JP2006501649A - シングルチャンバ型化学気相蒸着装置を用いた窒化膜の蒸着方法 - Google Patents
シングルチャンバ型化学気相蒸着装置を用いた窒化膜の蒸着方法 Download PDFInfo
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- 150000004767 nitrides Chemical class 0.000 title claims abstract description 120
- 238000005229 chemical vapour deposition Methods 0.000 title claims abstract description 9
- 238000000151 deposition Methods 0.000 title claims description 40
- 238000000034 method Methods 0.000 claims abstract description 83
- 230000008569 process Effects 0.000 claims abstract description 63
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims abstract description 39
- 238000002156 mixing Methods 0.000 claims abstract description 25
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 claims abstract description 24
- 229910000077 silane Inorganic materials 0.000 claims abstract description 24
- 239000007789 gas Substances 0.000 claims description 53
- 229910021529 ammonia Inorganic materials 0.000 claims description 12
- 238000007740 vapor deposition Methods 0.000 claims description 8
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 3
- 238000007865 diluting Methods 0.000 claims description 3
- 238000011065 in-situ storage Methods 0.000 claims description 3
- 238000010926 purge Methods 0.000 claims description 3
- 230000004907 flux Effects 0.000 abstract description 8
- 239000012535 impurity Substances 0.000 abstract description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 abstract 1
- 230000035515 penetration Effects 0.000 abstract 1
- 239000011229 interlayer Substances 0.000 description 18
- 239000011248 coating agent Substances 0.000 description 13
- 238000000576 coating method Methods 0.000 description 13
- 230000008021 deposition Effects 0.000 description 12
- 239000004065 semiconductor Substances 0.000 description 12
- 239000000758 substrate Substances 0.000 description 10
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 8
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 8
- 238000005530 etching Methods 0.000 description 7
- 230000004888 barrier function Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 4
- 208000037998 chronic venous disease Diseases 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 238000007599 discharging Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 238000011068 loading method Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000012495 reaction gas Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910020776 SixNy Inorganic materials 0.000 description 1
- HIVGXUNKSAJJDN-UHFFFAOYSA-N [Si].[P] Chemical compound [Si].[P] HIVGXUNKSAJJDN-UHFFFAOYSA-N 0.000 description 1
- MXSJNBRAMXILSE-UHFFFAOYSA-N [Si].[P].[B] Chemical compound [Si].[P].[B] MXSJNBRAMXILSE-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 229910001385 heavy metal Inorganic materials 0.000 description 1
- 238000010952 in-situ formation Methods 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229910021332 silicide Inorganic materials 0.000 description 1
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
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- H01L21/0217—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer the material containing silicon the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz
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- H01L21/02205—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition
- H01L21/02208—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si
- H01L21/02211—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates the layer being characterised by the precursor material for deposition the precursor containing a compound comprising Si the compound being a silane, e.g. disilane, methylsilane or chlorosilane
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/314—Inorganic layers
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- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76829—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
- H01L21/76831—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers in via holes or trenches, e.g. non-conductive sidewall liners
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Abstract
【解決手段】 単一のシングルチャンバ型CVD装置内において、領域ごとに相異なる厚さを有する窒化膜が蒸着されることから、工程の単純化が図れ、ウェーハの移動による不純物の浸透が防がれると共に、高温・低圧CVD工程による熱束の発生が抑えられる。
Description
この変化による重金属への汚染及び金属物質の熱的変形を防ぐために、普通、低温による熱束工程を行うが、この低温による熱束工程においても窒化膜がバリア膜として使われる。
、しかも、プラズマにより前記サーマルCVD工程に比べて劣化した窒化膜が得られるといった欠点がある。
。
12・・・吸気ライン
14・・・シャワーヘッド
16・・・ヒーター
18・・・ヒーター支持部
20・・・真空ポート部
22・・・ウェーハ
30,40,50・・・窒化膜
100・・・半導体基板
102・・・ランディングパッド
104・・・第1の層間絶縁膜
106・・・ビット線
108・・・窒化膜マスク
110・・・窒化膜スペーサ
112・・・第2の層間絶縁膜
114・・・コンタクトホール
116・・・第1次の窒化膜
118・・・第2次の窒化膜
120・・・プラグ電極
Claims (5)
- プロセスガスが導入される吸気ライン、導入されたプロセスガスが噴射されるシャワーヘッド、ウエーハがローディングされるヒーター、前記ヒーターを支持するヒーター支持部及びプロセスガスが排出される真空ポート部を備える工程チャンバから成るシングルチャンバ型化学気相蒸着装置を用いて窒化膜を蒸着する方法において、
プロセスガスとなるアンモニア(NH3)ガスとシラン(Sill4)ガスの混合比を100:1以上に維持した状態で、第1次の窒化膜を蒸着する工程と、
次いで、前記アンモニアガスとシランガスの混合比を100:1以下に維持した状態で、前記第1次の窒化膜の表面に側面及び下部領域よりも上部領域が厚い第2次の窒化膜をイン・サイチュ蒸着する工程と、を含むことを特徴とする窒化膜の蒸着方法。 - 前記アンモニアガスは約50〜10,000SCCMに維持し、前記シランガスは約2〜40SCCMに維持することを特徴とする請求項1に記載の窒化膜の蒸着方法。
- 前記チャンバ内の圧力は10〜350torrに維持し、チャンバ内の温度は600〜800℃に維持することを特徴とする請求項1に記載の窒化膜の蒸着方法。
- 前記シランガス及びアンモニアガスを希釈するためのパージガスとなる窒素(N2)ガスは、約100〜10,000SCCMに維持することを特徴とする請求項1に記載の窒化膜の蒸着方法。
- プロセスガスが導入される吸気ライン、導入されたプロセスガスが噴射されるシャワーヘッド、ウエーハがローディングされるヒーター、前記ヒーターを支持するヒーター支持部及びプロセスガスが排出される真空ポート部を備える工程チャンバから成るシングルチャンバ型化学気相蒸着装置を用いて窒化膜を蒸着する方法において、
前記窒化膜の蒸着のために注入されるプロセスガスとなるアンモニアガスとシランガスの混合比を100:1以下に維持することにより、単一の工程により側面及び下部の領域よりも上部の領域が厚い窒化膜を蒸着することを特徴とする窒化膜の蒸着方法。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2002-0059372A KR100472518B1 (ko) | 2002-09-30 | 2002-09-30 | 싱글 챔버식 화학 기상증착 장치를 이용한 질화막 증착방법 |
PCT/KR2003/001915 WO2004030059A1 (en) | 2002-09-30 | 2003-09-19 | Method for depositing nitride film using chemical vapor deposition apparatus of single chamber type |
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JP2006501649A true JP2006501649A (ja) | 2006-01-12 |
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JP2004539618A Pending JP2006501649A (ja) | 2002-09-30 | 2003-09-19 | シングルチャンバ型化学気相蒸着装置を用いた窒化膜の蒸着方法 |
Country Status (5)
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US (1) | US7326438B2 (ja) |
JP (1) | JP2006501649A (ja) |
KR (1) | KR100472518B1 (ja) |
AU (1) | AU2003263633A1 (ja) |
WO (1) | WO2004030059A1 (ja) |
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KR101551199B1 (ko) * | 2013-12-27 | 2015-09-10 | 주식회사 유진테크 | 사이클릭 박막 증착 방법 및 반도체 제조 방법, 그리고 반도체 소자 |
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US4721631A (en) * | 1985-02-14 | 1988-01-26 | Sharp Kabushiki Kaisha | Method of manufacturing thin-film electroluminescent display panel |
JPH02137325A (ja) * | 1988-11-18 | 1990-05-25 | Fuji Electric Co Ltd | 非晶質シリコン表面に対する不活性化処理方法 |
JP2875945B2 (ja) * | 1993-01-28 | 1999-03-31 | アプライド マテリアルズ インコーポレイテッド | Cvdにより大面積のガラス基板上に高堆積速度でシリコン窒化薄膜を堆積する方法 |
US5932286A (en) * | 1993-03-16 | 1999-08-03 | Applied Materials, Inc. | Deposition of silicon nitride thin films |
WO1995018460A1 (en) * | 1993-12-27 | 1995-07-06 | Kabushiki Kaisha Toshiba | Thin film formation method |
US6645884B1 (en) * | 1999-07-09 | 2003-11-11 | Applied Materials, Inc. | Method of forming a silicon nitride layer on a substrate |
SG89410A1 (en) * | 2000-07-31 | 2002-06-18 | Hitachi Ulsi Sys Co Ltd | Manufacturing method of semiconductor integrated circuit device |
JP3420205B2 (ja) * | 2000-11-20 | 2003-06-23 | Necエレクトロニクス株式会社 | 半導体装置の製造方法 |
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2002
- 2002-09-30 KR KR10-2002-0059372A patent/KR100472518B1/ko active IP Right Grant
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2003
- 2003-09-19 WO PCT/KR2003/001915 patent/WO2004030059A1/en active Application Filing
- 2003-09-19 JP JP2004539618A patent/JP2006501649A/ja active Pending
- 2003-09-19 US US10/529,535 patent/US7326438B2/en not_active Expired - Lifetime
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WO2004030059A1 (en) | 2004-04-08 |
KR20040028234A (ko) | 2004-04-03 |
US20060165889A1 (en) | 2006-07-27 |
AU2003263633A1 (en) | 2004-04-19 |
US7326438B2 (en) | 2008-02-05 |
KR100472518B1 (ko) | 2005-03-10 |
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