JP2007005666A - ウエーハの加工方法 - Google Patents
ウエーハの加工方法 Download PDFInfo
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- JP2007005666A JP2007005666A JP2005185974A JP2005185974A JP2007005666A JP 2007005666 A JP2007005666 A JP 2007005666A JP 2005185974 A JP2005185974 A JP 2005185974A JP 2005185974 A JP2005185974 A JP 2005185974A JP 2007005666 A JP2007005666 A JP 2007005666A
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- 238000003672 processing method Methods 0.000 title claims abstract description 12
- 238000000034 method Methods 0.000 claims abstract description 26
- 238000012545 processing Methods 0.000 claims description 41
- 230000003014 reinforcing effect Effects 0.000 claims description 24
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 238000005553 drilling Methods 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 59
- 238000003754 machining Methods 0.000 description 25
- 238000001514 detection method Methods 0.000 description 17
- 238000003384 imaging method Methods 0.000 description 17
- 238000003860 storage Methods 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 230000001681 protective effect Effects 0.000 description 5
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical group [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 229910052731 fluorine Inorganic materials 0.000 description 2
- 239000011737 fluorine Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 230000002787 reinforcement Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910009372 YVO4 Inorganic materials 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005323 electroforming Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000098 polyolefin Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 229920003002 synthetic resin Polymers 0.000 description 1
- 239000000057 synthetic resin Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
- H01L21/3043—Making grooves, e.g. cutting
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
- B23K26/382—Removing material by boring or cutting by boring
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/40—Removing material taking account of the properties of the material involved
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/60—Preliminary treatment
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- H—ELECTRICITY
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- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
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- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76898—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics formed through a semiconductor substrate
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- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/02—Bonding areas ; Manufacturing methods related thereto
- H01L24/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L24/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K2103/00—Materials to be soldered, welded or cut
- B23K2103/50—Inorganic material, e.g. metals, not provided for in B23K2103/02 – B23K2103/26
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
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- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
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- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/94—Laser ablative material removal
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/959—Mechanical polishing of wafer
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/977—Thinning or removal of substrate
Abstract
【解決手段】 表面に複数のデバイスが形成されたデバイス領域とデバイス領域を囲繞する余剰領域とを備え、デバイス領域に電極が形成されているウエーハの加工方法であって、ウエーハの裏面におけるデバイス領域に対応する領域を除去してデバイス領域の厚さを所定厚さに形成するとともに、ウエーハの裏面における余剰領域に対応する領域を残存させて環状の補強部を形成する補強部形成工程と、補強部形成工程が実施されたウエーハ該電極部に貫通孔を穿設するビアホール形成工程とを含む。
【選択図】 図8
Description
また、ウエーハの裏面を研削して所定の厚さ(例えば30〜50μm)に形成した後に貫通孔(ビアホール)を穿設すると、比較的容易に貫通孔(ビヤホール)を穿設することができるが、ウエーハが薄いために破損し易いとともに、湾曲して搬送等の取り扱いが困難となる。
更に、裏面を研削して所定の厚さに形成する前のウエーハの表面側からデバイスの仕上がり厚さに相当する深さの貫通孔(ビアホール)を穿設し、この貫通孔(ビアホール)に銅等の導電性材料からなる電極を埋設した後に、ウエーハの裏面を研削して所定の仕上がり厚さに形成することにより、ウエーハの裏面に埋設した電極を露出される方法も試みられている。しかしながら、ウエーハの裏面を研削して電極を露出せしめると、電極が延性により髭状に延び隣接する電極と短絡したり、銅イオンがウエーハの裏面から内部に侵入してデバイスの品質を低下させるという問題がある。
ウエーハの裏面における該デバイス領域に対応する領域を除去して該デバイス領域の厚さを所定厚さに形成するとともに、ウエーハの裏面における該余剰領域に対応する領域を残存させて環状の補強部を形成する補強部形成工程と、
該補強部形成工程が実施されたウエーハの該電極部に貫通孔を穿設するビアホール形成工程と、を含む、
ことを特徴とするウエーハの加工方法が提供される。
この補強部形成工程は、図示の実施形態においては図4(a)に示す研削装置12によって実施する。図4(a)に示す研削装置12は、被加工物を保持するチャックテーブル121と、該チャックテーブル121に保持された被加工物を研削する研削砥石122を備えた研削手段123を具備している。この研削装置12を用いて補強部形成工程を実施するには、チャックテーブル121上に半導体ウエーハ10の保護部材11を載置し、半導体ウエーハ10をチャックテーブル121上に吸引保持する。ここで、チャックテーブル121に保持された半導体ウエーハ10と研削砥石122の関係について説明する。チャックテーブル121の回転中心P1と研削砥石122の回転中心P2は偏芯しており、研削砥石122の直径は、半導体ウエーハ10の余剰領域105の内側とチャックテーブル121の回転中心P1(半導体ウエーハ10の中心)を通過する寸法に設定されている。半導体ウエーハ10をチャックテーブル121上に吸引保持したならば、チャックテーブル121を矢印121aで示す方向に300rpmで回転しつつ、研削手段123の研削砥石122を矢印122aで示す方向に6000rpmで回転せしめて半導体ウエーハ10の裏面2bに接触する。そして、研削手段123を所定の研削送り速度で下方に所定量研削送りする。この結果、半導体ウエーハ10の裏面10bには、図4の(b)に示すようにデバイス領域104に対応する領域が研削除去されて所定厚さ(例えば30μm)の円形状の凹部104bに形成されるとともに、余剰領域105に対応する領域が残存されて環状の補強部105bに形成される。
図6に示すレーザー加工装置1は、静止基台2と、該静止基台2に矢印Xで示す加工送り方向に移動可能に配設され被加工物を保持するチャックテーブル機構3と、静止基台2に上記矢印Xで示す方向と直角な矢印Yで示す割り出し送り方向に移動可能に配設されたレーザー光線照射ユニット支持機構4と、該レーザー光線ユニット支持機構4に矢印Zで示す方向に移動可能に配設されたレーザー光線照射ユニット5とを具備している。
なお、上述した半導体ウエーハ10の図1に示す各行E1・・・・Enおよび各列F1・・・・Fnに配設されたデバイス102の個数と図2に示す各間隔A,B,C,Dは、その設計値のデータが制御手段8のランダムアクセスメモリ(RAM)83の第1に記憶領域83aに格納されている。
光源 :LD励起QスイッチNd:YVO4
波長 :355nm
出力 :6W
集光スポット径 :50μm
加工送り速度 :100mm/秒
また、上述したビアホール形成工程はレーザー加工装置を用いて貫通孔(ビアホール)を形成した例を示したが、ビアホール形成工程は直径が100〜500μmの電鋳ドリルを用いて貫通孔(ビアホール)を形成してもよい。
2:静止基台
3:チャックテーブル機構
36:チャックテーブル
5:レーザー光線照射ユニット
52:レーザー光線加工手段
522:集光器
8:制御手段
10:半導体ウエーハ
101:ストリート
102:デバイス
103:電極
104:デバイス領域
105:余剰領域
107:貫通孔(ビアホール)
11:保護部材
12:研削装置
122:研削砥石
13:環状のフレーム
14:支持テープ
Claims (3)
- 表面に複数のデバイスが形成されたデバイス領域と該デバイス領域を囲繞する余剰領域とを備え、該デバイス領域に電極が形成されているウエーハの加工方法であって、
ウエーハの裏面における該デバイス領域に対応する領域を除去して該デバイス領域の厚さを所定厚さに形成するとともに、ウエーハの裏面における該余剰領域に対応する領域を残存させて環状の補強部を形成する補強部形成工程と、
該補強部形成工程が実施されたウエーハの該電極部に貫通孔を穿設するビアホール形成工程と、を含む、
ことを特徴とするウエーハの加工方法。 - 該補強部形成工程は、ウエーハの裏面における該デバイス領域に対応する領域を研削して円形状の凹部を形成する、請求項1記載のウエーハの加工方法。
- 該ビアホール形成工程は、ウエーハの該電極部にレーザー光線を照射して貫通孔を穿設する、請求項1または2記載のウエーハの加工方法。
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JP2005185974A JP4579066B2 (ja) | 2005-06-27 | 2005-06-27 | ウエーハの加工方法 |
US11/471,532 US7625810B2 (en) | 2005-06-27 | 2006-06-21 | Wafer processing method |
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JP2005185974A JP4579066B2 (ja) | 2005-06-27 | 2005-06-27 | ウエーハの加工方法 |
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JP2007005666A true JP2007005666A (ja) | 2007-01-11 |
JP4579066B2 JP4579066B2 (ja) | 2010-11-10 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009170510A (ja) * | 2008-01-11 | 2009-07-30 | Disco Abrasive Syst Ltd | 積層デバイスの製造方法 |
JP2010103245A (ja) * | 2008-10-22 | 2010-05-06 | Disco Abrasive Syst Ltd | 積層デバイスの製造方法 |
US10189141B2 (en) * | 2014-06-27 | 2019-01-29 | Applied Materials, Inc. | Chamber components with polished internal apertures |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP5073962B2 (ja) * | 2006-05-12 | 2012-11-14 | 株式会社ディスコ | ウエーハの加工方法 |
JP2008073740A (ja) * | 2006-09-22 | 2008-04-03 | Disco Abrasive Syst Ltd | ビアホールの加工方法 |
JP2008283025A (ja) * | 2007-05-11 | 2008-11-20 | Disco Abrasive Syst Ltd | ウエーハの分割方法 |
JP2009010178A (ja) * | 2007-06-28 | 2009-01-15 | Disco Abrasive Syst Ltd | ウェーハの加工方法 |
JP2009021462A (ja) * | 2007-07-13 | 2009-01-29 | Disco Abrasive Syst Ltd | ウェーハの加工方法 |
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