JP2007049088A - 高出力赤色半導体レーザ - Google Patents
高出力赤色半導体レーザ Download PDFInfo
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- JP2007049088A JP2007049088A JP2005234658A JP2005234658A JP2007049088A JP 2007049088 A JP2007049088 A JP 2007049088A JP 2005234658 A JP2005234658 A JP 2005234658A JP 2005234658 A JP2005234658 A JP 2005234658A JP 2007049088 A JP2007049088 A JP 2007049088A
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- layer
- cladding layer
- algainp
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
- H01S5/34326—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser with a well layer based on InGa(Al)P, e.g. red laser
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y20/00—Nanooptics, e.g. quantum optics or photonic crystals
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/34—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers
- H01S5/343—Structure or shape of the active region; Materials used for the active region comprising quantum well or superlattice structures, e.g. single quantum well [SQW] lasers, multiple quantum well [MQW] lasers or graded index separate confinement heterostructure [GRINSCH] lasers in AIIIBV compounds, e.g. AlGaAs-laser, InP-based laser
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/02208—Mountings; Housings characterised by the shape of the housings
- H01S5/02212—Can-type, e.g. TO-CAN housings with emission along or parallel to symmetry axis
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/022—Mountings; Housings
- H01S5/0233—Mounting configuration of laser chips
- H01S5/0234—Up-side down mountings, e.g. Flip-chip, epi-side down mountings or junction down mountings
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/02—Structural details or components not essential to laser action
- H01S5/024—Arrangements for thermal management
- H01S5/02461—Structure or details of the laser chip to manipulate the heat flow, e.g. passive layers in the chip with a low heat conductivity
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/223—Buried stripe structure
- H01S5/2231—Buried stripe structure with inner confining structure only between the active layer and the upper electrode
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/3211—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/30—Structure or shape of the active region; Materials used for the active region
- H01S5/32—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures
- H01S5/3211—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities
- H01S5/3213—Structure or shape of the active region; Materials used for the active region comprising PN junctions, e.g. hetero- or double- heterostructures characterised by special cladding layers, e.g. details on band-discontinuities asymmetric clading layers
Abstract
【解決手段】傾斜n−GaAs基板2上に、n−AlGaInPクラッド層3、AlGaInP光ガイド層4、MQW活性層5、AlGaInP光ガイド層6、p−AlGaInP第1クラッド層7、AlGaInPエッチングストップ層8、n−AlGaInPブロック層11、p−AlGaAs第2クラッド層9、p−GaAsコンタクト層10、p電極12が積層され、n−GaAs基板2の裏側にはn電極1が形成されている。第2クラッド層9は、熱伝導率の良いAlGaAsを成分としているのでレーザ素子の放熱特性が向上する。
【選択図】 図1
Description
2 n−GaAs基板
3 n−AlGaInPクラッド層
4 AlGaInP光ガイド層
5 MQW活性層
6 AlGaInP光ガイド層
7 p−AlGaInP第1クラッド層
8 AlGaInPエッチングストップ層
9 p−AlGaAs第2クラッド層
10 p−GaAsコンタクト層
11 n−AlGaInPブロック層
12 p電極
Claims (6)
- n型半導体基板上に、少なくとも、n型クラッド層、活性層、p型クラッド層を順に備え、活性層よりも上部に前記p型クラッド層を含むストライプ状のリッジ部を有するAlGaInP系の高出力赤色半導体レーザにおいて、前記リッジ部を構成する半導体層の一部を、AlGaAsを含む半導体で形成したことを特徴とする高出力赤色半導体レーザ。
- 前記p型クラッド層をAlGaAsを含む半導体で形成したことを特徴とする請求項1記載の高出力赤色半導体レーザ。
- 前記p型クラッド層は、中間に形成されたエッチングストップ層により、リッジ部を有する第2p型クラッド層とリッジ部を含まない第1p型クラッド層に分離されていることを特徴とする請求項1記載の高出力赤色半導体レーザ。
- 前記第2p型クラッド層をAlGaAsを含む半導体で形成したことを特徴とする請求項3記載の高出力赤色半導体レーザ。
- 前記第1p型クラッド層をAlGaAsを含む半導体で形成したことを特徴とする請求項4記載の高出力赤色半導体レーザ。
- 前記n型クラッド層を、AlGaAsを含む半導体で形成したことを特徴とする請求項1〜請求項5のいずれか1項に記載の高出力赤色半導体レーザ。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005234658A JP2007049088A (ja) | 2005-08-12 | 2005-08-12 | 高出力赤色半導体レーザ |
PCT/JP2006/315744 WO2007020852A1 (ja) | 2005-08-12 | 2006-08-09 | 高出力赤色半導体レーザ |
US11/990,260 US20090175306A1 (en) | 2005-08-12 | 2006-08-09 | High-Power Red Semiconductor Laser |
EP06782560A EP1923973A4 (en) | 2005-08-12 | 2006-08-09 | RED HIGH POWER SEMICONDUCTOR LASER |
CNA2006800371645A CN101283493A (zh) | 2005-08-12 | 2006-08-09 | 高输出红色半导体激光器 |
KR1020087005879A KR20080061357A (ko) | 2005-08-12 | 2006-08-09 | 고출력 적색 반도체 레이저 |
TW095129441A TW200715676A (en) | 2005-08-12 | 2006-08-10 | High-power red semiconductor laser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2005234658A JP2007049088A (ja) | 2005-08-12 | 2005-08-12 | 高出力赤色半導体レーザ |
Publications (1)
Publication Number | Publication Date |
---|---|
JP2007049088A true JP2007049088A (ja) | 2007-02-22 |
Family
ID=37757514
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005234658A Pending JP2007049088A (ja) | 2005-08-12 | 2005-08-12 | 高出力赤色半導体レーザ |
Country Status (7)
Country | Link |
---|---|
US (1) | US20090175306A1 (ja) |
EP (1) | EP1923973A4 (ja) |
JP (1) | JP2007049088A (ja) |
KR (1) | KR20080061357A (ja) |
CN (1) | CN101283493A (ja) |
TW (1) | TW200715676A (ja) |
WO (1) | WO2007020852A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011049416A (ja) * | 2009-08-28 | 2011-03-10 | Seiko Epson Corp | 発光装置およびプロジェクター |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN106300012B (zh) * | 2016-09-19 | 2020-02-14 | 山东华光光电子股份有限公司 | 一种含有高选择性腐蚀阻挡层的808nm半导体激光器 |
CN112260060B (zh) * | 2020-12-22 | 2021-03-09 | 武汉敏芯半导体股份有限公司 | 一种分布式反馈激光器 |
CN115166893A (zh) * | 2022-08-02 | 2022-10-11 | 苏州国顺激光技术有限公司 | 一种用于激光器件的环形纤芯光纤 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1075012A (ja) * | 1996-06-27 | 1998-03-17 | Mitsubishi Electric Corp | 半導体レーザ装置,及びその製造方法 |
JPH11289132A (ja) * | 1998-02-04 | 1999-10-19 | Mitsui Chem Inc | 面発光レ―ザ装置 |
JP2000294879A (ja) * | 1999-04-07 | 2000-10-20 | Mitsubishi Chemicals Corp | 半導体発光装置 |
JP2001060741A (ja) * | 1999-08-20 | 2001-03-06 | Nec Corp | 半導体発光素子およびその製造方法 |
JP2004088054A (ja) * | 2002-01-17 | 2004-03-18 | Matsushita Electric Ind Co Ltd | Iii−v族化合物半導体装置及びその製造方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
NL8900748A (nl) * | 1989-03-28 | 1990-10-16 | Philips Nv | Straling-emitterende halfgeleiderinrichting en werkwijze ter vervaardiging van een dergelijke halfgeleiderinrichting. |
JP2893827B2 (ja) * | 1990-03-27 | 1999-05-24 | ソニー株式会社 | 半導体レーザ |
JPH04199589A (ja) * | 1990-11-28 | 1992-07-20 | Mitsubishi Electric Corp | 可視光面発光レーザ装置 |
EP0540799A1 (en) * | 1991-11-04 | 1993-05-12 | International Business Machines Corporation | Improved AlGaInP diodes emitting visible light |
US5811839A (en) * | 1994-09-01 | 1998-09-22 | Mitsubishi Chemical Corporation | Semiconductor light-emitting devices |
JP2929990B2 (ja) | 1996-01-26 | 1999-08-03 | 日本電気株式会社 | 半導体レーザ |
US5898721A (en) * | 1997-02-14 | 1999-04-27 | Opto Power Corporation | InGaAsP/AlGaAs/GaAs hetero structure diode laser containing indium |
US6841409B2 (en) * | 2002-01-17 | 2005-01-11 | Matsushita Electric Industrial Co., Ltd. | Group III-V compound semiconductor and group III-V compound semiconductor device using the same |
KR20060038057A (ko) * | 2004-10-29 | 2006-05-03 | 삼성전기주식회사 | 반도체 레이저 소자 및 그 제조 방법 |
-
2005
- 2005-08-12 JP JP2005234658A patent/JP2007049088A/ja active Pending
-
2006
- 2006-08-09 CN CNA2006800371645A patent/CN101283493A/zh active Pending
- 2006-08-09 WO PCT/JP2006/315744 patent/WO2007020852A1/ja active Application Filing
- 2006-08-09 US US11/990,260 patent/US20090175306A1/en not_active Abandoned
- 2006-08-09 EP EP06782560A patent/EP1923973A4/en not_active Withdrawn
- 2006-08-09 KR KR1020087005879A patent/KR20080061357A/ko not_active Application Discontinuation
- 2006-08-10 TW TW095129441A patent/TW200715676A/zh unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1075012A (ja) * | 1996-06-27 | 1998-03-17 | Mitsubishi Electric Corp | 半導体レーザ装置,及びその製造方法 |
JPH11289132A (ja) * | 1998-02-04 | 1999-10-19 | Mitsui Chem Inc | 面発光レ―ザ装置 |
JP2000294879A (ja) * | 1999-04-07 | 2000-10-20 | Mitsubishi Chemicals Corp | 半導体発光装置 |
JP2001060741A (ja) * | 1999-08-20 | 2001-03-06 | Nec Corp | 半導体発光素子およびその製造方法 |
JP2004088054A (ja) * | 2002-01-17 | 2004-03-18 | Matsushita Electric Ind Co Ltd | Iii−v族化合物半導体装置及びその製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2011049416A (ja) * | 2009-08-28 | 2011-03-10 | Seiko Epson Corp | 発光装置およびプロジェクター |
Also Published As
Publication number | Publication date |
---|---|
EP1923973A1 (en) | 2008-05-21 |
CN101283493A (zh) | 2008-10-08 |
KR20080061357A (ko) | 2008-07-02 |
US20090175306A1 (en) | 2009-07-09 |
EP1923973A4 (en) | 2010-04-14 |
WO2007020852A1 (ja) | 2007-02-22 |
TW200715676A (en) | 2007-04-16 |
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