JP2007513372A5 - - Google Patents

Download PDF

Info

Publication number
JP2007513372A5
JP2007513372A5 JP2006541857A JP2006541857A JP2007513372A5 JP 2007513372 A5 JP2007513372 A5 JP 2007513372A5 JP 2006541857 A JP2006541857 A JP 2006541857A JP 2006541857 A JP2006541857 A JP 2006541857A JP 2007513372 A5 JP2007513372 A5 JP 2007513372A5
Authority
JP
Japan
Prior art keywords
lens
optical system
projection optical
refractive power
lenses
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2006541857A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007513372A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/EP2004/013519 external-priority patent/WO2005054956A2/en
Publication of JP2007513372A publication Critical patent/JP2007513372A/ja
Publication of JP2007513372A5 publication Critical patent/JP2007513372A5/ja
Pending legal-status Critical Current

Links

JP2006541857A 2003-12-02 2004-11-25 投影光学系 Pending JP2007513372A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US52609603P 2003-12-02 2003-12-02
PCT/EP2004/013519 WO2005054956A2 (en) 2003-12-02 2004-11-25 Projection optical system

Publications (2)

Publication Number Publication Date
JP2007513372A JP2007513372A (ja) 2007-05-24
JP2007513372A5 true JP2007513372A5 (enExample) 2010-04-30

Family

ID=34652415

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006541857A Pending JP2007513372A (ja) 2003-12-02 2004-11-25 投影光学系

Country Status (7)

Country Link
US (1) US7492509B2 (enExample)
EP (2) EP2040123B9 (enExample)
JP (1) JP2007513372A (enExample)
KR (2) KR101255854B1 (enExample)
CN (1) CN100538524C (enExample)
DE (1) DE602004019142D1 (enExample)
WO (1) WO2005054956A2 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8208198B2 (en) 2004-01-14 2012-06-26 Carl Zeiss Smt Gmbh Catadioptric projection objective
WO2005054956A2 (en) 2003-12-02 2005-06-16 Carl Zeiss Smt Ag Projection optical system
US20080151365A1 (en) 2004-01-14 2008-06-26 Carl Zeiss Smt Ag Catadioptric projection objective
KR101213831B1 (ko) 2004-05-17 2012-12-24 칼 짜이스 에스엠티 게엠베하 중간이미지를 갖는 카타디옵트릭 투사 대물렌즈
US7301707B2 (en) 2004-09-03 2007-11-27 Carl Zeiss Smt Ag Projection optical system and method
EP1839092A2 (en) * 2004-12-30 2007-10-03 Carl Zeiss SMT AG Projection optical system
CN105759543A (zh) * 2014-12-17 2016-07-13 深圳市亿思达科技集团有限公司 投影光学系统及投影装置
TWI708961B (zh) * 2015-08-13 2020-11-01 新加坡商海特根微光學公司 用於三維數據採集之照明組件
CN108292038B (zh) * 2015-12-07 2021-01-15 Asml控股股份有限公司 物镜系统
CN110646930A (zh) * 2018-04-20 2020-01-03 美国奈维特公司 具有大变焦范围的高光学扩展量镜头组件
CN117036647B (zh) * 2023-10-10 2023-12-12 中国电建集团昆明勘测设计研究院有限公司 基于倾斜实景三维模型的地面曲面提取方法

Family Cites Families (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4613940A (en) * 1982-11-09 1986-09-23 International Microelectronic Products Method and structure for use in designing and building electronic systems in integrated circuits
US5969803A (en) * 1998-06-30 1999-10-19 Nikon Corporation Large NA projection lens for excimer laser lithographic systems
JP2001051193A (en) * 1999-06-03 2001-02-23 Nikon Corp Projection optical system projection exposing device provided with the system and manufacture of device
WO2001023933A1 (en) * 1999-09-29 2001-04-05 Nikon Corporation Projection optical system
WO2001023935A1 (en) * 1999-09-29 2001-04-05 Nikon Corporation Projection exposure method and apparatus and projection optical system
DE19955984A1 (de) * 1999-11-20 2001-05-23 Zeiss Carl Optische Abbildungsvorrichtung, insbesondere Objektiv mit wenigstens einer Systemblende
US7187503B2 (en) * 1999-12-29 2007-03-06 Carl Zeiss Smt Ag Refractive projection objective for immersion lithography
JP3576961B2 (ja) * 2000-11-10 2004-10-13 キヤノン株式会社 投影露光装置及びデバイス製造方法
KR100866818B1 (ko) * 2000-12-11 2008-11-04 가부시키가이샤 니콘 투영광학계 및 이 투영광학계를 구비한 노광장치
DE10064685A1 (de) * 2000-12-22 2002-07-04 Zeiss Carl Lithographieobjektiv mit einer ersten Linsengruppe, bestehend ausschließlich aus Linsen positiver Brechkraft
JP2002323653A (ja) * 2001-02-23 2002-11-08 Nikon Corp 投影光学系，投影露光装置および投影露光方法
JP2002287023A (ja) * 2001-03-27 2002-10-03 Nikon Corp 投影光学系、該投影光学系を備えた投影露光装置及び投影露光方法
US20040075894A1 (en) * 2001-12-10 2004-04-22 Shafer David R. Catadioptric reduction objective
WO2003050587A2 (de) 2001-12-10 2003-06-19 Carl Zeiss Smt Ag Katadioptrisches reduktionsobjektiv
AU2003210214A1 (en) 2002-03-01 2003-09-16 Carl Zeiss Smt Ag Refractive projection lens
US7154676B2 (en) * 2002-03-01 2006-12-26 Carl Zeiss Smt A.G. Very-high aperture projection objective
US7190527B2 (en) * 2002-03-01 2007-03-13 Carl Zeiss Smt Ag Refractive projection objective
DE10229249A1 (de) * 2002-03-01 2003-09-04 Zeiss Carl Semiconductor Mfg Refraktives Projektionsobjektiv mit einer Taille
DE10210899A1 (de) * 2002-03-08 2003-09-18 Zeiss Carl Smt Ag Refraktives Projektionsobjektiv für Immersions-Lithographie
JP2004086128A (ja) * 2002-07-04 2004-03-18 Nikon Corp 投影光学系、露光装置、およびデバイス製造方法
US8009343B2 (en) 2003-08-01 2011-08-30 Carl Zeiss Smt Gmbh Optical imaging device having at least one system diaphragm
JP2005109286A (ja) * 2003-10-01 2005-04-21 Nikon Corp 投影光学系、露光装置、および露光方法
JP2005114881A (ja) * 2003-10-06 2005-04-28 Nikon Corp 投影光学系、露光装置、および露光方法
WO2005054956A2 (en) 2003-12-02 2005-06-16 Carl Zeiss Smt Ag Projection optical system

Similar Documents

Publication Publication Date Title
JP2011100094A5 (enExample)
JP2005519332A5 (enExample)
JP2005519347A (ja) 最大開口型の投影対物レンズ
US20060050398A1 (en) Flat wide-angle lens system
JP2018084598A5 (enExample)
JP2008547039A5 (enExample)
JP2009536373A5 (enExample)
JP2019179082A5 (enExample)
JP2001141997A5 (enExample)
JP2009169249A5 (enExample)
TW201303353A (zh) 變焦鏡頭
JP2008096656A5 (enExample)
JP2007513372A5 (enExample)
CN110709747A (zh) 摄像用的光学系统和摄像装置
TW201743102A (zh) 光學系統及其光學鏡頭
US7301702B2 (en) Diffractive optical element and optical system including the same
JP2021092694A5 (enExample)
JP2008203304A5 (enExample)
JP3005905B2 (ja) 撮影レンズ
CN101231378B (zh) 一种全折射式投影光学系统
JP2005215518A5 (enExample)
JP2001356268A5 (enExample)
CN115933129A (zh) 取像镜头
WO2020021662A1 (ja) 顕微鏡対物レンズおよび顕微鏡
JPWO2019124081A5 (enExample)