JP2006522226A - 輸送中の反応性化合物の劣化を低減する方法 - Google Patents
輸送中の反応性化合物の劣化を低減する方法 Download PDFInfo
- Publication number
- JP2006522226A JP2006522226A JP2006509300A JP2006509300A JP2006522226A JP 2006522226 A JP2006522226 A JP 2006522226A JP 2006509300 A JP2006509300 A JP 2006509300A JP 2006509300 A JP2006509300 A JP 2006509300A JP 2006522226 A JP2006522226 A JP 2006522226A
- Authority
- JP
- Japan
- Prior art keywords
- reactive compound
- transport
- location
- reactive
- minimizing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
- C25F3/00—Electrolytic etching or polishing
- C25F3/16—Polishing
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Filling Or Discharging Of Gas Storage Vessels (AREA)
- Sampling And Sample Adjustment (AREA)
- Manufacture And Refinement Of Metals (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/396,795 US20040188272A1 (en) | 2003-03-25 | 2003-03-25 | Method for reducing degradation of reactive compounds during transport |
| PCT/US2004/009186 WO2004088004A1 (en) | 2003-03-25 | 2004-03-25 | Method for reducing degradation of reactive compounds during transport |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006522226A true JP2006522226A (ja) | 2006-09-28 |
| JP2006522226A5 JP2006522226A5 (https=) | 2007-06-14 |
Family
ID=32988852
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006509300A Pending JP2006522226A (ja) | 2003-03-25 | 2004-03-25 | 輸送中の反応性化合物の劣化を低減する方法 |
Country Status (10)
| Country | Link |
|---|---|
| US (1) | US20040188272A1 (https=) |
| EP (1) | EP1606437A1 (https=) |
| JP (1) | JP2006522226A (https=) |
| KR (1) | KR20050114680A (https=) |
| CN (1) | CN1761774A (https=) |
| CA (1) | CA2514527A1 (https=) |
| RU (1) | RU2005132824A (https=) |
| TW (1) | TW200500166A (https=) |
| WO (1) | WO2004088004A1 (https=) |
| ZA (1) | ZA200505303B (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101983417B (zh) * | 2008-03-31 | 2013-04-24 | 日本瑞翁株式会社 | 等离子体蚀刻方法 |
| US8590705B2 (en) * | 2010-06-11 | 2013-11-26 | Air Products And Chemicals, Inc. | Cylinder surface treated container for monochlorosilane |
| CN104388938A (zh) * | 2014-11-05 | 2015-03-04 | 辽宁石油化工大学 | 一种铝合金焊丝的电化学抛光液及电化学抛光方法 |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3010138U (ja) * | 1994-10-13 | 1995-04-25 | 有限会社字多精密工業 | ステンレス製ボンベ |
| JPH07197158A (ja) * | 1993-12-28 | 1995-08-01 | Mitsubishi Materials Corp | Ni基合金とそれを用いた半導体製造装置用部材及び液晶製造装置用部材 |
| JPH0885548A (ja) * | 1994-09-20 | 1996-04-02 | Iwatani Internatl Corp | オゾンガス貯蔵容器 |
| JP2000070705A (ja) * | 1998-08-28 | 2000-03-07 | Iwatani Internatl Corp | フッ素含有ガスの供給ラインでの腐食生成物低減方法 |
Family Cites Families (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2138539B1 (https=) * | 1971-05-27 | 1973-05-25 | Alsthom | |
| US3998180A (en) * | 1975-04-07 | 1976-12-21 | Union Carbide Corporation | Vapor deposition apparatus including fluid transfer means |
| DE3614290A1 (de) * | 1986-04-26 | 1987-10-29 | Messer Griesheim Gmbh | Druckgasbehaelter aus einer austenitischen stahllegierung |
| DE3617092A1 (de) * | 1986-05-21 | 1987-11-26 | Poligrat Gmbh | Innenoberflaeche einer gasflasche und verfahren zu deren herstellung |
| JPH01261208A (ja) * | 1988-04-11 | 1989-10-18 | Mitsui Toatsu Chem Inc | 三弗化窒素ガスの精製方法 |
| US5009963A (en) * | 1988-07-20 | 1991-04-23 | Tadahiro Ohmi | Metal material with film passivated by fluorination and apparatus composed of the metal material |
| EP0437110B1 (en) * | 1990-01-08 | 2001-07-11 | Lsi Logic Corporation | Structure for filtering process gases for use with a chemical vapour deposition chamber |
| US5085745A (en) * | 1990-11-07 | 1992-02-04 | Liquid Carbonic Corporation | Method for treating carbon steel cylinder |
| JPH0666400A (ja) * | 1992-08-21 | 1994-03-08 | Mitsui Toatsu Chem Inc | フルオロシランガスの充填容器 |
| US6557593B2 (en) * | 1993-04-28 | 2003-05-06 | Advanced Technology Materials, Inc. | Refillable ampule and method re same |
| GB9724168D0 (en) * | 1997-11-14 | 1998-01-14 | Air Prod & Chem | Gas control device and method of supplying gas |
| US6514346B1 (en) * | 1998-03-25 | 2003-02-04 | Neuco, Inc. | Method and apparatus for inserting and propelling a coating device into and through live gas pipeline |
| US6343476B1 (en) * | 1998-04-28 | 2002-02-05 | Advanced Technology Materials, Inc. | Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein |
| US6374860B2 (en) * | 1998-10-16 | 2002-04-23 | Daniel Industries, Inc. | Integrated valve design for gas chromatograph |
| US6523615B2 (en) * | 2000-03-31 | 2003-02-25 | John Gandy Corporation | Electropolishing method for oil field tubular goods and drill pipe |
-
2003
- 2003-03-25 US US10/396,795 patent/US20040188272A1/en not_active Abandoned
-
2004
- 2004-03-25 EP EP04758353A patent/EP1606437A1/en not_active Withdrawn
- 2004-03-25 CN CNA2004800077050A patent/CN1761774A/zh active Pending
- 2004-03-25 RU RU2005132824/02A patent/RU2005132824A/ru not_active Application Discontinuation
- 2004-03-25 ZA ZA200505303A patent/ZA200505303B/en unknown
- 2004-03-25 CA CA002514527A patent/CA2514527A1/en not_active Abandoned
- 2004-03-25 KR KR1020057017843A patent/KR20050114680A/ko not_active Withdrawn
- 2004-03-25 TW TW093108133A patent/TW200500166A/zh unknown
- 2004-03-25 WO PCT/US2004/009186 patent/WO2004088004A1/en not_active Ceased
- 2004-03-25 JP JP2006509300A patent/JP2006522226A/ja active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07197158A (ja) * | 1993-12-28 | 1995-08-01 | Mitsubishi Materials Corp | Ni基合金とそれを用いた半導体製造装置用部材及び液晶製造装置用部材 |
| JPH0885548A (ja) * | 1994-09-20 | 1996-04-02 | Iwatani Internatl Corp | オゾンガス貯蔵容器 |
| JP3010138U (ja) * | 1994-10-13 | 1995-04-25 | 有限会社字多精密工業 | ステンレス製ボンベ |
| JP2000070705A (ja) * | 1998-08-28 | 2000-03-07 | Iwatani Internatl Corp | フッ素含有ガスの供給ラインでの腐食生成物低減方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| ZA200505303B (en) | 2006-09-27 |
| US20040188272A1 (en) | 2004-09-30 |
| EP1606437A1 (en) | 2005-12-21 |
| WO2004088004A1 (en) | 2004-10-14 |
| TW200500166A (en) | 2005-01-01 |
| CN1761774A (zh) | 2006-04-19 |
| KR20050114680A (ko) | 2005-12-06 |
| RU2005132824A (ru) | 2006-02-20 |
| CA2514527A1 (en) | 2004-10-14 |
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