JP2007072371A5 - - Google Patents

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Publication number
JP2007072371A5
JP2007072371A5 JP2005261981A JP2005261981A JP2007072371A5 JP 2007072371 A5 JP2007072371 A5 JP 2007072371A5 JP 2005261981 A JP2005261981 A JP 2005261981A JP 2005261981 A JP2005261981 A JP 2005261981A JP 2007072371 A5 JP2007072371 A5 JP 2007072371A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2005261981A
Other versions
JP2007072371A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005261981A priority Critical patent/JP2007072371A/ja
Priority claimed from JP2005261981A external-priority patent/JP2007072371A/ja
Priority to PCT/JP2006/316956 priority patent/WO2007029561A1/ja
Priority to CN2006800329154A priority patent/CN101258447B/zh
Priority to KR1020087007851A priority patent/KR20080059558A/ko
Priority to TW095131920A priority patent/TW200710603A/zh
Publication of JP2007072371A publication Critical patent/JP2007072371A/ja
Publication of JP2007072371A5 publication Critical patent/JP2007072371A5/ja
Pending legal-status Critical Current

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JP2005261981A 2005-09-09 2005-09-09 露光装置 Pending JP2007072371A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2005261981A JP2007072371A (ja) 2005-09-09 2005-09-09 露光装置
PCT/JP2006/316956 WO2007029561A1 (ja) 2005-09-09 2006-08-29 露光装置
CN2006800329154A CN101258447B (zh) 2005-09-09 2006-08-29 曝光装置
KR1020087007851A KR20080059558A (ko) 2005-09-09 2006-08-29 노광 장치
TW095131920A TW200710603A (en) 2005-09-09 2006-08-30 Exposure apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005261981A JP2007072371A (ja) 2005-09-09 2005-09-09 露光装置

Publications (2)

Publication Number Publication Date
JP2007072371A JP2007072371A (ja) 2007-03-22
JP2007072371A5 true JP2007072371A5 (ja) 2008-07-31

Family

ID=37835682

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005261981A Pending JP2007072371A (ja) 2005-09-09 2005-09-09 露光装置

Country Status (5)

Country Link
JP (1) JP2007072371A (ja)
KR (1) KR20080059558A (ja)
CN (1) CN101258447B (ja)
TW (1) TW200710603A (ja)
WO (1) WO2007029561A1 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007028859B4 (de) * 2007-06-22 2010-09-30 Josef Lindthaler Vorrichtung zur Kontaktbelichtung einer Druckform
CN102047152B (zh) 2008-05-28 2012-12-26 凸版印刷株式会社 滤色器的制造方法、带图案基板的制造方法及小型光掩模
JP5355261B2 (ja) * 2009-07-07 2013-11-27 株式会社日立ハイテクノロジーズ プロキシミティ露光装置、プロキシミティ露光装置の露光光形成方法、及び表示用パネル基板の製造方法
JP2013195442A (ja) * 2012-03-15 2013-09-30 V Technology Co Ltd 露光装置、露光方法及び露光済み材製造方法
CN105022234B (zh) * 2015-07-14 2017-05-17 浙江大学 基于多次曝光的跨尺度微结构制造方法
CN105137722A (zh) * 2015-09-24 2015-12-09 京东方科技集团股份有限公司 一种边缘曝光装置及曝光方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60207204A (ja) * 1984-03-30 1985-10-18 市光工業株式会社 車輛用灯具
JPS636501A (ja) * 1986-06-27 1988-01-12 Komatsu Ltd インテグレ−タプリズム
JP3415571B2 (ja) * 1992-11-05 2003-06-09 株式会社ニコン 走査露光装置、露光方法及び半導体製造方法
JPH07249561A (ja) * 1994-03-09 1995-09-26 Nikon Corp 照明光学装置
JPH08278404A (ja) * 1995-04-10 1996-10-22 Toppan Printing Co Ltd レンズシートおよびその製造方法
JPH08304732A (ja) * 1995-04-28 1996-11-22 Kowa Co スリット光照射光学系
JP3627355B2 (ja) * 1996-02-22 2005-03-09 ソニー株式会社 スキャン式露光装置
JPH09274323A (ja) * 1996-04-04 1997-10-21 Toppan Printing Co Ltd パターン露光方法
JPH09281711A (ja) * 1996-04-18 1997-10-31 Toppan Printing Co Ltd パターン露光方法
JPH10213743A (ja) * 1997-01-28 1998-08-11 Fuitsuto:Kk アスペクト比変換用光学系およびアスペクト比変換可能な画像処理装置
JP3658209B2 (ja) * 1998-10-08 2005-06-08 キヤノン株式会社 円弧照明光学系及びそれを用いた露光装置
JP3340720B2 (ja) * 2000-06-06 2002-11-05 東レエンジニアリング株式会社 周辺露光装置
JP2002139696A (ja) * 2000-11-01 2002-05-17 Sony Corp ビーム強度分布変換光学系を備えた照明装置
JP2003255552A (ja) * 2002-03-06 2003-09-10 Nec Corp レーザ照射装置並びに走査レーザ光を用いた露光方法及び走査レーザ光を用いたカラーフィルタの製造方法

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