JP2007099600A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2007099600A5 JP2007099600A5 JP2005295498A JP2005295498A JP2007099600A5 JP 2007099600 A5 JP2007099600 A5 JP 2007099600A5 JP 2005295498 A JP2005295498 A JP 2005295498A JP 2005295498 A JP2005295498 A JP 2005295498A JP 2007099600 A5 JP2007099600 A5 JP 2007099600A5
- Authority
- JP
- Japan
- Prior art keywords
- nitrogen trifluoride
- gas
- producing nitrogen
- solid product
- tubular reactor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- QKCGXXHCELUCKW-UHFFFAOYSA-N n-[4-[4-(dinaphthalen-2-ylamino)phenyl]phenyl]-n-naphthalen-2-ylnaphthalen-2-amine Chemical compound C1=CC=CC2=CC(N(C=3C=CC(=CC=3)C=3C=CC(=CC=3)N(C=3C=C4C=CC=CC4=CC=3)C=3C=C4C=CC=CC4=CC=3)C3=CC4=CC=CC=C4C=C3)=CC=C21 QKCGXXHCELUCKW-UHFFFAOYSA-N 0.000 claims description 50
- 239000007789 gas Substances 0.000 claims description 48
- 238000004519 manufacturing process Methods 0.000 claims description 47
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims description 24
- 229910052731 fluorine Inorganic materials 0.000 claims description 24
- 239000011737 fluorine Substances 0.000 claims description 24
- 239000012265 solid product Substances 0.000 claims description 23
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 22
- 229910052760 oxygen Inorganic materials 0.000 claims description 15
- 150000001875 compounds Chemical class 0.000 claims description 12
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 11
- 239000001301 oxygen Substances 0.000 claims description 11
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 8
- 239000000047 product Substances 0.000 claims description 8
- DDFHBQSCUXNBSA-UHFFFAOYSA-N 5-(5-carboxythiophen-2-yl)thiophene-2-carboxylic acid Chemical compound S1C(C(=O)O)=CC=C1C1=CC=C(C(O)=O)S1 DDFHBQSCUXNBSA-UHFFFAOYSA-N 0.000 claims description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 4
- 230000003197 catalytic effect Effects 0.000 claims description 4
- 239000003085 diluting agent Substances 0.000 claims description 4
- 238000010790 dilution Methods 0.000 claims description 4
- 239000012895 dilution Substances 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 229910052757 nitrogen Inorganic materials 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 3
- ZQXCQTAELHSNAT-UHFFFAOYSA-N 1-chloro-3-nitro-5-(trifluoromethyl)benzene Chemical compound [O-][N+](=O)C1=CC(Cl)=CC(C(F)(F)F)=C1 ZQXCQTAELHSNAT-UHFFFAOYSA-N 0.000 claims description 2
- 229910018503 SF6 Inorganic materials 0.000 claims description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 2
- 239000007864 aqueous solution Substances 0.000 claims description 2
- 229910052786 argon Inorganic materials 0.000 claims description 2
- 238000001816 cooling Methods 0.000 claims description 2
- 238000007599 discharging Methods 0.000 claims description 2
- 239000001307 helium Substances 0.000 claims description 2
- 229910052734 helium Inorganic materials 0.000 claims description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 2
- WMIYKQLTONQJES-UHFFFAOYSA-N hexafluoroethane Chemical compound FC(F)(F)C(F)(F)F WMIYKQLTONQJES-UHFFFAOYSA-N 0.000 claims description 2
- QYSGYZVSCZSLHT-UHFFFAOYSA-N octafluoropropane Chemical compound FC(F)(F)C(F)(F)C(F)(F)F QYSGYZVSCZSLHT-UHFFFAOYSA-N 0.000 claims description 2
- 229960004065 perflutren Drugs 0.000 claims description 2
- SFZCNBIFKDRMGX-UHFFFAOYSA-N sulfur hexafluoride Chemical compound FS(F)(F)(F)(F)F SFZCNBIFKDRMGX-UHFFFAOYSA-N 0.000 claims description 2
- 229960000909 sulfur hexafluoride Drugs 0.000 claims description 2
- 230000002378 acidificating effect Effects 0.000 claims 2
- GVGCUCJTUSOZKP-UHFFFAOYSA-N nitrogen trifluoride Chemical compound FN(F)F GVGCUCJTUSOZKP-UHFFFAOYSA-N 0.000 claims 2
- IBKKDOSOWNXUPK-UHFFFAOYSA-N [O].FC(F)(F)F Chemical compound [O].FC(F)(F)F IBKKDOSOWNXUPK-UHFFFAOYSA-N 0.000 claims 1
- KVBCYCWRDBDGBG-UHFFFAOYSA-N azane;dihydrofluoride Chemical compound [NH4+].F.[F-] KVBCYCWRDBDGBG-UHFFFAOYSA-N 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-O Ammonium Chemical compound [NH4+] QGZKDVFQNNGYKY-UHFFFAOYSA-O 0.000 description 1
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 1
Priority Applications (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005295498A JP2007099600A (ja) | 2005-10-07 | 2005-10-07 | 三フッ化窒素の製造方法 |
| PCT/JP2006/316778 WO2007023968A1 (ja) | 2005-08-26 | 2006-08-25 | 三フッ化窒素の製造方法および製造装置 |
| TW095131376A TW200722370A (en) | 2005-08-26 | 2006-08-25 | Method and apparatus for producing nitrogen trifluoride |
| KR1020087007173A KR100975490B1 (ko) | 2005-08-26 | 2006-08-25 | 삼불화질소의 제조 방법 및 제조 장치 |
| US12/064,927 US7820127B2 (en) | 2005-08-26 | 2006-08-25 | Method and apparatus for producing nitrogen trifluoride |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005295498A JP2007099600A (ja) | 2005-10-07 | 2005-10-07 | 三フッ化窒素の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2007099600A JP2007099600A (ja) | 2007-04-19 |
| JP2007099600A5 true JP2007099600A5 (enExample) | 2008-11-27 |
Family
ID=38026893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005295498A Pending JP2007099600A (ja) | 2005-08-26 | 2005-10-07 | 三フッ化窒素の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2007099600A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100239485A1 (en) | 2007-12-27 | 2010-09-23 | Central Glass Co., Ltd. | Method of manufacturing fluorinated gas compounds and apparatus for manufacturing the same |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62138338A (ja) * | 1985-12-09 | 1987-06-22 | Sumitomo Electric Ind Ltd | 堆積物自動除去装置 |
| JPH05105411A (ja) * | 1991-10-22 | 1993-04-27 | Onoda Cement Co Ltd | 三フツ化窒素の製造方法 |
| JP3390116B2 (ja) * | 1996-03-28 | 2003-03-24 | 東洋エンジニアリング株式会社 | 分離器内部の付着防止方法 |
| JP4508356B2 (ja) * | 2000-05-12 | 2010-07-21 | 昭和電工株式会社 | 三フッ化窒素の製造方法及びその用途 |
| JP4597443B2 (ja) * | 2001-09-18 | 2010-12-15 | Ｊｆｅケミカル株式会社 | 焙焼炉用付着物除去装置及びそれを備えた焙焼炉 |
-
2005
- 2005-10-07 JP JP2005295498A patent/JP2007099600A/ja active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0553725B2 (enExample) | ||
| CN100371053C (zh) | Nf3的净化方法 | |
| CN103130682B (zh) | 制备异氰酸酯的方法 | |
| JP2012046363A (ja) | 塩化水素の製造方法および塩素の製造方法 | |
| JP2006500309A (ja) | ポリスルファンの変換法 | |
| EP1024136B1 (en) | A process for producing dimethyl sulphoxide | |
| JP2007099600A5 (enExample) | ||
| JP4828180B2 (ja) | 三フッ化窒素の製造方法 | |
| JP2007119294A5 (enExample) | ||
| US7820127B2 (en) | Method and apparatus for producing nitrogen trifluoride | |
| JP4843635B2 (ja) | フッ化水素の含有量が低減されたフッ化カルボニルの製造方法 | |
| JP2007099599A5 (enExample) | ||
| JP2007119292A5 (enExample) | ||
| KR20150028800A (ko) | 암모니아, 질소 및 수소 또는 질소, 수소 및 암모니아의 혼합물들의 정제 방법 | |
| JP4624920B2 (ja) | 三フッ化窒素の製造方法 | |
| JP4624905B2 (ja) | 三フッ化窒素の製造方法 | |
| CN113562702B (zh) | 一种高纯电子级二氧化硫的提纯方法 | |
| JP5297208B2 (ja) | フッ素含有化合物処理剤及び排ガスの処理方法 | |
| JPH11240715A (ja) | 水和三フッ化ホウ素から三フッ化ホウ素と硫酸を製造する方法 | |
| JP2007099599A (ja) | 三フッ化窒素の製造方法および製造装置 | |
| JP2007099600A (ja) | 三フッ化窒素の製造方法 | |
| JP3822981B2 (ja) | 高純度一酸化炭素の製造方法 | |
| JP4534274B2 (ja) | ヘキサフルオロアセトンまたはその水和物の製造法 | |
| JP2007119292A (ja) | 三フッ化窒素の製造方法および製造装置 | |
| KR100553987B1 (ko) | 삼불화질소 가스의 정제방법 |