NO961739L - Fremgangsmåte til fremstilling av tynne metallmembraner - Google Patents
Fremgangsmåte til fremstilling av tynne metallmembranerInfo
- Publication number
- NO961739L NO961739L NO961739A NO961739A NO961739L NO 961739 L NO961739 L NO 961739L NO 961739 A NO961739 A NO 961739A NO 961739 A NO961739 A NO 961739A NO 961739 L NO961739 L NO 961739L
- Authority
- NO
- Norway
- Prior art keywords
- pct
- membrane
- thin metal
- coating
- making thin
- Prior art date
Links
- 239000012528 membrane Substances 0.000 title abstract 6
- 229910052751 metal Inorganic materials 0.000 title abstract 4
- 239000002184 metal Substances 0.000 title abstract 4
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 239000011248 coating agent Substances 0.000 abstract 3
- 238000000576 coating method Methods 0.000 abstract 3
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 abstract 2
- 229910001252 Pd alloy Inorganic materials 0.000 abstract 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract 1
- 239000002131 composite material Substances 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 239000007769 metal material Substances 0.000 abstract 1
- 229910052763 palladium Inorganic materials 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 239000004332 silver Substances 0.000 abstract 1
- 238000004544 sputter deposition Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 230000003746 surface roughness Effects 0.000 abstract 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D67/00—Processes specially adapted for manufacturing semi-permeable membranes for separation processes or apparatus
- B01D67/0039—Inorganic membrane manufacture
- B01D67/0072—Inorganic membrane manufacture by deposition from the gaseous phase, e.g. sputtering, CVD, PVD
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/22—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion
- B01D53/228—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by diffusion characterised by specific membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D71/00—Semi-permeable membranes for separation processes or apparatus characterised by the material; Manufacturing processes specially adapted therefor
- B01D71/02—Inorganic material
- B01D71/022—Metals
- B01D71/0223—Group 8, 9 or 10 metals
- B01D71/02231—Palladium
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B13/00—Oxygen; Ozone; Oxides or hydroxides in general
- C01B13/02—Preparation of oxygen
- C01B13/0229—Purification or separation processes
- C01B13/0248—Physical processing only
- C01B13/0251—Physical processing only by making use of membranes
- C01B13/0255—Physical processing only by making use of membranes characterised by the type of membrane
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
- C01B3/50—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification
- C01B3/501—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion
- C01B3/503—Separation of hydrogen or hydrogen containing gases from gaseous mixtures, e.g. purification by diffusion characterised by the membrane
- C01B3/505—Membranes containing palladium
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0005—Separation of the coating from the substrate
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M4/00—Electrodes
- H01M4/86—Inert electrodes with catalytic activity, e.g. for fuel cells
- H01M4/94—Non-porous diffusion electrodes, e.g. palladium membranes, ion exchange membranes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2325/00—Details relating to properties of membranes
- B01D2325/04—Characteristic thickness
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/10—Fuel cells with solid electrolytes
- H01M8/12—Fuel cells with solid electrolytes operating at high temperature, e.g. with stabilised ZrO2 electrolyte
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Materials Engineering (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Metallurgy (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Combustion & Propulsion (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Electrochemistry (AREA)
- Separation Using Semi-Permeable Membranes (AREA)
- Diaphragms For Electromechanical Transducers (AREA)
- Physical Vapour Deposition (AREA)
- Chemically Coating (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO961739A NO304220B1 (no) | 1996-04-30 | 1996-04-30 | FremgangsmÕte til fremstilling av tynne metallmembraner |
US09/171,439 US6086729A (en) | 1996-04-30 | 1997-04-25 | Method of manufacturing thin metal membranes |
AU27147/97A AU2714797A (en) | 1996-04-30 | 1997-04-25 | Method of manufacturing thin metal membranes |
EP97920988A EP0958029B1 (en) | 1996-04-30 | 1997-04-25 | Method of manufacturing thin metal membranes |
AT97920988T ATE230293T1 (de) | 1996-04-30 | 1997-04-25 | Methode zur herstellung von dunnen metallmembranen |
DE69718205T DE69718205T2 (de) | 1996-04-30 | 1997-04-25 | Methode zur herstellung von dunnen metallmembranen |
PCT/NO1997/000109 WO1997040914A1 (en) | 1996-04-30 | 1997-04-25 | Method of manufacturing thin metal membranes |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NO961739A NO304220B1 (no) | 1996-04-30 | 1996-04-30 | FremgangsmÕte til fremstilling av tynne metallmembraner |
Publications (3)
Publication Number | Publication Date |
---|---|
NO961739D0 NO961739D0 (no) | 1996-04-30 |
NO961739L true NO961739L (no) | 1997-10-31 |
NO304220B1 NO304220B1 (no) | 1998-11-16 |
Family
ID=19899323
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
NO961739A NO304220B1 (no) | 1996-04-30 | 1996-04-30 | FremgangsmÕte til fremstilling av tynne metallmembraner |
Country Status (7)
Country | Link |
---|---|
US (1) | US6086729A (no) |
EP (1) | EP0958029B1 (no) |
AT (1) | ATE230293T1 (no) |
AU (1) | AU2714797A (no) |
DE (1) | DE69718205T2 (no) |
NO (1) | NO304220B1 (no) |
WO (1) | WO1997040914A1 (no) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6152995A (en) * | 1999-03-22 | 2000-11-28 | Idatech Llc | Hydrogen-permeable metal membrane and method for producing the same |
KR100247557B1 (ko) * | 1997-12-24 | 2000-03-15 | 김충섭 | 수소기체 분리용 복합막의 제조방법 |
US6767389B2 (en) * | 1999-03-22 | 2004-07-27 | Idatech, Llc | Hydrogen-selective metal membranes, membrane modules, purification assemblies and methods of forming the same |
US6235417B1 (en) * | 1999-04-30 | 2001-05-22 | Her Majesty The Queen In Right Of Canada, As Represented By The Minister Of Natural Resources | Two-phase hydrogen permeation membrane |
US6171712B1 (en) * | 2000-03-15 | 2001-01-09 | Ford Global Technologies, Inc. | Palladium and palladium/copper thin flat membranes |
CA2403164A1 (en) * | 2000-04-06 | 2001-10-18 | R. Todd Lombard | Metal bearing membranes |
JP3882567B2 (ja) | 2000-11-24 | 2007-02-21 | 住友電気工業株式会社 | 物質分離構造体 |
US7169489B2 (en) | 2002-03-15 | 2007-01-30 | Fuelsell Technologies, Inc. | Hydrogen storage, distribution, and recovery system |
AU2003221816A1 (en) * | 2002-04-03 | 2003-10-20 | Colorado School Of Mines | Process for preparing palladium alloy composite membranes for use in hydrogen separation, palladium alloy composite membranes and products incorporating or made from the membranes |
US8101243B2 (en) * | 2002-04-03 | 2012-01-24 | Colorado School Of Mines | Method of making sulfur-resistant composite metal membranes |
US7988398B2 (en) * | 2002-07-22 | 2011-08-02 | Brooks Automation, Inc. | Linear substrate transport apparatus |
JPWO2004084333A1 (ja) | 2003-03-18 | 2006-06-29 | トヨタ自動車株式会社 | 燃料電池および燃料電池用電解質膜の製造方法 |
AU2004224371B2 (en) * | 2003-03-21 | 2008-07-31 | Worcester Polytechnic Institute | Method for fabricating composite gas separation modules |
JP4701695B2 (ja) * | 2004-12-08 | 2011-06-15 | トヨタ自動車株式会社 | 固体電解質およびその製造方法 |
US8163064B2 (en) | 2006-09-29 | 2012-04-24 | Sinvent As | Leak-proof membrane element and method of manufacturing such an element |
US20100313754A1 (en) * | 2007-02-19 | 2010-12-16 | Mitsubishi Gas Chemical Company, Inc. | Hydrogen purification method, hydrogen separation membrane, and hydrogen purification apparatus |
US8366805B2 (en) * | 2007-04-05 | 2013-02-05 | Worcester Polytechnic Institute | Composite structures with porous anodic oxide layers and methods of fabrication |
US9044715B2 (en) * | 2007-08-22 | 2015-06-02 | Colorado School Of Mines | Unsupported palladium alloy membranes and methods of making same |
US8652239B2 (en) | 2010-05-03 | 2014-02-18 | Worcester Polytechnic Institute | High permeance sulfur tolerant Pd/Cu alloy membranes |
US8778058B2 (en) | 2010-07-16 | 2014-07-15 | Colorado School Of Mines | Multilayer sulfur-resistant composite metal membranes and methods of making and repairing the same |
JP2013087297A (ja) * | 2011-10-13 | 2013-05-13 | Sumitomo Electric Ind Ltd | 金属膜の製造方法 |
JP5990225B2 (ja) * | 2013-07-30 | 2016-09-07 | 富士フイルム株式会社 | 酸性ガス分離用積層体および該積層体を備えた酸性ガス分離用モジュール |
JP5990556B2 (ja) * | 2013-07-30 | 2016-09-14 | 富士フイルム株式会社 | 酸性ガス分離用積層体および該積層体を備えた酸性ガス分離用モジュール |
WO2017146589A1 (en) | 2016-02-25 | 2017-08-31 | Hydrogen Mem-Tech As | Hydrogen production from natural gas in combination with injection of co2 for enhanced oil recovery |
US10029191B2 (en) | 2016-09-15 | 2018-07-24 | Hamilton Sundstrand Corporation | Liquid-dissolved gas separators |
GB201811436D0 (en) * | 2018-07-12 | 2018-08-29 | Hydrogen Mem Tech As | Gas separation device |
DE102018127716A1 (de) * | 2018-11-07 | 2020-05-07 | Meyer Burger (Germany) Gmbh | Membranherstellungsanlage |
CN116497334B (zh) * | 2023-06-21 | 2024-04-19 | 潍坊坤祥包装材料有限公司 | 一种用于薄膜镀银的自动化生产工艺 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2171599A (en) * | 1937-09-07 | 1939-09-05 | Metallizing Engineering Compan | Process of making negatives in metal of metal objects of substantially smooth surface |
US3270381A (en) * | 1965-08-04 | 1966-09-06 | Temescal Metallurgical Corp | Production of ductile foil |
DE3332348A1 (de) * | 1983-09-08 | 1985-04-04 | Kernforschungsanlage Jülich GmbH, 5170 Jülich | Wasserstoff-permeationswand |
US4857080A (en) * | 1987-12-02 | 1989-08-15 | Membrane Technology & Research, Inc. | Ultrathin composite metal membranes |
US5409782A (en) * | 1988-05-02 | 1995-04-25 | Orient Watch Company | Composite film |
US4898623A (en) * | 1988-12-09 | 1990-02-06 | Vapor Technologies Inc. | Method of shaping hard difficult-to-roll alloys |
US5217506A (en) * | 1990-08-10 | 1993-06-08 | Bend Research, Inc. | Hydrogen-permeable composite metal membrane and uses thereof |
US5139541A (en) * | 1990-08-10 | 1992-08-18 | Bend Research, Inc. | Hydrogen-permeable composite metal membrane |
CA2048849A1 (en) * | 1990-08-10 | 1992-02-11 | David J. Edlund | Thermally stable composite hydrogen-permeable metal membranes |
US5393325A (en) * | 1990-08-10 | 1995-02-28 | Bend Research, Inc. | Composite hydrogen separation metal membrane |
US5498278A (en) * | 1990-08-10 | 1996-03-12 | Bend Research, Inc. | Composite hydrogen separation element and module |
KR950000906B1 (ko) * | 1991-08-02 | 1995-02-03 | 니찌덴 아넬바 가부시기가이샤 | 스퍼터링장치 |
-
1996
- 1996-04-30 NO NO961739A patent/NO304220B1/no not_active IP Right Cessation
-
1997
- 1997-04-25 DE DE69718205T patent/DE69718205T2/de not_active Expired - Lifetime
- 1997-04-25 AU AU27147/97A patent/AU2714797A/en not_active Abandoned
- 1997-04-25 AT AT97920988T patent/ATE230293T1/de active
- 1997-04-25 EP EP97920988A patent/EP0958029B1/en not_active Expired - Lifetime
- 1997-04-25 WO PCT/NO1997/000109 patent/WO1997040914A1/en active IP Right Grant
- 1997-04-25 US US09/171,439 patent/US6086729A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE69718205T2 (de) | 2003-11-20 |
ATE230293T1 (de) | 2003-01-15 |
EP0958029B1 (en) | 2003-01-02 |
DE69718205D1 (de) | 2003-02-06 |
WO1997040914A1 (en) | 1997-11-06 |
AU2714797A (en) | 1997-11-19 |
NO304220B1 (no) | 1998-11-16 |
EP0958029A1 (en) | 1999-11-24 |
NO961739D0 (no) | 1996-04-30 |
US6086729A (en) | 2000-07-11 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK1K | Patent expired |