JP2007054821A5 - - Google Patents
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- Publication number
- JP2007054821A5 JP2007054821A5 JP2006113521A JP2006113521A JP2007054821A5 JP 2007054821 A5 JP2007054821 A5 JP 2007054821A5 JP 2006113521 A JP2006113521 A JP 2006113521A JP 2006113521 A JP2006113521 A JP 2006113521A JP 2007054821 A5 JP2007054821 A5 JP 2007054821A5
- Authority
- JP
- Japan
- Prior art keywords
- valve
- port
- fluid
- inlet
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012530 fluid Substances 0.000 claims 171
- 239000000126 substance Substances 0.000 claims 21
- 239000000463 material Substances 0.000 claims 16
- 238000000034 method Methods 0.000 claims 10
- 239000007789 gas Substances 0.000 claims 9
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 claims 6
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims 2
- CPELXLSAUQHCOX-UHFFFAOYSA-N Hydrogen bromide Chemical compound Br CPELXLSAUQHCOX-UHFFFAOYSA-N 0.000 claims 2
- 239000002250 absorbent Substances 0.000 claims 2
- 230000002745 absorbent Effects 0.000 claims 2
- 239000003463 adsorbent Substances 0.000 claims 2
- 229910052785 arsenic Inorganic materials 0.000 claims 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims 2
- 150000001875 compounds Chemical class 0.000 claims 2
- 238000001035 drying Methods 0.000 claims 2
- 238000003487 electrochemical reaction Methods 0.000 claims 2
- 238000001914 filtration Methods 0.000 claims 2
- 229910052751 metal Inorganic materials 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 claims 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 claims 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 claims 1
- 229910021529 ammonia Inorganic materials 0.000 claims 1
- 229910052786 argon Inorganic materials 0.000 claims 1
- 239000003054 catalyst Substances 0.000 claims 1
- 230000003197 catalytic effect Effects 0.000 claims 1
- 239000000460 chlorine Substances 0.000 claims 1
- 229910052801 chlorine Inorganic materials 0.000 claims 1
- MROCJMGDEKINLD-UHFFFAOYSA-N dichlorosilane Chemical compound Cl[SiH2]Cl MROCJMGDEKINLD-UHFFFAOYSA-N 0.000 claims 1
- PZPGRFITIJYNEJ-UHFFFAOYSA-N disilane Chemical compound [SiH3][SiH3] PZPGRFITIJYNEJ-UHFFFAOYSA-N 0.000 claims 1
- 239000001307 helium Substances 0.000 claims 1
- 229910052734 helium Inorganic materials 0.000 claims 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims 1
- 239000001257 hydrogen Substances 0.000 claims 1
- 229910052739 hydrogen Inorganic materials 0.000 claims 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 229910000042 hydrogen bromide Inorganic materials 0.000 claims 1
- 229910000041 hydrogen chloride Inorganic materials 0.000 claims 1
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 claims 1
- 229910000040 hydrogen fluoride Inorganic materials 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
- 229910052757 nitrogen Inorganic materials 0.000 claims 1
- 229910052756 noble gas Inorganic materials 0.000 claims 1
- FAQYAMRNWDIXMY-UHFFFAOYSA-N trichloroborane Chemical compound ClB(Cl)Cl FAQYAMRNWDIXMY-UHFFFAOYSA-N 0.000 claims 1
- PQDJYEQOELDLCP-UHFFFAOYSA-N trimethylsilane Chemical compound C[SiH](C)C PQDJYEQOELDLCP-UHFFFAOYSA-N 0.000 claims 1
- NXHILIPIEUBEPD-UHFFFAOYSA-H tungsten hexafluoride Chemical compound F[W](F)(F)(F)(F)F NXHILIPIEUBEPD-UHFFFAOYSA-H 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US67229005P | 2005-04-18 | 2005-04-18 | |
| US11/399,322 US7811532B2 (en) | 2005-04-18 | 2006-04-07 | Dual-flow valve and internal processing vessel isolation system |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007054821A JP2007054821A (ja) | 2007-03-08 |
| JP2007054821A5 true JP2007054821A5 (enExample) | 2009-03-19 |
| JP4680822B2 JP4680822B2 (ja) | 2011-05-11 |
Family
ID=36686101
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006113521A Active JP4680822B2 (ja) | 2005-04-18 | 2006-04-17 | 複流動弁及び内部処理容器隔離システム |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US7811532B2 (enExample) |
| EP (1) | EP1715225B1 (enExample) |
| JP (1) | JP4680822B2 (enExample) |
| KR (3) | KR100874937B1 (enExample) |
| CN (1) | CN1858470B (enExample) |
| TW (1) | TWI302974B (enExample) |
Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2007065103A2 (en) | 2005-11-29 | 2007-06-07 | University Of Florida Research Foundation, Inc. | On-demand portable chlorine dioxide generator |
| CN100436927C (zh) * | 2007-04-11 | 2008-11-26 | 镇江瑞昊工程塑料有限公司 | 组合阀式源瓶 |
| WO2010021891A1 (en) * | 2008-08-18 | 2010-02-25 | Sigma-Aldrich Co. | Valve assemblies |
| CN102414783B (zh) * | 2009-04-24 | 2014-05-07 | 应用材料公司 | 具整合混合阀的安瓿 |
| JP5898624B2 (ja) | 2009-11-02 | 2016-04-06 | シグマ−アルドリッチ・カンパニー、エルエルシー | 蒸発器 |
| JP6310172B2 (ja) * | 2011-01-07 | 2018-04-11 | 日本テクノ株式会社 | 酸素水素共存ガス体を用いた燃料及びその使用方法 |
| CN102261558B (zh) * | 2011-05-28 | 2013-01-30 | 青岛瑞丰气体有限公司 | 一种低温气体供气装置 |
| GB201309046D0 (en) * | 2013-05-20 | 2013-07-03 | Linde Ag | A pressurised fluid container |
| US9873557B2 (en) * | 2013-08-12 | 2018-01-23 | Tek Global S.R.L. | Disposable canister for sealant for inflatable article repair and inflation kit, and production thereof |
| CN105526496B (zh) * | 2014-09-29 | 2019-08-23 | 大唐国际化工技术研究院有限公司 | 工业分析样品容器及具有这种容器的采样设备 |
| WO2021262480A1 (en) * | 2020-06-22 | 2021-12-30 | Numat Technologies, Inc. | An apparatus for dispensing and supplying gas to a storage vessel |
| CN114542971A (zh) * | 2020-11-26 | 2022-05-27 | 未势能源科技有限公司 | 高压瓶阀和气瓶 |
Family Cites Families (26)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4286624A (en) * | 1980-02-25 | 1981-09-01 | Eivind Clausen | Fluid handling systems & multi-positionable valving arrangements for the use therein |
| JPS5854277A (ja) | 1981-09-25 | 1983-03-31 | Yamatake Honeywell Co Ltd | 均圧弁 |
| CA1240584A (en) * | 1986-01-28 | 1988-08-16 | Edward R. Coleman | Valve manifold |
| US4738693A (en) * | 1987-04-27 | 1988-04-19 | Advanced Technology Materials, Inc. | Valve block and container for semiconductor source reagent dispensing and/or purification |
| US4723967A (en) * | 1987-04-27 | 1988-02-09 | Advanced Technology Materials, Inc. | Valve block and container for semiconductor source reagent dispensing and/or purification |
| GB9220975D0 (en) * | 1992-10-06 | 1992-11-18 | Air Prod & Chem | Apparatus for supplying high purity gas |
| FR2724241B1 (fr) * | 1994-09-02 | 1996-10-25 | Air Liquide | Ensemble de commande et de distribution de gaz et dispositif de stockage de gaz equipe d'un tel ensemble |
| JPH08176873A (ja) | 1994-12-21 | 1996-07-09 | Imura Japan Kk | 電気化学的高圧水素発生装置、アクチュエータ及びエネルギー取得装置 |
| US5980599A (en) * | 1998-03-27 | 1999-11-09 | Uop Llc | In-tank purifier with bypass for filling |
| SE9801398D0 (sv) * | 1998-04-21 | 1998-04-21 | Astra Pharma Prod | Method and apparatus for filling containers? |
| US6343476B1 (en) * | 1998-04-28 | 2002-02-05 | Advanced Technology Materials, Inc. | Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein |
| US6257000B1 (en) * | 2000-03-22 | 2001-07-10 | Luping Wang | Fluid storage and dispensing system featuring interiorly disposed and exteriorly adjustable regulator for high flow dispensing of gas |
| JP2001317655A (ja) | 2000-05-08 | 2001-11-16 | Smc Corp | シリンダー操作形複合弁 |
| FR2810260B1 (fr) * | 2000-06-20 | 2002-08-30 | Air Liquide | Dispositif de stockage et de melange de deux gaz |
| US6360546B1 (en) | 2000-08-10 | 2002-03-26 | Advanced Technology Materials, Inc. | Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing |
| US6494343B2 (en) * | 2001-02-15 | 2002-12-17 | Advanced Technology Materials, Inc. | Fluid storage and dispensing system featuring ex-situ strain gauge pressure monitoring assembly |
| FR2824539B1 (fr) * | 2001-05-09 | 2003-12-19 | Oreal | Dispositif pour le conditionnement separe de deux produits, et leur distribution sous pression, de maniere separee ou en melange |
| US6932945B2 (en) | 2001-06-19 | 2005-08-23 | Air Products And Chemicals, Inc. | Adsorbent based gas delivery system with integrated purifier |
| US6592653B2 (en) | 2001-11-12 | 2003-07-15 | Advanced Technology Materials, Inc. | Fluid storage and delivery system utilizing low heels carbon sorbent medium |
| JP2003166700A (ja) | 2001-11-30 | 2003-06-13 | Nippon Sanso Corp | 減圧機能付き容器弁 |
| FR2833861B1 (fr) * | 2001-12-20 | 2004-02-06 | Air Liquide | Dispositif de stockage et de melange de deux gaz |
| ITMI20020636A1 (it) * | 2002-03-27 | 2003-09-29 | P L V Spa | Valvola di desgasazione unidirezionale per contenitori di prodotti pulverulenti quali caffe' e simili |
| GB0211410D0 (en) | 2002-05-17 | 2002-06-26 | Air Prod & Chem | Intra-cylinder tubular pressure regulator |
| US6959724B2 (en) | 2002-07-01 | 2005-11-01 | Praxair Technology, Inc. | Multiple regulator vacuum delivery valve assembly |
| US20040000339A1 (en) | 2002-07-01 | 2004-01-01 | Heiderman Douglas Charles | Multiple dispensing check valve delivery system |
| US6911065B2 (en) * | 2002-12-26 | 2005-06-28 | Matheson Tri-Gas, Inc. | Method and system for supplying high purity fluid |
-
2006
- 2006-04-07 US US11/399,322 patent/US7811532B2/en active Active
- 2006-04-14 TW TW95113410A patent/TWI302974B/zh active
- 2006-04-17 JP JP2006113521A patent/JP4680822B2/ja active Active
- 2006-04-18 CN CN2006100840086A patent/CN1858470B/zh active Active
- 2006-04-18 KR KR1020060035035A patent/KR100874937B1/ko active Active
- 2006-04-18 EP EP06008011.6A patent/EP1715225B1/en active Active
-
2008
- 2008-10-13 KR KR1020080100034A patent/KR100940551B1/ko active Active
-
2009
- 2009-11-18 KR KR1020090111553A patent/KR20100005695A/ko not_active Ceased
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