FR2839812B1 - Procede de fabrication collective de composants de filtrage optique et plaquette de composants - Google Patents

Procede de fabrication collective de composants de filtrage optique et plaquette de composants

Info

Publication number
FR2839812B1
FR2839812B1 FR0206113A FR0206113A FR2839812B1 FR 2839812 B1 FR2839812 B1 FR 2839812B1 FR 0206113 A FR0206113 A FR 0206113A FR 0206113 A FR0206113 A FR 0206113A FR 2839812 B1 FR2839812 B1 FR 2839812B1
Authority
FR
France
Prior art keywords
optical filter
filter components
component wafer
collective manufacturing
collective
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0206113A
Other languages
English (en)
Other versions
FR2839812A1 (fr
Inventor
Jean Pierre Moy
Xavier Hugon
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teledyne e2v Semiconductors SAS
Original Assignee
Atmel Grenoble SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to FR0206113A priority Critical patent/FR2839812B1/fr
Application filed by Atmel Grenoble SA filed Critical Atmel Grenoble SA
Priority to EP03752834A priority patent/EP1508064A1/fr
Priority to PCT/FR2003/001503 priority patent/WO2003098299A1/fr
Priority to CNB038112957A priority patent/CN1303445C/zh
Priority to US10/514,111 priority patent/US7626239B2/en
Priority to JP2004505765A priority patent/JP4582776B2/ja
Priority to AU2003255582A priority patent/AU2003255582A1/en
Publication of FR2839812A1 publication Critical patent/FR2839812A1/fr
Application granted granted Critical
Publication of FR2839812B1 publication Critical patent/FR2839812B1/fr
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29346—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means operating by wave or beam interference
    • G02B6/29358—Multiple beam interferometer external to a light guide, e.g. Fabry-Pérot, etalon, VIPA plate, OTDL plate, continuous interferometer, parallel plate resonator
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/28—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals
    • G02B6/293—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means
    • G02B6/29379—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device
    • G02B6/29395—Optical coupling means having data bus means, i.e. plural waveguides interconnected and providing an inherently bidirectional system by mixing and splitting signals with wavelength selective means characterised by the function or use of the complete device configurable, e.g. tunable or reconfigurable
FR0206113A 2002-05-17 2002-05-17 Procede de fabrication collective de composants de filtrage optique et plaquette de composants Expired - Fee Related FR2839812B1 (fr)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FR0206113A FR2839812B1 (fr) 2002-05-17 2002-05-17 Procede de fabrication collective de composants de filtrage optique et plaquette de composants
PCT/FR2003/001503 WO2003098299A1 (fr) 2002-05-17 2003-05-16 Procede de fabrication collective de composants de filtrage optique
CNB038112957A CN1303445C (zh) 2002-05-17 2003-05-16 批量制造光滤波器元件的方法和元件晶圆
US10/514,111 US7626239B2 (en) 2002-05-17 2003-05-16 Process for the collective fabrication of optical filtering components, and wafer of components
EP03752834A EP1508064A1 (fr) 2002-05-17 2003-05-16 Procede de fabrication collective de composants de filtrage optique
JP2004505765A JP4582776B2 (ja) 2002-05-17 2003-05-16 複数の光部品からなるウェハ
AU2003255582A AU2003255582A1 (en) 2002-05-17 2003-05-16 Method for collective production of optical filter components

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0206113A FR2839812B1 (fr) 2002-05-17 2002-05-17 Procede de fabrication collective de composants de filtrage optique et plaquette de composants

Publications (2)

Publication Number Publication Date
FR2839812A1 FR2839812A1 (fr) 2003-11-21
FR2839812B1 true FR2839812B1 (fr) 2005-07-01

Family

ID=29286586

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0206113A Expired - Fee Related FR2839812B1 (fr) 2002-05-17 2002-05-17 Procede de fabrication collective de composants de filtrage optique et plaquette de composants

Country Status (7)

Country Link
US (1) US7626239B2 (fr)
EP (1) EP1508064A1 (fr)
JP (1) JP4582776B2 (fr)
CN (1) CN1303445C (fr)
AU (1) AU2003255582A1 (fr)
FR (1) FR2839812B1 (fr)
WO (1) WO2003098299A1 (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7365530B2 (en) 2004-04-08 2008-04-29 Allegro Microsystems, Inc. Method and apparatus for vibration detection
US7668415B2 (en) 2004-09-27 2010-02-23 Qualcomm Mems Technologies, Inc. Method and device for providing electronic circuitry on a backplate
US8124434B2 (en) 2004-09-27 2012-02-28 Qualcomm Mems Technologies, Inc. Method and system for packaging a display
US7573547B2 (en) * 2004-09-27 2009-08-11 Idc, Llc System and method for protecting micro-structure of display array using spacers in gap within display device
US7424198B2 (en) 2004-09-27 2008-09-09 Idc, Llc Method and device for packaging a substrate
US8379392B2 (en) 2009-10-23 2013-02-19 Qualcomm Mems Technologies, Inc. Light-based sealing and device packaging
JP5720200B2 (ja) 2010-11-25 2015-05-20 セイコーエプソン株式会社 光モジュール、および光測定装置
JP2015068885A (ja) * 2013-09-27 2015-04-13 セイコーエプソン株式会社 干渉フィルター、光学フィルターデバイス、光学モジュール、及び電子機器
CN109814281B (zh) 2017-11-20 2023-10-27 菲尼萨公司 可调光滤波器及其制造方法以及可调光滤波器组件

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2581251B1 (fr) 1985-04-30 1987-09-11 Thomson Csf Dispositif d'aboutement optique de detecteurs photosensibles
JPH01134956A (ja) * 1987-11-20 1989-05-26 Hitachi Ltd 半導体装置の組立方法
FR2693005B1 (fr) * 1992-06-26 1995-03-31 Thomson Lcd Disposition d'encapsulation et de passivation de circuit pour écrans plats.
US5798557A (en) * 1996-08-29 1998-08-25 Harris Corporation Lid wafer bond packaging and micromachining
FR2758039B1 (fr) 1996-12-27 1999-03-26 Thomson Tubes Electroniques Detecteur d'image a contraste ameliore
FR2763700B1 (fr) 1997-05-23 1999-07-30 Thomson Tubes Electroniques Dispositif de mesure d'exposition d'un detecteur d'image a l'etat solide soumis a un rayonnement ionisant et detecteur d'image equipe d'un tel dispositif de mesure
US6222206B1 (en) * 1998-06-25 2001-04-24 Lucent Technologies Inc Wafer having top and bottom emitting vertical-cavity lasers
FR2782388B1 (fr) 1998-08-11 2000-11-03 Trixell Sas Detecteur de rayonnement a l'etat solide a duree de vie accrue
US6534340B1 (en) * 1998-11-18 2003-03-18 Analog Devices, Inc. Cover cap for semiconductor wafer devices
US6275513B1 (en) * 1999-06-04 2001-08-14 Bandwidth 9 Hermetically sealed semiconductor laser device
US6295130B1 (en) * 1999-12-22 2001-09-25 Xerox Corporation Structure and method for a microelectromechanically tunable fabry-perot cavity spectrophotometer
FR2812089B1 (fr) 2000-07-21 2007-11-30 Trixell Sas Detecteur de rayonnement a duree de vie accrue
US6509560B1 (en) * 2000-11-13 2003-01-21 Amkor Technology, Inc. Chip size image sensor in wirebond package with step-up ring for electrical contact
US6686588B1 (en) * 2001-01-16 2004-02-03 Amkor Technology, Inc. Optical module with lens integral holder
US6455927B1 (en) * 2001-03-12 2002-09-24 Amkor Technology, Inc. Micromirror device package
US6910812B2 (en) * 2001-05-15 2005-06-28 Peregrine Semiconductor Corporation Small-scale optoelectronic package
US6842217B1 (en) * 2001-08-23 2005-01-11 Cambridge Research And Instrumentation, Inc. Fabry-perot etalons and tunable filters made using liquid crystal devices as tuning material
FR2832512B1 (fr) * 2001-11-16 2004-01-02 Atmel Grenoble Sa Composant de filtrage optique accordable
JP2003163342A (ja) * 2001-11-29 2003-06-06 Olympus Optical Co Ltd 固体撮像装置及びその製造方法
JP4095300B2 (ja) * 2001-12-27 2008-06-04 セイコーエプソン株式会社 光デバイス及びその製造方法、光モジュール、回路基板並びに電子機器
KR100476558B1 (ko) * 2002-05-27 2005-03-17 삼성전기주식회사 이미지 센서 모듈 및 그 제작 공정
US7045868B2 (en) * 2003-07-31 2006-05-16 Motorola, Inc. Wafer-level sealed microdevice having trench isolation and methods for making the same

Also Published As

Publication number Publication date
CN1653367A (zh) 2005-08-10
AU2003255582A1 (en) 2003-12-02
CN1303445C (zh) 2007-03-07
FR2839812A1 (fr) 2003-11-21
JP4582776B2 (ja) 2010-11-17
US7626239B2 (en) 2009-12-01
JP2006511828A (ja) 2006-04-06
EP1508064A1 (fr) 2005-02-23
WO2003098299A1 (fr) 2003-11-27
US20050200835A1 (en) 2005-09-15

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Year of fee payment: 15

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Effective date: 20180131