JP2007034285A - 薄膜トランジスタの製造方法 - Google Patents
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1248—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs with a particular composition or shape of the interlayer dielectric specially adapted to the circuit arrangement
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier
- H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body
- H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
- H01L27/1255—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having at least one potential-jump barrier or surface barrier; including integrated passive circuit elements with at least one potential-jump barrier or surface barrier the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs integrated with passive devices, e.g. auxiliary capacitors
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/136—Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
- G02F1/1362—Active matrix addressed cells
- G02F1/1368—Active matrix addressed cells in which the switching element is a three-electrode device
Abstract
【解決手段】蓄積電極と重なる有機膜の凹凸を除去するための薄膜トランジスタ基板の製造方法は、蓄積電極が形成されている基板上に保護膜及び保護膜を覆う有機膜を形成し、蓄積電極と重なった領域の有機膜を一部除去し、その底面が凹凸パターンを有する凹部を形成し、底面の凹凸パターンを平坦化し、保護膜上面の平坦化された有機膜を除去して凹部が保護膜上面まで延長された開口部を形成することを含む。
【選択図】図1A
Description
Claims (23)
- 蓄積電極が形成されている基板上に保護膜及び前記保護膜を覆う有機膜を形成し、
前記蓄積電極と重なった領域の前記有機膜を一部除去し、その底面が凹凸パターンを有する凹部を形成し、
前記底面の凹凸パターンを平坦化し、
前記保護膜上面の前記平坦化された有機膜を除去し、前記凹部が前記保護膜上面まで延長された開口部を形成することを含むことを特徴とする薄膜トランジスタ基板の製造方法。 - 前記平坦化することは、前記凹部の凹凸をアッシングして除去することを含むことを特徴とする請求項1に記載の薄膜トランジスタ基板の製造方法。
- 前記アッシングは、酸素プラズマを用いて行われることを特徴とする請求項2に記載の薄膜トランジスタ基板の製造方法。
- 前記酸素プラズマを用いたアッシングは、窒素及び水素の混合ガスの雰囲気下で行われることを特徴とする請求項3に記載の薄膜トランジスタ基板の製造方法。
- 前記アッシングする前に前記凹部の凹凸パターンをエッチングし前記凹部の高さと前記凸部の高さとの差を緩和することをさらに含むことを特徴とする請求項2に記載の薄膜トランジスタ基板の製造方法。
- 前記エッチングは、SF6とO2との混合ガスまたはSF6とN2との混合ガスを用いる乾式エッチングであることを特徴とする請求項5に記載の薄膜トランジスタ基板の製造方法。
- 前記凹部を形成することは、露光に用いられる光源の分解能以下の大きさを有するスリットまたは半透明膜を含むマスクを用いてパターニングすることであることを特徴とする請求項1に記載の薄膜トランジスタ基板の製造方法。
- 前記開口部を形成することは、SF6とO2またはSF6とN2との混合ガスを用いる乾式エッチングであることを特徴とする請求項1に記載の薄膜トランジスタ基板の製造方法。
- 前記保護膜を覆うように形成された前記有機膜厚さは2.5ないし3.5μmであることを特徴とする請求項1に記載の薄膜トランジスタ基板の製造方法。
- 前記凹凸パターンを有する凹部の底面と前記保護膜の上部面との間の厚さは0.5ないし1.5μmであることを特徴とする請求項9に記載の薄膜トランジスタ基板の製造方法。
- 前記開口部を形成した後に前記開口部を介して前記蓄積電極と重なる領域の前記保護膜を覆う画素電極を形成することをさらに含むことを特徴とする請求項1に記載の薄膜トランジスタ基板の製造方法。
- 基板上にゲート線、ゲート電極及び蓄積電極を含むゲート配線を形成し、
前記ゲート配線を覆うゲート絶縁膜を形成し、
前記ゲート絶縁膜上に非晶質シリコン層及びデータ導電膜を順次積層して、一つのマスクを用いて半導体層、データ線、並びにソース電極及びドレイン電極を含むデータ配線を形成し、
前記データ配線上に保護膜及び前記保護膜を覆う有機膜を形成する段階と;
前記蓄積電極と重なった領域の前記有機膜を一部除去し、その底面が凹凸パターンを有する凹部を形成し、
前記底面の凹凸パターンを平坦化し、
前記保護膜上面の前記平坦化された有機膜を除去し、前記凹部が前記保護膜上面まで延長された開口部を形成することを含むことを特徴とする薄膜トランジスタ基板の製造方法。 - 前記平坦化することは、前記凹部の凹凸をアッシングして除去することを含むことを特徴とする請求項12に記載の薄膜トランジスタ基板の製造方法。
- 前記アッシングは酸素プラズマを用いて行われることを特徴とする請求項13に記載の薄膜トランジスタ基板の製造方法。
- 前記酸素プラズマを用いたアッシングは、窒素及び水素の混合ガスの雰囲気下で行うことを特徴とする請求項14に記載の薄膜トランジスタ基板の製造方法。
- 前記アッシング前に前記凹部の凹凸パターンをエッチングし、前記凹部の高さと前記凸部の高さとの差を緩和することをさらに含むことを特徴とする請求項13に記載の薄膜トランジスタ基板の製造方法。
- 前記エッチングは、SF6とO2との混合ガスまたはSF6とN2との混合ガスを用いる乾式エッチングであることを特徴とする請求項16に記載の薄膜トランジスタ基板の製造方法。
- 前記凹部を形成することは、露光に使われる光源の分解能以下の大きさを有するスリットまたは半透明膜を含むマスクを用いてパターニングすることであることを特徴とする請求項12に記載の薄膜トランジスタ基板の製造方法。
- 前記開口部を形成することは、SF6とO2との混合ガスまたはSF6とN2との混合ガスを用いる乾式エッチングであることを特徴とする請求項12に記載の薄膜トランジスタ基板の製造方法。
- 前記保護膜を覆うように形成された前記有機膜厚さは2.5ないし3.5μmであることを特徴とする請求項12に記載の薄膜トランジスタ基板の製造方法。
- 前記凹凸パターンを有する凹部の底面と前記保護膜の上部面との間の厚さは0.5ないし1.5μmであることを特徴とする請求項12に記載の薄膜トランジスタ基板の製造方法。
- 前記開口部を形成した後に前記開口部を介して前記蓄積電極と重なる領域の前記保護膜を覆う画素電極を形成することをさらに含むことを特徴とする請求項12に記載の薄膜トランジスタ基板の製造方法。
- 前記半導体層及び前記データ導電膜を形成することは、前記蓄積電極と重なる領域の前記非晶質シリコン層及び前記データ導電膜を除去することを含むことを特徴とする請求項12に記載の薄膜トランジスタ基板の製造方法。
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KR1020050066908A KR20070012081A (ko) | 2005-07-22 | 2005-07-22 | 박막 트랜지스터 기판의 제조 방법 |
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JP2007034285A true JP2007034285A (ja) | 2007-02-08 |
JP2007034285A5 JP2007034285A5 (ja) | 2009-07-16 |
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JP2006175257A Withdrawn JP2007034285A (ja) | 2005-07-22 | 2006-06-26 | 薄膜トランジスタの製造方法 |
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Country | Link |
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US (1) | US7351618B2 (ja) |
JP (1) | JP2007034285A (ja) |
KR (1) | KR20070012081A (ja) |
CN (1) | CN100580906C (ja) |
TW (1) | TW200705677A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009158940A (ja) * | 2007-12-03 | 2009-07-16 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
JP2014068024A (ja) * | 2007-12-21 | 2014-04-17 | Semiconductor Energy Lab Co Ltd | 表示装置 |
JP2018082216A (ja) * | 2007-07-27 | 2018-05-24 | 株式会社半導体エネルギー研究所 | 表示装置 |
JP2019512873A (ja) * | 2016-07-25 | 2019-05-16 | シェンジェン ロイオル テクノロジーズ カンパニー リミテッドShenzhen Royole Technologies Co., Ltd. | アレイ基板の製造方法 |
Families Citing this family (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20080001937A1 (en) * | 2006-06-09 | 2008-01-03 | Samsung Electronics Co., Ltd. | Display substrate having colorable organic layer interposed between pixel electrode and tft layer, plus method of manufacturing the same and display device having the same |
KR101377456B1 (ko) * | 2007-02-07 | 2014-03-25 | 삼성디스플레이 주식회사 | 표시 기판, 이의 제조 방법 및 이를 갖는 표시 장치 |
KR100899426B1 (ko) * | 2007-09-14 | 2009-05-27 | 삼성모바일디스플레이주식회사 | 유기 전계 발광표시장치 제조방법 |
KR101414043B1 (ko) * | 2007-12-04 | 2014-07-21 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판 |
TWI396909B (zh) * | 2008-05-09 | 2013-05-21 | Innolux Corp | 液晶顯示面板及其製造方法 |
KR101627728B1 (ko) * | 2008-12-30 | 2016-06-08 | 삼성디스플레이 주식회사 | 박막 트랜지스터 기판 및 그 제조 방법 |
CN103258726B (zh) * | 2013-03-25 | 2016-01-06 | 北京京东方光电科技有限公司 | 薄膜表面平坦化的方法、阵列基板及其制备方法和显示装置 |
KR20210041663A (ko) * | 2019-10-07 | 2021-04-16 | 삼성디스플레이 주식회사 | 표시 장치 및 이의 제조방법 |
CN110943093A (zh) * | 2019-11-28 | 2020-03-31 | 深圳市华星光电半导体显示技术有限公司 | 有机发光基板及其制备方法、有机发光显示面板 |
KR20210101485A (ko) | 2020-02-10 | 2021-08-19 | 잣향기푸른숲농업회사법인(주) | 잣나무 추출물을 함유하는 구강 내 위생증진용 조성물 및 이의 제조방법 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1124108A (ja) * | 1997-04-18 | 1999-01-29 | Hyundai Electron Ind Co Ltd | 薄膜トランジスタ型液晶表示素子とその製造方法 |
JPH11326950A (ja) * | 1998-05-18 | 1999-11-26 | Sharp Corp | アクティブマトリクス基板の製造方法 |
JP2001168190A (ja) * | 1999-12-08 | 2001-06-22 | Mitsubishi Electric Corp | 半導体装置、液晶表示装置、半導体装置の製造方法および液晶表示装置の製造方法 |
JP2002082355A (ja) * | 2000-06-29 | 2002-03-22 | Hynix Semiconductor Inc | 高開口率液晶表示素子の製造方法 |
JP2003248232A (ja) * | 2002-02-25 | 2003-09-05 | Advanced Display Inc | 液晶表示装置及びその製造方法 |
JP2004212933A (ja) * | 2002-12-31 | 2004-07-29 | Lg Phillips Lcd Co Ltd | 液晶表示装置及びアレイ基板の製造方法 |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6380559B1 (en) * | 1999-06-03 | 2002-04-30 | Samsung Electronics Co., Ltd. | Thin film transistor array substrate for a liquid crystal display |
KR100456137B1 (ko) * | 2001-07-07 | 2004-11-08 | 엘지.필립스 엘시디 주식회사 | 액정표시장치의 어레이 기판 및 그의 제조방법 |
-
2005
- 2005-07-22 KR KR1020050066908A patent/KR20070012081A/ko not_active Application Discontinuation
-
2006
- 2006-05-31 US US11/444,184 patent/US7351618B2/en active Active
- 2006-06-14 TW TW095121225A patent/TW200705677A/zh unknown
- 2006-06-26 JP JP2006175257A patent/JP2007034285A/ja not_active Withdrawn
- 2006-07-20 CN CN200610099446A patent/CN100580906C/zh active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1124108A (ja) * | 1997-04-18 | 1999-01-29 | Hyundai Electron Ind Co Ltd | 薄膜トランジスタ型液晶表示素子とその製造方法 |
JPH11326950A (ja) * | 1998-05-18 | 1999-11-26 | Sharp Corp | アクティブマトリクス基板の製造方法 |
JP2001168190A (ja) * | 1999-12-08 | 2001-06-22 | Mitsubishi Electric Corp | 半導体装置、液晶表示装置、半導体装置の製造方法および液晶表示装置の製造方法 |
JP2002082355A (ja) * | 2000-06-29 | 2002-03-22 | Hynix Semiconductor Inc | 高開口率液晶表示素子の製造方法 |
JP2003248232A (ja) * | 2002-02-25 | 2003-09-05 | Advanced Display Inc | 液晶表示装置及びその製造方法 |
JP2004212933A (ja) * | 2002-12-31 | 2004-07-29 | Lg Phillips Lcd Co Ltd | 液晶表示装置及びアレイ基板の製造方法 |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2018082216A (ja) * | 2007-07-27 | 2018-05-24 | 株式会社半導体エネルギー研究所 | 表示装置 |
JP2020144371A (ja) * | 2007-07-27 | 2020-09-10 | 株式会社半導体エネルギー研究所 | 表示装置 |
JP2009158940A (ja) * | 2007-12-03 | 2009-07-16 | Semiconductor Energy Lab Co Ltd | 半導体装置およびその作製方法 |
JP2014033217A (ja) * | 2007-12-03 | 2014-02-20 | Semiconductor Energy Lab Co Ltd | 半導体装置 |
JP2014068024A (ja) * | 2007-12-21 | 2014-04-17 | Semiconductor Energy Lab Co Ltd | 表示装置 |
JP2019512873A (ja) * | 2016-07-25 | 2019-05-16 | シェンジェン ロイオル テクノロジーズ カンパニー リミテッドShenzhen Royole Technologies Co., Ltd. | アレイ基板の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
TW200705677A (en) | 2007-02-01 |
KR20070012081A (ko) | 2007-01-25 |
US7351618B2 (en) | 2008-04-01 |
CN1901158A (zh) | 2007-01-24 |
US20070020825A1 (en) | 2007-01-25 |
CN100580906C (zh) | 2010-01-13 |
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