JP2007119292A5 - - Google Patents

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Publication number
JP2007119292A5
JP2007119292A5 JP2005313241A JP2005313241A JP2007119292A5 JP 2007119292 A5 JP2007119292 A5 JP 2007119292A5 JP 2005313241 A JP2005313241 A JP 2005313241A JP 2005313241 A JP2005313241 A JP 2005313241A JP 2007119292 A5 JP2007119292 A5 JP 2007119292A5
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JP
Japan
Prior art keywords
gas
nitrogen trifluoride
producing nitrogen
fluorine gas
ammonia gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005313241A
Other languages
English (en)
Japanese (ja)
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JP2007119292A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005313241A priority Critical patent/JP2007119292A/ja
Priority claimed from JP2005313241A external-priority patent/JP2007119292A/ja
Priority to PCT/JP2006/316778 priority patent/WO2007023968A1/ja
Priority to TW095131376A priority patent/TW200722370A/zh
Priority to KR1020087007173A priority patent/KR100975490B1/ko
Priority to US12/064,927 priority patent/US7820127B2/en
Publication of JP2007119292A publication Critical patent/JP2007119292A/ja
Publication of JP2007119292A5 publication Critical patent/JP2007119292A5/ja
Pending legal-status Critical Current

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JP2005313241A 2005-08-26 2005-10-27 三フッ化窒素の製造方法および製造装置 Pending JP2007119292A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005313241A JP2007119292A (ja) 2005-10-27 2005-10-27 三フッ化窒素の製造方法および製造装置
PCT/JP2006/316778 WO2007023968A1 (ja) 2005-08-26 2006-08-25 三フッ化窒素の製造方法および製造装置
TW095131376A TW200722370A (en) 2005-08-26 2006-08-25 Method and apparatus for producing nitrogen trifluoride
KR1020087007173A KR100975490B1 (ko) 2005-08-26 2006-08-25 삼불화질소의 제조 방법 및 제조 장치
US12/064,927 US7820127B2 (en) 2005-08-26 2006-08-25 Method and apparatus for producing nitrogen trifluoride

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005313241A JP2007119292A (ja) 2005-10-27 2005-10-27 三フッ化窒素の製造方法および製造装置

Publications (2)

Publication Number Publication Date
JP2007119292A JP2007119292A (ja) 2007-05-17
JP2007119292A5 true JP2007119292A5 (enExample) 2008-12-04

Family

ID=38143524

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005313241A Pending JP2007119292A (ja) 2005-08-26 2005-10-27 三フッ化窒素の製造方法および製造装置

Country Status (1)

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JP (1) JP2007119292A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN114572944B (zh) * 2021-12-23 2024-09-17 西安近代化学研究所 一种三氟化氮及三氟化氮混合气体的制备方法
CN114560473B (zh) * 2021-12-23 2024-09-17 西安近代化学研究所 一种三氟化硼及三氟化硼混合气体的制备方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05105411A (ja) * 1991-10-22 1993-04-27 Onoda Cement Co Ltd 三フツ化窒素の製造方法
JP3390116B2 (ja) * 1996-03-28 2003-03-24 東洋エンジニアリング株式会社 分離器内部の付着防止方法
JP4508356B2 (ja) * 2000-05-12 2010-07-21 昭和電工株式会社 三フッ化窒素の製造方法及びその用途

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