JP2007315918A5 - - Google Patents

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Publication number
JP2007315918A5
JP2007315918A5 JP2006145881A JP2006145881A JP2007315918A5 JP 2007315918 A5 JP2007315918 A5 JP 2007315918A5 JP 2006145881 A JP2006145881 A JP 2006145881A JP 2006145881 A JP2006145881 A JP 2006145881A JP 2007315918 A5 JP2007315918 A5 JP 2007315918A5
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JP
Japan
Prior art keywords
probe
sample
position control
speed
sample surface
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Application number
JP2006145881A
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English (en)
Japanese (ja)
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JP2007315918A (ja
JP4873460B2 (ja
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Priority to JP2006145881A priority Critical patent/JP4873460B2/ja
Priority claimed from JP2006145881A external-priority patent/JP4873460B2/ja
Priority to US11/802,624 priority patent/US7703314B2/en
Priority to CN200710138848A priority patent/CN100578679C/zh
Priority to KR1020070050792A priority patent/KR100909700B1/ko
Publication of JP2007315918A publication Critical patent/JP2007315918A/ja
Publication of JP2007315918A5 publication Critical patent/JP2007315918A5/ja
Application granted granted Critical
Publication of JP4873460B2 publication Critical patent/JP4873460B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2006145881A 2006-05-25 2006-05-25 探針位置制御装置 Expired - Fee Related JP4873460B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2006145881A JP4873460B2 (ja) 2006-05-25 2006-05-25 探針位置制御装置
US11/802,624 US7703314B2 (en) 2006-05-25 2007-05-24 Probe position control system and method
CN200710138848A CN100578679C (zh) 2006-05-25 2007-05-24 探针位置控制系统和方法
KR1020070050792A KR100909700B1 (ko) 2006-05-25 2007-05-25 탐침위치 제어장치 및 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2006145881A JP4873460B2 (ja) 2006-05-25 2006-05-25 探針位置制御装置

Publications (3)

Publication Number Publication Date
JP2007315918A JP2007315918A (ja) 2007-12-06
JP2007315918A5 true JP2007315918A5 (enExample) 2009-07-30
JP4873460B2 JP4873460B2 (ja) 2012-02-08

Family

ID=38748276

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006145881A Expired - Fee Related JP4873460B2 (ja) 2006-05-25 2006-05-25 探針位置制御装置

Country Status (4)

Country Link
US (1) US7703314B2 (enExample)
JP (1) JP4873460B2 (enExample)
KR (1) KR100909700B1 (enExample)
CN (1) CN100578679C (enExample)

Families Citing this family (27)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4474556B2 (ja) * 2005-12-19 2010-06-09 国立大学法人金沢大学 走査型プローブ顕微鏡
US7712354B2 (en) * 2006-06-06 2010-05-11 Jeol Ltd. Method and apparatus for controlling Z-position of probe
JP4960724B2 (ja) * 2007-02-23 2012-06-27 パナソニック株式会社 赤外線センサおよびその製造方法
JP5424404B2 (ja) * 2008-02-12 2014-02-26 国立大学法人秋田大学 表面状態計測装置及び該装置を用いた表面状態計測方法
US20110074476A1 (en) * 2008-05-27 2011-03-31 Flavio Heer Apparatus for lock-in amplifying an input signal and method for generating a reference signal for a lock-in amplifier
US20100100991A1 (en) * 2008-10-20 2010-04-22 Nanochip, Inc. Charge-Amp Based Piezoelectric Charge Microscopy (CPCM) Reading of Ferroelectric Bit Charge Signal
KR101700473B1 (ko) * 2009-12-01 2017-01-26 브루커 나노, 인코퍼레이션. 스캐닝 프로브 현미경을 작동하는 방법 및 장치
KR101807186B1 (ko) * 2010-03-19 2017-12-08 브루커 나노, 인코퍼레이션. 저 드리프트 스캐닝 프로브 현미경
FR2959823B1 (fr) * 2010-05-07 2013-05-17 Centre Nat Rech Scient Microscope a force atomique fonctionnant en mode circulaire, dispositif permettant sa mise en oeuvre et procede de mesure
CN102346202A (zh) * 2010-07-29 2012-02-08 鸿富锦精密工业（深圳）有限公司 机械手
JP5592841B2 (ja) * 2011-06-16 2014-09-17 株式会社日立製作所 磁気力顕微鏡及びそれを用いた磁場観察方法
KR101417209B1 (ko) * 2011-07-07 2014-07-11 한양대학교 산학협력단 주사 탐침 현미경을 이용하여 획득된 데이터 값들에 존재하는 왜곡의 제거 장치 및 방법
US8989511B1 (en) 2012-06-28 2015-03-24 Western Digital Technologies, Inc. Methods for correcting for thermal drift in microscopy images
US8490211B1 (en) 2012-06-28 2013-07-16 Western Digital Technologies, Inc. Methods for referencing related magnetic head microscopy scans to reduce processing requirements for high resolution imaging
JP6185701B2 (ja) * 2012-10-15 2017-08-23 株式会社ミツトヨ 形状測定装置
US8860505B2 (en) 2013-02-04 2014-10-14 Zurich Instruments Ag Lock-in amplifier with phase-synchronous processing
WO2014143727A1 (en) * 2013-03-15 2014-09-18 Bruker Nano, Inc. Method and apparatus for adaptive tracking using a scanning probe microscope
JP6274949B2 (ja) * 2014-04-04 2018-02-07 オリンパス株式会社 光ファイバスキャナ、照明装置および観察装置
KR101710337B1 (ko) * 2015-06-02 2017-02-28 파크시스템스 주식회사 조정 가능한 스캔 속도를 가지는 측정 장치 및 측정 방법
EP3314271B1 (en) * 2015-06-25 2022-02-09 Bruker Nano, Inc. Sample vessel retention for an inverted microscope with a scanning probe microscope
KR101607606B1 (ko) * 2015-08-17 2016-03-31 한국표준과학연구원 원자간력 현미경의 측정 방법
JP6848640B2 (ja) * 2017-04-17 2021-03-24 株式会社島津製作所 走査型プローブ顕微鏡
CN107967693B (zh) * 2017-12-01 2021-07-09 北京奇虎科技有限公司 视频关键点处理方法、装置、计算设备及计算机存储介质
KR102216627B1 (ko) * 2019-09-17 2021-02-17 안동대학교 산학협력단 주사 탐침 현미경
DE102019131421A1 (de) * 2019-11-21 2021-05-27 Bruker Nano Gmbh Messvorrichtung für ein Rastersondenmikroskop und Verfahren zum rastersondenmikroskopischen Untersuchen einer Messprobe mit einem Rastersondenmikroskop
JP7625971B2 (ja) * 2021-05-27 2025-02-04 株式会社島津製作所 走査型プローブ顕微鏡および制御方法
WO2025216036A1 (ja) * 2024-04-08 2025-10-16 株式会社島津製作所 走査型プローブ顕微鏡およびその制御方法

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Publication number Priority date Publication date Assignee Title
US6169281B1 (en) * 1998-07-29 2001-01-02 International Business Machines Corporation Apparatus and method for determining side wall profiles using a scanning probe microscope having a probe dithered in lateral directions
JP4576520B2 (ja) 2000-07-18 2010-11-10 国立大学法人北陸先端科学技術大学院大学 試料表面の電子エネルギ準位の測定方法
US7013717B1 (en) 2001-12-06 2006-03-21 Veeco Instruments Inc. Manual control with force-feedback for probe microscopy-based force spectroscopy
US7473887B2 (en) * 2002-07-04 2009-01-06 University Of Bristol Of Senate House Resonant scanning probe microscope
JP4872074B2 (ja) 2005-04-08 2012-02-08 国立大学法人大阪大学 原子位置固定装置、原子位置固定方法、原子操作方法及び原子間力測定方法

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