JP2006512776A - 直列接続されたトランジスタ列を組込んだプログラマブルメモリアレイ構造およびこの構造を製造して作動させるための方法 - Google Patents
直列接続されたトランジスタ列を組込んだプログラマブルメモリアレイ構造およびこの構造を製造して作動させるための方法 Download PDFInfo
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- JP2006512776A JP2006512776A JP2004565772A JP2004565772A JP2006512776A JP 2006512776 A JP2006512776 A JP 2006512776A JP 2004565772 A JP2004565772 A JP 2004565772A JP 2004565772 A JP2004565772 A JP 2004565772A JP 2006512776 A JP2006512776 A JP 2006512776A
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- 230000015654 memory Effects 0.000 title claims abstract description 379
- 238000000034 method Methods 0.000 title claims description 109
- 238000004519 manufacturing process Methods 0.000 title claims description 24
- 238000003860 storage Methods 0.000 claims abstract description 36
- 230000008878 coupling Effects 0.000 claims abstract description 28
- 238000010168 coupling process Methods 0.000 claims abstract description 28
- 238000005859 coupling reaction Methods 0.000 claims abstract description 28
- 239000000758 substrate Substances 0.000 claims description 34
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 27
- 229920005591 polysilicon Polymers 0.000 claims description 25
- 229910052710 silicon Inorganic materials 0.000 claims description 24
- 239000010703 silicon Substances 0.000 claims description 24
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 23
- 230000000903 blocking effect Effects 0.000 claims description 20
- 229910021332 silicide Inorganic materials 0.000 claims description 19
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 19
- 238000000151 deposition Methods 0.000 claims description 12
- 125000006850 spacer group Chemical group 0.000 claims description 11
- 229910052751 metal Inorganic materials 0.000 claims description 10
- 239000002184 metal Substances 0.000 claims description 10
- 238000005530 etching Methods 0.000 claims description 9
- 230000000873 masking effect Effects 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 238000007667 floating Methods 0.000 claims description 6
- 230000008021 deposition Effects 0.000 claims description 5
- 238000011065 in-situ storage Methods 0.000 claims description 5
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
- 229910021417 amorphous silicon Inorganic materials 0.000 claims description 2
- 239000013078 crystal Substances 0.000 claims description 2
- 230000036961 partial effect Effects 0.000 claims description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 4
- 229910052814 silicon oxide Inorganic materials 0.000 claims 4
- 230000004044 response Effects 0.000 claims 1
- 239000003989 dielectric material Substances 0.000 abstract description 5
- 239000010409 thin film Substances 0.000 abstract description 4
- 239000010410 layer Substances 0.000 description 136
- 238000010586 diagram Methods 0.000 description 26
- 239000004065 semiconductor Substances 0.000 description 19
- 230000008569 process Effects 0.000 description 16
- 238000003491 array Methods 0.000 description 13
- 230000015572 biosynthetic process Effects 0.000 description 9
- 239000000463 material Substances 0.000 description 9
- 229920002120 photoresistant polymer Polymers 0.000 description 9
- 239000007943 implant Substances 0.000 description 7
- 230000007246 mechanism Effects 0.000 description 7
- 150000004767 nitrides Chemical class 0.000 description 7
- 230000008901 benefit Effects 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- NFGXHKASABOEEW-UHFFFAOYSA-N 1-methylethyl 11-methoxy-3,7,11-trimethyl-2,4-dodecadienoate Chemical compound COC(C)(C)CCCC(C)CC=CC(C)=CC(=O)OC(C)C NFGXHKASABOEEW-UHFFFAOYSA-N 0.000 description 4
- 238000004891 communication Methods 0.000 description 4
- 238000011161 development Methods 0.000 description 4
- 239000002019 doping agent Substances 0.000 description 4
- 238000002347 injection Methods 0.000 description 4
- 239000007924 injection Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000002784 hot electron Substances 0.000 description 3
- 230000000670 limiting effect Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
- 229910052721 tungsten Inorganic materials 0.000 description 3
- 239000010937 tungsten Substances 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 2
- 229910052787 antimony Inorganic materials 0.000 description 2
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 2
- 229910052785 arsenic Inorganic materials 0.000 description 2
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 2
- 239000010941 cobalt Substances 0.000 description 2
- 229910017052 cobalt Inorganic materials 0.000 description 2
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000002513 implantation Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 238000005468 ion implantation Methods 0.000 description 2
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 230000008520 organization Effects 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 239000007858 starting material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000005641 tunneling Effects 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 229910052770 Uranium Inorganic materials 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 230000003466 anti-cipated effect Effects 0.000 description 1
- 230000003542 behavioural effect Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000002860 competitive effect Effects 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 229910021419 crystalline silicon Inorganic materials 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 238000012217 deletion Methods 0.000 description 1
- 230000037430 deletion Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000009977 dual effect Effects 0.000 description 1
- 238000010893 electron trap Methods 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 239000005543 nano-size silicon particle Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000002829 reductive effect Effects 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 229910021341 titanium silicide Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/10—Programming or data input circuits
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/04—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS
- G11C16/0483—Erasable programmable read-only memories electrically programmable using variable threshold transistors, e.g. FAMOS comprising cells having several storage transistors connected in series
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C16/00—Erasable programmable read-only memories
- G11C16/02—Erasable programmable read-only memories electrically programmable
- G11C16/06—Auxiliary circuits, e.g. for writing into memory
- G11C16/10—Programming or data input circuits
- G11C16/14—Circuits for erasing electrically, e.g. erase voltage switching circuits
- G11C16/16—Circuits for erasing electrically, e.g. erase voltage switching circuits for erasing blocks, e.g. arrays, words, groups
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/10—EEPROM devices comprising charge-trapping gate insulators characterised by the top-view layout
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
- H10B43/35—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region with cell select transistors, e.g. NAND
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Read Only Memory (AREA)
- Semiconductor Memories (AREA)
- Non-Volatile Memory (AREA)
- Thin Film Transistor (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US10/335,078 US7505321B2 (en) | 2002-12-31 | 2002-12-31 | Programmable memory array structure incorporating series-connected transistor strings and methods for fabrication and operation of same |
| US10/335,089 US7005350B2 (en) | 2002-12-31 | 2002-12-31 | Method for fabricating programmable memory array structures incorporating series-connected transistor strings |
| PCT/US2003/041446 WO2004061863A2 (en) | 2002-12-31 | 2003-12-29 | Programmable memory array structure incorporating series-connected transistor strings and methods for fabrication and operation of same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006512776A true JP2006512776A (ja) | 2006-04-13 |
| JP2006512776A5 JP2006512776A5 (cg-RX-API-DMAC7.html) | 2007-02-22 |
Family
ID=32716876
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004565772A Withdrawn JP2006512776A (ja) | 2002-12-31 | 2003-12-29 | 直列接続されたトランジスタ列を組込んだプログラマブルメモリアレイ構造およびこの構造を製造して作動させるための方法 |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP2006512776A (cg-RX-API-DMAC7.html) |
| AU (1) | AU2003300007A1 (cg-RX-API-DMAC7.html) |
| WO (1) | WO2004061863A2 (cg-RX-API-DMAC7.html) |
Cited By (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008004934A (ja) * | 2006-06-22 | 2008-01-10 | Macronix Internatl Co Ltd | 積層型不揮発性メモリデバイスおよびその製造方法 |
| JP2008098641A (ja) * | 2006-10-11 | 2008-04-24 | Samsung Electronics Co Ltd | Nandフラッシュメモリー装置及びその製造方法 |
| JP2008098602A (ja) * | 2006-10-13 | 2008-04-24 | Macronix Internatl Co Ltd | 積層型薄膜トランジスタ型不揮発性メモリ装置、およびその製造方法 |
| JP2008210503A (ja) * | 2007-02-27 | 2008-09-11 | Samsung Electronics Co Ltd | 不揮発性メモリ装置及びその駆動方法 |
| JP2009130140A (ja) * | 2007-11-22 | 2009-06-11 | Toshiba Corp | 不揮発性半導体記憶装置及びその製造方法 |
| JP2010040977A (ja) * | 2008-08-08 | 2010-02-18 | Toshiba Corp | 半導体記憶装置及びその製造方法 |
| JP2010045205A (ja) * | 2008-08-13 | 2010-02-25 | Toshiba Corp | 不揮発性半導体記憶装置、及びその製造方法 |
| JP2011054758A (ja) * | 2009-09-02 | 2011-03-17 | Toshiba Corp | 半導体集積回路装置 |
| JP2011243705A (ja) * | 2010-05-17 | 2011-12-01 | Toshiba Corp | 半導体装置 |
| JP2013157074A (ja) * | 2012-01-30 | 2013-08-15 | Phison Electronics Corp | Nandフラッシュメモリユニット、nandフラッシュメモリ配列、およびそれらの動作方法 |
| JP2013161878A (ja) * | 2012-02-02 | 2013-08-19 | Renesas Electronics Corp | 半導体装置、および半導体装置の製造方法 |
| KR101547328B1 (ko) * | 2009-09-25 | 2015-08-25 | 삼성전자주식회사 | 강유전체 메모리 소자 및 그 동작 방법 |
| US11647631B2 (en) | 2020-03-09 | 2023-05-09 | Kioxia Corporation | Semiconductor memory device |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100657910B1 (ko) * | 2004-11-10 | 2006-12-14 | 삼성전자주식회사 | 멀티비트 플래시 메모리 소자, 그 동작 방법, 및 그 제조방법 |
| DE102005017072A1 (de) * | 2004-12-29 | 2006-07-13 | Hynix Semiconductor Inc., Ichon | Ladungsfalle- bzw. Ladung-Trap-Isolator-Speichereinrichtung |
| US7317641B2 (en) | 2005-06-20 | 2008-01-08 | Sandisk Corporation | Volatile memory cell two-pass writing method |
| US7764549B2 (en) | 2005-06-20 | 2010-07-27 | Sandisk 3D Llc | Floating body memory cell system and method of manufacture |
| US7489546B2 (en) | 2005-12-20 | 2009-02-10 | Micron Technology, Inc. | NAND architecture memory devices and operation |
| US8759915B2 (en) | 2006-03-20 | 2014-06-24 | Micron Technology, Inc. | Semiconductor field-effect transistor, memory cell and memory device |
| US11729989B2 (en) * | 2020-01-06 | 2023-08-15 | Iu-Meng Tom Ho | Depletion mode ferroelectric transistors |
| CN112470225B (zh) * | 2020-10-23 | 2022-12-09 | 长江先进存储产业创新中心有限责任公司 | 用以提高2堆叠体3d pcm存储器的数据吞吐量的编程和读取偏置和访问方案 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5680347A (en) * | 1994-06-29 | 1997-10-21 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor memory device |
| AU7475196A (en) * | 1995-10-25 | 1997-05-15 | Nvx Corporation | Semiconductor non-volatile memory device having a nand cell structure |
| KR100206709B1 (ko) * | 1996-09-21 | 1999-07-01 | 윤종용 | 멀티비트 불휘발성 반도체 메모리의 셀 어레이의 구조 및 그의 구동방법 |
| US6888750B2 (en) * | 2000-04-28 | 2005-05-03 | Matrix Semiconductor, Inc. | Nonvolatile memory on SOI and compound semiconductor substrates and method of fabrication |
-
2003
- 2003-12-29 JP JP2004565772A patent/JP2006512776A/ja not_active Withdrawn
- 2003-12-29 AU AU2003300007A patent/AU2003300007A1/en not_active Abandoned
- 2003-12-29 WO PCT/US2003/041446 patent/WO2004061863A2/en not_active Ceased
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2008004934A (ja) * | 2006-06-22 | 2008-01-10 | Macronix Internatl Co Ltd | 積層型不揮発性メモリデバイスおよびその製造方法 |
| JP2008098641A (ja) * | 2006-10-11 | 2008-04-24 | Samsung Electronics Co Ltd | Nandフラッシュメモリー装置及びその製造方法 |
| JP2008098602A (ja) * | 2006-10-13 | 2008-04-24 | Macronix Internatl Co Ltd | 積層型薄膜トランジスタ型不揮発性メモリ装置、およびその製造方法 |
| JP2008210503A (ja) * | 2007-02-27 | 2008-09-11 | Samsung Electronics Co Ltd | 不揮発性メモリ装置及びその駆動方法 |
| US8648471B2 (en) | 2007-11-22 | 2014-02-11 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor memory device including a via-hole with a narrowing cross-section and method of manufacturing the same |
| JP2009130140A (ja) * | 2007-11-22 | 2009-06-11 | Toshiba Corp | 不揮発性半導体記憶装置及びその製造方法 |
| JP2010040977A (ja) * | 2008-08-08 | 2010-02-18 | Toshiba Corp | 半導体記憶装置及びその製造方法 |
| JP2010045205A (ja) * | 2008-08-13 | 2010-02-25 | Toshiba Corp | 不揮発性半導体記憶装置、及びその製造方法 |
| USRE45480E1 (en) | 2008-08-13 | 2015-04-21 | Kabushiki Kaisha Toshiba | Nonvolatile semiconductor memory device and producing method thereof |
| JP2011054758A (ja) * | 2009-09-02 | 2011-03-17 | Toshiba Corp | 半導体集積回路装置 |
| US8274068B2 (en) | 2009-09-02 | 2012-09-25 | Kabushiki Kaisha Toshiba | Semiconductor integrated circuit device and method of fabricating the same |
| KR101547328B1 (ko) * | 2009-09-25 | 2015-08-25 | 삼성전자주식회사 | 강유전체 메모리 소자 및 그 동작 방법 |
| US8791446B2 (en) | 2010-05-17 | 2014-07-29 | Kabushiki Kaisha Toshiba | Semiconductor device |
| JP2011243705A (ja) * | 2010-05-17 | 2011-12-01 | Toshiba Corp | 半導体装置 |
| US8755227B2 (en) | 2012-01-30 | 2014-06-17 | Phison Electronics Corp. | NAND flash memory unit, NAND flash memory array, and methods for operating them |
| JP2013157074A (ja) * | 2012-01-30 | 2013-08-15 | Phison Electronics Corp | Nandフラッシュメモリユニット、nandフラッシュメモリ配列、およびそれらの動作方法 |
| JP2013161878A (ja) * | 2012-02-02 | 2013-08-19 | Renesas Electronics Corp | 半導体装置、および半導体装置の製造方法 |
| US11647631B2 (en) | 2020-03-09 | 2023-05-09 | Kioxia Corporation | Semiconductor memory device |
Also Published As
| Publication number | Publication date |
|---|---|
| AU2003300007A8 (en) | 2004-07-29 |
| WO2004061863A3 (en) | 2004-12-16 |
| AU2003300007A1 (en) | 2004-07-29 |
| WO2004061863A2 (en) | 2004-07-22 |
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