JP2006520687A - 複合ガス分離モジュールを製造する方法 - Google Patents
複合ガス分離モジュールを製造する方法 Download PDFInfo
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- JP2006520687A JP2006520687A JP2006507347A JP2006507347A JP2006520687A JP 2006520687 A JP2006520687 A JP 2006520687A JP 2006507347 A JP2006507347 A JP 2006507347A JP 2006507347 A JP2006507347 A JP 2006507347A JP 2006520687 A JP2006520687 A JP 2006520687A
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- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2313/00—Details relating to membrane modules or apparatus
- B01D2313/22—Cooling or heating elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2313/00—Details relating to membrane modules or apparatus
- B01D2313/42—Catalysts within the flow path
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/04—Characteristic thickness
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/0405—Purification by membrane separation
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
- C01B2203/04—Integrated processes for the production of hydrogen or synthesis gas containing a purification step for the hydrogen or the synthesis gas
- C01B2203/0465—Composition of the impurity
- C01B2203/0475—Composition of the impurity the impurity being carbon dioxide
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Organic Chemistry (AREA)
- Geology (AREA)
- Life Sciences & Earth Sciences (AREA)
- Combustion & Propulsion (AREA)
- Electrochemistry (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US45693003P | 2003-03-21 | 2003-03-21 | |
| PCT/US2004/008383 WO2004085044A1 (en) | 2003-03-21 | 2004-03-19 | Method for fabricating composite gas separation modules |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006520687A true JP2006520687A (ja) | 2006-09-14 |
| JP2006520687A5 JP2006520687A5 (enExample) | 2007-05-10 |
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| JP2006507347A Pending JP2006520687A (ja) | 2003-03-21 | 2004-03-19 | 複合ガス分離モジュールを製造する方法 |
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| Country | Link |
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| US (1) | US7390536B2 (enExample) |
| EP (1) | EP1608459A1 (enExample) |
| JP (1) | JP2006520687A (enExample) |
| AU (1) | AU2004224371B2 (enExample) |
| CA (1) | CA2519774A1 (enExample) |
| NO (1) | NO20054363L (enExample) |
| WO (1) | WO2004085044A1 (enExample) |
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| JP5229503B2 (ja) * | 2007-02-19 | 2013-07-03 | 三菱瓦斯化学株式会社 | 水素精製方法、水素分離膜、及び水素精製装置 |
| JP2015502253A (ja) * | 2011-12-20 | 2015-01-22 | シエル・インターナシヨナル・リサーチ・マートスハツペイ・ベー・ヴエー | 複合金属ガス分離膜を作製する方法 |
| JP2016059902A (ja) * | 2014-09-19 | 2016-04-25 | 東京瓦斯株式会社 | 水素分離装置および水素分離方法 |
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| JP2017513698A (ja) * | 2014-04-10 | 2017-06-01 | シエル・インターナシヨナル・リサーチ・マートスハツペイ・ベー・ヴエー | 担持されたガス分離膜を作製する方法 |
| JP2020503171A (ja) * | 2016-10-25 | 2020-01-30 | ノヴァ ケミカルズ(アンテルナショナル)ソシエテ アノニム | クラッキングコイルにおける半透性膜の使用 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04346824A (ja) * | 1991-05-21 | 1992-12-02 | Mitsubishi Heavy Ind Ltd | 水素分離膜 |
| JPH0585702A (ja) * | 1991-09-30 | 1993-04-06 | Mitsubishi Heavy Ind Ltd | 水素分離膜の製造方法 |
| JPH05285357A (ja) * | 1992-04-09 | 1993-11-02 | Mitsubishi Heavy Ind Ltd | 水素分離膜 |
| JP2002219343A (ja) * | 2000-11-24 | 2002-08-06 | Sumitomo Electric Ind Ltd | 物質分離構造体とその製造方法 |
| WO2002064241A1 (en) * | 2001-02-16 | 2002-08-22 | Sumitomo Electric Industries, Ltd. | Hydrogen-permeable structure and method for manufacture thereof or repair thereof |
Family Cites Families (55)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US838829A (en) * | 1906-09-01 | 1906-12-18 | John B Williams | Shutter-fastener. |
| US2958391A (en) * | 1958-02-24 | 1960-11-01 | Universal Oil Prod Co | Purification of hydrogen utilizing hydrogen-permeable membranes |
| US3241298A (en) * | 1962-11-26 | 1966-03-22 | Union Carbide Corp | Method for making a fine porosity filter element |
| US3428476A (en) * | 1965-06-22 | 1969-02-18 | Engelhard Min & Chem | Method for producing hydrogen diffusion cells |
| US3413777A (en) * | 1965-06-22 | 1968-12-03 | Engelhard Min & Chem | Hydrogen diffusion and method for producing same |
| DE1648367A1 (de) * | 1967-06-05 | 1971-04-15 | Varian Mat Gmbh | Diffusionsmembran-Anordnung,insbesondere fuer Lecksuchroehren |
| EP0081669B1 (de) * | 1981-12-11 | 1986-10-08 | Forschungszentrum Jülich Gmbh | Wasserstoff-Diffusionsmembran und Diffusionsverfahren zur Abtrennung von Wasserstoff aus Gasgemischen |
| DE3332348A1 (de) * | 1983-09-08 | 1985-04-04 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Wasserstoff-permeationswand |
| DE3332346A1 (de) * | 1983-09-08 | 1985-04-04 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Wasserstoff-permeationswand, verfahren zur herstellung derselben und deren verwendung |
| US4689150A (en) * | 1985-03-07 | 1987-08-25 | Ngk Insulators, Ltd. | Separation membrane and process for manufacturing the same |
| US4857080A (en) * | 1987-12-02 | 1989-08-15 | Membrane Technology & Research, Inc. | Ultrathin composite metal membranes |
| JPH0317026A (ja) * | 1989-06-13 | 1991-01-25 | Agency Of Ind Science & Technol | 脱水素反応方法 |
| US5049167A (en) * | 1989-12-13 | 1991-09-17 | Membrane Technology & Research, Inc. | Multilayer interfacial composite membrane |
| US5215729A (en) * | 1990-06-22 | 1993-06-01 | Buxbaum Robert E | Composite metal membrane for hydrogen extraction |
| US5139541A (en) * | 1990-08-10 | 1992-08-18 | Bend Research, Inc. | Hydrogen-permeable composite metal membrane |
| US5393325A (en) | 1990-08-10 | 1995-02-28 | Bend Research, Inc. | Composite hydrogen separation metal membrane |
| US5217506A (en) | 1990-08-10 | 1993-06-08 | Bend Research, Inc. | Hydrogen-permeable composite metal membrane and uses thereof |
| BR9103432A (pt) * | 1990-08-10 | 1992-05-19 | Bend Res Inc | Membrana metalica composite permeavel a hidrogenio |
| US5498278A (en) * | 1990-08-10 | 1996-03-12 | Bend Research, Inc. | Composite hydrogen separation element and module |
| US5358553A (en) * | 1991-07-05 | 1994-10-25 | Texaco Inc. | Membrane and separation process |
| JPH05123548A (ja) | 1991-11-07 | 1993-05-21 | Mitsubishi Heavy Ind Ltd | 水素分離膜の製造方法 |
| US5258339A (en) * | 1992-03-12 | 1993-11-02 | Worcester Polytechnic Institute | Formation of zeolite membranes from sols |
| US5205841A (en) * | 1992-04-03 | 1993-04-27 | Tpc Technologies, Inc. | Apparatus and method for extracting hydrogen |
| US5451386A (en) * | 1993-05-19 | 1995-09-19 | The State Of Oregon Acting By And Through The State Board Of Higher Education On Behalf Of Osu | Hydrogen-selective membrane |
| JP3402515B2 (ja) * | 1994-05-23 | 2003-05-06 | 日本碍子株式会社 | 水素分離体とそれを用いた水素分離装置及び水素分離体の製造方法 |
| US5672388A (en) * | 1994-07-08 | 1997-09-30 | Exxon Research & Engineering Company | Membrane reparation and poer size reduction using interfacial ozone assisted chemical vapor deposition |
| US5763347A (en) * | 1994-07-08 | 1998-06-09 | Exxon Research And Engineering Company | In-situ crystallized zeolite containing composition (LAI-ISC) |
| US5738708A (en) * | 1995-06-07 | 1998-04-14 | The Regents Of The University Of California Office Of Technology Transfer | Composite metal membrane |
| KR0158431B1 (ko) * | 1995-06-23 | 1998-11-16 | 윤덕용 | 수소분리용 무기재료막의 제조방법 |
| JP3540495B2 (ja) * | 1996-03-18 | 2004-07-07 | 三菱重工業株式会社 | 水素分離膜 |
| NO304220B1 (no) * | 1996-04-30 | 1998-11-16 | Sintef | FremgangsmÕte til fremstilling av tynne metallmembraner |
| JP3621785B2 (ja) | 1996-07-12 | 2005-02-16 | トヨタ自動車株式会社 | 水素分離構造体 |
| US6537352B2 (en) * | 1996-10-30 | 2003-03-25 | Idatech, Llc | Hydrogen purification membranes, components and fuel processing systems containing the same |
| US6547858B1 (en) * | 1999-03-22 | 2003-04-15 | Idatech, Llc | Hydrogen-permeable metal membrane and hydrogen purification assemblies containing the same |
| US6152995A (en) * | 1999-03-22 | 2000-11-28 | Idatech Llc | Hydrogen-permeable metal membrane and method for producing the same |
| US6309546B1 (en) * | 1997-01-10 | 2001-10-30 | Ellipsis Corporation | Micro and ultrafilters with controlled pore sizes and pore size distribution and methods for making |
| US5904754A (en) * | 1997-06-20 | 1999-05-18 | Walter Juda Associates | Diffusion-bonded palladium-copper alloy framed membrane for pure hydrogen generators and the like and method of preparing the same |
| US6152987A (en) * | 1997-12-15 | 2000-11-28 | Worcester Polytechnic Institute | Hydrogen gas-extraction module and method of fabrication |
| KR100247557B1 (ko) * | 1997-12-24 | 2000-03-15 | 김충섭 | 수소기체 분리용 복합막의 제조방법 |
| DE19843306C2 (de) * | 1998-09-22 | 2001-06-28 | Heraeus Gmbh W C | Verfahren zur Herstellung einer rohrförmigen Wasserstoffpermeationsmembran |
| US6183542B1 (en) * | 1998-11-09 | 2001-02-06 | Peter R. Bossard | Method and apparatus for purifying hydrogen |
| US6596057B2 (en) * | 1999-03-22 | 2003-07-22 | Idatech, Llc | Hydrogen-selective metal membranes, membrane modules, purification assemblies and methods of forming the same |
| US6372363B1 (en) * | 2000-04-24 | 2002-04-16 | Walter Juda Associates, Inc. | Method of improving and optimizing the hydrogen permeability of a palladium-copper membrane and novel membranes manufactured thereby |
| DE10039596C2 (de) * | 2000-08-12 | 2003-03-27 | Omg Ag & Co Kg | Geträgerte Metallmembran, Verfahren zu ihrer Herstellung und Verwendung |
| US6475268B2 (en) * | 2000-12-22 | 2002-11-05 | Ford Global Technologies, Inc. | Supported membrane for hydrogen separation |
| FR2820988B1 (fr) * | 2001-02-19 | 2003-04-25 | Cie D Etudes Des Technologies | Structures composites de membranes selectivement permeables a l'hydrogene et processeurs de gaz combustibles en faisant usage |
| US6916454B2 (en) * | 2001-03-30 | 2005-07-12 | Siemens Westinghouse Power Corporation | Metal gas separation membrane |
| DE10135390A1 (de) | 2001-07-25 | 2003-02-20 | Fraunhofer Ges Forschung | Metallische Lösungs-Diffusions-Membran sowie Verfahren zur Herstellung |
| US6730145B1 (en) * | 2002-01-29 | 2004-05-04 | L'air Liquide Societe Anonyme | Treating gas separation membrane with aqueous reagent dispersion |
| US6899744B2 (en) * | 2002-03-05 | 2005-05-31 | Eltron Research, Inc. | Hydrogen transport membranes |
| US20030190486A1 (en) * | 2002-04-03 | 2003-10-09 | Fernando Roa | Process for Preparing Palladium Alloy Composite Membranes for Use in Hydrogen Separation, Palladium Alloy Composite Membranes and Products Incorporating or Made from the Membranes |
| DE10222568B4 (de) * | 2002-05-17 | 2007-02-08 | W.C. Heraeus Gmbh | Kompositmembran und Verfahren zu deren Herstellung |
| US7125440B2 (en) * | 2003-06-04 | 2006-10-24 | Bossard Peter R | Composite structure for high efficiency hydrogen separation and its associated methods of manufacture and use |
| US7018446B2 (en) * | 2003-09-24 | 2006-03-28 | Siemens Westinghouse Power Corporation | Metal gas separation membrane |
| WO2005075060A1 (en) | 2004-02-02 | 2005-08-18 | Bossard Peter R | Composite structure for high efficiency hydrogen separation and its associated methods of manufacture and use |
-
2004
- 2004-03-19 AU AU2004224371A patent/AU2004224371B2/en not_active Ceased
- 2004-03-19 EP EP04757851A patent/EP1608459A1/en not_active Withdrawn
- 2004-03-19 US US10/804,847 patent/US7390536B2/en not_active Expired - Fee Related
- 2004-03-19 JP JP2006507347A patent/JP2006520687A/ja active Pending
- 2004-03-19 WO PCT/US2004/008383 patent/WO2004085044A1/en not_active Ceased
- 2004-03-19 CA CA002519774A patent/CA2519774A1/en not_active Abandoned
-
2005
- 2005-09-20 NO NO20054363A patent/NO20054363L/no not_active Application Discontinuation
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04346824A (ja) * | 1991-05-21 | 1992-12-02 | Mitsubishi Heavy Ind Ltd | 水素分離膜 |
| JPH0585702A (ja) * | 1991-09-30 | 1993-04-06 | Mitsubishi Heavy Ind Ltd | 水素分離膜の製造方法 |
| JPH05285357A (ja) * | 1992-04-09 | 1993-11-02 | Mitsubishi Heavy Ind Ltd | 水素分離膜 |
| JP2002219343A (ja) * | 2000-11-24 | 2002-08-06 | Sumitomo Electric Ind Ltd | 物質分離構造体とその製造方法 |
| WO2002064241A1 (en) * | 2001-02-16 | 2002-08-22 | Sumitomo Electric Industries, Ltd. | Hydrogen-permeable structure and method for manufacture thereof or repair thereof |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5229503B2 (ja) * | 2007-02-19 | 2013-07-03 | 三菱瓦斯化学株式会社 | 水素精製方法、水素分離膜、及び水素精製装置 |
| JP2010519026A (ja) * | 2007-02-20 | 2010-06-03 | シエル・インターナシヨナル・リサーチ・マートスハツペイ・ベー・ヴエー | ガス分離膜システムおよびその調製または再生方法および使用 |
| JP2015502253A (ja) * | 2011-12-20 | 2015-01-22 | シエル・インターナシヨナル・リサーチ・マートスハツペイ・ベー・ヴエー | 複合金属ガス分離膜を作製する方法 |
| JP2017510448A (ja) * | 2014-04-10 | 2017-04-13 | シエル・インターナシヨナル・リサーチ・マートスハツペイ・ベー・ヴエー | 担持されたガス分離膜を作製する方法 |
| JP2017513698A (ja) * | 2014-04-10 | 2017-06-01 | シエル・インターナシヨナル・リサーチ・マートスハツペイ・ベー・ヴエー | 担持されたガス分離膜を作製する方法 |
| JP2016059902A (ja) * | 2014-09-19 | 2016-04-25 | 東京瓦斯株式会社 | 水素分離装置および水素分離方法 |
| JP2020503171A (ja) * | 2016-10-25 | 2020-01-30 | ノヴァ ケミカルズ(アンテルナショナル)ソシエテ アノニム | クラッキングコイルにおける半透性膜の使用 |
| JP7023289B2 (ja) | 2016-10-25 | 2022-02-21 | ノヴァ ケミカルズ(アンテルナショナル)ソシエテ アノニム | クラッキングコイルにおける半透性膜の使用 |
Also Published As
| Publication number | Publication date |
|---|---|
| EP1608459A1 (en) | 2005-12-28 |
| AU2004224371A1 (en) | 2004-10-07 |
| US7390536B2 (en) | 2008-06-24 |
| WO2004085044A1 (en) | 2004-10-07 |
| CA2519774A1 (en) | 2004-10-07 |
| AU2004224371B2 (en) | 2008-07-31 |
| NO20054363L (no) | 2005-10-19 |
| US20040237780A1 (en) | 2004-12-02 |
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