JP2007027331A5 - - Google Patents

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Publication number
JP2007027331A5
JP2007027331A5 JP2005206126A JP2005206126A JP2007027331A5 JP 2007027331 A5 JP2007027331 A5 JP 2007027331A5 JP 2005206126 A JP2005206126 A JP 2005206126A JP 2005206126 A JP2005206126 A JP 2005206126A JP 2007027331 A5 JP2007027331 A5 JP 2007027331A5
Authority
JP
Japan
Prior art keywords
coil
electromagnetic actuator
signal
unit
movement stage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2005206126A
Other languages
English (en)
Japanese (ja)
Other versions
JP2007027331A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2005206126A priority Critical patent/JP2007027331A/ja
Priority claimed from JP2005206126A external-priority patent/JP2007027331A/ja
Priority to US11/485,360 priority patent/US7602086B2/en
Publication of JP2007027331A publication Critical patent/JP2007027331A/ja
Publication of JP2007027331A5 publication Critical patent/JP2007027331A5/ja
Withdrawn legal-status Critical Current

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JP2005206126A 2005-07-14 2005-07-14 駆動装置及びこれを用いた露光装置並びにデバイス製造方法 Withdrawn JP2007027331A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2005206126A JP2007027331A (ja) 2005-07-14 2005-07-14 駆動装置及びこれを用いた露光装置並びにデバイス製造方法
US11/485,360 US7602086B2 (en) 2005-07-14 2006-07-13 Driving device, exposure apparatus using the same, and device manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2005206126A JP2007027331A (ja) 2005-07-14 2005-07-14 駆動装置及びこれを用いた露光装置並びにデバイス製造方法

Publications (2)

Publication Number Publication Date
JP2007027331A JP2007027331A (ja) 2007-02-01
JP2007027331A5 true JP2007027331A5 (enExample) 2008-08-28

Family

ID=37661363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2005206126A Withdrawn JP2007027331A (ja) 2005-07-14 2005-07-14 駆動装置及びこれを用いた露光装置並びにデバイス製造方法

Country Status (2)

Country Link
US (1) US7602086B2 (enExample)
JP (1) JP2007027331A (enExample)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4366386B2 (ja) 2006-09-07 2009-11-18 キヤノン株式会社 露光装置およびデバイス製造方法
US7579793B2 (en) * 2007-02-14 2009-08-25 Honeywell International Inc. System and method for efficient wide dynamic range coil drive
US20080285005A1 (en) * 2007-05-15 2008-11-20 Jean-Marc Gery System and method for measuring and mapping a sideforce for a mover
JP5180555B2 (ja) * 2007-10-04 2013-04-10 キヤノン株式会社 位置決め装置、露光装置及びデバイス製造方法
JP2009094163A (ja) * 2007-10-04 2009-04-30 Canon Inc 温度制御装置、露光装置およびデバイス製造方法
US9081307B2 (en) 2010-07-09 2015-07-14 Asml Netherlands B.V. Variable reluctance device, stage apparatus, lithographic apparatus and device manufacturing method
EP2492928A3 (en) * 2011-02-22 2017-08-30 ASML Netherlands BV Electromagnetic actuator, stage apparatus and lithographic apparatus
US9116834B2 (en) * 2011-03-23 2015-08-25 Asml Netherlands B.V. Methods and apparatus for calculating electromagnetic scattering properties of a structure and for reconstruction of approximate structures
JP2012235026A (ja) * 2011-05-06 2012-11-29 Canon Inc 位置決め装置、露光装置およびデバイス製造方法
WO2014044496A2 (en) * 2012-09-19 2014-03-27 Asml Netherlands B.V. Method of calibrating a reluctance actuator assembly, reluctance actuator and lithographic apparatus comprising such reluctance actuator
JP6466333B2 (ja) * 2012-10-15 2019-02-06 エーエスエムエル ネザーランズ ビー．ブイ． 作動機構、光学装置、リソグラフィ装置及びデバイス製造方法
JP6181956B2 (ja) * 2013-03-26 2017-08-16 キヤノン株式会社 ステージ装置、リソグラフィ装置及びデバイス製造方法
NL2010611C2 (en) * 2013-04-10 2014-10-13 Univ Delft Tech Magnetic actuator and method of controlling such a magnetic actuator.
WO2015163886A1 (en) * 2014-04-24 2015-10-29 Empire Technology Development, Llc Broadcasting a message using modulated power
TWI797114B (zh) * 2017-03-31 2023-04-01 日商尼康股份有限公司 移動體裝置、曝光裝置、平板顯示器的製造方法、元件製造方法以及移動體的驅動方法
WO2019143433A1 (en) 2018-01-17 2019-07-25 Cymer, Llc Apparatus for tuning discharge performance in a laser chamber

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3689885A (en) * 1970-09-15 1972-09-05 Transitag Corp Inductively coupled passive responder and interrogator unit having multidimension electromagnetic field capabilities
US4463354A (en) * 1981-12-09 1984-07-31 Sears Lawrence M Apparatus for communicating utility usage related information from a utility usage location to a portable utility usage registering device
GB8627241D0 (en) * 1986-11-14 1986-12-17 Chubb Lips Nederland Bv Identification token
US4922200A (en) * 1989-08-25 1990-05-01 Ldj Electronics, Inc. Apparatus for measuring the hysteresis loop of magnetic film
US5008664A (en) * 1990-01-23 1991-04-16 Quantum Solutions, Inc. Apparatus for inductively coupling signals between a downhole sensor and the surface
NL9100407A (nl) 1991-03-07 1992-10-01 Philips Nv Optisch lithografische inrichting met een krachtgecompenseerd machinegestel.
JP2728018B2 (ja) * 1995-04-18 1998-03-18 日本電気株式会社 送信回路
US6486941B1 (en) 2000-04-24 2002-11-26 Nikon Corporation Guideless stage
JP2002280801A (ja) * 2001-03-16 2002-09-27 Mitsubishi Electric Corp アンテナ装置及び導波管回転結合器

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