JP2007294088A - 熱的に誘発される突出を減少せしめる磁気書き込みヘッド及びその製造方法 - Google Patents
熱的に誘発される突出を減少せしめる磁気書き込みヘッド及びその製造方法 Download PDFInfo
- Publication number
- JP2007294088A JP2007294088A JP2007096452A JP2007096452A JP2007294088A JP 2007294088 A JP2007294088 A JP 2007294088A JP 2007096452 A JP2007096452 A JP 2007096452A JP 2007096452 A JP2007096452 A JP 2007096452A JP 2007294088 A JP2007294088 A JP 2007294088A
- Authority
- JP
- Japan
- Prior art keywords
- coil
- layer
- magnetic
- write
- photoresist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000005291 magnetic effect Effects 0.000 title claims abstract description 150
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 54
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims abstract description 43
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 28
- 238000009413 insulation Methods 0.000 claims abstract description 18
- 239000000463 material Substances 0.000 claims abstract description 9
- 238000004804 winding Methods 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 19
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 239000004020 conductor Substances 0.000 claims description 6
- 230000008569 process Effects 0.000 claims description 6
- 239000000945 filler Substances 0.000 claims description 5
- 239000000696 magnetic material Substances 0.000 claims description 5
- 238000000206 photolithography Methods 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000008878 coupling Effects 0.000 claims description 2
- 238000010168 coupling process Methods 0.000 claims description 2
- 238000005859 coupling reaction Methods 0.000 claims description 2
- 238000000151 deposition Methods 0.000 claims 7
- 238000000059 patterning Methods 0.000 claims 3
- 239000012777 electrically insulating material Substances 0.000 claims 2
- 238000003892 spreading Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 239000010410 layer Substances 0.000 description 98
- 230000004907 flux Effects 0.000 description 8
- 239000000725 suspension Substances 0.000 description 6
- 230000005415 magnetization Effects 0.000 description 5
- 238000003860 storage Methods 0.000 description 5
- 229910003321 CoFe Inorganic materials 0.000 description 4
- 229910001030 Iron–nickel alloy Inorganic materials 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- 230000005294 ferromagnetic effect Effects 0.000 description 3
- 238000005339 levitation Methods 0.000 description 3
- 238000001020 plasma etching Methods 0.000 description 3
- 239000011241 protective layer Substances 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 239000003989 dielectric material Substances 0.000 description 2
- 238000009713 electroplating Methods 0.000 description 2
- 230000006870 function Effects 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 238000004590 computer program Methods 0.000 description 1
- 239000002772 conduction electron Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 235000019788 craving Nutrition 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005292 diamagnetic effect Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 230000001939 inductive effect Effects 0.000 description 1
- 230000007787 long-term memory Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 229910000702 sendust Inorganic materials 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/1278—Structure or manufacture of heads, e.g. inductive specially adapted for magnetisations perpendicular to the surface of the record carrier
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3109—Details
- G11B5/313—Disposition of layers
- G11B5/3133—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure
- G11B5/3136—Disposition of layers including layers not usually being a part of the electromagnetic transducer structure and providing additional features, e.g. for improving heat radiation, reduction of power dissipation, adaptations for measurement or indication of gap depth or other properties of the structure for reducing the pole-tip-protrusion at the head transducing surface, e.g. caused by thermal expansion of dissimilar materials
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Magnetic Heads (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US11/411,590 US7593183B2 (en) | 2006-04-25 | 2006-04-25 | Magnetic write head design for reducing temperature induced protrusion |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007294088A true JP2007294088A (ja) | 2007-11-08 |
| JP2007294088A5 JP2007294088A5 (enExample) | 2010-04-15 |
Family
ID=38619242
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007096452A Pending JP2007294088A (ja) | 2006-04-25 | 2007-04-02 | 熱的に誘発される突出を減少せしめる磁気書き込みヘッド及びその製造方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US7593183B2 (enExample) |
| JP (1) | JP2007294088A (enExample) |
| CN (1) | CN101064115A (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7515381B2 (en) * | 2005-12-22 | 2009-04-07 | Hitachi Global Storage Technologies Netherlands B.V. | Method for fabricating a side shield for a flux guide layer for perpendicular magnetic recording |
| JP2008112545A (ja) * | 2006-10-31 | 2008-05-15 | Fujitsu Ltd | ヘッドスライダ支持機構の製造方法、ヘッドスライダおよび記憶装置 |
| JP2009157987A (ja) * | 2007-12-26 | 2009-07-16 | Hitachi Global Storage Technologies Netherlands Bv | ヘッド・スライダのリセス量を調整する方法及びディスク・ドライブ装置 |
| JP2010118099A (ja) * | 2008-11-11 | 2010-05-27 | Hitachi Global Storage Technologies Netherlands Bv | 磁気ヘッド・スライダ及び磁気ヘッド・スライダの製造方法 |
| US8749920B1 (en) | 2011-12-16 | 2014-06-10 | Western Digital (Fremont), Llc | Magnetic recording head with dynamic fly height heating and having thermally controlled pole tip protrusion to control and protect reader element |
| US8670214B1 (en) * | 2011-12-20 | 2014-03-11 | Western Digital (Fremont), Llc | Method and system for providing enhanced thermal expansion for hard disk drives |
| US8861317B1 (en) | 2013-04-02 | 2014-10-14 | Western Digital (Fremont), Llc | Heat assisted magnetic recording transducer having protective pads |
| US9343098B1 (en) | 2013-08-23 | 2016-05-17 | Western Digital (Fremont), Llc | Method for providing a heat assisted magnetic recording transducer having protective pads |
| US9099116B2 (en) | 2013-08-28 | 2015-08-04 | HGST Netherlands, B.V. | Stiff discrete insert array for thermal PTR management with desired induced stress state that reduces tendency for write pole erasure |
| US9411234B2 (en) * | 2014-10-01 | 2016-08-09 | Seagate Technology Llc | Writer pole formation |
| US9478242B1 (en) | 2016-03-25 | 2016-10-25 | Western Digital (Fremont), Llc | Magnetic recording apparatus having a recessed additional pole segment |
| IT201900022488A1 (it) * | 2019-11-29 | 2021-05-29 | St Microelectronics Srl | Dispositivo di lettura/scrittura per un sistema di memoria a disco rigido e relativo procedimento di fabbricazione |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07311912A (ja) * | 1994-05-16 | 1995-11-28 | Daido Steel Co Ltd | 薄膜コイルの製造方法 |
| JP2001060307A (ja) * | 1999-08-24 | 2001-03-06 | Tdk Corp | 薄膜磁気ヘッドおよびその製造方法 |
| JP2002298309A (ja) * | 2001-01-26 | 2002-10-11 | Alps Electric Co Ltd | 磁気ヘッド及びその製造方法 |
| JP2003030803A (ja) * | 2001-06-18 | 2003-01-31 | Internatl Business Mach Corp <Ibm> | 磁気ヘッド組立体およびその製造方法 |
| JP2005050510A (ja) * | 2003-07-30 | 2005-02-24 | Hitachi Global Storage Technologies Netherlands Bv | 第1磁極片に磁気的に結合された書込みシールドを有する垂直記録磁気ヘッド |
Family Cites Families (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6226860B1 (en) | 1997-07-22 | 2001-05-08 | Seagate Technology, Inc. | Method of forming an inductive writer having a high conductor/insulator ratio |
| JP3523092B2 (ja) | 1998-11-18 | 2004-04-26 | Tdk株式会社 | 薄膜磁気ヘッドおよびその製造方法 |
| US6728065B2 (en) * | 2001-03-29 | 2004-04-27 | Seagate Technology Llc | Single pole magnetic recording head for perpendicular magnetic recording |
| US6757141B2 (en) * | 2002-01-18 | 2004-06-29 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular recording write head with a ferromagnetic shaping layer |
| JP3950789B2 (ja) * | 2002-07-17 | 2007-08-01 | アルプス電気株式会社 | 薄膜磁気ヘッドの製造方法 |
| US6989963B2 (en) * | 2002-09-13 | 2006-01-24 | Seagate Technology Llc | Writer core structures having improved thermal dissipation properties |
| US6804879B2 (en) | 2002-10-23 | 2004-10-19 | Hitachi Global Storage Technologies Netherlands, B.V. | Method of fabricating a magnetic transducer with a write head having a multi-layer coil |
| US20040085684A1 (en) | 2002-11-05 | 2004-05-06 | Basra Vijay K. | Magnetic read/write head |
| JP3842724B2 (ja) | 2002-11-29 | 2006-11-08 | アルプス電気株式会社 | 磁気ヘッドの製造方法 |
| US7199973B2 (en) * | 2003-09-26 | 2007-04-03 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular magnetic recording head with trailing shield throat height less than shaping layer distance from ABS |
| US7322095B2 (en) * | 2004-04-21 | 2008-01-29 | Headway Technologies, Inc. | Process of manufacturing a four-sided shield structure for a perpendicular write head |
| US7394621B2 (en) * | 2004-06-30 | 2008-07-01 | Headway Technologies, Inc. | Using bilayer lithography process to define neck height for PMR |
| US7292408B2 (en) * | 2004-07-30 | 2007-11-06 | Hitachi Global Storage Technologies Netherlands B.V. | Bilayer coil insulation for magnetic write heads to minimize pole recession |
| JP4286208B2 (ja) * | 2004-10-20 | 2009-06-24 | ヒタチグローバルストレージテクノロジーズネザーランドビーブイ | 垂直記録用磁気ヘッドとその製造方法及びそれを用いた磁気ディスク装置 |
| JP4763264B2 (ja) * | 2004-10-25 | 2011-08-31 | ヒタチグローバルストレージテクノロジーズネザーランドビーブイ | 垂直記録用磁気ヘッド |
| US7551396B2 (en) * | 2005-04-27 | 2009-06-23 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular magnetic write head having a studded trailing shield compatible with read/write offset |
| JP2007242131A (ja) * | 2006-03-08 | 2007-09-20 | Fujitsu Ltd | 磁気ヘッドの製造方法および磁気ヘッド |
| US7612963B2 (en) * | 2006-06-30 | 2009-11-03 | Hitachi Global Storage Technologies Netherlands B.V. | Perpendicular magnetic recording head with photoresist dam between write coil and air bearing surface |
-
2006
- 2006-04-25 US US11/411,590 patent/US7593183B2/en not_active Expired - Fee Related
-
2007
- 2007-04-02 JP JP2007096452A patent/JP2007294088A/ja active Pending
- 2007-04-25 CN CNA2007101018676A patent/CN101064115A/zh active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07311912A (ja) * | 1994-05-16 | 1995-11-28 | Daido Steel Co Ltd | 薄膜コイルの製造方法 |
| JP2001060307A (ja) * | 1999-08-24 | 2001-03-06 | Tdk Corp | 薄膜磁気ヘッドおよびその製造方法 |
| JP2002298309A (ja) * | 2001-01-26 | 2002-10-11 | Alps Electric Co Ltd | 磁気ヘッド及びその製造方法 |
| JP2003030803A (ja) * | 2001-06-18 | 2003-01-31 | Internatl Business Mach Corp <Ibm> | 磁気ヘッド組立体およびその製造方法 |
| JP2005050510A (ja) * | 2003-07-30 | 2005-02-24 | Hitachi Global Storage Technologies Netherlands Bv | 第1磁極片に磁気的に結合された書込みシールドを有する垂直記録磁気ヘッド |
Also Published As
| Publication number | Publication date |
|---|---|
| CN101064115A (zh) | 2007-10-31 |
| US7593183B2 (en) | 2009-09-22 |
| US20070247750A1 (en) | 2007-10-25 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11276422B2 (en) | Magnetic recording head with non-magnetic conductive structure | |
| JP2007294088A (ja) | 熱的に誘発される突出を減少せしめる磁気書き込みヘッド及びその製造方法 | |
| US7467461B2 (en) | Additive gap process to define trailing and side shield gap for a perpendicular write head | |
| US6798616B1 (en) | Write head architecture for improved manufacturability | |
| US8111479B2 (en) | Perpendicular magnetic recording head having a notched trailing shield | |
| US8335053B2 (en) | Integrated touch-down pad and touch-down sensor | |
| US20100309581A1 (en) | Insertion under read shield for improved read gap actuation in dynamic flying height | |
| JP2008192284A (ja) | 複数の材料を使用したヘリカルコイル構造を備えた磁気書込みヘッド | |
| US11900971B1 (en) | Magnetic recording head with assisting electric current in trailing shield | |
| KR20060113431A (ko) | 수직 자기 기록 헤드에서 리턴 폴 코너 필드들을감소시키기 위한 플럭스 분류 구조 | |
| US7679862B2 (en) | Perpendicular recording head with reduced thermal protrusion | |
| US8164987B2 (en) | Thermally assisted magnetic head | |
| US7612963B2 (en) | Perpendicular magnetic recording head with photoresist dam between write coil and air bearing surface | |
| US11894026B1 (en) | Magnetic recording head having leads over the trailing shield for assisting electric currents | |
| JP5863304B2 (ja) | クロストラック方向に磁気的にバイアスした、巻き付け式トレーリング磁気シールドを有する垂直磁気書き込みヘッド | |
| US8031432B2 (en) | Magnetic write head having helical coil with a fin structure for reduced heat induced protrusion | |
| US12444434B2 (en) | Magnetic recording head with current path between trailing shield and leading shield for improved resistance | |
| US8964331B2 (en) | Perpendicular magnetic write head having a main magnetic write pole portion and a magnetic sub-pole portion configured for increased magnetic write field | |
| JP2006127740A (ja) | 垂直記録のための傾斜した翼部を有する段付シールドおよび磁極構造 | |
| CN101572094B (zh) | 磁写头及其制造方法 | |
| US7990652B2 (en) | Perpendicular magnetic write head with stepped write pole for reduced MCW dependency on skew angle | |
| US7538961B2 (en) | Using inductance to measure writer spacing in perpendicular magnetic recording | |
| US7768741B2 (en) | Magnetic write head design for reducing wide area track erasure | |
| US7523550B2 (en) | Process to open connection vias on a planarized surface | |
| US20140002927A1 (en) | Write head structure designed for temperature insensitive writing performance |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20100301 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20100301 |
|
| A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20110608 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110705 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20111206 |