JP2007001787A5 - - Google Patents
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- Publication number
- JP2007001787A5 JP2007001787A5 JP2005180990A JP2005180990A JP2007001787A5 JP 2007001787 A5 JP2007001787 A5 JP 2007001787A5 JP 2005180990 A JP2005180990 A JP 2005180990A JP 2005180990 A JP2005180990 A JP 2005180990A JP 2007001787 A5 JP2007001787 A5 JP 2007001787A5
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- ethylenediamine
- manufacturing
- ethylenediaminetetraacetic acid
- liquid mixture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 239000007788 liquid Substances 0.000 claims 2
- QXNVGIXVLWOKEQ-UHFFFAOYSA-N Disodium Chemical compound [Na][Na] QXNVGIXVLWOKEQ-UHFFFAOYSA-N 0.000 claims 1
- KCXVZYZYPLLWCC-UHFFFAOYSA-N EDTA Chemical compound OC(=O)CN(CC(O)=O)CCN(CC(O)=O)CC(O)=O KCXVZYZYPLLWCC-UHFFFAOYSA-N 0.000 claims 1
- PIICEJLVQHRZGT-UHFFFAOYSA-N Ethylenediamine Chemical compound NCCN PIICEJLVQHRZGT-UHFFFAOYSA-N 0.000 claims 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims 1
- 238000005530 etching Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 claims 1
- 238000000034 method Methods 0.000 claims 1
- 239000000203 mixture Substances 0.000 claims 1
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005180990A JP4610422B2 (ja) | 2005-06-21 | 2005-06-21 | ＺｎＯ基板の製造方法 |
| US11/392,863 US7288208B2 (en) | 2005-06-21 | 2006-03-29 | Method of manufacturing ZnO substrate from ZnO crystal formed by hydrothermal synthesis method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2005180990A JP4610422B2 (ja) | 2005-06-21 | 2005-06-21 | ＺｎＯ基板の製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2007001787A JP2007001787A (ja) | 2007-01-11 |
| JP2007001787A5 true JP2007001787A5 (https=) | 2008-07-24 |
| JP4610422B2 JP4610422B2 (ja) | 2011-01-12 |
Family
ID=37572344
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2005180990A Expired - Fee Related JP4610422B2 (ja) | 2005-06-21 | 2005-06-21 | ＺｎＯ基板の製造方法 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US7288208B2 (https=) |
| JP (1) | JP4610422B2 (https=) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE112006002133B4 (de) * | 2005-08-09 | 2017-10-12 | Stanley Electric Co. Ltd. | ZnO-Kristall, sein Aufwuchsverfahren und ein Herstellungsverfahren für eine Leuchtvorrichtung |
| JP4953879B2 (ja) * | 2007-03-29 | 2012-06-13 | スタンレー電気株式会社 | 半導体装置とその製造方法、及びテンプレート基板 |
| JP2009029688A (ja) * | 2007-06-28 | 2009-02-12 | Rohm Co Ltd | ＺｎＯ系基板及びＺｎＯ系基板の処理方法 |
| JP2010053017A (ja) | 2008-04-04 | 2010-03-11 | Fukuda Crystal Laboratory | 酸化亜鉛単結晶およびその製造方法 |
| JP5411681B2 (ja) * | 2009-12-09 | 2014-02-12 | スタンレー電気株式会社 | 酸化亜鉛系半導体の成長方法及び半導体発光素子の製造方法 |
| GB201010915D0 (en) | 2010-06-28 | 2010-08-11 | Uni I Oslo | Process |
| JP5647881B2 (ja) * | 2010-12-17 | 2015-01-07 | スタンレー電気株式会社 | 酸化亜鉛系半導体の成長方法 |
| JP5654910B2 (ja) * | 2011-03-14 | 2015-01-14 | スタンレー電気株式会社 | 酸化亜鉛基板の処理方法 |
| JP5647922B2 (ja) * | 2011-03-16 | 2015-01-07 | スタンレー電気株式会社 | 酸化亜鉛系基板の処理方法及び成長層付き基板 |
Family Cites Families (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2793047B2 (ja) | 1991-02-08 | 1998-09-03 | シャープ株式会社 | 静止画記録再生装置 |
| JPH0581787A (ja) | 1991-09-20 | 1993-04-02 | Mita Ind Co Ltd | 記録媒体の記録装置 |
| JPH05165935A (ja) | 1991-10-18 | 1993-07-02 | Konica Corp | 画像撮影装置及び画像ファイル装置 |
| CA2081762C (en) | 1991-12-05 | 2002-08-13 | Henry D. Hendrix | Method and apparatus to improve a video signal |
| JPH05158778A (ja) | 1991-12-09 | 1993-06-25 | Canon Inc | 画像情報記憶装置 |
| JP3561930B2 (ja) | 1993-08-14 | 2004-09-08 | ソニー株式会社 | 画像検索用ｉｄ信号の記録方法、画像検索方法、及び記録画像再生装置 |
| JP3610084B2 (ja) | 1993-11-19 | 2005-01-12 | キヤノン株式会社 | 記録装置 |
| US5687160A (en) | 1993-12-10 | 1997-11-11 | Sony Corporation | Optical recording medium with lists having playback control information |
| JPH08106721A (ja) | 1994-10-07 | 1996-04-23 | Sony Corp | 円盤状記録媒体の記録装置及び再生装置 |
| KR100197585B1 (ko) | 1995-01-16 | 1999-06-15 | 윤종용 | 영상(image)/오디오정보(information)를 반도체메모리에 기록/재생하기 위한 장치 |
| JPH08205014A (ja) | 1995-01-31 | 1996-08-09 | Casio Comput Co Ltd | 電子スチルカメラ |
| US5745643A (en) | 1995-04-06 | 1998-04-28 | Kabushiki Kaisha Toshiba | System for and method of reproducing playback data appropriately by the use of attribute information on the playback data |
| EP0915470A3 (en) | 1995-08-21 | 2004-03-24 | Matsushita Electric Industrial Co., Ltd. | Multimedia optical disk, reproduction apparatus and method for achieving variable scene development based on interactive control |
| TW436777B (en) | 1995-09-29 | 2001-05-28 | Matsushita Electric Industrial Co Ltd | A method and an apparatus for reproducing bitstream having non-sequential system clock data seamlessly therebetween |
| JP3824699B2 (ja) | 1996-03-15 | 2006-09-20 | パイオニア株式会社 | 情報記録媒体、その記録装置及び方法、その再生装置及び方法並びに情報処理装置及び方法 |
| JP3437371B2 (ja) | 1996-03-22 | 2003-08-18 | パイオニア株式会社 | 情報記録装置及び情報再生装置 |
| CN1449189B (zh) | 1996-03-29 | 2010-04-21 | 松下电器产业株式会社 | 光盘的制造方法 |
| US20020054049A1 (en) | 1996-11-12 | 2002-05-09 | Kenji Toyoda | Image playback apparatus, image recording apparatus, and methods thereof |
| JP3618986B2 (ja) * | 1996-12-13 | 2005-02-09 | キヤノン株式会社 | 光起電力素子の製造方法 |
| JPH09182013A (ja) | 1996-12-19 | 1997-07-11 | Casio Comput Co Ltd | 電子スチルカメラ |
| EP1193707B1 (en) | 1997-09-17 | 2006-05-24 | Matsushita Electric Industrial Co., Ltd. | Optical disc, recording apparatus, and computer-readable recording medium |
| JPH11136613A (ja) | 1997-10-31 | 1999-05-21 | Canon Inc | 画像記録装置および方法 |
| JP3597689B2 (ja) | 1998-01-21 | 2004-12-08 | 株式会社東芝 | 情報記録媒体及び情報記録媒体処理装置 |
| JP3389086B2 (ja) | 1998-02-23 | 2003-03-24 | 株式会社東芝 | 光ディスクの記録方法と光ディスクと再生方法と再生装置 |
| EP2261920A3 (en) | 1998-02-23 | 2011-03-09 | Kabushiki Kaisha Toshiba | Information storage medium, information playback method and apparatus and information recording method |
| JP3356991B2 (ja) | 1998-06-17 | 2002-12-16 | 株式会社日立製作所 | 光ディスク、記録方法、記録装置、再生方法及び再生装置 |
| US6721493B1 (en) | 1998-06-24 | 2004-04-13 | Samsung Electronics Co., Ltd. | Recording medium for storing information for still picture, recording and/or reproducing method and apparatus therefor |
| US6389222B1 (en) | 1998-07-07 | 2002-05-14 | Kabushiki Kaisha Toshiba | Management system for protected and temporarily-erased still picture information |
| JP3383587B2 (ja) | 1998-07-07 | 2003-03-04 | 株式会社東芝 | 静止画像連続情報記録方法と光ディスクと光ディスクの情報再生装置と情報再生方法 |
| KR100326337B1 (ko) | 1998-09-05 | 2002-09-12 | 엘지전자주식회사 | 재기록가능기록매체의데이터재생순서정보의생성기록방법 |
| JP4045499B2 (ja) | 2003-03-27 | 2008-02-13 | 信越半導体株式会社 | ＺｎＯ系半導体素子の製造方法 |
| JP2004315361A (ja) * | 2003-04-03 | 2004-11-11 | Tokyo Denpa Co Ltd | 酸化亜鉛単結晶 |
| JP4610870B2 (ja) * | 2003-07-17 | 2011-01-12 | 独立行政法人物質・材料研究機構 | 酸化亜鉛単結晶ウエファーの製造法 |
-
2005
- 2005-06-21 JP JP2005180990A patent/JP4610422B2/ja not_active Expired - Fee Related
-
2006
- 2006-03-29 US US11/392,863 patent/US7288208B2/en active Active
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