JP2007520072A5 - - Google Patents

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Publication number
JP2007520072A5
JP2007520072A5 JP2006550156A JP2006550156A JP2007520072A5 JP 2007520072 A5 JP2007520072 A5 JP 2007520072A5 JP 2006550156 A JP2006550156 A JP 2006550156A JP 2006550156 A JP2006550156 A JP 2006550156A JP 2007520072 A5 JP2007520072 A5 JP 2007520072A5
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JP
Japan
Prior art keywords
nanotube
semiconductor
gate electrode
plate
conductive
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006550156A
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English (en)
Japanese (ja)
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JP2007520072A (ja
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Publication date
Priority claimed from US10/767,065 external-priority patent/US20050167655A1/en
Application filed filed Critical
Publication of JP2007520072A publication Critical patent/JP2007520072A/ja
Publication of JP2007520072A5 publication Critical patent/JP2007520072A5/ja
Pending legal-status Critical Current

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JP2006550156A 2004-01-29 2005-01-13 垂直型ナノチューブ半導体デバイス構造体及びその形成方法 Pending JP2007520072A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/767,065 US20050167655A1 (en) 2004-01-29 2004-01-29 Vertical nanotube semiconductor device structures and methods of forming the same
PCT/EP2005/050127 WO2005076381A1 (en) 2004-01-29 2005-01-13 Vertical nanotube semiconducteur device structures and methods of forming the same

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2011172859A Division JP5511746B2 (ja) 2004-01-29 2011-08-08 垂直型ナノチューブ半導体デバイス構造体の形成方法

Publications (2)

Publication Number Publication Date
JP2007520072A JP2007520072A (ja) 2007-07-19
JP2007520072A5 true JP2007520072A5 (https=) 2007-11-29

Family

ID=34807634

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2006550156A Pending JP2007520072A (ja) 2004-01-29 2005-01-13 垂直型ナノチューブ半導体デバイス構造体及びその形成方法
JP2011172859A Expired - Fee Related JP5511746B2 (ja) 2004-01-29 2011-08-08 垂直型ナノチューブ半導体デバイス構造体の形成方法

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2011172859A Expired - Fee Related JP5511746B2 (ja) 2004-01-29 2011-08-08 垂直型ナノチューブ半導体デバイス構造体の形成方法

Country Status (9)

Country Link
US (2) US20050167655A1 (https=)
EP (1) EP1708960A1 (https=)
JP (2) JP2007520072A (https=)
KR (1) KR20060127105A (https=)
CN (1) CN100580971C (https=)
IL (1) IL177125A0 (https=)
RU (1) RU2342315C2 (https=)
TW (1) TWI343123B (https=)
WO (1) WO2005076381A1 (https=)

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