DE69718205D1 - Methode zur herstellung von dunnen metallmembranen - Google Patents

Methode zur herstellung von dunnen metallmembranen

Info

Publication number
DE69718205D1
DE69718205D1 DE69718205T DE69718205T DE69718205D1 DE 69718205 D1 DE69718205 D1 DE 69718205D1 DE 69718205 T DE69718205 T DE 69718205T DE 69718205 T DE69718205 T DE 69718205T DE 69718205 D1 DE69718205 D1 DE 69718205D1
Authority
DE
Germany
Prior art keywords
pct
membrane
thin metal
coating
producing thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
DE69718205T
Other languages
English (en)
Other versions
DE69718205T2 (de
Inventor
Rune Bredesen
Hallgeir Klette
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sintef AS
Original Assignee
Sintef AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sintef AS filed Critical Sintef AS
Application granted granted Critical
Publication of DE69718205D1 publication Critical patent/DE69718205D1/de
Publication of DE69718205T2 publication Critical patent/DE69718205T2/de
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
    • B01D67/0039—Inorganic membrane manufacture
    • B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
    • B01D53/228—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion characterised by specific membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
    • B01D71/02—Inorganic material
    • B01D71/022—Metals
    • B01D71/0223—Group 8, 9 or 10 metals
    • B01D71/02231—Palladium
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
    • C01B13/02—Preparation of oxygen
    • C01B13/0229—Purification or separation processes
    • C01B13/0248—Physical processing only
    • C01B13/0251—Physical processing only by making use of membranes
    • C01B13/0255—Physical processing only by making use of membranes characterised by the type of membrane
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
    • C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
    • C01B3/501—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion
    • C01B3/503—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion characterised by the membrane
    • C01B3/505—Membranes containing palladium
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0005—Separation of the coating from the substrate
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M4/00—Electrodes
    • H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
    • H01M4/94—Non-porous diffusion electrodes, e.g. palladium membranes, ion exchange membranes
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D2325/00—Details relating to properties of membranes
    • B01D2325/04—Characteristic thickness
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
    • H01M8/00—Fuel cells; Manufacture thereof
    • H01M8/10—Fuel cells with solid electrolytes
    • H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
    • Y02E60/30—Hydrogen technology
    • Y02E60/50—Fuel cells
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
    • Y02P70/50—Manufacturing or production processes characterised by the final manufactured product

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Inorganic Chemistry (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • Analytical Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Electrochemistry (AREA)
  • Combustion & Propulsion (AREA)
  • Separation Using Semi-Permeable Membranes (AREA)
  • Diaphragms For Electromechanical Transducers (AREA)
  • Physical Vapour Deposition (AREA)
  • Chemically Coating (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
DE69718205T 1996-04-30 1997-04-25 Methode zur herstellung von dunnen metallmembranen Expired - Lifetime DE69718205T2 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
NO961739A NO304220B1 (no) 1996-04-30 1996-04-30 FremgangsmÕte til fremstilling av tynne metallmembraner
PCT/NO1997/000109 WO1997040914A1 (en) 1996-04-30 1997-04-25 Method of manufacturing thin metal membranes

Publications (2)

Publication Number Publication Date
DE69718205D1 true DE69718205D1 (de) 2003-02-06
DE69718205T2 DE69718205T2 (de) 2003-11-20

Family

ID=19899323

Family Applications (1)

Application Number Title Priority Date Filing Date
DE69718205T Expired - Lifetime DE69718205T2 (de) 1996-04-30 1997-04-25 Methode zur herstellung von dunnen metallmembranen

Country Status (7)

Country Link
US (1) US6086729A (de)
EP (1) EP0958029B1 (de)
AT (1) ATE230293T1 (de)
AU (1) AU2714797A (de)
DE (1) DE69718205T2 (de)
NO (1) NO304220B1 (de)
WO (1) WO1997040914A1 (de)

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6152995A (en) * 1999-03-22 2000-11-28 Idatech Llc Hydrogen-permeable metal membrane and method for producing the same
KR100247557B1 (ko) * 1997-12-24 2000-03-15 김충섭 수소기체 분리용 복합막의 제조방법
US6767389B2 (en) * 1999-03-22 2004-07-27 Idatech, Llc Hydrogen-selective metal membranes, membrane modules, purification assemblies and methods of forming the same
US6235417B1 (en) * 1999-04-30 2001-05-22 Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of Natural Resources Two-phase hydrogen permeation membrane
US6171712B1 (en) * 2000-03-15 2001-01-09 Ford Global Technologies, Inc. Palladium and palladium/copper thin flat membranes
PT1322550E (pt) * 2000-04-06 2007-05-31 Walter Juda Associates Inc Membranas metálicas
JP3882567B2 (ja) * 2000-11-24 2007-02-21 住友電気工業株式会社 物質分離構造体
US7169489B2 (en) 2002-03-15 2007-01-30 Fuelsell Technologies, Inc. Hydrogen storage, distribution, and recovery system
US8101243B2 (en) * 2002-04-03 2012-01-24 Colorado School Of Mines Method of making sulfur-resistant composite metal membranes
US20030190486A1 (en) * 2002-04-03 2003-10-09 Fernando Roa Process for Preparing Palladium Alloy Composite Membranes for Use in Hydrogen Separation, Palladium Alloy Composite Membranes and Products Incorporating or Made from the Membranes
US7988398B2 (en) * 2002-07-22 2011-08-02 Brooks Automation, Inc. Linear substrate transport apparatus
WO2004084333A1 (ja) 2003-03-18 2004-09-30 Toyota Jidosha Kabushiki Kaisha 燃料電池および燃料電池用電解質膜の製造方法
EP1608459A1 (de) * 2003-03-21 2005-12-28 Worcester Polytechnic Institute Verfahren zur herstellung von verbundgastrennungsmodulen
JP4701695B2 (ja) * 2004-12-08 2011-06-15 トヨタ自動車株式会社 固体電解質およびその製造方法
US8163064B2 (en) 2006-09-29 2012-04-24 Sinvent As Leak-proof membrane element and method of manufacturing such an element
KR20090110897A (ko) * 2007-02-19 2009-10-23 미츠비시 가스 가가쿠 가부시키가이샤 수소 정제 방법, 수소 분리막 및 수소 정제 장치
WO2008124062A1 (en) * 2007-04-05 2008-10-16 Worcester Polytechnic Institute Composite structures with porous anodic oxide layers and methods of fabrication
US9044715B2 (en) * 2007-08-22 2015-06-02 Colorado School Of Mines Unsupported palladium alloy membranes and methods of making same
US8652239B2 (en) 2010-05-03 2014-02-18 Worcester Polytechnic Institute High permeance sulfur tolerant Pd/Cu alloy membranes
US8778058B2 (en) 2010-07-16 2014-07-15 Colorado School Of Mines Multilayer sulfur-resistant composite metal membranes and methods of making and repairing the same
JP2013087297A (ja) * 2011-10-13 2013-05-13 Sumitomo Electric Ind Ltd 金属膜の製造方法
JP5990556B2 (ja) * 2013-07-30 2016-09-14 富士フイルム株式会社 酸性ガス分離用積層体および該積層体を備えた酸性ガス分離用モジュール
JP5990225B2 (ja) * 2013-07-30 2016-09-07 富士フイルム株式会社 酸性ガス分離用積層体および該積層体を備えた酸性ガス分離用モジュール
WO2017146589A1 (en) 2016-02-25 2017-08-31 Hydrogen Mem-Tech As Hydrogen production from natural gas in combination with injection of co2 for enhanced oil recovery
US10029191B2 (en) 2016-09-15 2018-07-24 Hamilton Sundstrand Corporation Liquid-dissolved gas separators
GB201811436D0 (en) 2018-07-12 2018-08-29 Hydrogen Mem Tech As Gas separation device
DE102018127716A1 (de) * 2018-11-07 2020-05-07 Meyer Burger (Germany) Gmbh Membranherstellungsanlage
CN116497334B (zh) * 2023-06-21 2024-04-19 潍坊坤祥包装材料有限公司 一种用于薄膜镀银的自动化生产工艺

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2171599A (en) * 1937-09-07 1939-09-05 Metallizing Engineering Compan Process of making negatives in metal of metal objects of substantially smooth surface
US3270381A (en) * 1965-08-04 1966-09-06 Temescal Metallurgical Corp Production of ductile foil
DE3332348A1 (de) * 1983-09-08 1985-04-04 Kernforschungsanlage Jülich GmbH, 5170 Jülich Wasserstoff-permeationswand
US4857080A (en) * 1987-12-02 1989-08-15 Membrane Technology & Research, Inc. Ultrathin composite metal membranes
US5409782A (en) * 1988-05-02 1995-04-25 Orient Watch Company Composite film
US4898623A (en) * 1988-12-09 1990-02-06 Vapor Technologies Inc. Method of shaping hard difficult-to-roll alloys
US5393325A (en) * 1990-08-10 1995-02-28 Bend Research, Inc. Composite hydrogen separation metal membrane
US5139541A (en) * 1990-08-10 1992-08-18 Bend Research, Inc. Hydrogen-permeable composite metal membrane
US5498278A (en) * 1990-08-10 1996-03-12 Bend Research, Inc. Composite hydrogen separation element and module
CA2048849A1 (en) * 1990-08-10 1992-02-11 David J. Edlund Thermally stable composite hydrogen-permeable metal membranes
US5217506A (en) * 1990-08-10 1993-06-08 Bend Research, Inc. Hydrogen-permeable composite metal membrane and uses thereof
KR950000906B1 (ko) * 1991-08-02 1995-02-03 니찌덴 아넬바 가부시기가이샤 스퍼터링장치

Also Published As

Publication number Publication date
WO1997040914A1 (en) 1997-11-06
DE69718205T2 (de) 2003-11-20
EP0958029B1 (de) 2003-01-02
US6086729A (en) 2000-07-11
EP0958029A1 (de) 1999-11-24
NO961739L (no) 1997-10-31
AU2714797A (en) 1997-11-19
NO961739D0 (no) 1996-04-30
ATE230293T1 (de) 2003-01-15
NO304220B1 (no) 1998-11-16

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Legal Events

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