JP2007134655A - 太陽電池およびその製造方法 - Google Patents
太陽電池およびその製造方法 Download PDFInfo
- Publication number
- JP2007134655A JP2007134655A JP2005329000A JP2005329000A JP2007134655A JP 2007134655 A JP2007134655 A JP 2007134655A JP 2005329000 A JP2005329000 A JP 2005329000A JP 2005329000 A JP2005329000 A JP 2005329000A JP 2007134655 A JP2007134655 A JP 2007134655A
- Authority
- JP
- Japan
- Prior art keywords
- solar cell
- semiconductor substrate
- doping
- recess
- type layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 73
- 239000000758 substrate Substances 0.000 claims abstract description 95
- 239000004065 semiconductor Substances 0.000 claims abstract description 75
- 238000000034 method Methods 0.000 claims description 89
- 238000005530 etching Methods 0.000 claims description 48
- 230000000873 masking effect Effects 0.000 claims description 32
- 239000000463 material Substances 0.000 claims description 24
- 238000009792 diffusion process Methods 0.000 claims description 18
- 238000000059 patterning Methods 0.000 claims description 15
- 238000007639 printing Methods 0.000 claims description 6
- 229910052581 Si3N4 Inorganic materials 0.000 abstract description 33
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 abstract description 33
- 238000006243 chemical reaction Methods 0.000 abstract description 9
- 230000006866 deterioration Effects 0.000 abstract 1
- 230000008569 process Effects 0.000 description 31
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 23
- 229910052710 silicon Inorganic materials 0.000 description 23
- 239000010703 silicon Substances 0.000 description 23
- 239000002019 doping agent Substances 0.000 description 20
- 230000015572 biosynthetic process Effects 0.000 description 18
- 239000012535 impurity Substances 0.000 description 17
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 16
- -1 alkylated ammonium tetrafluoroborate Chemical class 0.000 description 16
- 229910052814 silicon oxide Inorganic materials 0.000 description 16
- 239000002904 solvent Substances 0.000 description 15
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 12
- 239000002253 acid Substances 0.000 description 12
- 239000000243 solution Substances 0.000 description 12
- 238000000206 photolithography Methods 0.000 description 11
- 229910000077 silane Inorganic materials 0.000 description 11
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 10
- 239000002562 thickening agent Substances 0.000 description 10
- 239000003795 chemical substances by application Substances 0.000 description 9
- 150000001875 compounds Chemical class 0.000 description 9
- 238000007650 screen-printing Methods 0.000 description 9
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 9
- 238000005229 chemical vapour deposition Methods 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- PUPZLCDOIYMWBV-UHFFFAOYSA-N (+/-)-1,3-Butanediol Chemical compound CC(O)CCO PUPZLCDOIYMWBV-UHFFFAOYSA-N 0.000 description 6
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 6
- QTBSBXVTEAMEQO-UHFFFAOYSA-N Acetic acid Chemical compound CC(O)=O QTBSBXVTEAMEQO-UHFFFAOYSA-N 0.000 description 6
- WERYXYBDKMZEQL-UHFFFAOYSA-N butane-1,4-diol Chemical compound OCCCCO WERYXYBDKMZEQL-UHFFFAOYSA-N 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- SWXVUIWOUIDPGS-UHFFFAOYSA-N diacetone alcohol Chemical compound CC(=O)CC(C)(C)O SWXVUIWOUIDPGS-UHFFFAOYSA-N 0.000 description 6
- 239000003513 alkali Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 150000002222 fluorine compounds Chemical class 0.000 description 5
- 239000002803 fossil fuel Substances 0.000 description 5
- OJVAMHKKJGICOG-UHFFFAOYSA-N 2,5-hexanedione Chemical compound CC(=O)CCC(C)=O OJVAMHKKJGICOG-UHFFFAOYSA-N 0.000 description 4
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 4
- XBDQKXXYIPTUBI-UHFFFAOYSA-M Propionate Chemical compound CCC([O-])=O XBDQKXXYIPTUBI-UHFFFAOYSA-M 0.000 description 4
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 4
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 4
- 239000002518 antifoaming agent Substances 0.000 description 4
- 239000004359 castor oil Substances 0.000 description 4
- 235000019438 castor oil Nutrition 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- ZEMPKEQAKRGZGQ-XOQCFJPHSA-N glycerol triricinoleate Natural products CCCCCC[C@@H](O)CC=CCCCCCCCC(=O)OC[C@@H](COC(=O)CCCCCCCC=CC[C@@H](O)CCCCCC)OC(=O)CCCCCCCC=CC[C@H](O)CCCCCC ZEMPKEQAKRGZGQ-XOQCFJPHSA-N 0.000 description 4
- 238000007641 inkjet printing Methods 0.000 description 4
- TZIHFWKZFHZASV-UHFFFAOYSA-N methyl formate Chemical compound COC=O TZIHFWKZFHZASV-UHFFFAOYSA-N 0.000 description 4
- FDPIMTJIUBPUKL-UHFFFAOYSA-N pentan-3-one Chemical compound CCC(=O)CC FDPIMTJIUBPUKL-UHFFFAOYSA-N 0.000 description 4
- 230000002829 reductive effect Effects 0.000 description 4
- 239000013008 thixotropic agent Substances 0.000 description 4
- 238000005406 washing Methods 0.000 description 4
- DNIAPMSPPWPWGF-GSVOUGTGSA-N (R)-(-)-Propylene glycol Chemical compound C[C@@H](O)CO DNIAPMSPPWPWGF-GSVOUGTGSA-N 0.000 description 3
- POAOYUHQDCAZBD-UHFFFAOYSA-N 2-butoxyethanol Chemical compound CCCCOCCO POAOYUHQDCAZBD-UHFFFAOYSA-N 0.000 description 3
- QCAHUFWKIQLBNB-UHFFFAOYSA-N 3-(3-methoxypropoxy)propan-1-ol Chemical compound COCCCOCCCO QCAHUFWKIQLBNB-UHFFFAOYSA-N 0.000 description 3
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 3
- PEDCQBHIVMGVHV-UHFFFAOYSA-N Glycerine Chemical compound OCC(O)CO PEDCQBHIVMGVHV-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- MUBZPKHOEPUJKR-UHFFFAOYSA-N Oxalic acid Chemical compound OC(=O)C(O)=O MUBZPKHOEPUJKR-UHFFFAOYSA-N 0.000 description 3
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 230000008901 benefit Effects 0.000 description 3
- 229910052796 boron Inorganic materials 0.000 description 3
- MTHSVFCYNBDYFN-UHFFFAOYSA-N diethylene glycol Chemical compound OCCOCCO MTHSVFCYNBDYFN-UHFFFAOYSA-N 0.000 description 3
- 229940028356 diethylene glycol monobutyl ether Drugs 0.000 description 3
- 150000002170 ethers Chemical class 0.000 description 3
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- DNIAPMSPPWPWGF-UHFFFAOYSA-N monopropylene glycol Natural products CC(O)CO DNIAPMSPPWPWGF-UHFFFAOYSA-N 0.000 description 3
- JCGNDDUYTRNOFT-UHFFFAOYSA-N oxolane-2,4-dione Chemical compound O=C1COC(=O)C1 JCGNDDUYTRNOFT-UHFFFAOYSA-N 0.000 description 3
- 238000007649 pad printing Methods 0.000 description 3
- 239000011574 phosphorus Substances 0.000 description 3
- 229910052698 phosphorus Inorganic materials 0.000 description 3
- 229920000036 polyvinylpyrrolidone Polymers 0.000 description 3
- 239000001267 polyvinylpyrrolidone Substances 0.000 description 3
- 235000013855 polyvinylpyrrolidone Nutrition 0.000 description 3
- 238000010248 power generation Methods 0.000 description 3
- 235000013772 propylene glycol Nutrition 0.000 description 3
- 150000005846 sugar alcohols Polymers 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 239000002699 waste material Substances 0.000 description 3
- DHKHKXVYLBGOIT-UHFFFAOYSA-N 1,1-Diethoxyethane Chemical compound CCOC(C)OCC DHKHKXVYLBGOIT-UHFFFAOYSA-N 0.000 description 2
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 2
- ZPVFWPFBNIEHGJ-UHFFFAOYSA-N 2-octanone Chemical compound CCCCCCC(C)=O ZPVFWPFBNIEHGJ-UHFFFAOYSA-N 0.000 description 2
- KWOLFJPFCHCOCG-UHFFFAOYSA-N Acetophenone Chemical compound CC(=O)C1=CC=CC=C1 KWOLFJPFCHCOCG-UHFFFAOYSA-N 0.000 description 2
- FERIUCNNQQJTOY-UHFFFAOYSA-M Butyrate Chemical compound CCCC([O-])=O FERIUCNNQQJTOY-UHFFFAOYSA-M 0.000 description 2
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- 108010010803 Gelatin Proteins 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- NTIZESTWPVYFNL-UHFFFAOYSA-N Methyl isobutyl ketone Chemical compound CC(C)CC(C)=O NTIZESTWPVYFNL-UHFFFAOYSA-N 0.000 description 2
- UIHCLUNTQKBZGK-UHFFFAOYSA-N Methyl isobutyl ketone Natural products CCC(C)C(C)=O UIHCLUNTQKBZGK-UHFFFAOYSA-N 0.000 description 2
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 2
- 239000000020 Nitrocellulose Substances 0.000 description 2
- 239000004721 Polyphenylene oxide Substances 0.000 description 2
- 229920002472 Starch Polymers 0.000 description 2
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 description 2
- FJWGYAHXMCUOOM-QHOUIDNNSA-N [(2s,3r,4s,5r,6r)-2-[(2r,3r,4s,5r,6s)-4,5-dinitrooxy-2-(nitrooxymethyl)-6-[(2r,3r,4s,5r,6s)-4,5,6-trinitrooxy-2-(nitrooxymethyl)oxan-3-yl]oxyoxan-3-yl]oxy-3,5-dinitrooxy-6-(nitrooxymethyl)oxan-4-yl] nitrate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](O[N+]([O-])=O)[C@H]1O[N+]([O-])=O)O[C@H]1[C@@H]([C@@H](O[N+]([O-])=O)[C@H](O[N+]([O-])=O)[C@@H](CO[N+]([O-])=O)O1)O[N+]([O-])=O)CO[N+](=O)[O-])[C@@H]1[C@@H](CO[N+]([O-])=O)O[C@@H](O[N+]([O-])=O)[C@H](O[N+]([O-])=O)[C@H]1O[N+]([O-])=O FJWGYAHXMCUOOM-QHOUIDNNSA-N 0.000 description 2
- KXKVLQRXCPHEJC-UHFFFAOYSA-N acetic acid trimethyl ester Natural products COC(C)=O KXKVLQRXCPHEJC-UHFFFAOYSA-N 0.000 description 2
- DPXJVFZANSGRMM-UHFFFAOYSA-N acetic acid;2,3,4,5,6-pentahydroxyhexanal;sodium Chemical compound [Na].CC(O)=O.OCC(O)C(O)C(O)C(O)C=O DPXJVFZANSGRMM-UHFFFAOYSA-N 0.000 description 2
- 239000002318 adhesion promoter Substances 0.000 description 2
- 239000000783 alginic acid Substances 0.000 description 2
- 235000010443 alginic acid Nutrition 0.000 description 2
- 229920000615 alginic acid Polymers 0.000 description 2
- 229960001126 alginic acid Drugs 0.000 description 2
- 150000004781 alginic acids Chemical class 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 2
- 229910021417 amorphous silicon Inorganic materials 0.000 description 2
- 239000000440 bentonite Substances 0.000 description 2
- 229910000278 bentonite Inorganic materials 0.000 description 2
- SVPXDRXYRYOSEX-UHFFFAOYSA-N bentoquatam Chemical compound O.O=[Si]=O.O=[Al]O[Al]=O SVPXDRXYRYOSEX-UHFFFAOYSA-N 0.000 description 2
- 239000001768 carboxy methyl cellulose Substances 0.000 description 2
- 239000012159 carrier gas Substances 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- 239000001913 cellulose Substances 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 230000018109 developmental process Effects 0.000 description 2
- 239000007772 electrode material Substances 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 150000002148 esters Chemical class 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- WBJINCZRORDGAQ-UHFFFAOYSA-N formic acid ethyl ester Natural products CCOC=O WBJINCZRORDGAQ-UHFFFAOYSA-N 0.000 description 2
- 229920000159 gelatin Polymers 0.000 description 2
- 239000008273 gelatin Substances 0.000 description 2
- 235000019322 gelatine Nutrition 0.000 description 2
- 235000011852 gelatine desserts Nutrition 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- JVTAAEKCZFNVCJ-UHFFFAOYSA-N lactic acid Chemical compound CC(O)C(O)=O JVTAAEKCZFNVCJ-UHFFFAOYSA-N 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- BDAGIHXWWSANSR-UHFFFAOYSA-N methanoic acid Natural products OC=O BDAGIHXWWSANSR-UHFFFAOYSA-N 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- 229920001220 nitrocellulos Polymers 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 230000036961 partial effect Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 229920002037 poly(vinyl butyral) polymer Polymers 0.000 description 2
- 229920000058 polyacrylate Polymers 0.000 description 2
- 229920006122 polyamide resin Polymers 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920000570 polyether Polymers 0.000 description 2
- 229920005862 polyol Polymers 0.000 description 2
- 229920002635 polyurethane Polymers 0.000 description 2
- 239000004814 polyurethane Substances 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- 230000007261 regionalization Effects 0.000 description 2
- 238000010020 roller printing Methods 0.000 description 2
- 150000003839 salts Chemical class 0.000 description 2
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 2
- 235000012239 silicon dioxide Nutrition 0.000 description 2
- 235000019812 sodium carboxymethyl cellulose Nutrition 0.000 description 2
- 229920001027 sodium carboxymethylcellulose Polymers 0.000 description 2
- 239000008107 starch Substances 0.000 description 2
- 235000019698 starch Nutrition 0.000 description 2
- UQMOLLPKNHFRAC-UHFFFAOYSA-N tetrabutyl silicate Chemical compound CCCCO[Si](OCCCC)(OCCCC)OCCCC UQMOLLPKNHFRAC-UHFFFAOYSA-N 0.000 description 2
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 2
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 2
- ZQZCOBSUOFHDEE-UHFFFAOYSA-N tetrapropyl silicate Chemical compound CCCO[Si](OCCC)(OCCC)OCCC ZQZCOBSUOFHDEE-UHFFFAOYSA-N 0.000 description 2
- 239000001993 wax Substances 0.000 description 2
- 239000000080 wetting agent Substances 0.000 description 2
- FQERLIOIVXPZKH-UHFFFAOYSA-N 1,2,4-trioxane Chemical compound C1COOCO1 FQERLIOIVXPZKH-UHFFFAOYSA-N 0.000 description 1
- BGJSXRVXTHVRSN-UHFFFAOYSA-N 1,3,5-trioxane Chemical compound C1OCOCO1 BGJSXRVXTHVRSN-UHFFFAOYSA-N 0.000 description 1
- MMELVRLTDGKXGU-UHFFFAOYSA-N 2-ethylhex-1-en-1-ol Chemical compound CCCCC(CC)=CO MMELVRLTDGKXGU-UHFFFAOYSA-N 0.000 description 1
- OSWFIVFLDKOXQC-UHFFFAOYSA-N 4-(3-methoxyphenyl)aniline Chemical compound COC1=CC=CC(C=2C=CC(N)=CC=2)=C1 OSWFIVFLDKOXQC-UHFFFAOYSA-N 0.000 description 1
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 description 1
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- 239000004354 Hydroxyethyl cellulose Substances 0.000 description 1
- 229920000663 Hydroxyethyl cellulose Polymers 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229910019142 PO4 Inorganic materials 0.000 description 1
- ALQSHHUCVQOPAS-UHFFFAOYSA-N Pentane-1,5-diol Chemical compound OCCCCCO ALQSHHUCVQOPAS-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 1
- 235000011054 acetic acid Nutrition 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 229910001515 alkali metal fluoride Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- AZDRQVAHHNSJOQ-UHFFFAOYSA-N alumane Chemical class [AlH3] AZDRQVAHHNSJOQ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- GUNJVIDCYZYFGV-UHFFFAOYSA-K antimony trifluoride Chemical compound F[Sb](F)F GUNJVIDCYZYFGV-UHFFFAOYSA-K 0.000 description 1
- 238000001505 atmospheric-pressure chemical vapour deposition Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- KGBXLFKZBHKPEV-UHFFFAOYSA-N boric acid Chemical compound OB(O)O KGBXLFKZBHKPEV-UHFFFAOYSA-N 0.000 description 1
- 239000004327 boric acid Substances 0.000 description 1
- 150000001638 boron Chemical class 0.000 description 1
- 150000001639 boron compounds Chemical class 0.000 description 1
- 229910052795 boron group element Inorganic materials 0.000 description 1
- 229910052810 boron oxide Inorganic materials 0.000 description 1
- 230000005587 bubbling Effects 0.000 description 1
- 125000000484 butyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000011575 calcium Substances 0.000 description 1
- 229910052791 calcium Inorganic materials 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 125000004432 carbon atom Chemical group C* 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 150000004649 carbonic acid derivatives Chemical class 0.000 description 1
- 229920003090 carboxymethyl hydroxyethyl cellulose Polymers 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000003034 coal gas Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000007872 degassing Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- JKWMSGQKBLHBQQ-UHFFFAOYSA-N diboron trioxide Chemical compound O=BOB=O JKWMSGQKBLHBQQ-UHFFFAOYSA-N 0.000 description 1
- YWEUIGNSBFLMFL-UHFFFAOYSA-N diphosphonate Chemical compound O=P(=O)OP(=O)=O YWEUIGNSBFLMFL-UHFFFAOYSA-N 0.000 description 1
- SZXQTJUDPRGNJN-UHFFFAOYSA-N dipropylene glycol Chemical compound OCCCOCCCO SZXQTJUDPRGNJN-UHFFFAOYSA-N 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 125000001301 ethoxy group Chemical group [H]C([H])([H])C([H])([H])O* 0.000 description 1
- 125000004494 ethyl ester group Chemical group 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 235000019253 formic acid Nutrition 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- NGAZZOYFWWSOGK-UHFFFAOYSA-N heptan-3-one Chemical compound CCCCC(=O)CC NGAZZOYFWWSOGK-UHFFFAOYSA-N 0.000 description 1
- 235000019447 hydroxyethyl cellulose Nutrition 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 125000001449 isopropyl group Chemical group [H]C([H])([H])C([H])(*)C([H])([H])[H] 0.000 description 1
- 239000004310 lactic acid Substances 0.000 description 1
- 235000014655 lactic acid Nutrition 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 238000001459 lithography Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 150000007522 mineralic acids Chemical class 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000003345 natural gas Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 150000007524 organic acids Chemical class 0.000 description 1
- 235000005985 organic acids Nutrition 0.000 description 1
- 150000002903 organophosphorus compounds Chemical class 0.000 description 1
- 235000006408 oxalic acid Nutrition 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- NBIIXXVUZAFLBC-UHFFFAOYSA-K phosphate Chemical compound [O-]P([O-])([O-])=O NBIIXXVUZAFLBC-UHFFFAOYSA-K 0.000 description 1
- 239000010452 phosphate Substances 0.000 description 1
- RLOWWWKZYUNIDI-UHFFFAOYSA-N phosphinic chloride Chemical compound ClP=O RLOWWWKZYUNIDI-UHFFFAOYSA-N 0.000 description 1
- 150000003017 phosphorus Chemical class 0.000 description 1
- 229910001392 phosphorus oxide Inorganic materials 0.000 description 1
- DLYUQMMRRRQYAE-UHFFFAOYSA-N phosphorus pentoxide Inorganic materials O1P(O2)(=O)OP3(=O)OP1(=O)OP2(=O)O3 DLYUQMMRRRQYAE-UHFFFAOYSA-N 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- RUOJZAUFBMNUDX-UHFFFAOYSA-N propylene carbonate Chemical compound CC1COC(=O)O1 RUOJZAUFBMNUDX-UHFFFAOYSA-N 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- VSAISIQCTGDGPU-UHFFFAOYSA-N tetraphosphorus hexaoxide Chemical compound O1P(O2)OP3OP1OP2O3 VSAISIQCTGDGPU-UHFFFAOYSA-N 0.000 description 1
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- JLGLQAWTXXGVEM-UHFFFAOYSA-N triethylene glycol monomethyl ether Chemical compound COCCOCCOCCO JLGLQAWTXXGVEM-UHFFFAOYSA-N 0.000 description 1
- 238000010792 warming Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1804—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof comprising only elements of Group IV of the Periodic System
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
【解決手段】 面20aに凸部29と凹所26とを有しかつ他方の面である受光面20bが粗面化された半導体基板20と、p型層22と、n型層28と、シリコン窒化膜32a,32bと、電極34a,34bとを含む太陽電池35であって、p型層22を凸部29の頂部に形成し、かつn型層28を凹所26の底面26aの一部から半導体基板20の厚み方向の中心に向けて形成することにより、p型層22とn型層28との接触がない構造にする。
【選択図】 図1
Description
半導体基板の凸部と凹所とを有する面に第1導電型の第1ドーピング領域と第2導電型の第2ドーピング領域とが形成された太陽電池であって、
凸部の頂部全面に、第1導電型の第1ドーピング領域および第2導電型の第2ドーピング領域のいずれか一方のドーピング領域が形成され、
凹所の底部の少なくとも一部にもう一方のドーピング領域が形成されることを特徴とする太陽電池である。
半導体基板の少なくとも一面に第1導電型の第1ドーピング材料および第2導電型の第2ドーピング材料のいずれか一方のドーピング材料を拡散させてドーピング領域を形成する1回目のドーピング領域形成工程と、
半導体基板のドーピング領域が形成された面に、該ドーピング領域を厚み方向に貫通して底部が半導体基板のドーピングされない領域に達するように凹所を形成する凹所形成工程と、
凹所の底部の少なくとも一部にもう一方のドーピング材料を拡散させてもう一方のドーピング領域を形成する2回目のドーピング領域形成工程とを含むことを特徴とする太陽電池の製造方法である。
2回目のドーピング領域形成工程におけるドーピング材料の拡散が、
凹所の底部にマスキングによるパターニングを施した後に行われることを特徴とする。
凹所の底部へのマスキングによるパターニングが、ドーピングペーストの印刷により行われることを特徴とする。
凹所の底部へのマスキングによるパターニングが、エッチングペーストを用いて行われることを特徴とする。
凹所の底部へのマスキンクによるパターニングが、レーザ光の照射により行われることを特徴とする。
凹所の底部へのマスキングによるパターニングが、マスキングペーストを用いて行われることを特徴とする。
工程(d1)では、ペースト材21の残渣を洗浄により除去する。
R1 nSi(OR2)4−n
(式中R1はメチル基、エチル基またはフェニル基を示す。R2はメチル基、エチル基、プロピル基、イソプロピル基、ブチル基などの炭素数1〜4の直鎖または分岐鎖状のアルキル基を示す。nは0〜4の整数を示す。)で表されるシラン化合物が挙げられる。シラン化合物の具体例としては、たとえば、テトラメトキシシラン、テトラエトキシシラン、テトラプロポキシシラン、テトラブトキシシラン、それらの塩(テトラエチルオルトケイ酸塩)などが挙げられる。シラン化合物は1種を単独で使用できまたは2種以上を併用できる。シラン化合物のドーピングペーストにおける含有割合は特に制限されないけれども、好ましくはドーピングペースト全量の0.1〜5重量%である。
工程(a2)〜(e2)は、それぞれ、工程(a1)〜(e1)と同様に実施できる。
工程(a3)〜(d3)は、それぞれ、工程(a1)〜(d1)と同様に実施できる。
Chemical Vapor Deposition、常圧化学気相成長法)によりシリコン酸化膜36を形成する。
工程(a4)〜(h4)は、それぞれ、工程(a1)〜(h1)と同様に実施できる。
R1 nSi(OR2)4−n
(式中R1およびR2、nは上記に同じ。)で表されるシラン化合物が挙げられる。シラン化合物の具体例としては、たとえば、テトラメトキシシラン、テトラエトキシシラン、テトラプロポキシシラン、テトラブトキシシラン、それらの塩(テトラエチルオルトケイ酸塩)などが挙げられる。シラン化合物は1種を単独で使用できまたは2種以上を併用できる。シラン化合物のマスキングペーストにおける含有割合は特に制限されないけれども、好ましくはマスキングペースト全量の0.1〜5重量%である。
工程(a5)〜(h5)は、それぞれ、工程(a4)〜(h4)と同様に実施できる。
21 ペースト材
22 p型層
23,30,32a,32b シリコン窒化膜
24 エッチングペースト
25 エッチング窓層
26 凹所
27 ドーピングペースト
28 n型層
29 凸部
33a,33b 電極形成用窓層
34a,34b 電極
35,39 太陽電池
36,37,38a,38b シリコン酸化膜
40 マスク層
Claims (7)
- 半導体基板の凸部と凹所とを有する面に第1導電型の第1ドーピング領域と第2導電型の第2ドーピング領域とが形成された太陽電池であって、
凸部の頂部全面に、第1導電型の第1ドーピング領域および第2導電型の第2ドーピング領域のいずれか一方のドーピング領域が形成され、
凹所の底部の少なくとも一部にもう一方のドーピング領域が形成されることを特徴とする太陽電池。 - 半導体基板の少なくとも一面に第1導電型の第1ドーピング材料および第2導電型の第2ドーピング材料のいずれか一方のドーピング材料を拡散させてドーピング領域を形成する1回目のドーピング領域形成工程と、
半導体基板のドーピング領域が形成された面に、該ドーピング領域を厚み方向に貫通して底部が半導体基板のドーピングされない領域に達するように凹所を形成する凹所形成工程と、
凹所の底部の少なくとも一部にもう一方のドーピング材料を拡散させてもう一方のドーピング領域を形成する2回目のドーピング領域形成工程とを含むことを特徴とする太陽電池の製造方法。 - 2回目のドーピング領域形成工程におけるドーピング材料の拡散は、
凹所の底部にマスキングによるパターニングを施した後に行われることを特徴とする請求項2記載の太陽電池の製造方法。 - 凹所の底部へのマスキングによるパターニングは、
ドーピングペーストの印刷により行われることを特徴とする請求項3記載の太陽電池の製造方法。 - 凹所の底部へのマスキングによるパターニングは、
エッチングペーストを用いて行われることを特徴とする請求項3記載の太陽電池の製造方法。 - 凹所の底部へのマスキンクによるパターニングは、
レーザ光の照射により行われることを特徴とする請求項3記載の太陽電池の製造方法。 - 凹所の底部へのマスキングによるパターニングは、
マスキングペーストを用いて行われることを特徴とする請求項3記載の太陽電池の製造方法。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005329000A JP5201789B2 (ja) | 2005-11-14 | 2005-11-14 | 太陽電池およびその製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005329000A JP5201789B2 (ja) | 2005-11-14 | 2005-11-14 | 太陽電池およびその製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2007134655A true JP2007134655A (ja) | 2007-05-31 |
JP5201789B2 JP5201789B2 (ja) | 2013-06-05 |
Family
ID=38156032
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005329000A Expired - Fee Related JP5201789B2 (ja) | 2005-11-14 | 2005-11-14 | 太陽電池およびその製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP5201789B2 (ja) |
Cited By (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009088098A (ja) * | 2007-09-28 | 2009-04-23 | Sharp Corp | 誘電体膜のパターニング方法 |
WO2009081453A1 (ja) * | 2007-12-20 | 2009-07-02 | Teoss Co., Ltd. | 増粘エッチング塗布液およびそれを用いた太陽電池用太陽光発電素子基板の選択エッチング方法 |
JP2010161310A (ja) * | 2009-01-09 | 2010-07-22 | Sharp Corp | 裏面電極型太陽電池および裏面電極型太陽電池の製造方法 |
WO2010101054A1 (ja) * | 2009-03-02 | 2010-09-10 | シャープ株式会社 | 半導体装置の製造方法 |
JP2011511442A (ja) * | 2008-02-01 | 2011-04-07 | ニューサウス・イノベーションズ・ピーティーワイ・リミテッド | 選択された材料のパターン化されたエッチング法 |
JP2011233657A (ja) * | 2010-04-27 | 2011-11-17 | Sharp Corp | 裏面電極型太陽電池、および裏面電極型太陽電池の製造方法 |
JP2012510183A (ja) * | 2008-11-26 | 2012-04-26 | マイクロリンク デバイセズ, インク. | エミッタ層に接触する裏面バイアを備えた太陽電池 |
JP2013183004A (ja) * | 2012-03-01 | 2013-09-12 | Mitsubishi Electric Corp | 太陽電池の製造方法 |
WO2013089879A3 (en) * | 2011-09-30 | 2013-10-03 | Sunpower Corporation | Solar cell with doped groove regions separated by ridges |
JP2014022544A (ja) * | 2012-07-18 | 2014-02-03 | Sharp Corp | 光電変換素子および光電変換素子の製造方法 |
JP2014504003A (ja) * | 2010-12-02 | 2014-02-13 | サンパワー コーポレイション | バックコンタクト型太陽電池のコンタクトの製造方法 |
JP2014505377A (ja) * | 2011-02-15 | 2014-02-27 | サンパワー コーポレイション | 太陽電池の製造方法及び構造 |
JP2014067803A (ja) * | 2012-09-25 | 2014-04-17 | Sharp Corp | 光電変換素子 |
US8992803B2 (en) | 2011-09-30 | 2015-03-31 | Sunpower Corporation | Dopant ink composition and method of fabricating a solar cell there from |
US9018033B2 (en) | 2011-09-30 | 2015-04-28 | Sunpower Corporation | Method for forming diffusion regions in a silicon substrate |
WO2016158226A1 (ja) * | 2015-03-31 | 2016-10-06 | 株式会社カネカ | 太陽電池及びその製造方法 |
KR101948206B1 (ko) * | 2012-03-02 | 2019-02-14 | 인텔렉츄얼 키스톤 테크놀로지 엘엘씨 | 태양 전지와, 이의 제조 방법 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0575149A (ja) * | 1991-09-11 | 1993-03-26 | Hitachi Ltd | 太陽電池素子とその製造方法 |
JP2005223080A (ja) * | 2004-02-04 | 2005-08-18 | Sharp Corp | 太陽電池の製造方法 |
JP2005310830A (ja) * | 2004-04-16 | 2005-11-04 | Sharp Corp | 太陽電池および太陽電池の製造方法 |
-
2005
- 2005-11-14 JP JP2005329000A patent/JP5201789B2/ja not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0575149A (ja) * | 1991-09-11 | 1993-03-26 | Hitachi Ltd | 太陽電池素子とその製造方法 |
JP2005223080A (ja) * | 2004-02-04 | 2005-08-18 | Sharp Corp | 太陽電池の製造方法 |
JP2005310830A (ja) * | 2004-04-16 | 2005-11-04 | Sharp Corp | 太陽電池および太陽電池の製造方法 |
Cited By (27)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009088098A (ja) * | 2007-09-28 | 2009-04-23 | Sharp Corp | 誘電体膜のパターニング方法 |
WO2009081453A1 (ja) * | 2007-12-20 | 2009-07-02 | Teoss Co., Ltd. | 増粘エッチング塗布液およびそれを用いた太陽電池用太陽光発電素子基板の選択エッチング方法 |
JP2011511442A (ja) * | 2008-02-01 | 2011-04-07 | ニューサウス・イノベーションズ・ピーティーワイ・リミテッド | 選択された材料のパターン化されたエッチング法 |
JP2012510183A (ja) * | 2008-11-26 | 2012-04-26 | マイクロリンク デバイセズ, インク. | エミッタ層に接触する裏面バイアを備えた太陽電池 |
US8993873B2 (en) | 2008-11-26 | 2015-03-31 | Microlink Devices, Inc. | Solar cell with a backside via to contact the emitter layer |
JP2010161310A (ja) * | 2009-01-09 | 2010-07-22 | Sharp Corp | 裏面電極型太陽電池および裏面電極型太陽電池の製造方法 |
WO2010101054A1 (ja) * | 2009-03-02 | 2010-09-10 | シャープ株式会社 | 半導体装置の製造方法 |
JP2010205839A (ja) * | 2009-03-02 | 2010-09-16 | Sharp Corp | 半導体装置の製造方法 |
US8377809B2 (en) | 2009-03-02 | 2013-02-19 | Sharp Kabushiki Kaisha | Method of fabricating semiconductor device |
JP2011233657A (ja) * | 2010-04-27 | 2011-11-17 | Sharp Corp | 裏面電極型太陽電池、および裏面電極型太陽電池の製造方法 |
JP2014504003A (ja) * | 2010-12-02 | 2014-02-13 | サンパワー コーポレイション | バックコンタクト型太陽電池のコンタクトの製造方法 |
JP2016122847A (ja) * | 2010-12-02 | 2016-07-07 | サンパワー コーポレイション | バックコンタクト型太陽電池のコンタクトの製造方法 |
US9263602B2 (en) | 2011-02-15 | 2016-02-16 | Sunpower Corporation | Laser processing of solar cells with anti-reflective coating |
JP2014505377A (ja) * | 2011-02-15 | 2014-02-27 | サンパワー コーポレイション | 太陽電池の製造方法及び構造 |
US9799783B2 (en) | 2011-09-30 | 2017-10-24 | Sunpower Corporation | Dopant ink composition and method of fabricating a solar cell there from |
US8992803B2 (en) | 2011-09-30 | 2015-03-31 | Sunpower Corporation | Dopant ink composition and method of fabricating a solar cell there from |
US9018033B2 (en) | 2011-09-30 | 2015-04-28 | Sunpower Corporation | Method for forming diffusion regions in a silicon substrate |
WO2013089879A3 (en) * | 2011-09-30 | 2013-10-03 | Sunpower Corporation | Solar cell with doped groove regions separated by ridges |
US9559228B2 (en) | 2011-09-30 | 2017-01-31 | Sunpower Corporation | Solar cell with doped groove regions separated by ridges |
JP2013183004A (ja) * | 2012-03-01 | 2013-09-12 | Mitsubishi Electric Corp | 太陽電池の製造方法 |
KR101948206B1 (ko) * | 2012-03-02 | 2019-02-14 | 인텔렉츄얼 키스톤 테크놀로지 엘엘씨 | 태양 전지와, 이의 제조 방법 |
JP2014022544A (ja) * | 2012-07-18 | 2014-02-03 | Sharp Corp | 光電変換素子および光電変換素子の製造方法 |
JP2014067803A (ja) * | 2012-09-25 | 2014-04-17 | Sharp Corp | 光電変換素子 |
WO2016158226A1 (ja) * | 2015-03-31 | 2016-10-06 | 株式会社カネカ | 太陽電池及びその製造方法 |
CN107210331A (zh) * | 2015-03-31 | 2017-09-26 | 株式会社钟化 | 太阳能电池及其制造方法 |
CN107210331B (zh) * | 2015-03-31 | 2019-06-28 | 株式会社钟化 | 太阳能电池及其制造方法 |
US10854767B2 (en) | 2015-03-31 | 2020-12-01 | Kaneka Corporation | Solar cell and method for manufacturing same |
Also Published As
Publication number | Publication date |
---|---|
JP5201789B2 (ja) | 2013-06-05 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5201789B2 (ja) | 太陽電池およびその製造方法 | |
ES2359531T3 (es) | Método de fabricación de células solares de silicio cristalino con pasivación superficial mejorada. | |
US8377809B2 (en) | Method of fabricating semiconductor device | |
JP5271189B2 (ja) | 裏面電極型太陽電池セルの製造方法 | |
JP5117770B2 (ja) | 太陽電池の製造方法 | |
JP2007049079A (ja) | マスキングペースト、その製造方法およびマスキングペーストを用いた太陽電池の製造方法 | |
US20110298100A1 (en) | Semiconductor device producing method and semiconductor device | |
JP4827550B2 (ja) | 太陽電池の製造方法 | |
JP4684056B2 (ja) | 太陽電池の製造方法 | |
JP2010267787A (ja) | 半導体装置の製造方法 | |
JP2009238824A (ja) | 半導体用電極の製造方法及びこれを用いた太陽電池 | |
JP2017517147A (ja) | 太陽電池内の相対的ドーパント濃度レベル | |
WO2010110106A1 (ja) | 光電変換素子の製造方法および光電変換素子 | |
KR101085382B1 (ko) | 선택적 에미터를 포함하는 태양 전지 제조 방법 | |
JP2010205965A (ja) | 半導体装置の製造方法 | |
JP2006156646A (ja) | 太陽電池の製造方法 | |
JP5756352B2 (ja) | 裏面電極型太陽電池の製造方法 | |
WO2011132744A1 (ja) | 半導体装置の製造方法 | |
JP2010157654A (ja) | 半導体装置の製造方法 | |
JP2016139762A (ja) | 太陽電池素子の製造方法 | |
KR100910968B1 (ko) | 실리콘 태양전지의 제조방법 | |
JP4831709B2 (ja) | 半導体装置および半導体装置の製造方法 | |
JP2014110256A (ja) | 太陽電池セルの製造方法および太陽電池セル | |
CN103700723B (zh) | 一种硼背场太阳能电池的制备方法 | |
JP5221738B2 (ja) | 半導体装置および半導体装置の製造方法 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20080220 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20100209 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20110712 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20110912 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120522 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120719 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130122 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130212 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20160222 Year of fee payment: 3 |
|
LAPS | Cancellation because of no payment of annual fees |