JP2007505367A5 - - Google Patents

Info

Publication number

JP2007505367A5

JP2007505367A5 JP2006532953A JP2006532953A JP2007505367A5 JP 2007505367 A5 JP2007505367 A5 JP 2007505367A5 JP 2006532953 A JP2006532953 A JP 2006532953A JP 2006532953 A JP2006532953 A JP 2006532953A JP 2007505367 A5 JP2007505367 A5 JP 2007505367A5

Authority

JP

Japan

Prior art keywords

segment

sensitive layer

radiation sensitive

support

radiation

Prior art date

2004-05-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Withdrawn

Links

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• -1 diphenyliodonium hexafluorophosphate Chemical compound 0.000 claims 10
• 230000005855 radiation Effects 0.000 claims 10
• 239000000203 mixture Substances 0.000 claims 6
• 150000003839 salts Chemical class 0.000 claims 6
• 229920003171 Poly (ethylene oxide) Polymers 0.000 claims 4
• 230000002209 hydrophobic effect Effects 0.000 claims 4
• 239000003999 initiator Substances 0.000 claims 4
• 239000000463 material Substances 0.000 claims 4
• 239000002243 precursor Substances 0.000 claims 4
• 239000006100 radiation absorber Substances 0.000 claims 4
• 239000011230 binding agent Substances 0.000 claims 3
• 239000011248 coating agent Substances 0.000 claims 2
• 238000000576 coating method Methods 0.000 claims 2
• 238000004519 manufacturing process Methods 0.000 claims 2
• 229920005596 polymer binder Polymers 0.000 claims 2
• 239000002491 polymer binding agent Substances 0.000 claims 2
• YBOGGLIJTSTNGC-UHFFFAOYSA-M 2-cyanoethyl(triphenyl)phosphanium;chloride Chemical compound [Cl-].C=1C=CC=CC=1[P+](C=1C=CC=CC=1)(CCC#N)C1=CC=CC=C1 YBOGGLIJTSTNGC-UHFFFAOYSA-M 0.000 claims 1
• TVIAHRDFWXRZAP-UHFFFAOYSA-N 2-phenoxybenzenediazonium Chemical compound N#[N+]C1=CC=CC=C1OC1=CC=CC=C1 TVIAHRDFWXRZAP-UHFFFAOYSA-N 0.000 claims 1
• LUGVQQXOGHCZNN-UHFFFAOYSA-N 2-phenyliodoniobenzoate Chemical compound [O-]C(=O)C1=CC=CC=C1[I+]C1=CC=CC=C1 LUGVQQXOGHCZNN-UHFFFAOYSA-N 0.000 claims 1
• BMAFNRPGKSUBAX-UHFFFAOYSA-L 4-anilino-2-methoxybenzenediazonium [benzyl(ethenyl)-lambda4-sulfanylidene]-dioxido-oxo-lambda6-sulfane Chemical compound C(=C)S(=S(=O)([O-])[O-])CC1=CC=CC=C1.COC1=C(C=CC(=C1)NC1=CC=CC=C1)[N+]#N.COC1=C(C=CC(=C1)NC1=CC=CC=C1)[N+]#N BMAFNRPGKSUBAX-UHFFFAOYSA-L 0.000 claims 1
• GQLZYMNBOHZTNB-UHFFFAOYSA-M 4-anilino-2-methoxybenzenediazonium;hexadecyl sulfate Chemical compound C1=C([N+]#N)C(OC)=CC(NC=2C=CC=CC=2)=C1.CCCCCCCCCCCCCCCCOS([O-])(=O)=O GQLZYMNBOHZTNB-UHFFFAOYSA-M 0.000 claims 1
• GSFWUNOPQXILSI-UHFFFAOYSA-M 4-anilino-2-methoxybenzenediazonium;octyl sulfate Chemical compound CCCCCCCCOS([O-])(=O)=O.C1=C([N+]#N)C(OC)=CC(NC=2C=CC=CC=2)=C1 GSFWUNOPQXILSI-UHFFFAOYSA-M 0.000 claims 1
• ZCYVEMRRCGMTRW-UHFFFAOYSA-N 7553-56-2 Chemical group [I] ZCYVEMRRCGMTRW-UHFFFAOYSA-N 0.000 claims 1
• 230000001588 bifunctional effect Effects 0.000 claims 1
• RSJLWBUYLGJOBD-UHFFFAOYSA-M diphenyliodanium;chloride Chemical group [Cl-].C=1C=CC=CC=1[I+]C1=CC=CC=C1 RSJLWBUYLGJOBD-UHFFFAOYSA-M 0.000 claims 1
• FFAOSSINTSWWDT-UHFFFAOYSA-M diphenyliodanium;octyl sulfate Chemical compound CCCCCCCCOS([O-])(=O)=O.C=1C=CC=CC=1[I+]C1=CC=CC=C1 FFAOSSINTSWWDT-UHFFFAOYSA-M 0.000 claims 1
• 238000001035 drying Methods 0.000 claims 1
• 229920000578 graft copolymer Polymers 0.000 claims 1
• XMBWDFGMSWQBCA-UHFFFAOYSA-N hydrogen iodide Chemical class I XMBWDFGMSWQBCA-UHFFFAOYSA-N 0.000 claims 1
• 229920001600 hydrophobic polymer Polymers 0.000 claims 1
• 229910052740 iodine Inorganic materials 0.000 claims 1
• 125000005647 linker group Chemical group 0.000 claims 1
• NTFQXVLCDLIZMU-UHFFFAOYSA-M octyl sulfate;triphenylsulfanium Chemical compound CCCCCCCCOS([O-])(=O)=O.C1=CC=CC=C1[S+](C=1C=CC=CC=1)C1=CC=CC=C1 NTFQXVLCDLIZMU-UHFFFAOYSA-M 0.000 claims 1
• WGNAKZGUSRVWRH-UHFFFAOYSA-N p-cresol sulfate Chemical compound CC1=CC=C(OS(O)(=O)=O)C=C1 WGNAKZGUSRVWRH-UHFFFAOYSA-N 0.000 claims 1
• KTNLYTNKBOKXRW-UHFFFAOYSA-N phenyliodanium Chemical compound [IH+]C1=CC=CC=C1 KTNLYTNKBOKXRW-UHFFFAOYSA-N 0.000 claims 1
• 229920000642 polymer Polymers 0.000 claims 1
• 125000001424 substituent group Chemical group 0.000 claims 1