JP2006502399A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2006502399A5 JP2006502399A5 JP2004542562A JP2004542562A JP2006502399A5 JP 2006502399 A5 JP2006502399 A5 JP 2006502399A5 JP 2004542562 A JP2004542562 A JP 2004542562A JP 2004542562 A JP2004542562 A JP 2004542562A JP 2006502399 A5 JP2006502399 A5 JP 2006502399A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- mirror
- mirrors
- detection device
- emitted
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 5
- 230000003287 optical effect Effects 0.000 claims 4
- 230000005855 radiation Effects 0.000 claims 4
- 238000010521 absorption reaction Methods 0.000 claims 2
- 239000002184 metal Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 230000004075 alteration Effects 0.000 claims 1
- 230000003321 amplification Effects 0.000 claims 1
- 230000003628 erosive effect Effects 0.000 claims 1
- 238000003199 nucleic acid amplification method Methods 0.000 claims 1
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| FR0212467A FR2845487B1 (fr) | 2002-10-08 | 2002-10-08 | Systeme de collecte de lumiere, amplificateur, achromatique et d'absorption reduite, particulierement adapte a l'analyse spectrometrique optique |
| PCT/FR2003/002947 WO2004034119A1 (fr) | 2002-10-08 | 2003-10-07 | Systeme de collecte de lumiere , achromatique et d'absorption reduite, particulierement adapte a l'analyse spectrometrique optique |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2006502399A JP2006502399A (ja) | 2006-01-19 |
| JP2006502399A5 true JP2006502399A5 (enExample) | 2010-01-14 |
Family
ID=32011494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2004542562A Pending JP2006502399A (ja) | 2002-10-08 | 2003-10-07 | 色収差無発生型且つ吸収低減型の光収集システムで、特に光学的分光分析に適応させたシステム |
Country Status (8)
| Country | Link |
|---|---|
| US (1) | US7492454B2 (enExample) |
| EP (1) | EP1549987A1 (enExample) |
| JP (1) | JP2006502399A (enExample) |
| CN (1) | CN100342260C (enExample) |
| AU (1) | AU2003299446B2 (enExample) |
| CA (1) | CA2501441A1 (enExample) |
| FR (1) | FR2845487B1 (enExample) |
| WO (1) | WO2004034119A1 (enExample) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101229021B1 (ko) * | 2006-06-20 | 2013-02-01 | 엘지디스플레이 주식회사 | 확대된 영상을 표시하는 영상표시장치 및 이를 이용한 영상표시방법 |
| CN102680120B (zh) * | 2012-05-24 | 2014-10-22 | 哈尔滨工业大学 | 极紫外光刻光源Xe10+离子状态的检测系统 |
| US9304287B2 (en) * | 2012-12-18 | 2016-04-05 | Suncentral, Inc. | Light concentrating apparatus |
| KR102167221B1 (ko) * | 2017-02-10 | 2020-10-19 | 주식회사 엘지화학 | 비대칭 투과필름 |
| CN110107857B (zh) * | 2019-06-04 | 2024-04-12 | 华域视觉科技(上海)有限公司 | 近光iii区照明模组、车辆前照灯及车辆 |
Family Cites Families (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2218270A (en) * | 1935-11-25 | 1940-10-15 | Homer C Snook | Microscopy |
| GB941813A (en) * | 1960-09-15 | 1963-11-13 | Llewellyn Ernest Hunt | Improved means for concentrating solar energy |
| US3460892A (en) * | 1966-05-27 | 1969-08-12 | Warner Swasey Co | Rapid scan spectrometer that sweeps corner mirrors through the spectrum |
| US3540825A (en) * | 1968-01-18 | 1970-11-17 | Mcpherson Instr Corp | Double beam spectrometer readout system |
| US3641350A (en) * | 1970-09-08 | 1972-02-08 | Us Navy | Infrared analyzer for indicating the scintillation spectrum, shimmer and modulation transfer function of the radiation path |
| GB1421897A (en) * | 1973-05-24 | 1976-01-21 | Bruker Physik Ag | Spectrometers |
| US3983385A (en) * | 1974-08-23 | 1976-09-28 | Union Carbide Corporation | Method and apparatus for operating a mercury vapor lamp |
| US4205902A (en) * | 1978-10-12 | 1980-06-03 | The Perkin-Elmer Corporation | Laser beam expander |
| JPH0746598B2 (ja) * | 1986-05-29 | 1995-05-17 | 東芝ライテック株式会社 | 蛍光ランプ |
| US4988858A (en) * | 1986-11-12 | 1991-01-29 | The Boeing Company | Catoptric multispectral band imaging and detecting device |
| JPH02165042A (ja) * | 1988-12-20 | 1990-06-26 | Shimadzu Corp | X線分析装置 |
| JPH0776745B2 (ja) * | 1989-11-03 | 1995-08-16 | 株式会社堀場製作所 | 顕微分光測定装置 |
| US5107526A (en) * | 1990-10-31 | 1992-04-21 | The United State Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Water window imaging x-ray microscope |
| US5452085A (en) * | 1993-01-27 | 1995-09-19 | Acton Research Corporation | Spectrographic astigmatism correction system |
| DE4434814A1 (de) * | 1994-09-29 | 1996-04-04 | Microparts Gmbh | Infrarotspektrometrischer Sensor für Gase |
| NL1001952C2 (nl) * | 1995-12-21 | 1997-06-24 | Tno | Telescoop met groot gezichtsveld. |
| JPH09250966A (ja) * | 1996-03-15 | 1997-09-22 | Nikon Corp | 反射率測定装置 |
| US5867329A (en) | 1996-05-31 | 1999-02-02 | The United States Of America As Represented By The Secretary Of The Navy | Multiple-pass reflection filter |
| CN1091255C (zh) * | 1996-12-21 | 2002-09-18 | 中国科学院福建物质结构研究所 | 实时高温红外光谱光学泵浦采集系统 |
| JP2000081371A (ja) * | 1998-09-07 | 2000-03-21 | Nec Corp | 薄膜分子配向評価方法、評価装置及び記録媒体 |
| JP2001221687A (ja) * | 2000-02-04 | 2001-08-17 | Shimadzu Corp | 分光光度計 |
| DE10063376A1 (de) * | 2000-12-19 | 2002-06-20 | Philips Corp Intellectual Pty | Hochdruckentladungslampe |
-
2002
- 2002-10-08 FR FR0212467A patent/FR2845487B1/fr not_active Expired - Fee Related
-
2003
- 2003-10-07 JP JP2004542562A patent/JP2006502399A/ja active Pending
- 2003-10-07 CA CA002501441A patent/CA2501441A1/fr not_active Abandoned
- 2003-10-07 US US10/530,608 patent/US7492454B2/en not_active Expired - Fee Related
- 2003-10-07 CN CNB2003801011126A patent/CN100342260C/zh not_active Expired - Fee Related
- 2003-10-07 AU AU2003299446A patent/AU2003299446B2/en not_active Ceased
- 2003-10-07 EP EP03807876A patent/EP1549987A1/fr not_active Withdrawn
- 2003-10-07 WO PCT/FR2003/002947 patent/WO2004034119A1/fr not_active Ceased
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7813475B1 (en) | X-ray microscope with switchable x-ray source | |
| RU2539970C2 (ru) | Источник света с лазерной накачкой и способ генерации излучения | |
| FR2871622B1 (fr) | Dispositif de generation de lumiere dans l'extreme ultraviolet et application a une source de lithographie par rayonnement dans l'extreme ultraviolet | |
| US20100200772A1 (en) | Radiation system with contamination barrier | |
| JP2009545181A5 (enExample) | ||
| JP2005527833A5 (enExample) | ||
| JP2012195064A5 (enExample) | ||
| TW201138557A (en) | Beam transport system for extreme ultraviolet light source | |
| GB2029562A (en) | Illuminator emitting light along a defined axis | |
| ATE545150T1 (de) | Optisches kollektorsystem, lichtquelleneinheit, optisches beleuchtungsgerät und belichtungsgerät | |
| RU2001121681A (ru) | Устройство для элементного анализа путем спектрометрии оптической эмиссии на плазме, полученной с помощью лазера | |
| JP4897039B2 (ja) | 極紫外の電磁放射束を集める装置 | |
| KR20210157327A (ko) | 마이크로리소그라픽 마스크의 특징을 구하기 위한 장치 및 방법 | |
| KR100958765B1 (ko) | 향상된 집광기 광학계를 구비하는 조명 시스템 | |
| CN104483816A (zh) | 一种用于极紫外光刻的类临界照明系统 | |
| JP6631798B2 (ja) | 投光装置 | |
| AU2003299446B2 (en) | Achromatic and absorption reducing light collecting system, particularly adapted to optical spectrometric analysis | |
| JP4424748B2 (ja) | リソグラフィ装置、デバイス製造方法および放射線システム | |
| WO2025021415A1 (en) | Optical assembly for an euv projection exposure apparatus, euv projection exposure apparatus | |
| US12362166B2 (en) | Cathode-ray tube ultraviolet light source | |
| JP4385079B2 (ja) | Euv放射線を生成するための配列装置 | |
| KR100456436B1 (ko) | 조명장치 | |
| US20230121350A1 (en) | Euv microscope | |
| KR20240027558A (ko) | Euv 현미경 | |
| JP7072457B2 (ja) | 試料分析装置、電子顕微鏡、及び集光ミラーユニット |