JP2006519496A - 水素化シリコンオキシカーバイド膜の生成方法。 - Google Patents
水素化シリコンオキシカーバイド膜の生成方法。 Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 10
- 238000000034 method Methods 0.000 claims abstract description 42
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 33
- 239000010703 silicon Substances 0.000 claims abstract description 32
- -1 cyclic silane compound Chemical class 0.000 claims abstract description 26
- 239000004065 semiconductor Substances 0.000 claims abstract description 16
- 150000003376 silicon Chemical class 0.000 claims abstract description 6
- 239000007789 gas Substances 0.000 claims description 48
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 32
- 229910052760 oxygen Inorganic materials 0.000 claims description 32
- 239000001301 oxygen Substances 0.000 claims description 32
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 29
- 239000000758 substrate Substances 0.000 claims description 20
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 claims description 16
- 239000000203 mixture Substances 0.000 claims description 16
- 229910052739 hydrogen Inorganic materials 0.000 claims description 12
- 229910052799 carbon Inorganic materials 0.000 claims description 11
- 239000001257 hydrogen Substances 0.000 claims description 11
- PMPVIKIVABFJJI-UHFFFAOYSA-N Cyclobutane Chemical compound C1CCC1 PMPVIKIVABFJJI-UHFFFAOYSA-N 0.000 claims description 10
- 238000000151 deposition Methods 0.000 claims description 10
- 230000008021 deposition Effects 0.000 claims description 10
- 238000006243 chemical reaction Methods 0.000 claims description 9
- 150000002430 hydrocarbons Chemical group 0.000 claims description 9
- 239000001272 nitrous oxide Substances 0.000 claims description 8
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 7
- 238000005229 chemical vapour deposition Methods 0.000 claims description 6
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical group FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 5
- 239000011737 fluorine Chemical group 0.000 claims description 5
- 229910052731 fluorine Inorganic materials 0.000 claims description 5
- YQQFFTNDQFUNHB-UHFFFAOYSA-N 1,1-dimethylsiletane Chemical compound C[Si]1(C)CCC1 YQQFFTNDQFUNHB-UHFFFAOYSA-N 0.000 claims description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 4
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 4
- RGSFGYAAUTVSQA-UHFFFAOYSA-N Cyclopentane Chemical compound C1CCCC1 RGSFGYAAUTVSQA-UHFFFAOYSA-N 0.000 claims description 4
- MWUXSHHQAYIFBG-UHFFFAOYSA-N Nitric oxide Chemical compound O=[N] MWUXSHHQAYIFBG-UHFFFAOYSA-N 0.000 claims description 4
- RAHZWNYVWXNFOC-UHFFFAOYSA-N Sulphur dioxide Chemical compound O=S=O RAHZWNYVWXNFOC-UHFFFAOYSA-N 0.000 claims description 4
- KDQBKCRYCZJUAE-UHFFFAOYSA-N 1,1-dimethylsilolane Chemical group C[Si]1(C)CCCC1 KDQBKCRYCZJUAE-UHFFFAOYSA-N 0.000 claims description 3
- 239000012159 carrier gas Substances 0.000 claims description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 claims description 2
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 claims description 2
- 125000002619 bicyclic group Chemical group 0.000 claims description 2
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 2
- 239000001569 carbon dioxide Substances 0.000 claims description 2
- 229910002091 carbon monoxide Inorganic materials 0.000 claims description 2
- 230000005284 excitation Effects 0.000 claims description 2
- DMEGYFMYUHOHGS-UHFFFAOYSA-N heptamethylene Natural products C1CCCCCC1 DMEGYFMYUHOHGS-UHFFFAOYSA-N 0.000 claims description 2
- 239000004973 liquid crystal related substance Substances 0.000 claims description 2
- MAMCJGWPGQJKLS-UHFFFAOYSA-N nona-2,7-diene Chemical compound CC=CCCCC=CC MAMCJGWPGQJKLS-UHFFFAOYSA-N 0.000 claims description 2
- 150000002978 peroxides Chemical class 0.000 claims description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 7
- 150000001721 carbon Chemical group 0.000 claims 6
- 230000001939 inductive effect Effects 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 abstract description 7
- 238000006116 polymerization reaction Methods 0.000 abstract description 6
- 239000010408 film Substances 0.000 description 41
- 229910010271 silicon carbide Inorganic materials 0.000 description 15
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 14
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 12
- 239000000463 material Substances 0.000 description 10
- 239000012212 insulator Substances 0.000 description 7
- 150000001875 compounds Chemical class 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- NHBMXLXMVPLQAX-UHFFFAOYSA-N 1,3-disiletane Chemical compound C1[SiH2]C[SiH2]1 NHBMXLXMVPLQAX-UHFFFAOYSA-N 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 125000004432 carbon atom Chemical group C* 0.000 description 3
- 239000001307 helium Substances 0.000 description 3
- 229910052734 helium Inorganic materials 0.000 description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 3
- 239000011229 interlayer Substances 0.000 description 3
- 239000012299 nitrogen atmosphere Substances 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- PQDJYEQOELDLCP-UHFFFAOYSA-N trimethylsilane Chemical compound C[SiH](C)C PQDJYEQOELDLCP-UHFFFAOYSA-N 0.000 description 3
- 229910001339 C alloy Inorganic materials 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910003481 amorphous carbon Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 150000001930 cyclobutanes Chemical class 0.000 description 2
- 229910052736 halogen Inorganic materials 0.000 description 2
- 150000002367 halogens Chemical class 0.000 description 2
- 150000002431 hydrogen Chemical group 0.000 description 2
- 125000004430 oxygen atom Chemical group O* 0.000 description 2
- 150000004756 silanes Chemical class 0.000 description 2
- WQXLRZBBJBYYNM-UHFFFAOYSA-N 1,1,3,3-tetrafluoro-1,3-disiletane Chemical compound F[Si]1(F)C[Si](F)(F)C1 WQXLRZBBJBYYNM-UHFFFAOYSA-N 0.000 description 1
- PASYEMKYRSIVTP-UHFFFAOYSA-N 1,1-dichlorosiletane Chemical compound Cl[Si]1(Cl)CCC1 PASYEMKYRSIVTP-UHFFFAOYSA-N 0.000 description 1
- LMHRMNRFXFASEH-UHFFFAOYSA-N 1,1-difluorosiletane Chemical compound F[Si]1(F)CCC1 LMHRMNRFXFASEH-UHFFFAOYSA-N 0.000 description 1
- AKDHUUDXAAUAPB-UHFFFAOYSA-N 1,3-dimethyl-1,3-disiletane Chemical compound C[SiH]1C[SiH](C)C1 AKDHUUDXAAUAPB-UHFFFAOYSA-N 0.000 description 1
- CNTUJLRCMFKKKD-UHFFFAOYSA-N 1-butyl-1,3-disiletane Chemical compound CCCC[SiH]1C[SiH2]C1 CNTUJLRCMFKKKD-UHFFFAOYSA-N 0.000 description 1
- OMRZKCGPKDKGEA-UHFFFAOYSA-N 1-butylsiletane Chemical compound CCCC[SiH]1CCC1 OMRZKCGPKDKGEA-UHFFFAOYSA-N 0.000 description 1
- LCCRFOXOVWMMGI-UHFFFAOYSA-N 1-ethyl-1-methylsiletane Chemical compound CC[Si]1(C)CCC1 LCCRFOXOVWMMGI-UHFFFAOYSA-N 0.000 description 1
- CQFRXHDORNUERA-UHFFFAOYSA-N 1-methylsiletane Chemical compound C[SiH]1CCC1 CQFRXHDORNUERA-UHFFFAOYSA-N 0.000 description 1
- DVXOTJBWEMNATF-UHFFFAOYSA-N 2,2-diethyl-1,3-disiletane Chemical compound CCC1(CC)[SiH2]C[SiH2]1 DVXOTJBWEMNATF-UHFFFAOYSA-N 0.000 description 1
- RAQPBCCALCSGQH-UHFFFAOYSA-N 2,4-dimethylsiletane Chemical compound CC1CC(C)[SiH2]1 RAQPBCCALCSGQH-UHFFFAOYSA-N 0.000 description 1
- FCBDKZUWKSSTHD-UHFFFAOYSA-N 3,3-diethylsiletane Chemical compound CCC1(CC)C[SiH2]C1 FCBDKZUWKSSTHD-UHFFFAOYSA-N 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910018557 Si O Inorganic materials 0.000 description 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- KPUWHANPEXNPJT-UHFFFAOYSA-N disiloxane Chemical class [SiH3]O[SiH3] KPUWHANPEXNPJT-UHFFFAOYSA-N 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 238000001678 elastic recoil detection analysis Methods 0.000 description 1
- 230000005672 electromagnetic field Effects 0.000 description 1
- 238000004969 ion scattering spectroscopy Methods 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000012280 lithium aluminium hydride Substances 0.000 description 1
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000005693 optoelectronics Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Inorganic materials [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02263—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase
- H01L21/02271—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition
- H01L21/0228—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process deposition from the gas or vapour phase deposition by decomposition or reaction of gaseous or vapour phase compounds, i.e. chemical vapour deposition deposition by cyclic CVD, e.g. ALD, ALE, pulsed CVD
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02123—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon
- H01L21/02126—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material containing Si, O, and at least one of H, N, C, F, or other non-metal elements, e.g. SiOC, SiOC:H or SiONC
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
- H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
- H01L21/02211—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound being a silane, e.g. disilane, methylsilane or chlorosilane
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/324—Thermal treatment for modifying the properties of semiconductor bodies, e.g. annealing, sintering
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Formation Of Insulating Films (AREA)
- Chemical Vapour Deposition (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
ジメチルシラシクロブタン(DMSCB)と亜酸化窒素(N2O)とを含む反応性ガス混合物(ガス流量については、表1参照)が、沈着温度350℃において、容量的にカップリングされた平行板PECVDシステム中へと導入された。該PECVDシステムがその下に操作された電力および圧力条件が、表1に与えられる。1−1番、1−14番、および1−15番においては、ヘリウムが担体ガスとして使用された。基板としてのSi(100)ウェーハ上において、膜が形成された。その屈折率(RI)が、沈着したままの膜に関して測定された。その誘電率(k)が、これらの膜がN2雰囲気下および400℃において1時間アニールされ、次いでメタル沈着された後に、測定された。これらのプロセス条件および結果が、表1中にある。
亜酸化窒素(N2O)が該反応性ガス混合物において使用されなかったこと以外、a−SiC:H膜が、例1に記載のDMSCBを使用して生成された。
例1の1−15番および例2の2−4番において生成された膜が、Rutherford Back Scattering−Hydrogen Forward Scattering(Ion Scattering Spectrometry)を使用して、組成について分析された。この分析結果が、表3に与えられる。これらの結果により判る通りである。
ジメチルシラシクロペンタン(DMSCP)、亜酸化窒素(N2O)、およびアルゴン(Ar)を含む反応性ガス混合物(ガス流量については、表4参照)が、沈着温度370℃において、容量的にカップリングされた平行板PECVDシステム中へと導入された。該PECVDシステムがその下に操作された電力および圧力条件が、表4に与えられる。
ジメチルシラシクロペンタン(DMSCP)およびヘリウム(He)を含む反応性ガス混合物(ガス流量については、表5参照)が、沈着温度370℃において、容量的にカップリングされた平行板PECVDシステム中へと導入された。該PECVDシステムがその下に操作された電力および圧力条件が、表5に与えられる。
Claims (25)
- (i)少なくとも1つの歪んだシリコン結合を含有する環状シラン化合物と、(ii)酸素供給ガスとを含む反応性ガス混合物を、基板を含有する沈着チャンバー中へと導入し、該環状シラン化合物と該酸素供給ガスとの間の反応を25℃〜500℃の温度において誘導することを含み、ここで、該反応の間には制御された量の酸素が存在し、該基板上において、水素、シリコン、炭素、および酸素を含み、2.0〜3.2の範囲の誘電率を持つ膜を与える、水素化シリコンオキシカーバイド膜を生成させるための化学蒸着方法。
- 前記環状シラン化合物が、シリコン含有シクロブタン、シリコン含有シクロペンタン、シリコン含有シクロヘキサン、シラ−5−スピロ[4,4]ノナ−2,7−ジエン、および2環性化合物からなる群から選択される、請求項1に記載の方法。
- 前記環状シラン化合物が、シリコン含有シクロブタンである、請求項2に記載の方法。
- 前記酸素供給ガスが、酸素、空気、過酸化物、二酸化硫黄、一酸化炭素、二酸化炭素、亜酸化窒素、および酸化窒素からなる群から選択される、請求項1に記載の方法。
- 前記酸素供給ガスが、亜酸化窒素である、請求項1に記載の方法。
- 前記環状シラン化合物がジメチルシラシクロブタンであり、前記酸素供給ガスが亜酸化窒素である、請求項1に記載の方法。
- 前記酸素供給ガスの量が容積にて、前記環状シラン化合物1部につき該酸素供給ガス0.1〜10部の範囲である、請求項1に記載の方法。
- 前記酸素供給ガスの量が容積にて、前記環状シラン化合物1部につき該酸素供給ガス0.2〜7部である、請求項1に記載の方法。
- 前記反応が、前記反応性ガス混合物をプラズマに晒すことにより誘導される、請求項1に記載の方法。
- 前記反応が、20〜1,000Wの電力、1〜10,000mTorrの圧力、および25〜500℃の温度において、前記反応性ガス混合物をプラズマに晒すことにより誘導される、請求項12に記載の方法。
- 前記膜が、2.2〜2.8の範囲の誘電率を持つ、請求項1に記載の方法。
- 前記膜が、2.5〜2.8の範囲の誘電率を持つ、請求項1に記載の方法。
- 前記反応性ガス混合物が更に担体ガスを含む、請求項1に記載の方法。
- 前記水素化シリコンオキシカーバイド膜が、0.01〜10μmの厚さを持つ、請求項1に記載の方法。
- 前記水素化シリコンオキシカーバイド膜が、0.5〜3.0μmの厚さを持つ、請求項1に記載の方法。
- 前記基板が半導体基板である、請求項1に記載の方法。
- 前記基板が、液晶素子、発光ダイオード表示素子、および有機発光ダイオード表示素子から選択される、請求項1に記載の方法。
- 前記酸素供給ガスの量が、前記環状シラン化合物と該酸素供給ガスとの間の反応の間に、増加もしくは削減され、SiO2、H:SiOC、およびSiC:Hからなる群から選択される連続層を含有する膜を生成させる、請求項1に記載の方法。
- 前記反応が、前記反応性ガス混合物を、RF周波数による励起と組み合わされた、被圧されているが低圧のマイクロ波周波数のプラズマに晒すことにより誘導される、請求項1に記載の方法。
- 請求項1に記載の方法により生成された膜をその上に持つ、半導体素子。
- 前記シリコン含有シクロブタンが、ジメチルシラシクロブタンである、請求項4に記載の方法。
- 前記シリコン含有シクロブタンが、ジメチルシラシクロペンタンである、請求項4に記載の方法。
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US10/375,516 US20040166692A1 (en) | 2003-02-26 | 2003-02-26 | Method for producing hydrogenated silicon oxycarbide films |
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Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009093581A1 (ja) * | 2008-01-23 | 2009-07-30 | National Institute For Materials Science | 絶縁膜材料、この絶縁膜材料を用いた成膜方法および絶縁膜 |
WO2010023964A1 (ja) * | 2008-09-01 | 2010-03-04 | 独立行政法人物質・材料研究機構 | 絶縁膜材料、この絶縁膜材料を用いた成膜方法および絶縁膜 |
WO2010090038A1 (ja) * | 2009-02-06 | 2010-08-12 | 独立行政法人物質・材料研究機構 | 絶縁膜材料、この絶縁膜材料を用いた成膜方法および絶縁膜 |
JP2010219533A (ja) * | 2009-03-13 | 2010-09-30 | Air Products & Chemicals Inc | 誘電体膜形成方法 |
WO2019058477A1 (ja) * | 2017-09-21 | 2019-03-28 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理装置およびプログラム |
JP2022544232A (ja) * | 2019-08-12 | 2022-10-17 | アプライド マテリアルズ インコーポレイテッド | 低誘電率誘電体膜 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6800571B2 (en) * | 1998-09-29 | 2004-10-05 | Applied Materials Inc. | CVD plasma assisted low dielectric constant films |
US6821571B2 (en) * | 1999-06-18 | 2004-11-23 | Applied Materials Inc. | Plasma treatment to enhance adhesion and to minimize oxidation of carbon-containing layers |
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US20240087880A1 (en) * | 2022-08-26 | 2024-03-14 | Applied Materials, Inc. | Systems and methods for depositing low-k dielectric films |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07165497A (ja) * | 1993-08-16 | 1995-06-27 | Dow Corning Corp | 低温における結晶質炭化ケイ素コーティングの作成方法 |
JPH08298260A (ja) * | 1995-02-28 | 1996-11-12 | Hitachi Ltd | 誘電体及びその製造方法並びに半導体装置 |
JP2000049157A (ja) * | 1998-05-29 | 2000-02-18 | Dow Corning Corp | 低誘電率を有する水素化オキシ炭化珪素フィルムの製造方法 |
WO2002077320A1 (en) * | 2001-03-23 | 2002-10-03 | Dow Corning Corporation | Method for producing hydrogenated silicon oxycarbide films |
JP2003007699A (ja) * | 2001-05-23 | 2003-01-10 | Air Products & Chemicals Inc | 低誘電率材料およびcvdによる処理方法 |
Family Cites Families (17)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0827539B2 (ja) * | 1987-09-28 | 1996-03-21 | 富士写真フイルム株式会社 | 光重合性組成物 |
US5011706A (en) * | 1989-04-12 | 1991-04-30 | Dow Corning Corporation | Method of forming coatings containing amorphous silicon carbide |
CA2027031A1 (en) * | 1989-10-18 | 1991-04-19 | Loren A. Haluska | Hermetic substrate coatings in an inert gas atmosphere |
US5318857A (en) * | 1989-11-06 | 1994-06-07 | Dow Corning Corporation | Low temperature ozonolysis of silicon and ceramic oxide precursor polymers to ceramic coatings |
US4973526A (en) * | 1990-02-15 | 1990-11-27 | Dow Corning Corporation | Method of forming ceramic coatings and resulting articles |
US5384289A (en) * | 1993-06-17 | 1995-01-24 | Micron Semiconductor, Inc. | Reductive elimination chemical vapor deposition processes utilizing organometallic precursor compounds in semiconductor wafer processing |
TW328971B (en) * | 1995-10-30 | 1998-04-01 | Dow Corning | Method for depositing Si-O containing coatings |
US5753374A (en) * | 1995-11-27 | 1998-05-19 | Dow Corning Corporation | Protective electronic coating |
US5780163A (en) * | 1996-06-05 | 1998-07-14 | Dow Corning Corporation | Multilayer coating for microelectronic devices |
US5926740A (en) * | 1997-10-27 | 1999-07-20 | Micron Technology, Inc. | Graded anti-reflective coating for IC lithography |
US6287990B1 (en) * | 1998-02-11 | 2001-09-11 | Applied Materials, Inc. | CVD plasma assisted low dielectric constant films |
US6667553B2 (en) * | 1998-05-29 | 2003-12-23 | Dow Corning Corporation | H:SiOC coated substrates |
US6469540B2 (en) * | 2000-06-15 | 2002-10-22 | Nec Corporation | Reconfigurable device having programmable interconnect network suitable for implementing data paths |
CN1222195C (zh) * | 2000-07-24 | 2005-10-05 | Tdk株式会社 | 发光元件 |
US6440876B1 (en) * | 2000-10-10 | 2002-08-27 | The Boc Group, Inc. | Low-K dielectric constant CVD precursors formed of cyclic siloxanes having in-ring SI—O—C, and uses thereof |
US6649540B2 (en) * | 2000-11-09 | 2003-11-18 | The Boc Group, Inc. | Organosilane CVD precursors and their use for making organosilane polymer low-k dielectric film |
US6984594B2 (en) * | 2002-05-17 | 2006-01-10 | Samsung Electronics, Co., Ltd. | Deposition method of insulating layers having low dielectric constant of semiconductor devices |
-
2003
- 2003-02-26 US US10/375,516 patent/US20040166692A1/en not_active Abandoned
-
2004
- 2004-01-26 CN CNB2004800053450A patent/CN100416776C/zh not_active Expired - Lifetime
- 2004-01-26 KR KR1020057015852A patent/KR101039242B1/ko active IP Right Grant
- 2004-01-26 US US10/543,672 patent/US7189664B2/en not_active Expired - Lifetime
- 2004-01-26 JP JP2006503062A patent/JP4881153B2/ja not_active Expired - Lifetime
- 2004-01-26 WO PCT/US2004/002210 patent/WO2004077543A1/en active Search and Examination
- 2004-01-27 TW TW093101750A patent/TWI368670B/zh not_active IP Right Cessation
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07165497A (ja) * | 1993-08-16 | 1995-06-27 | Dow Corning Corp | 低温における結晶質炭化ケイ素コーティングの作成方法 |
JPH08298260A (ja) * | 1995-02-28 | 1996-11-12 | Hitachi Ltd | 誘電体及びその製造方法並びに半導体装置 |
JP2000049157A (ja) * | 1998-05-29 | 2000-02-18 | Dow Corning Corp | 低誘電率を有する水素化オキシ炭化珪素フィルムの製造方法 |
WO2002077320A1 (en) * | 2001-03-23 | 2002-10-03 | Dow Corning Corporation | Method for producing hydrogenated silicon oxycarbide films |
JP2004526318A (ja) * | 2001-03-23 | 2004-08-26 | ダウ・コーニング・コーポレイション | 水素化シリコンオキシカーバイド膜を生産するための方法 |
JP2003007699A (ja) * | 2001-05-23 | 2003-01-10 | Air Products & Chemicals Inc | 低誘電率材料およびcvdによる処理方法 |
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2009093581A1 (ja) * | 2008-01-23 | 2009-07-30 | National Institute For Materials Science | 絶縁膜材料、この絶縁膜材料を用いた成膜方法および絶縁膜 |
JP2009176898A (ja) * | 2008-01-23 | 2009-08-06 | National Institute For Materials Science | 絶縁膜材料、この絶縁膜材料を用いた成膜方法および絶縁膜 |
US8497391B2 (en) | 2008-01-23 | 2013-07-30 | National Institute For Materials Science | Insulating film material, method of film formation using insulating film material, and insulating film |
WO2010023964A1 (ja) * | 2008-09-01 | 2010-03-04 | 独立行政法人物質・材料研究機構 | 絶縁膜材料、この絶縁膜材料を用いた成膜方法および絶縁膜 |
JP2010062218A (ja) * | 2008-09-01 | 2010-03-18 | National Institute For Materials Science | 絶縁膜材料、この絶縁膜材料を用いた成膜方法および絶縁膜 |
WO2010090038A1 (ja) * | 2009-02-06 | 2010-08-12 | 独立行政法人物質・材料研究機構 | 絶縁膜材料、この絶縁膜材料を用いた成膜方法および絶縁膜 |
JP5614589B2 (ja) * | 2009-02-06 | 2014-10-29 | 独立行政法人物質・材料研究機構 | 絶縁膜材料を用いた成膜方法および絶縁膜 |
JP2010219533A (ja) * | 2009-03-13 | 2010-09-30 | Air Products & Chemicals Inc | 誘電体膜形成方法 |
JP2013225695A (ja) * | 2009-03-13 | 2013-10-31 | Air Products & Chemicals Inc | 誘電体膜形成方法 |
WO2019058477A1 (ja) * | 2017-09-21 | 2019-03-28 | 株式会社Kokusai Electric | 半導体装置の製造方法、基板処理装置およびプログラム |
JP2022544232A (ja) * | 2019-08-12 | 2022-10-17 | アプライド マテリアルズ インコーポレイテッド | 低誘電率誘電体膜 |
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US20040166692A1 (en) | 2004-08-26 |
WO2004077543A1 (en) | 2004-09-10 |
US20060148252A1 (en) | 2006-07-06 |
CN1754252A (zh) | 2006-03-29 |
KR20050104401A (ko) | 2005-11-02 |
CN100416776C (zh) | 2008-09-03 |
US7189664B2 (en) | 2007-03-13 |
KR101039242B1 (ko) | 2011-06-09 |
TWI368670B (en) | 2012-07-21 |
JP4881153B2 (ja) | 2012-02-22 |
TW200420750A (en) | 2004-10-16 |
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