NO304220B1 - FremgangsmÕte til fremstilling av tynne metallmembraner - Google Patents

FremgangsmÕte til fremstilling av tynne metallmembraner

Info

Publication number
NO304220B1
NO304220B1 NO961739A NO961739A NO304220B1 NO 304220 B1 NO304220 B1 NO 304220B1 NO 961739 A NO961739 A NO 961739A NO 961739 A NO961739 A NO 961739A NO 304220 B1 NO304220 B1 NO 304220B1
Authority
NO
Norway
Prior art keywords
pct
membrane
thin metal
coating
producing thin
Prior art date
Application number
NO961739A
Other languages
English (en)
Other versions
NO961739L (no
NO961739D0 (no
Inventor
Rune Bredesen
Hallgeir Klette
Original Assignee
Sintef
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sintef filed Critical Sintef
Priority to NO961739A priority Critical patent/NO304220B1/no
Publication of NO961739D0 publication Critical patent/NO961739D0/no
Priority to EP97920988A priority patent/EP0958029B1/en
Priority to PCT/NO1997/000109 priority patent/WO1997040914A1/en
Priority to DE69718205T priority patent/DE69718205T2/de
Priority to AU27147/97A priority patent/AU2714797A/en
Priority to US09/171,439 priority patent/US6086729A/en
Priority to AT97920988T priority patent/ATE230293T1/de
Publication of NO961739L publication Critical patent/NO961739L/no
Publication of NO304220B1 publication Critical patent/NO304220B1/no

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/228—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion characterised by specific membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/022—Metals
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/022—Metals
    • B01D71/0223—Group 8, 9 or 10 metals
    • B01D71/02231—Palladium
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/02—Preparation of oxygen
    • C01B13/0229—Purification or separation processes
    • C01B13/0248—Physical processing only
    • C01B13/0251—Physical processing only by making use of membranes
    • C01B13/0255—Physical processing only by making use of membranes characterised by the type of membrane
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
    • C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
    • C01B3/501—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion
    • C01B3/503—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion characterised by the membrane
    • C01B3/505—Membranes containing palladium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0005—Separation of the coating from the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/94—Non-porous diffusion electrodes, e.g. palladium membranes, ion exchange membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/04—Characteristic thickness
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
NO961739A 1996-04-30 1996-04-30 FremgangsmÕte til fremstilling av tynne metallmembraner NO304220B1 (no)

Priority Applications (7)

Application Number Priority Date Filing Date Title
NO961739A NO304220B1 (no) 1996-04-30 1996-04-30 FremgangsmÕte til fremstilling av tynne metallmembraner
EP97920988A EP0958029B1 (en) 1996-04-30 1997-04-25 Method of manufacturing thin metal membranes
PCT/NO1997/000109 WO1997040914A1 (en) 1996-04-30 1997-04-25 Method of manufacturing thin metal membranes
DE69718205T DE69718205T2 (de) 1996-04-30 1997-04-25 Methode zur herstellung von dunnen metallmembranen
AU27147/97A AU2714797A (en) 1996-04-30 1997-04-25 Method of manufacturing thin metal membranes
US09/171,439 US6086729A (en) 1996-04-30 1997-04-25 Method of manufacturing thin metal membranes
AT97920988T ATE230293T1 (de) 1996-04-30 1997-04-25 Methode zur herstellung von dunnen metallmembranen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NO961739A NO304220B1 (no) 1996-04-30 1996-04-30 FremgangsmÕte til fremstilling av tynne metallmembraner

Publications (3)

Publication Number Publication Date
NO961739D0 NO961739D0 (no) 1996-04-30
NO961739L NO961739L (no) 1997-10-31
NO304220B1 true NO304220B1 (no) 1998-11-16

Family

ID=19899323

Family Applications (1)

Application Number Title Priority Date Filing Date
NO961739A NO304220B1 (no) 1996-04-30 1996-04-30 FremgangsmÕte til fremstilling av tynne metallmembraner

Country Status (7)

Country Link
US (1) US6086729A (no)
EP (1) EP0958029B1 (no)
AT (1) ATE230293T1 (no)
AU (1) AU2714797A (no)
DE (1) DE69718205T2 (no)
NO (1) NO304220B1 (no)
WO (1) WO1997040914A1 (no)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008039080A1 (en) 2006-09-29 2008-04-03 Sinvent As Leak-proof membrane element and method of manufacturing such an element
WO2017146589A1 (en) 2016-02-25 2017-08-31 Hydrogen Mem-Tech As Hydrogen production from natural gas in combination with injection of co2 for enhanced oil recovery

Families Citing this family (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6152995A (en) * 1999-03-22 2000-11-28 Idatech Llc Hydrogen-permeable metal membrane and method for producing the same
KR100247557B1 (ko) * 1997-12-24 2000-03-15 김충섭 수소기체 분리용 복합막의 제조방법
US6767389B2 (en) * 1999-03-22 2004-07-27 Idatech, Llc Hydrogen-selective metal membranes, membrane modules, purification assemblies and methods of forming the same
US6235417B1 (en) * 1999-04-30 2001-05-22 Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of Natural Resources Two-phase hydrogen permeation membrane
US6171712B1 (en) * 2000-03-15 2001-01-09 Ford Global Technologies, Inc. Palladium and palladium/copper thin flat membranes
AU2000234490A1 (en) * 2000-04-06 2001-10-23 Walter Juda Associates Inc. Metal bearing membranes
JP3882567B2 (ja) 2000-11-24 2007-02-21 住友電気工業株式会社 物質分離構造体
US7169489B2 (en) 2002-03-15 2007-01-30 Fuelsell Technologies, Inc. Hydrogen storage, distribution, and recovery system
WO2003084628A2 (en) * 2002-04-03 2003-10-16 Colorado School Of Mines Process for preparing palladium alloy composite membranes for use in hydrogen separation, palladium alloy composite membranes and products incorporating or made from the membranes
US8101243B2 (en) * 2002-04-03 2012-01-24 Colorado School Of Mines Method of making sulfur-resistant composite metal membranes
US7988398B2 (en) * 2002-07-22 2011-08-02 Brooks Automation, Inc. Linear substrate transport apparatus
EP1619736A4 (en) * 2003-03-18 2008-06-04 Toyota Motor Co Ltd FUEL CELL AND METHOD FOR MANUFACTURING ELECTROLYTE MEMBRANE FOR FUEL CELL
CA2519774A1 (en) * 2003-03-21 2004-10-07 Worcester Polytechnic Institute Method for fabricating composite gas separation modules
JP4701695B2 (ja) * 2004-12-08 2011-06-15 トヨタ自動車株式会社 固体電解質およびその製造方法
JP5229503B2 (ja) * 2007-02-19 2013-07-03 三菱瓦斯化学株式会社 水素精製方法、水素分離膜、及び水素精製装置
WO2008124062A1 (en) * 2007-04-05 2008-10-16 Worcester Polytechnic Institute Composite structures with porous anodic oxide layers and methods of fabrication
US9044715B2 (en) * 2007-08-22 2015-06-02 Colorado School Of Mines Unsupported palladium alloy membranes and methods of making same
US8652239B2 (en) 2010-05-03 2014-02-18 Worcester Polytechnic Institute High permeance sulfur tolerant Pd/Cu alloy membranes
US8778058B2 (en) 2010-07-16 2014-07-15 Colorado School Of Mines Multilayer sulfur-resistant composite metal membranes and methods of making and repairing the same
JP2013087297A (ja) * 2011-10-13 2013-05-13 Sumitomo Electric Ind Ltd 金属膜の製造方法
JP5990225B2 (ja) * 2013-07-30 2016-09-07 富士フイルム株式会社 酸性ガス分離用積層体および該積層体を備えた酸性ガス分離用モジュール
JP5990556B2 (ja) * 2013-07-30 2016-09-14 富士フイルム株式会社 酸性ガス分離用積層体および該積層体を備えた酸性ガス分離用モジュール
US10029191B2 (en) 2016-09-15 2018-07-24 Hamilton Sundstrand Corporation Liquid-dissolved gas separators
GB201811436D0 (en) 2018-07-12 2018-08-29 Hydrogen Mem Tech As Gas separation device
DE102018127716A1 (de) * 2018-11-07 2020-05-07 Meyer Burger (Germany) Gmbh Membranherstellungsanlage

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2171599A (en) * 1937-09-07 1939-09-05 Metallizing Engineering Compan Process of making negatives in metal of metal objects of substantially smooth surface
US3270381A (en) * 1965-08-04 1966-09-06 Temescal Metallurgical Corp Production of ductile foil
DE3332348A1 (de) * 1983-09-08 1985-04-04 Kernforschungsanlage Jülich GmbH, 5170 Jülich Wasserstoff-permeationswand
US4857080A (en) * 1987-12-02 1989-08-15 Membrane Technology & Research, Inc. Ultrathin composite metal membranes
US5409782A (en) * 1988-05-02 1995-04-25 Orient Watch Company Composite film
US4898623A (en) * 1988-12-09 1990-02-06 Vapor Technologies Inc. Method of shaping hard difficult-to-roll alloys
US5498278A (en) * 1990-08-10 1996-03-12 Bend Research, Inc. Composite hydrogen separation element and module
US5217506A (en) * 1990-08-10 1993-06-08 Bend Research, Inc. Hydrogen-permeable composite metal membrane and uses thereof
US5139541A (en) * 1990-08-10 1992-08-18 Bend Research, Inc. Hydrogen-permeable composite metal membrane
CA2048849A1 (en) * 1990-08-10 1992-02-11 David J. Edlund Thermally stable composite hydrogen-permeable metal membranes
US5393325A (en) * 1990-08-10 1995-02-28 Bend Research, Inc. Composite hydrogen separation metal membrane
KR950000906B1 (ko) * 1991-08-02 1995-02-03 니찌덴 아넬바 가부시기가이샤 스퍼터링장치

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008039080A1 (en) 2006-09-29 2008-04-03 Sinvent As Leak-proof membrane element and method of manufacturing such an element
US8163064B2 (en) 2006-09-29 2012-04-24 Sinvent As Leak-proof membrane element and method of manufacturing such an element
WO2017146589A1 (en) 2016-02-25 2017-08-31 Hydrogen Mem-Tech As Hydrogen production from natural gas in combination with injection of co2 for enhanced oil recovery

Also Published As

Publication number Publication date
NO961739L (no) 1997-10-31
DE69718205T2 (de) 2003-11-20
WO1997040914A1 (en) 1997-11-06
AU2714797A (en) 1997-11-19
DE69718205D1 (de) 2003-02-06
ATE230293T1 (de) 2003-01-15
US6086729A (en) 2000-07-11
NO961739D0 (no) 1996-04-30
EP0958029A1 (en) 1999-11-24
EP0958029B1 (en) 2003-01-02

Similar Documents

Publication Publication Date Title
NO304220B1 (no) FremgangsmÕte til fremstilling av tynne metallmembraner
DE50308332D1 (de) Kompositmembran und Verfahren zu deren Herstellung
MY118697A (en) Noble metal support
AU1725199A (en) Hydrogen gas-extraction module
WO2003056966A1 (fr) Objet decoratif presentant un revetement blanc et son procede de fabrication
TW329564B (en) The bottom electrode of IC capacitor and its manufacturing method
ATE452751T1 (de) Ausbildung von dünnfilmen auf substraten unter verwendung eines porösen trägers
ATE52709T1 (de) Wasserstoff-permeationswand.
AU8105294A (en) Coated body, its method of production and its use
GR1002377B (el) Διαμορφωση μιας επενδυσης αργυρου πανω σε ενα υαλωδες υποστρωμα.
TW330306B (en) A semiconductor substrate and its fabrication method
TW200515637A (en) Porous films and method of making the same
CA2399145A1 (en) Hydrogen-permeable structure and method for preparation thereof
AU5589699A (en) Capacitors comprising roughened platinum layers, methods of forming roughened layers of platinum and methods of forming capacitors
NO965256D0 (no) Konversjonsbelegg og fremgangsmåte og lösning for fremstilling av dette
MY135997A (en) Metal article coated with multilayer surface finish for porosity reduction
WO2004016341A3 (en) Fluoropolymer membrane
CA2177244A1 (en) Metal layer pattern forming method
DE60224647D1 (de) Selektive, wasserstoffdurchlässige membranverbundstrukturen und brenngasprozessor unter verwendung derselben
ATE16294T1 (de) Elektrokatalytische elektrode.
CA2107696A1 (en) Electric Contact Element
TW338186B (en) Lead frame and manufacturing method therefor
MY116957A (en) Stainless steel wire and producing method thereof
CA2046820A1 (en) Catalyst for the removal of hydrogen from an atmosphere containing hydrogen, oxygen and steam
DE69914711T2 (de) Preparation of platinum coatings through plasma polymerization

Legal Events

Date Code Title Description
MK1K Patent expired