JP2006519701A5 - - Google Patents

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Publication number
JP2006519701A5
JP2006519701A5 JP2006509172A JP2006509172A JP2006519701A5 JP 2006519701 A5 JP2006519701 A5 JP 2006519701A5 JP 2006509172 A JP2006509172 A JP 2006509172A JP 2006509172 A JP2006509172 A JP 2006509172A JP 2006519701 A5 JP2006519701 A5 JP 2006519701A5
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JP
Japan
Prior art keywords
workpiece
torch
flame
reactive species
reactive
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Pending
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JP2006509172A
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English (en)
Japanese (ja)
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JP2006519701A (ja
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Priority claimed from US10/384,506 external-priority patent/US7371992B2/en
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Publication of JP2006519701A publication Critical patent/JP2006519701A/ja
Publication of JP2006519701A5 publication Critical patent/JP2006519701A5/ja
Pending legal-status Critical Current

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JP2006509172A 2003-03-07 2004-03-05 表面の非接触洗浄装置及び方法 Pending JP2006519701A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US10/384,506 US7371992B2 (en) 2003-03-07 2003-03-07 Method for non-contact cleaning of a surface
PCT/US2004/006773 WO2004081258A2 (en) 2003-03-07 2004-03-05 Apparatus and method for non-contact cleaning of a surface

Publications (2)

Publication Number Publication Date
JP2006519701A JP2006519701A (ja) 2006-08-31
JP2006519701A5 true JP2006519701A5 (enExample) 2007-03-29

Family

ID=32927277

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2006509172A Pending JP2006519701A (ja) 2003-03-07 2004-03-05 表面の非接触洗浄装置及び方法

Country Status (5)

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US (3) US7371992B2 (enExample)
EP (1) EP1611268A2 (enExample)
JP (1) JP2006519701A (enExample)
KR (1) KR20050116813A (enExample)
WO (1) WO2004081258A2 (enExample)

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