A JP 2006544148A JP 2006544148 A JP2006544148 A JP 2006544148A JP 2007527112 A5 JP2007527112 A5 JP 2007527112A5
- Authority
- JP
- Japan
- Prior art keywords
- pad
- layer
- operatively connected
- runner
- discrete power
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010410 layer Substances 0.000 claims 36
- 229910052751 metal Inorganic materials 0.000 claims 24
- 239000002184 metal Substances 0.000 claims 24
- 239000004065 semiconductor Substances 0.000 claims 23
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims 10
- 229910052802 copper Inorganic materials 0.000 claims 10
- 239000010949 copper Substances 0.000 claims 10
- 229910000679 solder Inorganic materials 0.000 claims 7
- 239000000758 substrate Substances 0.000 claims 6
- 238000000034 method Methods 0.000 claims 5
- 239000011241 protective layer Substances 0.000 claims 3
- 229910010165 TiCu Inorganic materials 0.000 claims 2
- 229910052782 aluminium Inorganic materials 0.000 claims 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims 2
- 239000000463 material Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US52916603P | 2003-12-12 | 2003-12-12 | |
| US54470204P | 2004-02-12 | 2004-02-12 | |
| PCT/US2004/044097 WO2005062998A2 (en) | 2003-12-12 | 2004-12-11 | Metal interconnect system and method for direct die attachment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007527112A JP2007527112A (ja) | 2007-09-20 |
| JP2007527112A5 true JP2007527112A5 (enExample) | 2007-11-08 |
Family
ID=34704266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006544148A Pending JP2007527112A (ja) | 2003-12-12 | 2004-12-11 | 直接的なダイの取付けのための金属相互接続システムおよび方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20080296690A1 (enExample) |
| JP (1) | JP2007527112A (enExample) |
| WO (2) | WO2005059957A2 (enExample) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20070257375A1 (en) * | 2006-05-02 | 2007-11-08 | Roland James P | Increased interconnect density electronic package and method of fabrication |
| DE102006050087A1 (de) | 2006-10-24 | 2008-04-30 | Austriamicrosystems Ag | Halbleiterkörper und Verfahren zum Entwurf eines Halbleiterkörpers mit einer Anschlussleitung |
| US8400784B2 (en) | 2009-08-10 | 2013-03-19 | Silergy Technology | Flip chip package for monolithic switching regulator |
| US8344504B2 (en) | 2010-07-29 | 2013-01-01 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Semiconductor structure comprising pillar and moisture barrier |
| US8314472B2 (en) | 2010-07-29 | 2012-11-20 | Avago Technologies Wireless Ip (Singapore) Pte. Ltd. | Semiconductor structure comprising pillar |
| US8536707B2 (en) | 2011-11-29 | 2013-09-17 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Semiconductor structure comprising moisture barrier and conductive redistribution layer |
| TWI869690B (zh) * | 2022-07-08 | 2025-01-11 | 聯華電子股份有限公司 | 銅柱凸塊結構及其製作方法 |
Family Cites Families (27)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02118931A (ja) * | 1988-10-27 | 1990-05-07 | Seiko Epson Corp | 光ディスクスタンパ検査装置 |
| EP1918991B1 (en) * | 1996-08-27 | 2017-04-05 | Nippon Steel & Sumitomo Metal Corporation | Semiconductor device provided with low melting point metal bumps |
| US6507070B1 (en) * | 1996-11-25 | 2003-01-14 | Semiconductor Components Industries Llc | Semiconductor device and method of making |
| FR2759493B1 (fr) * | 1997-02-12 | 2001-01-26 | Motorola Semiconducteurs | Dispositif de puissance a semiconducteur |
| US5904859A (en) * | 1997-04-02 | 1999-05-18 | Lucent Technologies Inc. | Flip chip metallization |
| JP3638085B2 (ja) * | 1998-08-17 | 2005-04-13 | 富士通株式会社 | 半導体装置 |
| US6130141A (en) * | 1998-10-14 | 2000-10-10 | Lucent Technologies Inc. | Flip chip metallization |
| US6261944B1 (en) * | 1998-11-24 | 2001-07-17 | Vantis Corporation | Method for forming a semiconductor device having high reliability passivation overlying a multi-level interconnect |
| US6256200B1 (en) * | 1999-05-27 | 2001-07-03 | Allen K. Lam | Symmetrical package for semiconductor die |
| US6570251B1 (en) * | 1999-09-02 | 2003-05-27 | Micron Technology, Inc. | Under bump metalization pad and solder bump connections |
| KR100306842B1 (ko) * | 1999-09-30 | 2001-11-02 | 윤종용 | 범프 패드에 오목 패턴이 형성된 재배치 웨이퍼 레벨 칩 사이즈 패키지 및 그 제조방법 |
| JP5156155B2 (ja) * | 1999-10-13 | 2013-03-06 | アプライド マテリアルズ インコーポレイテッド | 半導体集積回路を製造する方法 |
| US6620720B1 (en) * | 2000-04-10 | 2003-09-16 | Agere Systems Inc | Interconnections to copper IC's |
| WO2002007312A2 (en) * | 2000-07-13 | 2002-01-24 | Isothermal Systems Research, Inc. | Power semiconductor switching devices, power converters, integrated circuit assemblies, integrated circuitry, power current switching methods, methods of forming a power semiconductor switching device, power conversion methods, power semiconductor switching device packaging methods, and methods of forming a power transistor |
| US6717241B1 (en) * | 2000-08-31 | 2004-04-06 | Micron Technology, Inc. | Magnetic shielding for integrated circuits |
| US6586323B1 (en) * | 2000-09-18 | 2003-07-01 | Taiwan Semiconductor Manufacturing Company | Method for dual-layer polyimide processing on bumping technology |
| US6426281B1 (en) * | 2001-01-16 | 2002-07-30 | Taiwan Semiconductor Manufacturing Company | Method to form bump in bumping technology |
| JP4972842B2 (ja) * | 2001-05-11 | 2012-07-11 | 富士電機株式会社 | 半導体装置 |
| US6618846B2 (en) * | 2001-08-31 | 2003-09-09 | Synopsys, Inc. | Estimating capacitance effects in integrated circuits using congestion estimations |
| US6630715B2 (en) * | 2001-10-01 | 2003-10-07 | International Business Machines Corporation | Asymmetrical MOSFET layout for high currents and high speed operation |
| US6674157B2 (en) * | 2001-11-02 | 2004-01-06 | Fairchild Semiconductor Corporation | Semiconductor package comprising vertical power transistor |
| US6617655B1 (en) * | 2002-04-05 | 2003-09-09 | Fairchild Semiconductor Corporation | MOSFET device with multiple gate contacts offset from gate contact area and over source area |
| US6677672B2 (en) * | 2002-04-26 | 2004-01-13 | Semiconductor Components Industries Llc | Structure and method of forming a multiple leadframe semiconductor device |
| US6972464B2 (en) * | 2002-10-08 | 2005-12-06 | Great Wall Semiconductor Corporation | Power MOSFET |
| TWI244184B (en) * | 2002-11-12 | 2005-11-21 | Siliconware Precision Industries Co Ltd | Semiconductor device with under bump metallurgy and method for fabricating the same |
| US6897561B2 (en) * | 2003-06-06 | 2005-05-24 | Semiconductor Components Industries, Llc | Semiconductor power device having a diamond shaped metal interconnect scheme |
| WO2005057626A2 (en) * | 2003-12-04 | 2005-06-23 | Great Wall Semiconductor Corporation | System and method to reduce metal series resistance of bumped chip |
-
2004
- 2004-12-10 WO PCT/US2004/041242 patent/WO2005059957A2/en not_active Ceased
- 2004-12-11 WO PCT/US2004/044097 patent/WO2005062998A2/en not_active Ceased
- 2004-12-11 JP JP2006544148A patent/JP2007527112A/ja active Pending
- 2004-12-11 US US10/581,950 patent/US20080296690A1/en not_active Abandoned
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