JP2007519245A - 微結晶シリコン層を備えたシリコン太陽電池の製造方法 - Google Patents
微結晶シリコン層を備えたシリコン太陽電池の製造方法 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims description 5
- 229910052710 silicon Inorganic materials 0.000 title claims description 5
- 239000010703 silicon Substances 0.000 title claims description 5
- 229910021424 microcrystalline silicon Inorganic materials 0.000 title description 25
- 238000000034 method Methods 0.000 claims abstract description 57
- 230000008569 process Effects 0.000 claims abstract description 25
- 239000000758 substrate Substances 0.000 claims abstract description 13
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 claims abstract description 3
- 238000006243 chemical reaction Methods 0.000 claims description 19
- 238000000151 deposition Methods 0.000 claims description 15
- 238000009792 diffusion process Methods 0.000 claims description 5
- 230000005284 excitation Effects 0.000 claims description 3
- CMIAIUZBKPLIOP-YZLZLFLDSA-N methyl (1r,4ar,4br,10ar)-7-(2-hydroperoxypropan-2-yl)-4a-methyl-2,3,4,4b,5,6,10,10a-octahydro-1h-phenanthrene-1-carboxylate Chemical compound C1=C(C(C)(C)OO)CC[C@@H]2[C@]3(C)CCC[C@@H](C(=O)OC)[C@H]3CC=C21 CMIAIUZBKPLIOP-YZLZLFLDSA-N 0.000 claims 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract description 6
- 230000008021 deposition Effects 0.000 description 14
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 5
- 229910052796 boron Inorganic materials 0.000 description 5
- 229910021419 crystalline silicon Inorganic materials 0.000 description 5
- 229910000077 silane Inorganic materials 0.000 description 5
- 239000007789 gas Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 239000001257 hydrogen Substances 0.000 description 2
- 229910052739 hydrogen Inorganic materials 0.000 description 2
- 238000009776 industrial production Methods 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000001627 detrimental effect Effects 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000001556 precipitation Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
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- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic Table
- H01L31/182—Special manufacturing methods for polycrystalline Si, e.g. Si ribbon, poly Si ingots, thin films of polycrystalline Si
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- C23C16/24—Deposition of silicon only
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
- C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
- C23C16/5096—Flat-bed apparatus
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Abstract
Description
A.E. Delahoy, F.B. Ellis, Jr., E. Eser, S. Gau, H. Volltrauer, Z. Kiss, 6th E.C. Photovoltaic Energy Conf., London, (1984), 670 R. Platz, D. Fisher, S. Dubail, A. Shah, Sol. Enery Mat. and Sol. Cells 46 (1997), 157 Y.-M. Li, J.A. Anna Selvan, L. Li, R.A. Levy, A.E. Delahoy, 3rd World Conf. on Photovoltaic Energy Conv., Japan (2003), to be published
μc−Si:Hのp層は、i層と同様に、高い蒸着圧力と大きな高周波電力を用いた蒸着方針で製造される。シラン濃度は、i層と比べて、より高く設定され、例えば、0.004sccm/cm2 (0.04slm/m2 )のSiH4 及び1.43sccm/cm2 (14.3slm/m2 )のH2 である。
好適なμc−Si:Hバッファ層は、μc−Si:Hのp層とi層と同様に、高い蒸着圧力と大きな高周波電力を使用した蒸着方針により製造することができる。この場合、シラン濃度又はシラン流量は、μc−Si:Hのp層と同じ量に設定するが、バッファ層は真性とし、そのことは、ドーピングガスの供給の無い形で析出させることを意味する。
Claims (14)
- PECVD法を用いて、少なくとも一つのp−i−n層系列を備えた太陽電池を製造するための方法において、
p−i−n層系列のすべての層を単一の反応室によるプロセスで析出することと、
電極の間隔が5〜15mmであることと、
基板に渡ってのガスの均質な拡散を保証するシャワーヘッド形ガス投入口によって、ガス拡散を行うことと、
SiH4 のガス流量を0.01〜3sccm/cm2 に設定することと、
プロセス圧力を3〜50hPaに設定することと、
基板の加熱器温度を50〜280°Cに設定することと、
高周波電力を0.2〜2ワット/cm2 に設定することと、
を特徴とする方法。 - 電極の間隔が、10〜15mmであることを特徴とする請求項1に記載の方法。
- 当該のシャワーヘッド形ガス投入口が、選定した電極間隔よりも小さい格子を有することを特徴とする請求項1又は2に記載の方法。
- H2 のガス流量を、0.3〜30sccm/cm2 、特に0.3〜10sccm/cm2 に設定することを特徴とする請求項1から3までのいずれか一つに記載の方法。
- SiH4 のガス流量を、0.01〜1sccm/cmに設定することを特徴とする請求項1から4までのいずれか一つに記載の方法。
- プロセス圧力を、8〜15hPaに設定することを特徴とする請求項1から5までのいずれか一つに記載の方法。
- 基板の加熱器温度を、80〜180°Cに設定することを特徴とする請求項1から6までのいずれか一つに記載の方法。
- 高周波電力を、0.2〜2W/cm2 に設定することを特徴とする請求項1から7までのいずれか一つに記載の方法。
- 少なくとも一つの均質なμcシリコン層を、20x20cm、特に30x30cmより大きな面積の基板上に析出させることを特徴とする請求項1から8までのいずれか一つに記載の方法。
- テクスチャ構造を持つZnOを使用することを特徴とする請求項1から9までのいずれか一つに記載の方法。
- p層とi層の間に、バッファ層を追加して析出することを特徴とする請求項1から10までのいずれか一つに記載の方法。
- 30x30cm、特に50x50cmより大きな面積、並びに1x1mより大きな面積の基板を、均質にコーティングすることを特徴とする請求項1から11までのいずれか一つに記載の方法。
- 高いプラズマ励起周波数、特に13.56MHzの倍数の周波数を選定することを特徴とする請求項1から12までのいずれか一つに記載の方法。
- 請求項1から13までのいずれか一つに記載の方法を実施するための装置において、
0.5m2 より大きな面積を持つ個々の基板をコーティングすることが可能であることと、
電極が、15mmより小さい間隔、特に5〜15mmの間隔を有することと、
を特徴とする装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE102004003761A DE102004003761A1 (de) | 2004-01-23 | 2004-01-23 | Herstellungsverfahren für Siliziumsolarzellen umfassend µc-Siliziumschichten |
PCT/DE2004/002752 WO2005071761A1 (de) | 2004-01-23 | 2004-12-16 | HERSTELLUNGSVERFAHREN FÜR SILIZIUMSOLARZELLEN UMFASSEND µC-SILIZIUMSCHICHTEN |
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JP2007519245A true JP2007519245A (ja) | 2007-07-12 |
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US (1) | US7927907B2 (ja) |
EP (1) | EP1706908B1 (ja) |
JP (1) | JP2007519245A (ja) |
KR (1) | KR101108931B1 (ja) |
AT (1) | ATE527695T1 (ja) |
AU (1) | AU2004314625B9 (ja) |
DE (1) | DE102004003761A1 (ja) |
ES (1) | ES2374528T3 (ja) |
PT (1) | PT1706908E (ja) |
WO (1) | WO2005071761A1 (ja) |
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US20090208668A1 (en) * | 2008-02-19 | 2009-08-20 | Soo Young Choi | Formation of clean interfacial thin film solar cells |
DE102010013039A1 (de) * | 2010-03-26 | 2011-09-29 | Sunfilm Ag | Verfahren zur Herstellung einer Fotovoltaikzelle sowie Verfahren zur Herstellung einer Mehrzahl von Fotovoltaikzellen |
EP2740817A1 (en) * | 2012-12-05 | 2014-06-11 | L'air Liquide, Societe Anonyme Pour L'etude Et L'exploitation Des Procedes Georges Claude | Microcrystalline silicon thin film PECVD using hydrogen and silanes mixtures |
JP6952467B2 (ja) | 2017-01-24 | 2021-10-20 | 三星電子株式会社Samsung Electronics Co.,Ltd. | 全固体二次電池用正極活物質、全固体二次電池用正極活物質層、および全固体二次電池 |
KR20200047960A (ko) | 2018-10-29 | 2020-05-08 | 현대자동차주식회사 | 코팅층이 형성된 양극 활물질 및 이의 제조방법 |
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2004
- 2004-01-23 DE DE102004003761A patent/DE102004003761A1/de not_active Withdrawn
- 2004-12-16 PT PT04816261T patent/PT1706908E/pt unknown
- 2004-12-16 JP JP2006549849A patent/JP2007519245A/ja not_active Withdrawn
- 2004-12-16 AT AT04816261T patent/ATE527695T1/de active
- 2004-12-16 EP EP04816261A patent/EP1706908B1/de not_active Not-in-force
- 2004-12-16 KR KR1020067014905A patent/KR101108931B1/ko not_active IP Right Cessation
- 2004-12-16 AU AU2004314625A patent/AU2004314625B9/en not_active Ceased
- 2004-12-16 ES ES04816261T patent/ES2374528T3/es active Active
- 2004-12-16 US US10/587,131 patent/US7927907B2/en not_active Expired - Fee Related
- 2004-12-16 WO PCT/DE2004/002752 patent/WO2005071761A1/de active Application Filing
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11330520A (ja) * | 1998-03-09 | 1999-11-30 | Kanegafuchi Chem Ind Co Ltd | シリコン系薄膜光電変換装置の製造方法とその方法に用いられるプラズマcvd装置 |
JP2000252495A (ja) * | 1999-02-26 | 2000-09-14 | Kanegafuchi Chem Ind Co Ltd | シリコン系薄膜光電変換装置の製造方法 |
JP2002246313A (ja) * | 2001-02-13 | 2002-08-30 | Kanegafuchi Chem Ind Co Ltd | 結晶質シリコン系薄膜をプラズマcvdで形成する方法 |
JP2003173980A (ja) * | 2001-09-26 | 2003-06-20 | Kyocera Corp | 熱触媒体内蔵カソード型pecvd装置、それを用いて作製した光電変換装置並びにその製造方法、および熱触媒体内蔵カソード型pecvd法、それを用いるcvd装置、その方法により形成した膜並びにその膜を用いて形成したデバイス |
Also Published As
Publication number | Publication date |
---|---|
PT1706908E (pt) | 2012-01-09 |
EP1706908B1 (de) | 2011-10-05 |
EP1706908A1 (de) | 2006-10-04 |
KR20070004590A (ko) | 2007-01-09 |
US7927907B2 (en) | 2011-04-19 |
ES2374528T3 (es) | 2012-02-17 |
AU2004314625A1 (en) | 2005-08-04 |
DE102004003761A1 (de) | 2005-08-25 |
US20080274582A1 (en) | 2008-11-06 |
KR101108931B1 (ko) | 2012-01-31 |
AU2004314625B2 (en) | 2011-04-14 |
AU2004314625B9 (en) | 2011-06-09 |
WO2005071761A1 (de) | 2005-08-04 |
ATE527695T1 (de) | 2011-10-15 |
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