JP2007012833A - 積層型光起電力装置 - Google Patents
積層型光起電力装置 Download PDFInfo
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- 238000006243 chemical reaction Methods 0.000 claims abstract description 72
- 229910021424 microcrystalline silicon Inorganic materials 0.000 claims abstract description 57
- 229910021417 amorphous silicon Inorganic materials 0.000 claims abstract description 36
- 229910018557 Si O Inorganic materials 0.000 claims abstract description 14
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 claims abstract description 14
- 238000004566 IR spectroscopy Methods 0.000 claims abstract description 3
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- 238000011156 evaluation Methods 0.000 description 2
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 2
- 238000001755 magnetron sputter deposition Methods 0.000 description 2
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- 239000004695 Polyether sulfone Substances 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
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- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
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- 229910052710 silicon Inorganic materials 0.000 description 1
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- 238000001228 spectrum Methods 0.000 description 1
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- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 1
- 229910001887 tin oxide Inorganic materials 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by potential barriers
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- H01L31/0725—Multiple junction or tandem solar cells
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- H01L31/0368—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including polycrystalline semiconductors
- H01L31/03682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including polycrystalline semiconductors including only elements of Group IV of the Periodic Table
- H01L31/03685—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including polycrystalline semiconductors including only elements of Group IV of the Periodic Table including microcrystalline silicon, uc-Si
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Abstract
【解決手段】 光電変換層としての非晶質シリコン層8及び微結晶シリコン層5を赤外吸収分光法で測定して得られるSi−Hストレッチングモードのピーク面積をI〔Si-H〕とし、Si−Oストレッチングモードのピーク面積をI〔Si-O〕とし、これらの比をα(=I〔Si-O〕/I〔Si-H〕)としたとき、第2の光起電力ユニットの光電変換層である微結晶シリコン層5のα2が、第1の光起電力ユニットの光電変換層である非晶質シリコン層8のα1よりも大きく、かつ第2の光起電力ユニットの短絡電流Isc2が、第1の光起電力ユニットの短絡電流Isc1よりも大きいことを特徴としている。
【選択図】 図1
Description
積層型光起電力装置の短絡電流(Isc)=各ユニットセルのそれぞれの電流値のうち、小さい方の電流値
積層型光起電力装置の曲線因子(F.F.)=各ユニットセルのそれぞれの曲線因子のうち、低い方の値
また、非晶質シリコンを発電層とする光起電力素子は、光照射によって主に曲線因子及び開放電圧が低下する。これに対し、微結晶シリコン層を発電層とする光起電力素子においては、光照射によってほとんど劣化せず、劣化する場合であっても曲線因子が僅かに低下する程度である。
図1は、本発明に従う一実施例の積層型光起電力装置を示す断面図である。図1に示す実施例の積層型光起電力装置は、非晶質シリコン層を光電変換層とした第1の光起電力ユニットと、微結晶シリコン層を光電変換層とした第2の光起電力ユニットとを光入射側からこの順番で積層した積層型光起電力装置(タンデム型光起電力装置)である。
比較例として、ボトムセル(第2の光起電力ユニット)における光電変換層である微結晶シリコン層を形成する際の条件を、表4に示すように変化させる以外は、上記の実施例と同様にして積層型光起電力装置を作製した。ボトムセルの光電変換層における薄膜形成条件は、具体的には、表4に示すように高周波電力を30Wから50Wとし、ガス流量におけるH2400sccmに対するSiH4の流量を20sccmから10sccmに変化させている。
実施例及び比較例におけるフロントセル及びボトムセルの光電変換層の赤外吸収スペクトルを測定するためのサンプルを作製した。上記と同様のステンレス基板の上に、上記と同様の裏面電極を形成し、その上に各セルのn型微結晶シリコン層を形成し、その上に各セルの光電変換層を形成した。これらのサンプルを用いて、各光電変換層の赤外吸収スペクトルを測定した。
上述の定エネルギー分光器による分光感度の測定方法により、実施例及び比較例におけるフロントセル(第1の光起電力ユニット)の短絡電流Isc1及びボトムセル(第2の光起電力ユニット)の短絡電流Isc2を求めた。結果を表6に示す。表6に示す値は、実施例におけるフロントセルの短絡電流Isc1で規格化した値である。
実施例及び比較例の積層型光起電力装置について、長期間光照射した後の特性を評価した。AM−1.5、500mW/cm2、25℃、及び端子間開放状態の条件で160分間光照射し、その後AM−1.5、100mW/cm2、25℃の条件で光照射後の特性を測定した。光照射前の初期特性の出力で割った規格値(=1−光劣化率)で変換効率、開放電圧、短絡電流及び曲線因子の測定結果を表7に示す。
2…ポリイミド層
3…裏面電極
4…第2の光起電力ユニットのn型微結晶シリコン層
5…第2の光起電力ユニットの光電変換層(微結晶シリコン層)
6…第2の光起電力ユニットのp型微結晶シリコン層
7…第1の光起電力ユニットのn型微結晶シリコン層
8…第1の光起電力ユニットの光電変換層(非晶質シリコン層)
9…第1の光起電力ユニットのp型非晶質シリコンカーバイド層
10…表面透明電極
11…集電極
Claims (2)
- 一導電型の非単結晶半導体層、実質的に真性でかつ発電に寄与する光電変換層としての非晶質シリコン層、及び他導電型の非単結晶半導体層を積層してなる第1の光起電力ユニットが光入射側に設けられ、一導電型の非単結晶半導体層、実質的に真性でかつ発電に寄与する光電変換層としての微結晶シリコン層、及び他導電型の非単結晶半導体層を積層してなる第2の光起電力ユニットが光入射に対して前記第1の光起電力ユニットより後側に設けられた積層型光起電力装置であって、
光電変換層としての前記非晶質シリコン層及び前記微結晶シリコン層を赤外吸収分光法で測定して得られるSi−Hストレッチングモードのピーク面積をI〔Si-H〕とし、Si−Oストレッチングモードのピーク面積をI〔Si-O〕とし、これらの比をα(=I〔Si-O〕/I〔Si-H〕)としたとき、前記第2の光起電力ユニットの光電変換層である前記微結晶シリコン層のα2が、前記第1の光起電力ユニットの光電変換層である前記非晶質シリコン層のα1よりも大きく、かつ
前記第2の光起電力ユニットの短絡電流Isc2が、前記第1の光起電力ユニットの短絡電流Isc1よりも大きいことを特徴とする積層型光起電力装置。 - 前記各非単結晶半導体層が、非単結晶シリコン層または非単結晶シリコン合金層であることを特徴とする請求項1に記載の積層型光起電力装置。
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JP2005190930A JP4688589B2 (ja) | 2005-06-30 | 2005-06-30 | 積層型光起電力装置 |
AT06011518T ATE520155T1 (de) | 2005-06-30 | 2006-06-02 | Tandem photovoltaisches bauelement |
EP06011518A EP1739755B1 (en) | 2005-06-30 | 2006-06-02 | Tandem photovoltaic device |
US11/447,263 US20070000538A1 (en) | 2005-06-30 | 2006-06-06 | Stacked photovoltaic device |
CNB2006101005099A CN100539204C (zh) | 2005-06-30 | 2006-06-30 | 叠层型光电动势装置 |
US12/900,399 US20110020974A1 (en) | 2005-06-30 | 2010-10-07 | Method for producing a stacked photovoltaic device |
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US8203071B2 (en) | 2007-01-18 | 2012-06-19 | Applied Materials, Inc. | Multi-junction solar cells and methods and apparatuses for forming the same |
US7687300B2 (en) * | 2007-10-22 | 2010-03-30 | Applied Materials, Inc. | Method of dynamic temperature control during microcrystalline SI growth |
US20090104733A1 (en) * | 2007-10-22 | 2009-04-23 | Yong Kee Chae | Microcrystalline silicon deposition for thin film solar applications |
CN101842875A (zh) * | 2007-11-02 | 2010-09-22 | 应用材料股份有限公司 | 在沉积处理间实施的等离子处理 |
US20090130827A1 (en) * | 2007-11-02 | 2009-05-21 | Soo Young Choi | Intrinsic amorphous silicon layer |
US20110088760A1 (en) * | 2009-10-20 | 2011-04-21 | Applied Materials, Inc. | Methods of forming an amorphous silicon layer for thin film solar cell application |
US20120222730A1 (en) * | 2011-03-01 | 2012-09-06 | International Business Machines Corporation | Tandem solar cell with improved absorption material |
CN102244081B (zh) * | 2011-07-05 | 2012-11-07 | 南开大学 | 一种高稳定性非晶硅/微晶硅叠层太阳电池及制备方法 |
CN108010989B (zh) * | 2017-11-10 | 2019-11-08 | 深圳先进技术研究院 | 柔性太阳能电池及其制备方法 |
CN108010985B (zh) * | 2017-11-10 | 2019-11-08 | 深圳先进技术研究院 | 柔性薄膜太阳能电池及其制备方法 |
CN108417651B (zh) * | 2018-03-07 | 2020-06-09 | 宁波山迪光能技术有限公司 | 薄膜太阳能电池、制作方法及隔热太阳能夹胶玻璃 |
CN109742266B (zh) * | 2019-01-11 | 2021-08-06 | 京东方科技集团股份有限公司 | 一种oled微腔结构的制作方法 |
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EP1739755A2 (en) | 2007-01-03 |
US20070000538A1 (en) | 2007-01-04 |
CN1893120A (zh) | 2007-01-10 |
EP1739755B1 (en) | 2011-08-10 |
US20110020974A1 (en) | 2011-01-27 |
ATE520155T1 (de) | 2011-08-15 |
JP4688589B2 (ja) | 2011-05-25 |
EP1739755A3 (en) | 2010-06-16 |
CN100539204C (zh) | 2009-09-09 |
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