JP2007263818A - Adjusting method for thickness measuring instrument, and device therefor - Google Patents

Adjusting method for thickness measuring instrument, and device therefor Download PDF

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JP2007263818A
JP2007263818A JP2006090569A JP2006090569A JP2007263818A JP 2007263818 A JP2007263818 A JP 2007263818A JP 2006090569 A JP2006090569 A JP 2006090569A JP 2006090569 A JP2006090569 A JP 2006090569A JP 2007263818 A JP2007263818 A JP 2007263818A
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distance
calibration plate
distance meter
measurement
thickness
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Koichi Tezuka
浩一 手塚
Yoshiki Fukutaka
善己 福▲高▼
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JFE Steel Corp
JFE Denki Corp
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JFE Steel Corp
JFE Denki Corp
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Abstract

<P>PROBLEM TO BE SOLVED: To provide an adjusting method for a thickness measuring instrument, capable of evaluating the angle and the positional shift in measuring axis, in a range finder arranged opposite, capable of regulating the angle and the positional shift to eliminate error factors, and capable of accurately measuring the thickness, and to provide a device therefor. <P>SOLUTION: This adjusting method is provided with a process for moving a calibration plate, located within a measuring range of the range finder at the first optional angle; a process for moving the calibration plate at the second optional angle; a process for finding the first variation by measuring respectively the distances, before and after the moving when moving the calibration plate at the first optional angle, by the range finder; a process for finding the second variation by measuring respectively distances, before and after the moving when moving the calibration plate at the second optional angle, by the range finder; a process for finding an angle deviation between a distance measuring direction and a moving axis of the calibration plate, based on a difference between the first variation and the second variation; and a process for adjusting the distance measuring direction, based on the deviation. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

本発明は、計測対象物の厚さを複数の対向するレーザ距離計によって計測する厚さ計測装置、たとえば厚鋼板や薄鋼板の精整ラインや検査ライン等へ適用される複数の対向するレーザ距離計により構成される厚さ計測装置の調整方法及びその装置に関するものであり、特に、板厚（寸法）の計測上の誤差要因となる、対向するレーザ距離計の相対的な位置関係のズレを正確に検出し、調整・校正する技術に関するものである。   The present invention relates to a thickness measuring device that measures the thickness of a measurement object with a plurality of opposed laser distance meters, for example, a plurality of opposed laser distances applied to a finishing line or an inspection line of a thick steel plate or a thin steel plate. The present invention relates to an adjustment method of a thickness measuring device constituted by a meter and the device, and in particular, a deviation in the relative positional relationship between opposing laser distance meters, which is an error factor in measuring a plate thickness (dimension). The present invention relates to a technique for accurately detecting, adjusting and calibrating.

厚板、薄板ラインにおいては、連続して搬送、通板される鋼板の板厚を連続して計測し、板厚の制御、保証を行う必要があり、従来よりγ線、X線等を利用した板厚計が使用されている。γ線、X線方式の板厚計は対象物（鋼板）透過時のγ線、X線の減衰量から、対象物の厚さを計測するもので、外乱等の影響を受けにくく、高精度な厚さ計測が可能な技術として確立されている。   For thick plate and thin plate lines, it is necessary to continuously measure the plate thickness of steel plates that are continuously conveyed and passed, and to control and guarantee the plate thickness. Conventionally, γ rays, X-rays, etc. are used. A thickness gauge is used. Gamma ray and X-ray thickness gauges measure the thickness of an object from the amount of attenuation of γ-rays and X-rays that pass through the object (steel plate), and are highly resistant to disturbances and are highly accurate. It has been established as a technology that enables accurate thickness measurement.

これらのγ線、X線方式板厚計では透過させるγ線、X線のビーム形状を絞り込むことができないため、一定面積（ビーム断面積）の平均板厚しか計測できない。さらに、γ線、X線の検出器の応答性が低く、高速で進入する対象物（鋼板）に関しては先端部の板厚を正確に計測できず、不感帯が発生するという問題点もあった。   These γ-ray and X-ray system thickness gauges cannot measure the beam shapes of γ-rays and X-rays to be transmitted, and therefore can only measure an average plate thickness of a certain area (beam cross-sectional area). Furthermore, the responsiveness of the γ-ray and X-ray detectors is low, and the object (steel plate) that enters at high speed cannot accurately measure the thickness of the tip portion, resulting in a dead zone.

これに対して、三角測量の原理を利用した高精度で、応答性の高いレーザ距離計を使用した板厚計が実用化されている。これは、対向して設置されたレーザ距離計間に対象物を挿入し、距離計による対象物表面までの距離の計測結果と距離計間の距離から対象物の厚さを計測するもので、応答性が高く、計測スポット（レーザビーム径）も細い事から、高速で搬送される対象物に関しても全長に渡って正確な板厚を計測する事が可能となっている。   On the other hand, a plate thickness meter using a laser distance meter with high accuracy and high response utilizing the principle of triangulation has been put into practical use. This is to insert the object between the laser distance meters installed facing each other, and measure the thickness of the object from the distance between the distance meter and the measurement result of the distance to the object surface, Since the responsiveness is high and the measurement spot (laser beam diameter) is thin, it is possible to accurately measure the plate thickness over the entire length of the object to be conveyed at high speed.

また、その改良技術として、被測定対象物の振動や測定位置のずれによる厚さ測定誤差を低減するために、上下のレーザ光源を同時にパルス放射させる装置も開示されている（例えば特許文献１など）。
特開平６−６６５２５号公報 Further, as an improvement technique thereof, an apparatus that simultaneously emits pulses of upper and lower laser light sources is disclosed in order to reduce a thickness measurement error due to a vibration of a measurement target or a displacement of a measurement position (for example, Patent Document 1). ).
JP-A-6-66525

レーザ方式板厚計では、対向して設置されたレーザ距離計による距離計間に挿入された対象物（鋼板）表面までの距離計測結果と、対向する距離計間の距離から対象物（鋼板）の厚さを算出する。このため、対向する距離計の計測軸は完全に一致していることが必要であり、さらにその状態が計測中維持される必要がある。対向する距離計の計測軸が一致していない場合や変動が発生すると、距離計測値に誤差が発生し、正確な対象物の厚さを計測することができなくなる。   In the laser type thickness gauge, the object (steel plate) is calculated from the distance measurement result to the surface of the object (steel plate) inserted between the distance meters by the laser distance meter installed opposite to the distance between the opposing distance meters. Calculate the thickness. For this reason, it is necessary that the measurement axes of the distance meters facing each other are completely coincident with each other, and that state needs to be maintained during measurement. If the measuring axes of the distance meters facing each other do not match or change occurs, an error occurs in the distance measurement value, and it becomes impossible to accurately measure the thickness of the object.

実際の装置においては、計測軸を一致させるためには、距離計を固定設置し対向させるためのフレーム、架台を製作し、レーザ距離計を設置後に対向する距離計の位置関係を調整する必要があるが、現状では、目視等による計測点の確認とフレーム、筐体の角度（水平、垂直）調整によって行っているため、高精度の調整は困難であり、誤差要因となっている。また、一旦設置調整された状態が維持されているかの確認も困難であり、長期間の使用に伴う変動、誤差の増加を評価し、再調整を行うことも困難である。   In an actual device, in order to make the measurement axes coincide with each other, it is necessary to manufacture a frame and a base for fixedly installing the distance meter to face each other, and to adjust the positional relationship of the opposed distance meters after installing the laser distance meter. However, at present, the measurement points are confirmed by visual observation or the like and the angles (horizontal and vertical) of the frame and the casing are adjusted, so that high-precision adjustment is difficult and causes an error. In addition, it is difficult to confirm whether or not the installation and adjustment state is maintained, and it is difficult to perform readjustment by evaluating fluctuations and increase in errors associated with long-term use.

本発明は、上記のような問題点を解決するためになされたものであり、対向配置されたレーザ距離計の計測軸の角度、位置のズレを評価し、角度、位置のズレを調整して誤差要因をなくし、正確な厚さ計測を可能にするための厚さ計測装置の調整方法及びその装置を提供することを目的とする。   The present invention has been made in order to solve the above-described problems, and evaluates the angle and position deviation of the measurement axis of the laser distance meter disposed oppositely, and adjusts the angle and position deviation. It is an object of the present invention to provide a method and apparatus for adjusting a thickness measuring device that eliminates an error factor and enables accurate thickness measurement.

本発明に係る厚さ計測装置の調整方法は、複数の対向配置されたレーザ距離計により構成される厚さ計測装置の調整方法において、前記レーザ距離計の計測範囲内にある校正板を、校正板の移動軸に対して第１の任意の角度にして前記距離計の距離計測方向に移動させる工程と、前記校正板を、校正板の移動軸に対して第２の任意の角度にして前記距離計の距離計測方向に前記第１の任意の角度配置の場合と同一距離移動させる工程と、前記校正板を前記第１の任意の角度にして移動させたときの移動の前後で前記距離計によりそれぞれ距離計測をしてその計測値の変化量である第１の変化量を求める工程と、前記校正板を前記第２の任意の角度にして移動させたときの移動の前後で前記距離計によりそれぞれ距離計測してその計測値の変化量である第２の変化量を求める工程と、前記第１の変化量と前記第２の変位量との差異に基づいて前記距離計の距離計測方向と前記校正板の移動軸との間の角度の偏差を求める工程と、前記偏差に基づいて前記距離計の距離計測方向を調整する工程とを備えたものである。   The method for adjusting a thickness measuring apparatus according to the present invention is the method for adjusting a thickness measuring apparatus constituted by a plurality of opposed laser distance meters, wherein a calibration plate within the measurement range of the laser distance meter is calibrated. A step of moving the distance meter in a distance measuring direction at a first arbitrary angle with respect to the movement axis of the plate; and a step of moving the calibration plate at a second arbitrary angle with respect to the movement axis of the calibration plate. The step of moving the same distance in the distance measurement direction of the distance meter as in the case of the first arbitrary angle arrangement, and the distance meter before and after the movement when the calibration plate is moved to the first arbitrary angle Measuring the distance by each to obtain a first change amount which is a change amount of the measured value, and the distance meter before and after movement when the calibration plate is moved at the second arbitrary angle. Measure the distance by each and change the measured value And determining the second change amount, and the angle between the distance measuring direction of the distance meter and the moving axis of the calibration plate based on the difference between the first change amount and the second displacement amount. And a step of adjusting a distance measuring direction of the distance meter based on the deviation.

本発明に係る厚さ計測装置の調整方法は、複数の対向配置されたレーザ距離計により構成される厚さ計測装置の調整方法において、前記レーザ距離計の計測範囲内に厚さが既知の校正板を、前記距離計の距離計測方向に対して任意の角度に調整する工程と、前記校正板が前記任意の角度にされた状態で前記距離計により前記校正板の厚さを計測する工程と、前記厚さ計測値と、前記校正板の既知の厚さ及び前記任意の角度によって得られる斜め方向の校正板の厚さとを比較し、その差異に基づいて対向配置された前記距離計の計測軸の位置ズレを算出する工程とを備えたものである。   An adjustment method for a thickness measurement apparatus according to the present invention is an adjustment method for a thickness measurement apparatus constituted by a plurality of opposed laser distance meters, wherein the calibration has a known thickness within the measurement range of the laser distance meter. Adjusting the plate to an arbitrary angle with respect to the distance measuring direction of the distance meter; measuring the thickness of the calibration plate with the distance meter in a state where the calibration plate is at the arbitrary angle; The thickness measurement value is compared with the known thickness of the calibration plate and the thickness of the calibration plate in the oblique direction obtained by the arbitrary angle, and measurement of the distance meter arranged oppositely based on the difference is performed. And a step of calculating a positional deviation of the shaft.

本発明に係る厚さ計測装置の調整方法は、複数の対向配置されたレーザ距離計により構成される厚さ計測装置の調整方法において、前記レーザ距離計の計測範囲内にある校正板を、前記校正板の移動軸に対して第１の任意の角度にして前記距離計の距離計測方向に移動させる工程と、前記校正板を、前記校正板の移動軸に対して第２の任意の角度にして前記距離計の距離計測方向に前記第１の任意の角度配置の場合と同一距離移動させる工程と、前記校正板を前記第１の任意の角度にして移動させたときの移動の前後で前記距離計によりそれぞれ距離計測をしてその計測値の変化量である第１の変化量を求める工程と、前記校正板を第２の任意の角度にして移動させたときの移動の前後で前記距離計によりそれぞれ距離計測してその計測値の変化量である第２の変化量を求める工程と、前記第１の変化量と前記第２の変化量が、前記校正板の角度によらず等しくなるように前記距離計の距離計測方向を調整することにより対向配置された前記距離計の計測方向が平行となるように調整する工程と、前記対向配置された距離計の計測方向が平行になるように調整された後、前記校正板を任意の角度にした状態で前記距離計により計測された厚さ計測値と、前記校正板の既知の厚さ及び前記任意の角度によって得られる斜め方向の校正板の厚さとを比較し、両者が一致するように、前記距離計の距離計測方向に垂直な平面での位置を調整し、前記対向配置された距離計の計測軸を一致させる工程とを備えたものである。   The method for adjusting a thickness measuring apparatus according to the present invention is the method for adjusting a thickness measuring apparatus configured by a plurality of opposed laser distance meters, wherein the calibration plate within the measurement range of the laser distance meter is A step of moving in the distance measuring direction of the distance meter at a first arbitrary angle with respect to the movement axis of the calibration plate; and a second arbitrary angle of the calibration plate with respect to the movement axis of the calibration plate. Moving the same distance in the distance measuring direction of the distance meter as in the case of the first arbitrary angle arrangement, and before and after the movement when the calibration plate is moved to the first arbitrary angle. The distance is measured by a distance meter to obtain a first change amount that is a change amount of the measured value, and the distance before and after the movement when the calibration plate is moved at a second arbitrary angle. Measure the distance with a meter and A step of obtaining a second change amount that is a conversion amount, and adjusting a distance measurement direction of the distance meter so that the first change amount and the second change amount are equal regardless of the angle of the calibration plate Adjusting the measurement directions of the distance meters arranged opposite to each other in parallel to each other, and adjusting the measurement directions of the distance meters arranged opposite to each other to be parallel. The thickness measurement value measured by the distance meter in the state of the angle is compared with the known thickness of the calibration plate and the thickness of the calibration plate in the oblique direction obtained by the arbitrary angle. And adjusting the position of the distance meter on a plane perpendicular to the distance measurement direction so that the measurement axes of the distance meters arranged opposite to each other coincide with each other.

本発明に係る厚さ計測装置の調整方法は、前記校正板の厚さを計測するときに、前記校正板をその面方向に連続的に移動させる。   The thickness measuring device adjusting method according to the present invention continuously moves the calibration plate in the surface direction when measuring the thickness of the calibration plate.

本発明に係る厚さ計測装置の調整装置は、複数の対向配置されたレーザ距離計により構成される厚さ計測装置の調整装置において、前記レーザ距離計の計測範囲内に配置された校正板を前記距離計の距離計測方向に移動させる第１の機構と、前記校正板を前記移動方向に対して任意の角度に調整可能な第２の機構と、前記距離計の計測値を演算処理する演算手段とを備え、前記第２及び第１の機構は、前記レーザ距離計の計測範囲内に配置された校正板を、前記校正板を移動方向に対して第１の任意の角度にするとともに前記距離計の距離計測方向に移動させ、また、前記校正板を、該校正板の移動方向に対して第２の任意の角度にするとともに前記距離計の距離計測方向に前記第１の任意の角度配置の場合と同一距離移動させ、前記演算手段は、前記校正板を前記第１の任意の角度にして移動させたときの移動の前後で前記距離計によりそれぞれ距離計測させてその計測値の変化量である第１の変化量を求めるとともに、前記校正板を前記第２の任意の角度にして移動させたときの移動の前後で前記距離計にそれぞれ距離計測させてその計測値の変化量である第２の変化量を求め、前記第１の変化量と前記第２の変化量との差異に基づいて前記距離計の計測方向と前記校正板の移動方向との間の角度の偏差を求める。そして、前記距離計の距離計測方向を前記偏差に基づいて調整するものである。   An adjustment device for a thickness measurement device according to the present invention is the adjustment device for a thickness measurement device constituted by a plurality of laser distance meters arranged opposite to each other, and includes a calibration plate arranged within the measurement range of the laser distance meter. A first mechanism for moving the distance meter in the distance measuring direction, a second mechanism for adjusting the calibration plate to an arbitrary angle with respect to the moving direction, and an operation for calculating the measured value of the distance meter And the second and first mechanisms are configured such that the calibration plate disposed within the measurement range of the laser distance meter is set to a first arbitrary angle with respect to the moving direction of the calibration plate and The distance measuring direction of the distance meter is moved, and the calibration plate is set to a second arbitrary angle with respect to the moving direction of the calibration plate, and the first arbitrary angle is set to the distance measuring direction of the distance meter. Move the same distance as in the case of placement, and Is a distance measurement by the distance meter before and after movement when the calibration plate is moved at the first arbitrary angle to obtain a first change amount that is a change amount of the measured value, The distance meter is made to measure the distance before and after the calibration plate is moved at the second arbitrary angle to obtain a second change amount that is a change amount of the measured value, and The deviation of the angle between the measuring direction of the distance meter and the moving direction of the calibration plate is obtained based on the difference between the change amount and the second change amount. Then, the distance measuring direction of the distance meter is adjusted based on the deviation.

本発明に係る厚さ計測装置の調整装置は、複数の対向配置されたレーザ距離計により構成される厚さ計測装置の調整方法において、前記レーザ距離計の計測範囲内に配置される厚さが既知の校正板と、前記校正板の移動方向に対して任意の角度に調整可能な機構と、前記距離計の計測値を演算処理する演算手段とを備え、前記演算手段は、前記校正板を前記任意の角度にした状態で前記距離計により厚さを計測させたときの厚さ計測値と、前記校正板の既知の厚さ及び前記任意の角度から得られる傾斜方向の校正板の厚さとを比較し、その差異に基づいて対向配置された前記距離計の計測軸の位置ズレを算出するものである。   According to the present invention, there is provided an adjustment apparatus for a thickness measurement apparatus, wherein the thickness arranged in the measurement range of the laser distance meter is a thickness measurement apparatus adjustment method including a plurality of opposed laser distance meters. A known calibration plate, a mechanism that can be adjusted to an arbitrary angle with respect to the direction of movement of the calibration plate, and a calculation means for calculating the measured value of the distance meter, wherein the calculation means includes the calibration plate The thickness measurement value when the distance meter measures the thickness in the state of the arbitrary angle, the known thickness of the calibration plate and the thickness of the calibration plate in the tilt direction obtained from the arbitrary angle , And the positional deviation of the measurement axis of the distance meter arranged to face the other is calculated based on the difference.

本発明に係る厚さ計測装置の調整装置は、複数の対向配置されたレーザ距離計により構成される厚さ計測装置の調整装置において、前記レーザ距離計の計測範囲内に配置される厚さが既知の校正板と、前記レーザ距離計の計測範囲内に配置された校正板を前記距離計の距離計測方向に移動させる第１の機構と、前記校正板を前記移動方向に対して任意の角度に調整可能な第２の機構と、前記距離計の計測値を演算処理する演算手段とを備え、前記第２及び第１の機構は、前記レーザ距離計の計測範囲内に配置された校正板を、前記校正板の移動軸に対して第１の任意の角度にするとともに前記距離計の計測方向に移動させ、前記校正板を、前記校正板の移動軸に対して第２の任意の角度にするとともに、前記距離計の距離計測方向に前記第１の任意の角度配置の場合と同一距離移動させ、前記演算手段は、前記校正板を前記第１の任意の角度にして移動させたときの移動の前後で前記距離計によりそれぞれ距離計測をさせてその計測値の変化量である第１の変化量を求める処理、及び前記校正板を前記第２の任意の角度にして移動させたときの移動の前後で前記距離計によりそれぞれ距離計測をさせてその計測値の変化量である第２の変化量を求める処理を行い、前記第１の変化量と前記第２の変位量が、前記校正板の角度によらず等しくなるように前記距離計の距離計測方向を調整することにより対向配置された前記距離計の距離計測方向が平行となるように調整し、前記対向配置された距離計の計測方向が平行になるように調整された後に、前記校正板を任意の角度にした状態で前記距離計により計測された厚さ計測値と、前記校正板の既知の厚さ及び前記任意の角度から得られる斜め方向の校正板の厚さとが一致するように、前記距離計の距離計測方向に垂直な平面での位置を調整し、前記対向配置された距離計の計測軸を一致させるものである。   The thickness measuring device adjusting device according to the present invention is a thickness measuring device adjusting device constituted by a plurality of opposed laser distance meters, wherein the thickness disposed within the measurement range of the laser distance meter is A known calibration plate, a first mechanism for moving the calibration plate arranged within the measurement range of the laser distance meter in the distance measurement direction of the distance meter, and the calibration plate at an arbitrary angle with respect to the movement direction A calibration plate disposed within the measurement range of the laser distance meter. The second mechanism can be adjusted and a calculation means for calculating the measurement value of the distance meter. Is moved to the first arbitrary angle with respect to the movement axis of the calibration plate and moved in the measuring direction of the distance meter, and the calibration plate is moved to the second arbitrary angle with respect to the movement axis of the calibration plate. And the first in the distance measuring direction of the distance meter The same distance is moved as in the case of an arbitrary angle arrangement, and the calculation means causes the distance meter to measure the distance before and after the movement when the calibration plate is moved to the first arbitrary angle. A process for obtaining a first change amount that is a change amount of a measurement value, and a distance measurement by the distance meter before and after the calibration plate is moved at the second arbitrary angle. A process of obtaining a second change amount that is a change amount of the measured value is performed, and the distance of the distance meter is set so that the first change amount and the second displacement amount are equal regardless of the angle of the calibration plate. The calibration is performed by adjusting the measurement direction so that the distance measurement directions of the distance meters arranged opposite to each other are parallel and adjusting the measurement directions of the distance meters arranged opposite to each other to be parallel. The plate is at an arbitrary angle The distance measurement direction of the distance meter so that the thickness measurement value measured by the distance meter matches the known thickness of the calibration plate and the thickness of the oblique calibration plate obtained from the arbitrary angle. The position on the plane perpendicular to the vertical axis is adjusted so that the measurement axes of the distance meters arranged opposite to each other coincide with each other.

本発明に係る厚さ計測装置の調整装置は、前記校正板の厚さを計測するときに、前記校正板をその面方向に連続的に移動させる機構を備えたものである。   The adjusting device of the thickness measuring apparatus according to the present invention includes a mechanism for continuously moving the calibration plate in the surface direction when measuring the thickness of the calibration plate.

本発明によれば、レーザ距離計を用いた厚さ計測装置において、対向配置されたレーザ距離計の相対的な位置、方向ズレを検出することが可能であり、検出結果に応じて距離計の位置、方向を調整することにより距離計の計測軸を高精度に一致させる事が可能となり、距離計間の計測軸のズレ（計測位置ズレ、計測方向ズレ）に起因する誤差要因を無くし、正確な形状（寸法）計測が可能となる。
また、本発明によれば、対向配置されたレーザ距離計の相対的な位置関係を定期的に検出、確認し、必要に応じて調整（校正）を行う事により機械的な変形、歪等に起因する距離計の相対的な位置関係のズレを補正し、誤差要因を低減した高精度な計測条件を維持する事が可能となる。 According to the present invention, in a thickness measuring device using a laser distance meter, it is possible to detect the relative position and direction deviation of the laser distance meters arranged opposite to each other. By adjusting the position and direction, it is possible to match the measurement axis of the distance meter with high accuracy, eliminating the error factor due to the measurement axis deviation (measurement position deviation, measurement direction deviation) between distance meters, and accurate. Measurement (dimension) is possible.
In addition, according to the present invention, the relative positional relationship of the laser distance meters arranged opposite to each other is periodically detected and confirmed, and adjusted (calibrated) as necessary to reduce mechanical deformation, distortion, and the like. It is possible to maintain the high-precision measurement conditions with the error factor reduced by correcting the relative positional shift of the distance meter.

実施形態１．
本発明の実施形態１による厚さ計測装置の調整方法では、対向配置されたレーザ距離計により構成される厚さ計測装置において、距離計の計測範囲内に校正板を挿入し、校正板を距離計測方向に移動させ、校正板の移動量と距離計の計測値の変化量を計測する。図１（ａ）に示されるように、校正板の移動方向とレーザ距離計の距離計測方向（光軸）とが平行であれば、校正板の移動量L0と距離計の計測値の変化量L1は等しくなるはずであるが、図１（ｂ）に示されるように、校正板の移動方向と距離計測方向とが平行でない場合には、校正板移動量L0と距離計計測値変化量L1とは異なる。ここで、校正板移動方向と距離計測方向との角度をθとすると、L0とL1の関係は
L1=L0/cos(θ） …（１）
となるので、L1とL0の差が小さくなるように校正板の移動軸或いは距離計の距離計測方向の角度を調整すれば、両者を平行にすることが可能であるが、校正板の移動量L0と角度θが小さい場合には、L1とL0の差は小さく、一定角度差以下に調整することは出来ない。 Embodiment 1. FIG.
In the thickness measuring apparatus adjustment method according to the first embodiment of the present invention, a calibration plate is inserted into the measurement range of the distance meter in the thickness measuring device constituted by the laser distance meters arranged opposite to each other. Move in the measuring direction and measure the amount of movement of the calibration plate and the amount of change in the measured value of the distance meter. As shown in FIG. 1A, if the movement direction of the calibration plate and the distance measurement direction (optical axis) of the laser distance meter are parallel, the movement amount L0 of the calibration plate and the change amount of the measurement value of the distance meter L1 should be equal, but as shown in FIG. 1 (b), when the movement direction of the calibration plate and the distance measurement direction are not parallel, the calibration plate movement amount L0 and the distance meter measurement value change amount L1 Is different. Here, if the angle between the calibration plate movement direction and the distance measurement direction is θ, the relationship between L0 and L1 is
L1 = L0 / cos (θ) (1)
Therefore, if the movement axis of the calibration plate or the angle in the distance measurement direction of the distance meter is adjusted so that the difference between L1 and L0 is small, both can be made parallel, but the movement amount of the calibration plate When L0 and angle θ are small, the difference between L1 and L0 is small and cannot be adjusted below a certain angle difference.

ここで、図２（ａ）に示されるように、校正板の移動軸に対して校正板を任意の角度に設定し、校正板を移動させた場合には、校正板移動量L0と計測値変化量L2とは、校正板の移動方向と距離計の距離計測方向とが平行な場合には図１（ａ）の場合と同様に等しくなるが、図２（ｂ）に示されるように、校正板の移動方向と距離計の距離計測方向とが異なる場合には、L0とL2の関係は、その角度ずれθが０に近い微小角度とすれば、（２）式で表され、（１）式に示したL0、L1の関係に対して両者の差異は拡大する。
L2＝L0/cos(θ)＋L0tan(θ)tan(α)/｛cos(θ)−sin(θ)tan(α)｝
≒L0/cos(θ)＋L0tan(θ）tan(α) …（２） Here, as shown in FIG. 2A, when the calibration plate is set at an arbitrary angle with respect to the movement axis of the calibration plate and the calibration plate is moved, the calibration plate moving amount L0 and the measured value are measured. The amount of change L2 is equal to that in the case of FIG. 1A when the movement direction of the calibration plate and the distance measurement direction of the distance meter are parallel, but as shown in FIG. When the movement direction of the calibration plate and the distance measurement direction of the distance meter are different, the relationship between L0 and L2 is expressed by the equation (2) if the angle deviation θ is a minute angle close to 0, and (1 ) The difference between the two increases with respect to the relationship between L0 and L1 shown in the equation.
L2 = L0 / cos (θ) + L0tan (θ) tan (α) / {cos (θ) −sin (θ) tan (α)}
≒ L0 / cos (θ) + L0tan (θ) tan (α) (2)

上記のL0とL2の差を小さくするように調整を行った場合には、校正板の移動方向と距離計側方向とのズレをより小さく調整することが可能となる。さらに、図２（ｃ）（ｄ）に示されるように、校正板の移動軸に対する傾斜方向を変えることにより、L2とL0との差が変化するので、校正板の移動方向と距離計測方向との角度ズレの方向を特定する事も可能となり、調整をより容易とすることも可能である。   When adjustment is performed to reduce the difference between L0 and L2, the deviation between the movement direction of the calibration plate and the distance meter side direction can be adjusted to be smaller. Further, as shown in FIGS. 2C and 2D, by changing the inclination direction of the calibration plate with respect to the movement axis, the difference between L2 and L0 changes. It is also possible to specify the direction of the angle deviation, and it is possible to make adjustment easier.

したがって、校正板の角度を変更し、校正板を移動させ、校正板の移動量と距離計の計測値変化量とを比較することにより校正板の移動方向と距離計の距離計測方向とのズレを検出し、角度ズレを無くすように調整を行う事が可能となる。即ち、本発明の実施形態１においては、上記の知見に基づいて次のような処理を行って、校正板の移動軸と距離計の距離計測方向とを平行に調整している。   Therefore, by changing the angle of the calibration plate, moving the calibration plate, and comparing the movement amount of the calibration plate with the measured value change amount of the distance meter, the deviation between the movement direction of the calibration plate and the distance measurement direction of the distance meter. Can be detected, and adjustment can be performed to eliminate the angle deviation. That is, in the first embodiment of the present invention, the following processing is performed based on the above knowledge, and the moving axis of the calibration plate and the distance measuring direction of the distance meter are adjusted in parallel.

ａ．距離計の計測範囲内の校正板を、校正板の移動軸に対して第１の任意の角度して距
離計の距離計測方向に移動させる。
ｂ．校正板を校正板の移動軸に対して第２の任意の角度にして前記距離計の距離計測方
向に第１の任意の角度配置の場合と同一距離移動させる。
ｃ．校正板を第１の任意の角度にして移動させたときの移動の前後で距離計によりそれ
ぞれ距離計測をしてその計測値の変化量である第１の変化量を求める。
ｄ．校正板を第２の任意の角度にして移動させたときの移動の前後で距離計によりそれ
ぞれ距離計測してその計測値の変化量である第２の変化量を求める。
ｅ．第１の変化量と第２の変位量との差異に基づいて距離計の距離計測方向と校正板の
移動軸との間の角度の偏差を求める。
ｆ．偏差に基づいて距離計の距離計測方向（光軸方向）を調整する。 a. The calibration plate within the measurement range of the distance meter is moved in the distance measurement direction of the distance meter at a first arbitrary angle with respect to the movement axis of the calibration plate.
b. The calibration plate is moved to the second arbitrary angle with respect to the movement axis of the calibration plate and moved in the same distance measurement direction as the first arbitrary angle arrangement in the distance measuring direction of the distance meter.
c. A distance measurement is performed with a distance meter before and after the calibration plate is moved at the first arbitrary angle, and a first change amount that is a change amount of the measured value is obtained.
d. A distance is measured with a distance meter before and after the calibration plate is moved at a second arbitrary angle, and a second change amount that is a change amount of the measured value is obtained.
e. Based on the difference between the first change amount and the second displacement amount, the deviation of the angle between the distance measuring direction of the distance meter and the movement axis of the calibration plate is obtained.
f. The distance measurement direction (optical axis direction) of the distance meter is adjusted based on the deviation.

以上のようにして、対向する各距離計に関して校正板の移動方向と距離計の距離計測方向とのズレを検出し、校正板の移動方向と距離計の距離計測方向とが平行になるように調整を行うことにより、距離計の距離計測方向を校正板の移動軸に対して平行に調整することができ、その平行度を精密に調整する事が可能となる。   As described above, the deviation between the movement direction of the calibration plate and the distance measurement direction of the distance meter is detected for each opposing distance meter so that the movement direction of the calibration plate and the distance measurement direction of the distance meter are parallel. By performing the adjustment, the distance measuring direction of the distance meter can be adjusted parallel to the moving axis of the calibration plate, and the parallelism can be adjusted precisely.

実施形態２．
また、本発明の実施形態２による厚さ計測装置の調整方法では、図３（ａ）に示されるように対向配置されたレーザ距離計により構成される厚さ計測装置（対向するレーザ距離計の距離計測方向は平行に調整されているとする）において、対向する距離計の計測範囲内に厚さが既知の校正板を挿入し校正の板厚を計測する。この時、校正板の距離計測方向に対する角度を例えば図３（ａ）から（ｂ）のように変更すると、角度αに応じて計測値は変化する。校正板の板厚をｄ、校正板の角度をαとすると計測される板厚Ｄ0は、次式で表される。
Ｄ0＝d/cos(α) …（３）
ここで、図３（ｃ）に示すように対向する距離計の計測軸（光軸）が距離計測方向に対して垂直方向にズレｈがあると、計測される板厚Ｄ1は次式で表され、（３）式に対してずれを生じる。
Ｄ1＝d/cos(α)＋h・tan(α) …（４） Embodiment 2. FIG.
Moreover, in the adjustment method of the thickness measuring device according to the second embodiment of the present invention, as shown in FIG. The distance measurement direction is adjusted in parallel), and a calibration plate having a known thickness is inserted into the measurement range of the opposing distance meter to measure the calibration plate thickness. At this time, if the angle of the calibration plate with respect to the distance measurement direction is changed as shown in FIGS. 3A to 3B, for example, the measurement value changes according to the angle α. The thickness D0 measured when the thickness of the calibration plate is d and the angle of the calibration plate is α is expressed by the following equation.
D0 = d / cos (α) (3)
Here, as shown in FIG. 3 (c), when the measuring axis (optical axis) of the opposing distance meter is displaced in the direction perpendicular to the distance measuring direction, the measured plate thickness D1 is expressed by the following equation. Therefore, there is a deviation from the equation (3).
D1 = d / cos (α) + h · tan (α) (4)

また、図３（ｃ）に示されるように対向する距離計の計測軸のズレの方向と、校正板の傾斜方向の関係により計測される板厚Ｄが変化する事から、校正板の傾斜方向を変更して計測を行う事により、対向する距離計の計測軸ズレの方向と、ズレの量を算出する事が可能であり、容易に調整を行う事が可能となる。   Further, as shown in FIG. 3 (c), since the plate thickness D measured by the relationship between the direction of deviation of the measuring axis of the opposing distance meter and the inclination direction of the calibration plate changes, the inclination direction of the calibration plate By performing measurement while changing the distance, it is possible to calculate the direction of the measurement axis deviation of the opposing distance meter and the amount of deviation, and it is possible to easily adjust.

したがって、本発明の実施形態２においては、上記の知見に基づいて次のような処理を行って、対向配置された距離計の計測軸のズレを調整している。
ａ．既知厚さの校正板を、距離計の距離計測方向に対して任意の角度に調整する。
ｂ．校正板が前記任意の角度にされた状態で距離計により校正板の板厚を計測する。
ｃ．厚さ計測値と、校正板の既知の板厚及び前記任意の角度によって得られる斜め方向
の校正板の板厚とを比較し、その差異に基づいて対向配置された前記距離計の計測
軸の位置ズレを算出する。
ｄ．算出された計測軸の位置ズレを調整し一致させる。 Therefore, in the second embodiment of the present invention, the following processing is performed based on the above knowledge to adjust the deviation of the measurement axes of the distance meters arranged opposite to each other.
a. A calibration plate having a known thickness is adjusted to an arbitrary angle with respect to the distance measuring direction of the distance meter.
b. The thickness of the calibration plate is measured by a distance meter in a state where the calibration plate is at the arbitrary angle.
c. The thickness measurement value is compared with the known thickness of the calibration plate and the thickness of the calibration plate in the oblique direction obtained by the arbitrary angle. Based on the difference, the measurement axis of the distance meter arranged oppositely is compared. Calculate the displacement.
d. Adjust and match the calculated measurement axis misalignment.

以上のように、上記の実施形態１により前記対向配置された距離計の距離計測方向の調整を行い、対向距離計の距離計測方向を平行にした後に、本実施形態２において、更に、計測軸のずれを調整し一致させるようにしており、これにより対向配置された距離計の計測軸（光軸）を高精度に一致させる事が可能となり、板厚（寸法）計測の誤差要因を最小化することが可能となる。   As described above, after adjusting the distance measurement direction of the distance meter arranged oppositely according to the first embodiment and making the distance measurement direction of the opposite distance meter parallel, the measurement axis in the second embodiment is further increased. It is possible to match the measurement axis (optical axis) of the distance meter arranged opposite to each other with high accuracy and to minimize the error factor of thickness (dimension) measurement. It becomes possible to do.

図４は本発明による厚さ計測装置の調整装置の実施例を示した図であり、同図（ａ）は側面図、同図（ｂ）は平面図である。図中、１はレーザ距離計、２は距離計を保持する為のＣフレーム、３はフレームを移動させるためのガイド、４は校正板機構部、５は校正板、６は校正板回転機構、７は校正板移動機構、８は校正板角度変更機構、９は校正板機構部全体の移動機構、１０は信号処理装置（演算手段）、１１は計測対象（鋼板）をそれぞれ示している。   4A and 4B are diagrams showing an embodiment of the adjusting device of the thickness measuring device according to the present invention, where FIG. 4A is a side view and FIG. 4B is a plan view. In the figure, 1 is a laser distance meter, 2 is a C frame for holding the distance meter, 3 is a guide for moving the frame, 4 is a calibration plate mechanism, 5 is a calibration plate, 6 is a calibration plate rotation mechanism, 7 is a calibration plate moving mechanism, 8 is a calibration plate angle changing mechanism, 9 is a movement mechanism for the entire calibration plate mechanism, 10 is a signal processing device (calculation means), and 11 is a measurement target (steel plate).

レーザ距離計１は、図５に示されるように、対象物にレーザ光を投光し、対象物表面での反射散乱光をレンズとＣＣＤラインセンサにより検出し、三角測量の原理で対象物までの距離を算出するものであり、レーザの投光軸（光軸）が距離計測方向となる。本実施例における距離計１は、計測基準距離270mm、計測レンジ150mmであり、（計測レンジをラップさせ）対向する距離計間の距離Ｌ０を640ｍｍとなるように、Ｃフレーム２に固定されている。Ｃフレーム２には固定された距離計のＣフレームに対する固定位置、角度を調整する機構（図示せず）を有し、図６に示されるように、各距離計１を水平面内の直交２方向に±２mmの位置調整、鉛直方向に対して直交２方向に±１°の角度調整がそれぞれ可能としている。   As shown in FIG. 5, the laser rangefinder 1 projects laser light on an object, detects reflected and scattered light on the surface of the object with a lens and a CCD line sensor, and reaches the object by the principle of triangulation. The laser projection axis (optical axis) is the distance measurement direction. The distance meter 1 in this embodiment has a measurement reference distance of 270 mm and a measurement range of 150 mm, and is fixed to the C frame 2 so that the distance L0 between the distance meters facing each other (wrapping the measurement range) is 640 mm. . The C frame 2 has a mechanism (not shown) for adjusting the fixed position and angle of the fixed distance meter with respect to the C frame. As shown in FIG. 6, each distance meter 1 is arranged in two orthogonal directions in the horizontal plane. ± 2 mm position adjustment and ± 1 ° angle adjustment in two directions perpendicular to the vertical direction.

本実施例ではＣフレーム２はガイド３に沿って移動可能とし、対象材１１を計測する位置と校正、調整を行う位置間で移動可能としている。Ｃフレーム２を計測位置に移動し、図７に示されるように、対象材１１が挿入されると、対向する上下距離計１による対象材表面（表裏）までの計測距離と距離計間の間隔（640ｍｍ）から対象物の寸法（厚さ）を算出する。また、校正、調整を行う場合には、校正板機構部４位置に距離計１が来るようにＣフレーム２が移動し、距離計１間に校正板５が来るように校正板機構部全体が機構９により移動する（Ｃフレーム２が計測位置に移動する際には、移動の障害にならないように、校正板機構部４全体が退避する構造となっている）。   In this embodiment, the C frame 2 is movable along the guide 3 and is movable between a position where the target material 11 is measured and a position where calibration and adjustment are performed. When the target material 11 is inserted as shown in FIG. 7 when the C frame 2 is moved to the measurement position, the distance between the distance measured by the opposing vertical distance meter 1 to the target material surface (front and back) and the distance meter The dimension (thickness) of the object is calculated from (640 mm). When performing calibration and adjustment, the entire calibration plate mechanism unit is moved so that the C frame 2 moves so that the distance meter 1 comes to the position of the calibration plate mechanism unit 4 and the calibration plate 5 comes between the distance meters 1. It moves by the mechanism 9 (when the C frame 2 moves to the measurement position, the entire calibration plate mechanism unit 4 is retracted so as not to obstruct the movement).

図８（ａ）に示されるように、校正板機構部４の校正板５は、厚さ20mm、直径150mmの円盤形状で、上下面の平坦度、平行度が高く加工された板を使用している。また、校正板５は校正板回転機構６に取付けられ、距離計１の計測位置に挿入された際には回転軸を中心に回転可能としている。本実施例では２００〜３００ｒｐｍでの回転を行うようにした。距離計１による計測時に校正板５を回転運動させることにより、距離計測時に対象表面が連続的に移動する状態とし、対象材（校正板）１１の表面正常、粗さの影響を平滑化し、安定した計測値を得る事を可能としている。   As shown in FIG. 8 (a), the calibration plate 5 of the calibration plate mechanism 4 is a disk having a thickness of 20 mm and a diameter of 150 mm, and is processed with high flatness and parallelism on the upper and lower surfaces. ing. The calibration plate 5 is attached to the calibration plate rotation mechanism 6 and is rotatable about the rotation axis when inserted in the measurement position of the distance meter 1. In this embodiment, rotation was performed at 200 to 300 rpm. By rotating the calibration plate 5 during measurement by the distance meter 1, the target surface continuously moves during distance measurement, and the surface normality and roughness of the target material (calibration plate) 11 are smoothed and stabilized. It is possible to obtain measured values.

また、校正板５及び校正板回転機構６は、校正板移動機構７に取り付けられ、鉛直Z方向（距離計計測方向）に直線移動（昇降）を可能としている。本実施例では、移動機構はリニアステージにより実現し、移動ストローク１５０ｍｍ、繰返し移動位置決め精度±0.01mm以下での校正板の移動を可能としている。   Further, the calibration plate 5 and the calibration plate rotating mechanism 6 are attached to the calibration plate moving mechanism 7 to enable linear movement (up and down) in the vertical Z direction (distance meter measurement direction). In this embodiment, the movement mechanism is realized by a linear stage, and the calibration plate can be moved with a movement stroke of 150 mm and repeated movement positioning accuracy of ± 0.01 mm or less.

更に、校正板５及び校正板回転機構６は、校正板角度変更機構８により、図８（ｂ）（ｃ）に示されるように、移動機構による移動方向に対して校正板の面を任意の角度に変更可能としている（鉛直Ｚ方向に対して垂直面内の直交２軸（Ｘ，Ｙ軸）周りに回転（角度変更）可能）。角度変更機構８は、光学ステージを利用して構成され、直交２軸周りにそれぞれ±３０°の範囲に再現性±０．０５°での角度変更を可能としている。   Further, the calibration plate 5 and the calibration plate rotation mechanism 6 are arranged so that the calibration plate angle changing mechanism 8 can be used to freely adjust the surface of the calibration plate with respect to the moving direction of the moving mechanism as shown in FIGS. The angle can be changed (rotation (angle change) is possible around two orthogonal axes (X, Y axes) in the vertical plane with respect to the vertical Z direction). The angle changing mechanism 8 is configured by using an optical stage, and can change the angle within a range of ± 30 ° around two orthogonal axes with a reproducibility of ± 0.05 °.

本発明の実施例においては以下の手順（例）で上下距離計１の角度検定、調整を行う。
Ａ１）Ｃフレーム２を校正位置に移動する。
Ａ２）校正板機構部４を校正位置（計測位置）に移動する。
Ａ３）校正板５の角度を変更する（Ｘ軸周りに３０°傾斜させる）
Ａ４）上下距離計１により校正片表面までの距離を計測する。
上距離計１の計測距離Ｌu0、下距離計計測距離Ld0とする。
Ａ５）校正板５を校正板移動機構７により移動させる（移動量ΔＬ＝１００ｍｍ）
Ａ６）上下距離計１により校正板５の表面までの距離を計測する。
上距離計の計測距離Ｌu1、下距離計計測距離Ld1とする。 In the embodiment of the present invention, the angle test and adjustment of the vertical distance meter 1 are performed by the following procedure (example).
A1) Move the C frame 2 to the calibration position.
A2) The calibration plate mechanism 4 is moved to the calibration position (measurement position).
A3) Change the angle of the calibration plate 5 (tilt 30 ° around the X axis)
A4) The distance to the calibration piece surface is measured by the vertical distance meter 1.
The upper distance meter 1 has a measurement distance Lu0 and a lower distance meter measurement distance Ld0.
A5) The calibration plate 5 is moved by the calibration plate moving mechanism 7 (movement amount ΔL = 100 mm).
A6) The distance to the surface of the calibration plate 5 is measured by the vertical distance meter 1.
The measurement distance Lu1 of the upper distance meter and the measurement distance Ld1 of the lower distance meter.

Ａ７）各距離計１の計測距離の変化量を算出する。
上距離計変化量ΔＬu1＝Ｌu1-Ｌu0、下距離計変化量ΔLd1＝Ld1-Ld0
Ａ８）校正板５の角度を変更する（Ｘ軸周り傾斜０°、Ｙ軸周り傾斜３０°）
Ａ９）上下距離計１により校正片表面までの距離を計測する。
上距離計計測距離Ｌu2、下距離計計測距離Ld2とする。
Ａ１０）校正板５を校正板移動機構７により移動させる（移動量ΔＬ＝１００ｍｍ）
Ａ１１）上下距離計１により校正片表面までの距離を計測する。
上距離計計測距離Ｌu3、下距離計計測距離Ld3とする。
Ａ１２）各距離計１の計測距離の変化量を算出する。
上距離計変化量ΔＬu2＝Ｌu3-Ｌu2、下距離計変化量ΔLd2＝Ld3-Ld2
Ａ１３）距離計１の計測距離変化量と校正板５の移動量を比較する。
・ΔL≠ΔＬu1の場合
上側距離計の計測方向と校正板移動方向がＸ軸周りにずれている。
・ΔL≠ΔＬu2の場合
上側距離計の計測方向と校正板移動方向がＹ軸周りにずれている。
・ΔL≠ΔＬd1の場合
下側距離計の計測方向と校正板移動方向がＸ軸周りにずれている。
・ΔL≠ΔＬd2の場合
下側距離計の計測方向と校正板移動方向がＹ軸周りにずれている。 A7) The amount of change in the measurement distance of each distance meter 1 is calculated.
Upper distance meter change amount ΔLu1 = Lu1-Lu0, Lower distance meter change amount ΔLd1 = Ld1-Ld0
A8) Change the angle of the calibration plate 5 (0 ° inclination around the X axis, 30 ° inclination around the Y axis)
A9) The distance to the calibration piece surface is measured by the vertical distance meter 1.
The upper distance meter measurement distance Lu2 and the lower distance meter measurement distance Ld2.
A10) The calibration plate 5 is moved by the calibration plate moving mechanism 7 (movement amount ΔL = 100 mm).
A11) The distance to the calibration piece surface is measured by the vertical distance meter 1.
The upper distance meter measurement distance Lu3 and the lower distance meter measurement distance Ld3.
A12) The amount of change in the measurement distance of each distance meter 1 is calculated.
Upper distance meter change ΔLu2 = Lu3-Lu2, Lower distance meter change ΔLd2 = Ld3-Ld2
A13) The amount of change in the distance measured by the distance meter 1 is compared with the amount of movement of the calibration plate 5.
・ When ΔL ≠ ΔLu1
The measurement direction of the upper distance meter and the calibration plate movement direction are shifted around the X axis.
・ When ΔL ≠ ΔLu2
The measurement direction of the upper distance meter and the calibration plate movement direction are shifted around the Y axis.
・ When ΔL ≠ ΔLd1
The measurement direction of the lower distance meter and the calibration plate movement direction are shifted around the X axis.
・ When ΔL ≠ ΔLd2
The measurement direction of the lower distance meter and the calibration plate movement direction are shifted around the Y axis.

ここで、距離計の距離計測方向と校正板の移動方向の角度をθ、校正板の角度をα（＝３０°）とすると
距離計の計測値変化量は次式で表される（（2）式）。
ΔLu=ΔL/cos(θ）＋ΔLtan（θ）tan(α)
θ<<１の場合、下記近似が成り立つ。
ΔLu≒ΔL＋ΔLtan（θ）tan(α)
ΔLu-ΔL＝ΔLtan（θ）tan(α)
θ＝tan-1((ΔLu-ΔL)/ΔLtan(α))
距離計１の計測値変化量ΔLuと校正板移動量ΔLの差が0.2mmの場合には、θ≒0．2°となる。距離計の計測誤差を±30μｍとすると、±0．03°の角度ズレの検出が可能となる。
Ａ１４）各距離計１の計測方向が校正板移動方向と平行になるようにＣフレーム２へ
の距離計取付け角度を調整する。
Ａ１５）Ａ３）〜Ａ１３）を繰返し、角度調整結果を確認する。 Here, if the angle between the distance measurement direction of the distance meter and the movement direction of the calibration plate is θ and the angle of the calibration plate is α (= 30 °), the measured value variation of the distance meter is expressed by the following equation ((2 )formula).
ΔLu = ΔL / cos (θ) + ΔLtan (θ) tan (α)
When θ << 1, the following approximation holds.
ΔLu ≒ ΔL + ΔLtan （θ） tan (α)
ΔLu-ΔL = ΔLtan (θ) tan (α)
θ = tan -1 ((ΔLu-ΔL) / ΔLtan (α))
When the difference between the measured value change amount ΔLu of the distance meter 1 and the calibration plate movement amount ΔL is 0.2 mm, θ≈0.2 °. If the measurement error of the distance meter is ± 30 μm, an angular deviation of ± 0.03 ° can be detected.
A14) Adjust the distance meter attachment angle to the C frame 2 so that the measurement direction of each distance meter 1 is parallel to the calibration plate movement direction.
A15) A3) to A13) are repeated, and the angle adjustment result is confirmed.

また、本発明の実施例においては、以下の手順（例）で上下距離計の校正と計測軸の検定、調整を行う。
Ｂ１）前記角度検定、調整を実施する（或いは実施済であるとする）
Ｂ２）校正板５の面を校正板移動軸（距離計計測軸）に垂直にする（Ｘ，Ｙ軸周り角
度０°）
Ｂ３）校正板５を距離計計測レンジ内で移動させ、上下距離計１により校正板表面ま
での距離を計測する。
上距離計計測距離Ｌu0、下距離計計測距離Ld0とする。 In the embodiment of the present invention, the vertical distance meter is calibrated and the measurement axis is verified and adjusted in the following procedure (example).
B1) Perform the angle test and adjustment (or assume that it has been performed)
B2) Make the surface of the calibration plate 5 perpendicular to the calibration plate movement axis (distance meter measurement axis) (angle around the X and Y axes is 0 °)
B3) The calibration plate 5 is moved within the distance meter measurement range, and the distance to the calibration plate surface is measured by the vertical distance meter 1.
It is assumed that the upper distance meter measurement distance Lu0 and the lower distance meter measurement distance Ld0.

Ｂ４）校正片移動量と、各距離計移動量が等しくなるように、補正係数を設定する。
＊板厚Ｄ0を算出する。
Ｄ0＝Ｌ0−Ｌu0−Ld0
（Ｌ0上下距離計間隔、本実施例ではＬ0＝640mm）
＊校正板位置によらず、Ｄ0が一定となることを確認する。
Ｂ５）校正板５の角度を変更する（Ｘ軸周り傾斜α＝３０°）
Ｂ６）上下距離計１により校正板表面までの距離を計測する。
上距離計計測距離Ｌu1、下距離計計測距離Ld1とする。
Ｂ７）板厚Ｄ1を算出する。
Ｄ1＝Ｌ0−Ｌu1−Ld1
Ｂ８）校正板５の角度を変更する（Ｘ軸周り傾斜０°、Ｙ軸周り傾斜α＝３０°）
Ｂ９）上下距離計１により校正板表面までの距離を計測する。
上距離計計測距離Ｌu1、下距離計計測距離Ld1とする。
Ｂ１０）板厚Ｄ2を算出する。
Ｄ2＝Ｌ0−Ｌu2−Ld2 B4) A correction coefficient is set so that the movement amount of the calibration piece is equal to the movement amount of each distance meter.
* Calculate the plate thickness D0.
D0 = L0-Lu0-Ld0
(L0 vertical distance meter interval, L0 = 640mm in this example)
* Confirm that D0 is constant regardless of the calibration plate position.
B5) Change the angle of the calibration plate 5 (tilt around the X axis α = 30 °)
B6) The distance to the calibration plate surface is measured by the vertical distance meter 1.
The upper distance meter measurement distance Lu1 and the lower distance meter measurement distance Ld1.
B7) The plate thickness D1 is calculated.
D1 = L0-Lu1-Ld1
B8) Change the angle of the calibration plate 5 (inclination around the X axis 0 °, inclination around the Y axis α = 30 °)
B9) The distance to the calibration plate surface is measured by the vertical distance meter 1.
The upper distance meter measurement distance Lu1 and the lower distance meter measurement distance Ld1.
B10) The plate thickness D2 is calculated.
D2 = L0-Lu2-Ld2

Ｂ１１）計測板厚Ｄ0と校正板角度から求められる計算板厚値（＝Ｄ0/cos(α)）と、Ｄ1、Ｄ2を比較する。
・Ｄ1≠Ｄ0/cos(α)の場合
上下距離計の光軸がＹ軸方向にずれている
・Ｄ2≠Ｄ0/cos(α)の場合
上下距離計の光軸がＸ軸方向にずれている B11) The calculated plate thickness value (= D0 / cos (α)) obtained from the measured plate thickness D0 and the calibration plate angle is compared with D1 and D2.
・ When D1 ≠ D0 / cos (α)
The optical axis of the vertical rangefinder is displaced in the Y-axis direction. • When D2 ≠ D0 / cos (α)
The optical axis of the vertical rangefinder is displaced in the X-axis direction

ここで、上下距離計１の計測軸のズレをｈ、校正板の角度をα（＝３０°）とすると、計測される板厚は次式で表される（（4）式）。
Ｄ1＝Ｄ0/cos(α)＋h・tan(α)
Ｄ1-Ｄ0/cos(α)＝ｈtan(α)
計測軸のズレｈ＝0.5ｍｍの場合、計測板厚と計算板厚（Ｄ0/cos(α)）の差は
Ｄ1-Ｄ0/cos(α)＝0.29ｍｍ
となる。距離計の計測誤差を±30μｍとすると、0.05mmの計測軸のズレを検出することが可能となる。
Ｂ１２）上下距離計１の計測軸が一致するようにＣフレーム２上の取付け位置を調整する。
Ｂ１３）Ｂ５）〜Ｂ１２）繰返し、計測軸ズレ調整結果を確認する（必要であれば、再調整を行う）。 Here, when the deviation of the measurement axis of the vertical distance meter 1 is h and the angle of the calibration plate is α (= 30 °), the measured plate thickness is expressed by the following equation (Equation (4)).
D1 = D0 / cos (α) + h · tan (α)
D1-D0 / cos (α) = htan (α)
When the measurement axis deviation is h = 0.5 mm, the difference between the measured thickness and the calculated thickness (D0 / cos (α)) is
D1-D0 / cos (α) = 0.29mm
It becomes. When the measurement error of the distance meter is ± 30 μm, it is possible to detect a deviation of the measurement axis of 0.05 mm.
B12) The mounting position on the C frame 2 is adjusted so that the measurement axes of the vertical distance meter 1 coincide.
B13) B5) to B12) Repeatedly check the measurement axis deviation adjustment result (readjustment is performed if necessary).

以上のように本実施例においては、前記の角度、位置検定手順において、校正板の角度変更、移動等の動作は信号処理装置（演算手段）１０により制御するとともに、必要な距離計計測値の取り込み、データ処理を自動で行い、角度、位置ズレの方向、程度を算出表示し、検定、調整を容易に可能としているが手動で設定を行う事も可能である。また、本実施例では１つの校正板の角度、位置を変更し、計測を行っているが、距離、角度の精度が確保可能であれば複数の校正板を交換して変更を実現しても良い。   As described above, in this embodiment, in the angle and position verification procedure, operations such as changing the angle and moving the calibration plate are controlled by the signal processing device (calculation means) 10 and the necessary distance meter measurement value is obtained. Importing and data processing are performed automatically, and the angle and the direction and degree of misalignment are calculated and displayed for easy verification and adjustment, but they can also be set manually. In this embodiment, the angle and position of one calibration plate are changed and measurement is performed. However, if the accuracy of distance and angle can be ensured, a plurality of calibration plates can be replaced to realize the change. good.

厚さ計測時に計測誤差が発生する要因の説明図。Explanatory drawing of the factor which a measurement error generate | occur | produces at the time of thickness measurement. 鋼板の斜め計測誤差の補正方法を説明する図。The figure explaining the correction method of the diagonal measurement error of a steel plate. 鋼板の斜め計測誤差の他の補正方法を説明する図。The figure explaining the other correction method of the diagonal measurement error of a steel plate. 本発明の実施例の厚さ計測装置の正面図及び平面図。The front view and top view of the thickness measuring apparatus of the Example of this invention. 三角測量式レーザー距離計の原理図。Principle diagram of triangulation laser distance meter. 距離計の角度調整の説明図。Explanatory drawing of angle adjustment of a distance meter. 上下距離計による厚さ計測の説明図。Explanatory drawing of thickness measurement by a vertical distance meter. 校正板機構部の説明図。Explanatory drawing of a calibration board mechanism part.

符号の説明Explanation of symbols

１ 距離計、２ Ｃフレーム、３ ガイド、４ 校正板機構部、５ 校正板、６ 校正板回転機構、７ 校正板移動機構、８ 校正板角度変更機構、９ 移動機構、１０ 信号処理装置、１１ 計測対象（鋼板）。   1 distance meter, 2 C frame, 3 guide, 4 calibration plate mechanism, 5 calibration plate, 6 calibration plate rotation mechanism, 7 calibration plate moving mechanism, 8 calibration plate angle changing mechanism, 9 moving mechanism, 10 signal processing device, 11 Measurement target (steel plate).

Claims (8)

複数の対向配置されたレーザ距離計により構成される厚さ計測装置の調整方法において、
前記レーザ距離計の計測範囲内にある校正板を、校正板の移動軸に対して第１の任意の角度にして前記距離計の距離計測方向に移動させる工程と、
前記校正板を、校正板の移動軸に対して第２の任意の角度にして前記距離計の距離計測方向に前記第１の任意の角度配置の場合と同一距離移動させる工程と、
前記校正板を前記第１の任意の角度にして移動させたときの移動の前後で前記距離計によりそれぞれ距離計測をしてその計測値の変化量である第１の変化量を求める工程と、
前記校正板を前記第２の任意の角度にして移動させたときの移動の前後で前記距離計によりそれぞれ距離計測してその計測値の変化量である第２の変化量を求める工程と、
前記第１の変化量と前記第２の変位量との差異に基づいて前記距離計の距離計測方向と前記校正板の移動軸との間の角度の偏差を求める工程と、
前記偏差に基づいて前記距離計の距離計測方向を調整する工程と
を備えたことを特徴とする厚さ計測装置の調整方法。 In the adjustment method of the thickness measuring device constituted by a plurality of laser distance meters arranged opposite to each other,
Moving the calibration plate within the measurement range of the laser distance meter in the distance measurement direction of the distance meter at a first arbitrary angle with respect to the movement axis of the calibration plate;
Moving the calibration plate at a second arbitrary angle with respect to the movement axis of the calibration plate in the distance measuring direction of the distance meter by the same distance as in the first arbitrary angle arrangement;
Measuring the distance with the distance meter before and after the movement when the calibration plate is moved at the first arbitrary angle to obtain a first change amount that is a change amount of the measurement value;
Measuring the distance by the distance meter before and after the movement when the calibration plate is moved at the second arbitrary angle, and obtaining a second change amount that is a change amount of the measured value;
Obtaining a deviation of an angle between a distance measuring direction of the distance meter and a moving axis of the calibration plate based on a difference between the first change amount and the second displacement amount;
Adjusting the distance measuring direction of the distance meter based on the deviation, and adjusting the thickness measuring device. 複数の対向配置されたレーザ距離計により構成される厚さ計測装置の調整方法において、
前記レーザ距離計の計測範囲内に厚さが既知の校正板を、前記距離計の距離計測方向に対して任意の角度に調整する工程と、
前記校正板が前記任意の角度にされた状態で前記距離計により前記校正板の厚さを計測する工程と、
前記厚さ計測値と、前記校正板の既知の厚さ及び前記任意の角度によって得られる斜め方向の校正板の厚さとを比較し、その差異に基づいて対向配置された前記距離計の計測軸の位置ズレを算出する工程と
を備えたことを特徴とする厚さ計測装置の調整方法。 In the adjustment method of the thickness measuring device constituted by a plurality of laser distance meters arranged opposite to each other,
Adjusting a calibration plate whose thickness is known within the measurement range of the laser distance meter to an arbitrary angle with respect to the distance measurement direction of the distance meter;
Measuring the thickness of the calibration plate with the distance meter in a state where the calibration plate is at the arbitrary angle;
The thickness measurement value is compared with the known thickness of the calibration plate and the thickness of the calibration plate in the oblique direction obtained by the arbitrary angle, and the measuring axis of the distance meter arranged oppositely based on the difference A method for adjusting a thickness measuring apparatus comprising the step of calculating a positional deviation of the thickness measuring apparatus. 複数の対向配置されたレーザ距離計により構成される厚さ計測装置の調整方法において、
前記レーザ距離計の計測範囲内にある校正板を、前記校正板の移動軸に対して第１の任意の角度にして前記距離計の距離計測方向に移動させる工程と、
前記校正板を、前記校正板の移動軸に対して第２の任意の角度にして前記距離計の距離計測方向に前記第１の任意の角度配置の場合と同一距離移動させる工程と、
前記校正板を前記第１の任意の角度にして移動させたときの移動の前後で前記距離計によりそれぞれ距離計測をしてその計測値の変化量である第１の変化量を求める工程と、
前記校正板を第２の任意の角度にして移動させたときの移動の前後で前記距離計によりそれぞれ距離計測してその計測値の変化量である第２の変化量を求める工程と、
前記第１の変化量と前記第２の変化量が、前記校正板の角度によらず等しくなるように前記距離計の距離計測方向を調整することにより対向配置された前記距離計の計測方向が平行となるように調整する工程と、
前記対向配置された距離計の計測方向が平行になるように調整された後、前記校正板を任意の角度にした状態で前記距離計により計測された厚さ計測値と、前記校正板の既知の厚さ及び前記任意の角度によって得られる斜め方向の校正板の厚さとを比較し、両者が一致するように、前記距離計の距離計測方向に垂直な平面での位置を調整し、前記対向配置された距離計の計測軸を一致させる工程と
を備えたことを特徴とする厚さ計測装置の調整方法。 In the adjustment method of the thickness measuring device constituted by a plurality of laser distance meters arranged opposite to each other,
Moving the calibration plate within the measurement range of the laser rangefinder to a distance measurement direction of the rangefinder at a first arbitrary angle with respect to the movement axis of the calibration plate;
Moving the calibration plate at a second arbitrary angle with respect to the movement axis of the calibration plate in the distance measuring direction of the distance meter by the same distance as in the first arbitrary angle arrangement;
Measuring the distance with the distance meter before and after the movement when the calibration plate is moved at the first arbitrary angle to obtain a first change amount that is a change amount of the measurement value;
Measuring the distance by the distance meter before and after the movement when the calibration plate is moved at a second arbitrary angle to obtain a second change amount that is a change amount of the measured value;
By adjusting the distance measurement direction of the distance meter so that the first change amount and the second change amount are equal regardless of the angle of the calibration plate, the measurement direction of the distance meter disposed oppositely is changed. Adjusting to be parallel,
The thickness measurement value measured by the distance meter in a state where the calibration plate is at an arbitrary angle after being adjusted so that the measurement directions of the opposed distance meters are parallel, and the calibration plate is known And the thickness of the calibration plate in the oblique direction obtained by the arbitrary angle, and adjust the position on the plane perpendicular to the distance measurement direction of the distance meter so that they match each other. A method for adjusting a thickness measuring device, comprising: a step of matching a measuring axis of a distance meter arranged. 前記校正板の厚さを計測するときに、前記校正板をその面方向に連続的に移動させることを特徴とする請求項１〜３の何れかに記載の厚さ計測装置の調整方法。   The method for adjusting a thickness measuring apparatus according to claim 1, wherein when the thickness of the calibration plate is measured, the calibration plate is continuously moved in the surface direction. 複数の対向配置されたレーザ距離計により構成される厚さ計測装置の調整装置において、
前記レーザ距離計の計測範囲内に配置された校正板を前記距離計の距離計測方向に移動させる第１の機構と、
前記校正板を前記移動方向に対して任意の角度に調整可能な第２の機構と、
前記距離計の計測値を演算処理する演算手段とを備え、
前記第２及び第１の機構は、前記レーザ距離計の計測範囲内に配置された校正板を、前記校正板を移動方向に対して第１の任意の角度にするとともに前記距離計の距離計測方向に移動させ、また、前記校正板を、該校正板の移動方向に対して第２の任意の角度にするとともに前記距離計の距離計測方向に前記第１の任意の角度配置の場合と同一距離移動させ、
前記演算手段は、前記校正板を前記第１の任意の角度にして移動させたときの移動の前後で前記距離計によりそれぞれ距離計測させてその計測値の変化量である第１の変化量を求めるとともに、前記校正板を前記第２の任意の角度にして移動させたときの移動の前後で前記距離計にそれぞれ距離計測させてその計測値の変化量である第２の変化量を求め、前記第１の変化量と前記第２の変化量との差異に基づいて前記距離計の計測方向と前記校正板の移動方向との間の角度の偏差を求め、
前記距離計の距離計測方向を前記偏差に基づいて調整することを特徴とする厚さ計測装置の調整装置。 In the adjusting device of the thickness measuring device constituted by a plurality of laser distance meters arranged opposite to each other,
A first mechanism for moving a calibration plate arranged within the measurement range of the laser distance meter in the distance measurement direction of the distance meter;
A second mechanism capable of adjusting the calibration plate to an arbitrary angle with respect to the moving direction;
A calculation means for calculating the measurement value of the distance meter;
The second and first mechanisms are configured such that the calibration plate disposed within the measurement range of the laser rangefinder is set to the first arbitrary angle with respect to the moving direction of the calibration plate and the distance measurement of the rangefinder. The calibration plate is moved to a second arbitrary angle with respect to the movement direction of the calibration plate and the same as the first arbitrary angle arrangement in the distance measuring direction of the rangefinder. Move the distance,
The computing means measures the distance by the distance meter before and after the calibration plate is moved at the first arbitrary angle, and calculates a first change amount that is a change amount of the measured value. And obtaining a second change amount that is a change amount of the measured value by causing the distance meter to measure the distance before and after the movement when the calibration plate is moved at the second arbitrary angle, Based on the difference between the first change amount and the second change amount, the deviation of the angle between the measuring direction of the distance meter and the moving direction of the calibration plate is obtained,
An apparatus for adjusting a thickness measuring apparatus, wherein the distance measuring direction of the distance meter is adjusted based on the deviation. 複数の対向配置されたレーザ距離計により構成される厚さ計測装置の調整方法において、
前記レーザ距離計の計測範囲内に配置される厚さが既知の校正板と、
前記校正板の移動方向に対して任意の角度に調整可能な機構と、
前記距離計の計測値を演算処理する演算手段とを備え、
前記演算手段は、
前記校正板を前記任意の角度にした状態で前記距離計により厚さを計測させたときの厚さ計測値と、前記校正板の既知の厚さ及び前記任意の角度から得られる傾斜方向の校正板の厚さとを比較し、その差異に基づいて対向配置された前記距離計の計測軸の位置ズレを算出することを特徴とする厚さ計測装置の調整装置。 In the adjustment method of the thickness measuring device constituted by a plurality of laser distance meters arranged opposite to each other,
A calibration plate with a known thickness disposed within the measurement range of the laser distance meter;
A mechanism that can be adjusted to an arbitrary angle with respect to the moving direction of the calibration plate;
A calculation means for calculating the measurement value of the distance meter;
The computing means is
A thickness measurement value when the thickness is measured by the distance meter in a state where the calibration plate is at the arbitrary angle, and a calibration of the tilt direction obtained from the known thickness of the calibration plate and the arbitrary angle. An adjustment device for a thickness measuring device, which compares a thickness of a plate and calculates a positional shift of a measuring axis of the distance meter arranged to face the plate based on the difference. 複数の対向配置されたレーザ距離計により構成される厚さ計測装置の調整装置において、
前記レーザ距離計の計測範囲内に配置される厚さが既知の校正板と、
前記レーザ距離計の計測範囲内に配置された校正板を前記距離計の距離計測方向に移動させる第１の機構と、
前記校正板を前記移動方向に対して任意の角度に調整可能な第２の機構と、
前記距離計の計測値を演算処理する演算手段とを備え、
前記第２及び第１の機構は、前記レーザ距離計の計測範囲内に配置された校正板を、前記校正板の移動軸に対して第１の任意の角度にするとともに前記距離計の計測方向に移動させ、前記校正板を、前記校正板の移動軸に対して第２の任意の角度にするとともに、前記距離計の距離計測方向に前記第１の任意の角度配置の場合と同一距離移動させ、
前記演算手段は、前記校正板を前記第１の任意の角度にして移動させたときの移動の前後で前記距離計によりそれぞれ距離計測をさせてその計測値の変化量である第１の変化量を求める処理、及び前記校正板を前記第２の任意の角度にして移動させたときの移動の前後で前記距離計によりそれぞれ距離計測をさせてその計測値の変化量である第２の変化量を求める処理を行い、
前記第１の変化量と前記第２の変位量が、前記校正板の角度によらず等しくなるように前記距離計の距離計測方向を調整することにより対向配置された前記距離計の距離計測方向が平行となるように調整し、
前記対向配置された距離計の計測方向が平行になるように調整された後に、前記校正板を任意の角度にした状態で前記距離計により計測された厚さ計測値と、前記校正板の既知の厚さ及び前記任意の角度から得られる斜め方向の校正板の厚さとが一致するように、前記距離計の距離計測方向に垂直な平面での位置を調整し、前記対向配置された距離計の計測軸を一致させることを特徴とする厚さ計測装置の調整装置。 In the adjusting device of the thickness measuring device constituted by a plurality of laser distance meters arranged opposite to each other,
A calibration plate with a known thickness disposed within the measurement range of the laser distance meter;
A first mechanism for moving a calibration plate arranged within the measurement range of the laser distance meter in the distance measurement direction of the distance meter;
A second mechanism capable of adjusting the calibration plate to an arbitrary angle with respect to the moving direction;
A calculation means for calculating the measurement value of the distance meter;
The second and first mechanisms are configured such that a calibration plate disposed within the measurement range of the laser rangefinder is set to a first arbitrary angle with respect to the movement axis of the calibration plate and the measurement direction of the rangefinder The calibration plate is moved to the second arbitrary angle with respect to the movement axis of the calibration plate, and is moved the same distance in the distance measurement direction of the distance meter as in the first arbitrary angle arrangement. Let
The arithmetic means measures a distance by the distance meter before and after the calibration plate is moved at the first arbitrary angle, and a first change amount that is a change amount of the measured value. And a second change amount that is a change amount of the measured value by measuring the distance with the distance meter before and after the movement when the calibration plate is moved at the second arbitrary angle. Process to find
The distance measurement direction of the distance meter disposed opposite to the distance meter by adjusting the distance measurement direction of the distance meter so that the first change amount and the second displacement amount are equal regardless of the angle of the calibration plate. Are adjusted to be parallel,
The thickness measurement value measured by the distance meter in a state where the calibration plate is at an arbitrary angle after the measurement is performed so that the measuring directions of the distance meters arranged opposite to each other are parallel, and the calibration plate is known. So that the thickness of the calibration plate in the oblique direction obtained from the arbitrary angle coincides with the distance measurement direction of the distance meter in a plane perpendicular to the distance measurement direction, and the distance meter disposed opposite to the distance meter. An adjustment device for a thickness measuring device, wherein the measuring axes are matched. 前記校正板の厚さを計測するときに、前記校正板をその面方向に連続的に移動させる機構を備えたことを特徴とする請求項５〜７の何れかに記載の厚さ計測装置の調整装置。
The thickness measuring device according to any one of claims 5 to 7, further comprising a mechanism for continuously moving the calibration plate in a surface direction when measuring the thickness of the calibration plate. Adjustment device.
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