JP2006511828A - 光フィルタ部品を集積形成する方法 - Google Patents
光フィルタ部品を集積形成する方法 Download PDFInfo
- Publication number
- JP2006511828A JP2006511828A JP2004505765A JP2004505765A JP2006511828A JP 2006511828 A JP2006511828 A JP 2006511828A JP 2004505765 A JP2004505765 A JP 2004505765A JP 2004505765 A JP2004505765 A JP 2004505765A JP 2006511828 A JP2006511828 A JP 2006511828A
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- optical
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- optical filter
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-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
- G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
- G02B6/29358—Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
- G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
- G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
- G02B6/29395—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device configurable, e.g. tunable or reconfigurable
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Optical Filters (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
更に詳細には、本発明は、透明基板(2)上に複数の光フィルタ部品(1)を形成することにより光フィルタ部品群(1)を集積形成する方法に関するものである。この方法では、更に、複数の部品を透明全体カバー(8)で覆い、各部品(1)に対して光学テストを個々に行ない、種々の部品(1)を互いから分離する。
本発明はまた、上に複数の光フィルタ部品(1)が形成された透明基板(2)と、これらの部品(1)をまとめて覆う透明カバー(8)とを備えた、複数の部品からなるウェハに関する。このウェハは更に、各部品(1)を個々にテストする手段を含む。
Description
A. Spisser等による論文「Highly Selective 1.55 micrometer InP/airgap micromachined Fabry-Perot filter for optical communications」(Electronics Letters, No. 34(5), 453-454, 1998)
ne=c/2Δν
この式において、cは光速を表わし、ΔνはITU692標準の2つの隣接周波数の差を表わす。空気中でのこの厚さはほぼ1.5mmになり、862μmの厚さのサファイアか、又は475μmの厚さのリン化インジウム(InP)から成るカバーによって形成される。勿論、他の材料を用いることも可能である。
及び
によって与えられる。更に、
が知られている。この公式をサファイアに適用すると次式が得られる。
Claims (15)
- 透明基板(2)の上に複数の光フィルタ部品(1)を形成することからなる光フィルタ部品群(1)の集積形成方法であって、更に、前記複数の部品を透明全体カバー(8)で覆い、各部品(1)に対して光学テストを個々に行ない、種々の部品(1)を互いから分離することを特徴とする方法。
- 1の部品に対して前記光学テストを行っている間に、前記部品(1)を調整する手段をテストすることを特徴とする請求項1記載の方法。
- 前記部品(1)を調整する前記手段をテストするために、前記部品(1)の2つのミラー(3,4)の間に電圧を印加し、前記電圧が前記2つのミラー(3,4)の間に位置する空気層(5)の厚さを変えるように設定されることを特徴とする請求項2記載の方法。
- 前記カバー(8)の一部(16)を切断して前記電圧をパッド(14,15)に印加し、各パッドは半導体材料から成る前記ミラー(3,4)の内の一つのミラーに接続されることを特徴とする請求項3記載の方法。
- 前記基板(2)の一部を切断して前記電圧をパッド(14,15)に印加し、各パッドは半導体材料から成る前記ミラー(3,4)の内の一つのミラーに接続されることを特徴とする請求項3記載の方法。
- 複数のビアを前記カバー(8)に設け、これらのビアによって前記電圧をパッド(14,15)に印加することが可能になり、各パッドは半導体材料から成る前記ミラー(3,4)の内の一つのミラーに前記カバー(8)の外面(13)を介して接続されることを特徴とする請求項3記載の方法。
- 上に複数の光フィルタ部品(1)が形成され透明基板(2)と、これらの部品(1)をまとめて覆う透明カバー(8)とを備えた複数の部品からなるウェハであって、更に各部品(1)を個々にテストする手段を含むことを特徴とするウェハ。
- 前記カバーは光処理手段(12)を含むことを特徴とする請求項7記載のウェハ。
- 前記テスト手段は、前記カバー(8)を貫通し、且つ前記部品(1)に接続されるビア(25,26)を含むことを特徴とする請求項7又は8記載のウェハ。
- 前記透明カバー(8)は、前記部品(1)を通過する光路(11)の少なくとも近傍に、一定の光学厚さ(ne)を有し、よって前記部品(1)により調整可能なキャビティを形成することを特徴とする請求項7乃至9のいずれか一項に記載のウェハ。
- 前記部品(1)に対する前記カバー(8)の位置を決めて前記部品(1)が透過する1波長以上の精度を実現する手段(9)を含むことを特徴とする請求項10記載のウェハ。
- 前記カバー(8)の前記位置決め手段(9)が較正済みボールからなることを特徴とする請求項11記載のウェハ。
- 前記基板(2)に対する前記カバー(8)の位置を決める手段(9)を含み、前記位置決め手段(9)が前記カバー(8)又は前記基板(2)にエッチングされる1の材料から成る1の層を有することを特徴とする請求項11記載のウェハ。
- 前記カバー(8)はカバーの光学厚さ(ne)を調整する手段を含むことを特徴とする請求項10乃至13のいずれか一項に記載のウェハ。
- 前記カバー(8)の前記光学厚さ(ne)を調整する前記手段は前記カバー(8)の温度(T)を調整する手段からなることを特徴とする請求項14記載のウェハ。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0206113A FR2839812B1 (fr) | 2002-05-17 | 2002-05-17 | Procede de fabrication collective de composants de filtrage optique et plaquette de composants |
PCT/FR2003/001503 WO2003098299A1 (fr) | 2002-05-17 | 2003-05-16 | Procede de fabrication collective de composants de filtrage optique |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006511828A true JP2006511828A (ja) | 2006-04-06 |
JP4582776B2 JP4582776B2 (ja) | 2010-11-17 |
Family
ID=29286586
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2004505765A Expired - Fee Related JP4582776B2 (ja) | 2002-05-17 | 2003-05-16 | 複数の光部品からなるウェハ |
Country Status (7)
Country | Link |
---|---|
US (1) | US7626239B2 (ja) |
EP (1) | EP1508064A1 (ja) |
JP (1) | JP4582776B2 (ja) |
CN (1) | CN1303445C (ja) |
AU (1) | AU2003255582A1 (ja) |
FR (1) | FR2839812B1 (ja) |
WO (1) | WO2003098299A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8981281B2 (en) | 2010-11-25 | 2015-03-17 | Seiko Epson Corporation | Optical module and optical measurement device |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7365530B2 (en) | 2004-04-08 | 2008-04-29 | Allegro Microsystems, Inc. | Method and apparatus for vibration detection |
US8124434B2 (en) | 2004-09-27 | 2012-02-28 | Qualcomm Mems Technologies, Inc. | Method and system for packaging a display |
US7668415B2 (en) | 2004-09-27 | 2010-02-23 | Qualcomm Mems Technologies, Inc. | Method and device for providing electronic circuitry on a backplate |
US7424198B2 (en) | 2004-09-27 | 2008-09-09 | Idc, Llc | Method and device for packaging a substrate |
US7573547B2 (en) * | 2004-09-27 | 2009-08-11 | Idc, Llc | System and method for protecting micro-structure of display array using spacers in gap within display device |
US8379392B2 (en) | 2009-10-23 | 2013-02-19 | Qualcomm Mems Technologies, Inc. | Light-based sealing and device packaging |
JP2015068885A (ja) * | 2013-09-27 | 2015-04-13 | セイコーエプソン株式会社 | 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器 |
CN109814281B (zh) | 2017-11-20 | 2023-10-27 | 菲尼萨公司 | 可调光滤波器及其制造方法以及可调光滤波器组件 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
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JPH01134956A (ja) * | 1987-11-20 | 1989-05-26 | Hitachi Ltd | 半導体装置の組立方法 |
US6222206B1 (en) * | 1998-06-25 | 2001-04-24 | Lucent Technologies Inc | Wafer having top and bottom emitting vertical-cavity lasers |
US6275513B1 (en) * | 1999-06-04 | 2001-08-14 | Bandwidth 9 | Hermetically sealed semiconductor laser device |
JP2001235369A (ja) * | 1999-12-22 | 2001-08-31 | Xerox Corp | ファブリペロー・キャビティ分光光度計およびその製造方法 |
US6455927B1 (en) * | 2001-03-12 | 2002-09-24 | Amkor Technology, Inc. | Micromirror device package |
US20030201462A1 (en) * | 2001-05-15 | 2003-10-30 | Richard Pommer | Small-scale optoelectronic package |
Family Cites Families (16)
Publication number | Priority date | Publication date | Assignee | Title |
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FR2581251B1 (fr) | 1985-04-30 | 1987-09-11 | Thomson Csf | Dispositif d'aboutement optique de detecteurs photosensibles |
FR2693005B1 (fr) * | 1992-06-26 | 1995-03-31 | Thomson Lcd | Disposition d'encapsulation et de passivation de circuit pour écrans plats. |
US5798557A (en) * | 1996-08-29 | 1998-08-25 | Harris Corporation | Lid wafer bond packaging and micromachining |
FR2758039B1 (fr) | 1996-12-27 | 1999-03-26 | Thomson Tubes Electroniques | Detecteur d'image a contraste ameliore |
FR2763700B1 (fr) | 1997-05-23 | 1999-07-30 | Thomson Tubes Electroniques | Dispositif de mesure d'exposition d'un detecteur d'image a l'etat solide soumis a un rayonnement ionisant et detecteur d'image equipe d'un tel dispositif de mesure |
FR2782388B1 (fr) | 1998-08-11 | 2000-11-03 | Trixell Sas | Detecteur de rayonnement a l'etat solide a duree de vie accrue |
US6534340B1 (en) * | 1998-11-18 | 2003-03-18 | Analog Devices, Inc. | Cover cap for semiconductor wafer devices |
FR2812089B1 (fr) | 2000-07-21 | 2007-11-30 | Trixell Sas | Detecteur de rayonnement a duree de vie accrue |
US6509560B1 (en) * | 2000-11-13 | 2003-01-21 | Amkor Technology, Inc. | Chip size image sensor in wirebond package with step-up ring for electrical contact |
US6686588B1 (en) * | 2001-01-16 | 2004-02-03 | Amkor Technology, Inc. | Optical module with lens integral holder |
US6842217B1 (en) * | 2001-08-23 | 2005-01-11 | Cambridge Research And Instrumentation, Inc. | Fabry-perot etalons and tunable filters made using liquid crystal devices as tuning material |
FR2832512B1 (fr) * | 2001-11-16 | 2004-01-02 | Atmel Grenoble Sa | Composant de filtrage optique accordable |
JP2003163342A (ja) * | 2001-11-29 | 2003-06-06 | Olympus Optical Co Ltd | 固体撮像装置及びその製造方法 |
JP4095300B2 (ja) * | 2001-12-27 | 2008-06-04 | セイコーエプソン株式会社 | 光デバイス及びその製造方法、光モジュール、回路基板並びに電子機器 |
KR100476558B1 (ko) * | 2002-05-27 | 2005-03-17 | 삼성전기주식회사 | 이미지 센서 모듈 및 그 제작 공정 |
US7045868B2 (en) * | 2003-07-31 | 2006-05-16 | Motorola, Inc. | Wafer-level sealed microdevice having trench isolation and methods for making the same |
-
2002
- 2002-05-17 FR FR0206113A patent/FR2839812B1/fr not_active Expired - Fee Related
-
2003
- 2003-05-16 AU AU2003255582A patent/AU2003255582A1/en not_active Abandoned
- 2003-05-16 CN CNB038112957A patent/CN1303445C/zh not_active Expired - Fee Related
- 2003-05-16 EP EP03752834A patent/EP1508064A1/fr not_active Withdrawn
- 2003-05-16 WO PCT/FR2003/001503 patent/WO2003098299A1/fr active Application Filing
- 2003-05-16 JP JP2004505765A patent/JP4582776B2/ja not_active Expired - Fee Related
- 2003-05-16 US US10/514,111 patent/US7626239B2/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01134956A (ja) * | 1987-11-20 | 1989-05-26 | Hitachi Ltd | 半導体装置の組立方法 |
US6222206B1 (en) * | 1998-06-25 | 2001-04-24 | Lucent Technologies Inc | Wafer having top and bottom emitting vertical-cavity lasers |
US6275513B1 (en) * | 1999-06-04 | 2001-08-14 | Bandwidth 9 | Hermetically sealed semiconductor laser device |
JP2001235369A (ja) * | 1999-12-22 | 2001-08-31 | Xerox Corp | ファブリペロー・キャビティ分光光度計およびその製造方法 |
US6455927B1 (en) * | 2001-03-12 | 2002-09-24 | Amkor Technology, Inc. | Micromirror device package |
US20030201462A1 (en) * | 2001-05-15 | 2003-10-30 | Richard Pommer | Small-scale optoelectronic package |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8981281B2 (en) | 2010-11-25 | 2015-03-17 | Seiko Epson Corporation | Optical module and optical measurement device |
Also Published As
Publication number | Publication date |
---|---|
CN1653367A (zh) | 2005-08-10 |
CN1303445C (zh) | 2007-03-07 |
JP4582776B2 (ja) | 2010-11-17 |
FR2839812B1 (fr) | 2005-07-01 |
FR2839812A1 (fr) | 2003-11-21 |
US20050200835A1 (en) | 2005-09-15 |
AU2003255582A1 (en) | 2003-12-02 |
US7626239B2 (en) | 2009-12-01 |
WO2003098299A1 (fr) | 2003-11-27 |
EP1508064A1 (fr) | 2005-02-23 |
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