JP2006337542A - Stage apparatus for color filter substrate, and inspection apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a stage apparatus for a color filter substrate capable of reducing vibration, and to provide a detecting device that uses the same. <P>SOLUTION: The stage apparatus has a stage 7, on which a color filter substrate 6 is placed, a frame 33 for supporting the peripheral part of the stage 7, a damping rod 21 arranged movably, vertically under the stage 7, to be in contact with the undersurface of the stage 7 and a movable rail 36, arranged under the stage 7 and provided movably. The damping rod 21 has a damping rod 21a and a damping rod 21b, arranged at a place different from the place, where the damping rod 21a is arranged in the moving direction of the movable rail 36. When the movable rail 36 is moved to a place corresponding the damping rod 21a, the damping rod 21a goes to descending state and the damping rod 21b abuts against the stage 7. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to a stage device for a color filter substrate and an inspection device using the same.

  In the manufacturing process of color filters for liquid crystal displays, defects in the color filter substrate are detected and corrected in order to improve the yield. In such an inspection apparatus for detecting a defect, a substrate is placed on a stage to optically detect the defect. In this case, the substrate is placed on a transparent stage in order to observe the transmission image. Then, for example, a detector is disposed on the upper part of the substrate, and an illumination light source is disposed on the lower part of the transparent stage to capture a transmission image of the substrate. A glass substrate or the like is usually used for such a transparent stage. In order to accurately detect minute defects on the substrate, it is desirable that the substrate does not vibrate.

  In recent years, the size of a color filter substrate for a liquid crystal display has been increased in order to improve productivity, and for example, a glass substrate of about 2200 × 2400 mm is used. As the color filter substrate increases in size, the transparent stage on which the color filter substrate is placed also increases in size. Therefore, vibration suppression measures are more important. However, there is a limit to the thickness of the transparent glass stage, and it is difficult to make the thickness above a certain level.

  In addition, an apparatus including a sound wave generator for damping vibration is disclosed (Patent Document 1). However, with this apparatus, it has been difficult to reduce the vibration of the substrate placed on the stage. If the substrate vibrates, the defect cannot be detected accurately.

Japanese Patent Laid-Open No. 64-87934

As described above, the conventional inspection apparatus has a problem that the substrate vibrates and the defect cannot be detected accurately.
The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a stage device for a color filter substrate with reduced vibration and an inspection device using the same.

  A stage device for a color filter substrate according to a first aspect of the present invention includes a stage on which a color filter substrate is placed, a frame that supports a peripheral portion of the stage, and a lower side of the stage that supports the stage. A damping member disposed so as to be movable up and down; and a movable rail disposed under the stage and movably provided, wherein the damping member includes a first damping member and the first damping member. A second damping member disposed at a different position in the moving direction of the member and the movable rail, and when the movable rail moves to a position corresponding to the first damping member, the first and first The vibration damping member is lowered, and the second vibration damping member supports the stage. Thereby, vibration can be reduced.

  A stage device for a color filter substrate according to a second aspect of the present invention includes a stage on which the color filter substrate is placed, a movable rail disposed below the stage and movably provided, and supports the stage. And a damping member attached to the movable rail so as to move together with the movable rail. Thereby, vibration can be reduced.

  A stage device for a color filter substrate according to a third aspect of the present invention is the stage device described above, further comprising a drive head attached to the movable rail and movably provided along the movable rail. A vibration member is provided so as to move together with the drive head. Thereby, since the vicinity of the observation point can be supported, vibration can be further reduced.

  A stage device for a color filter substrate according to a fourth aspect of the present invention is the above-described stage device, wherein a damper is provided at the tip of the damping member. Thereby, a vibration can be reduced more.

  A stage device for a color filter substrate according to a fifth aspect of the present invention is the above stage device, wherein a fixed base disposed under the stage, a vibration sensor for detecting vibration, and output vibration from the vibration sensor. And a vibration canceller that is attached to the fixed mount and outputs a sound wave under the stage based on vibration from the phase inverter. Thereby, a vibration can be reduced more.

  A stage device for a color filter substrate according to a sixth aspect of the present invention includes: a fixed base; a stage disposed on the fixed base and on which the color filter substrate is placed; a vibration sensor that detects vibration; A phase inverter that inverts the phase of output vibration from the vibration sensor, and a vibration canceller that is attached to the fixed base and outputs a sound wave under the stage based on the vibration from the phase inverter. Thereby, a vibration can be reduced more.

  A color filter substrate inspection apparatus according to a seventh aspect of the present invention includes any one of the above-described stage apparatuses and an inspection head provided to be movable with respect to the stage apparatus. As a result, vibration can be further reduced, so that inspection can be performed accurately.

  The present invention can provide a stage device for a color filter substrate capable of reducing vibrations and an inspection device using the same.

Embodiments of the present invention will be described below with reference to the drawings. The following description shows preferred examples of the present invention, and the scope of the present invention is not limited to the following examples. In the following description, the same reference numerals denote the same contents.
Embodiment 1 of the Invention

  A pattern substrate defect correcting apparatus according to the present invention will be described with reference to FIGS. 1, 2, and 3. FIG. FIG. 1 is a top view schematically showing the configuration of the defect correcting apparatus. FIG. 2 is a side view showing the configuration of the defect correcting device at the position of the inspection head. FIG. 3 is a side view showing the configuration of the defect correcting device at the position of the damping rod. 6 is a substrate, 7 is a stage, 21 is a damping rod, 22 is a drive mechanism, 23 is a damper, 26 is an air damper, 27 is a fixed mount, 31 is a mount, 32 is a Y rail, 33 is a frame, 34 is an X rail , 35 are inspection heads, 36 is a movable rail, and 37 is a light source head. Here, the substrate will be described as a color filter substrate used in a display device such as a liquid crystal display device. The color filter substrate includes three colored layers of R, G, and B and a light shielding layer provided between the colored layers. In the defect correction apparatus according to the present invention, the substrate 6 is illuminated from the back side by a transmitted illumination light source provided in the light source head 37 disposed under the stage. Then, a transmission image is picked up by a camera provided on the inspection head 35 disposed on the substrate 6. Thereby, the defect of the board | substrate 6 of a board | substrate can be detected optically. Then, the detected defect is repaired.

  As shown in FIG. 2, a gantry 31 is provided on the fixed gantry 27 via an air damper 26. The fixed mount 27 is installed and fixed to the floor surface, for example. A gantry 31 is arranged on an air damper 26 provided on the fixed gantry 27. Thereby, even when the floor vibrates, the vibration is absorbed by the air damper 26. A frame-like frame 33 is provided on the gantry 31. On the frame-like frame 33, a stage 7 made of a transparent glass plate is provided. That is, the vicinity of the outer periphery of the stage 7 is supported by the frame 33. The frame 33 is fixed to the gantry 31, and the stage 7 is fixed to the frame 33. A substrate 6 having a color filter formed on the upper surface is placed on the stage 7. The stage 7 may be an XYZ stage. The stage 7 is a transparent glass substrate with a thickness of 19 mm, for example, and transmits illumination light from below.

  A Y rail 32 is provided outside the stage 7. The Y rails 32 are disposed on both sides of the stage 7 along the Y direction. An X rail 34 is provided on the two Y rails 32. The X rail 34 is provided along the X direction so as to straddle the substrate 6. An inspection head 35 is attached to the X rail 34. The inspection head 35 is provided so as to be movable with respect to the X rail 34. Thereby, the inspection head 35 moves along the X direction. As will be described later, the inspection head 35 is provided with a defect detection mechanism for detecting defects and a defect correction mechanism for correcting defects.

  Further, the X rail 34 is provided so as to be movable with respect to the Y rail 32. As a result, the X rail 34 moves in the Y direction. Accordingly, the inspection head 35 moves on the substrate 6 in the XY directions. That is, the inspection head 35 can be moved two-dimensionally by moving the inspection head 35 in the X direction and moving the X rail 34 to which the inspection head 35 is attached in the Y direction. Thereby, it is possible to detect and correct defects on the entire surface of the substrate 6. In addition, since the footprint of the defect correction apparatus can be reduced, productivity can be improved. The inspection head 35 and the X rail 34 can be driven by a known method such as an AC servo motor.

  A movable rail 36 is provided below the stage 7. A light source head 37 is attached to the movable rail 36. The movable rail 36 is attached to the frame 33 or the gantry 31. Like the inspection head 35, the light source head 37 is provided so as to be movable in the XY directions. That is, the light source head 37 is provided to be movable in the X direction, and the movable rail 36 is provided to be movable in the Y direction. The light source head 37 slides in the X direction and the movable rail 36 slides in the Y direction, so that the light source head 37 can be driven two-dimensionally. The movable rail 36 is provided over substantially the entire width direction of the stage 7 in the X direction so that substantially the entire substrate 6 can be illuminated. Further, the light source head 37 can move following the movement of the inspection head 35. That is, when the inspection head 35 moves, the light source head 37 moves by the same distance in the direction in which the inspection head 35 moves. Thereby, the light source head 37 moves to the same position as the inspection head 35 on the XY plane. Specifically, the light source head 37 and the inspection head 35 move to coordinates corresponding to a movement command from a processing device (not shown). The light source head 37 is provided with a transmission illumination light source for transmission illumination. The light source head 37 will be described later.

  Furthermore, a damping rod 21 is provided under the stage 7 as shown in FIG. As shown in FIG. 1, the damping rod 21 supports the stage 7 at four locations near the center of the stage 7. That is, the two damping rods 21 are disposed along the X direction, and the damping rod 21 is disposed along the Y direction with respect to the two damping rods 21. In other words, two rows of damping rods 21 are arranged in the X direction, and two rows of damping rods 21 are arranged in the Y direction. In order to enable the four damping rods 21 to be raised and lowered, a drive mechanism 22 is attached to the gantry 31 as shown in FIG. That is, the vibration control rod 21 can be moved up and down by driving the drive mechanism 22 including a motor or the like. When the damping rod 21 is raised, the tip of the damping rod 21 comes into contact with the lower surface of the stage 7. That is, the upper surface of the damping rod 21 and the lower surface of the stage 7 are in contact. Thereby, the vibration of the stage 7 can be reduced. It is preferable to provide a damper 23 such as an oil damper at the tip of the damping rod 21. Thereby, the vibration of the stage 7 can be absorbed. The tip portion of the damping rod 21 that comes into contact with the stage 7 is made of a resin material.

  The two rows of damping rods 21 arranged in the Y direction are provided so as to be moved up and down independently for each row, for example, as shown in FIG. 4, provided at different positions in the Y direction. The two damping rods 21 are referred to as damping rods 21a and 21b, respectively. And the drive mechanism 22 is provided with respect to each damping rod 21a, 21b. When the light source head 37 and the movable rail 36 move to the position of the damping rod 21a, the damping rod 21a is lowered and the damping rod 21b is raised. At this time, the two damping rods 21a provided at the same position in the Y direction are simultaneously lowered. Thereby, even if the light source head 37 moves to the position corresponding to the damping rod 21a, it can prevent that the damping rod 21a and the light source head 37 interfere. Accordingly, the substrate 6 can be transmitted and illuminated at a position corresponding to the damping rod 21a to perform inspection. Of course, when the light source head 37 and the movable rail 36 move to the position of the damping rod 21b, the damping rod 21b is in the lowered state and the damping rod 21a is in the raised state. That is, according to the position of the light source head 37, one row of the two rows of damping rods provided along the Y direction is in a lowered state. At this time, the damping rods 21 in the other row are in the raised state and come into contact with the lower surface of the stage, so that vibration can be reduced. Thereby, the test | inspection in the position of the damping rod 21 can be performed in the state which vibration reduced.

  In the above example, four damping rods 21 are provided. However, the number of damping rods 21 may be two or more. That is, if two or more are arranged in a direction inclined with respect to the direction of the movable rail 36, the damping rod 21 corresponding to the position of the movable rail 36 is in the lowered state, and the other damping rod 21 is in the raised state. Good. Of course, when the movable rail 36 and the light source head 37 are in a position where they do not interfere with the damping rod 21, all of the damping rods 21 may be raised. Thereby, since all the damping rods 21 are in contact with the lower surface of the stage 7, the vibration of the substrate 6 can be further reduced.

  Next, the configuration of the inspection head 35 and the light source head 37 will be described with reference to FIG. In the present embodiment, an observation optical system for observing the substrate on the inspection head 35, a confocal optical system for performing height measurement and 3D image measurement, and a defect by removing foreign matter or the like attached to the substrate. A correction optical system for correcting the above is provided. The light source head 37 includes a transmission illumination optical system for performing transmission illumination from below the substrate 6. First, a confocal optical system for height measurement and 3D image measurement will be described. The confocal optical system includes a lamp light source 51, a lens 52, a slit 53, a mirror 54, a lens 55, a beam splitter 56, a scanning mirror 57, a lens 58, a beam splitter 59, and a beam splitter 60. , A lens 61, an objective lens 62, a lens 65, a slit 66, and a CCD camera 67.

  The lamp light source 51 is a xenon lamp light source, for example, and emits white light. The light beam from the lamp light source 51 is refracted by the lens 52 and enters the slit 53. The light incident through the slit 53 is converted into a linear light beam. That is, the slit 53 has a line-shaped opening, and the light beam passes only through the opening. The linear light beam emitted from the slit 53 is reflected by the mirror 54, refracted by the lens 55, and enters the beam splitter 56. A part of the light beam incident on the beam splitter 56 enters the scanning mirror 57. The scanning mirror 57 is a galvanometer mirror, for example, and scans the light beam in a direction perpendicular to the direction corresponding to the opening of the slit 53. Thereby, the linear spot of the light beam on the substrate is scanned in a direction perpendicular to the line. Therefore, the two-dimensional area on the substrate can be illuminated.

  The light beam scanned by the scanning mirror 57 is refracted by the lens 58 and enters the beam splitter 59. A part of the light beam incident on the beam splitter 59 passes through the beam splitter 59 and enters the beam splitter 60. A part of the light beam incident on the beam splitter 60 is refracted by the lens 61 and enters the objective lens 62. A dichroic mirror or a mirror may be selectively used instead of the beam splitter 60. The light beam incident on the objective lens 62 is condensed on the surface of the substrate 6. Since the slits 53 are provided, the light is condensed in a line shape on the surface of the substrate 6. The reflected light reflected by the substrate 6 enters the beam splitter 56 through the same optical path as the incident light incident on the substrate. That is, the reflected light reflected by the substrate 6 passes through the objective lens 62, the lens 61, the beam splitter 60, the beam splitter 59, and the lens 58 and enters the scanning mirror 57. The reflected light reflected by the scanning mirror 57 enters the beam splitter 56. Part of the reflected light incident on the beam splitter 56 passes through the beam splitter 56. The reflected light that has passed through the beam splitter 56 is refracted by the lens 65 and enters the slit 66.

  The light that has passed through the slit 66 provided with the line-shaped opening enters the CCD camera 67. The CCD camera 67 is, for example, a one-dimensional CCD camera and is arranged in the same direction as the slit direction. Here, the substrate 6 and the slit 53, and the substrate 6 and the slit 66 are arranged at conjugate positions to each other, and constitute a slit confocal optical system. Therefore, when the in-focus position is reached, the reflected light from the substrate 6 passes through the slit 66 and is detected by the CCD camera 67. At this time, since the scanning is performed by the scanning mirror 57, a two-dimensional image can be measured. Then, the three-dimensional image of the substrate 6 can be measured by scanning the distance between the substrate 6 and the objective lens 62 and sequentially measuring the two-dimensional slice images. The height of the surface of the substrate 6 can also be measured from the change in the relative distance between the substrate 6 and the objective lens 62 when the in-focus position is reached. Thereby, the height of a projection defect or the like on the substrate 6 can be measured. Furthermore, since vibration is reduced by the damping rod 21, more accurate height measurement and 3D image measurement can be performed.

  Next, the observation optical system will be described. With the observation optical system of the defect correction apparatus according to the present embodiment, a reflected image and a transmitted image can be captured. The inspection head 35 further includes an LED light source 71, a lens 72, a polarizing plate 73, a beam splitter 74, a polarizing plate 75, a mirror 76, a lens 77, and a lens 78 as an observation optical system. A CCD camera 79 is provided. The light source head 37 is provided with a transmission illumination light source 91 as an observation optical system.

  The LED light source 71 is, for example, a white LED light source, and emits white light. The light beam emitted from the LED light source 71 is refracted by the lens 72 and enters the polarizing plate 73. The light beam that has passed through the polarizing plate 73 and has become linearly polarized light enters the beam splitter 59. A part of the light beam incident on the beam splitter 59 is reflected in the direction of the beam splitter 60. Here, the observation optical system and the confocal optical system are arranged so as to propagate on the same optical axis. That is, the light beam from the LED light source 71 reflected by the beam splitter 59 has the same optical axis as the light beam from the lamp light source 51 that has passed through the beam splitter 59. Thereby, a part of the optical system of the observation optical system and the confocal optical system can be shared, and the number of optical components can be reduced. The light beam reflected by the beam splitter 59 passes through the beam splitter 60, is refracted by the lens 61, and enters the objective lens 62. The objective lens 62 condenses the incident light beam on the surface of the substrate 6. Thereby, the illumination light from the LED light source 71 can illuminate from above the substrate 6. That is, the LED light source 71 provided in the inspection head 35 becomes a light source for epi-illumination.

  Of the light beam incident on the substrate 6 from the LED light source 71, the reflected light reflected by the substrate 6 enters the beam splitter 60 through the same optical path as the incident light incident on the substrate. That is, the reflected light reflected by the substrate 6 passes through the objective lens 62 and the lens 61 and enters the beam splitter 60. A part of the reflected light incident on the beam splitter 60 is reflected in the direction of the beam splitter 74. The reflected light that has passed through the beam splitter 74 passes through the polarizing plate 75, is reflected by the mirror 76, is refracted by the lens 77, is refracted by the lens 78, and enters the CCD camera 79. The CCD camera 79 is a two-dimensional CCD camera and captures a reflected image. Thereby, a reflected image can be observed. That is, the illumination light is incident on the substrate 6 from above by the light beam from the LED light source 71 provided as the incident light source. Then, the reflected image can be observed by detecting the reflected light with the CCD camera 79 on the substrate 6.

  The light source head 37 provided below the stage 7 is provided with a transmission illumination light source 91. Light from the transmitted illumination light source 91 passes through the transparent stage 7 and enters the substrate 6. The light source head 37 may be provided with an optical system such as a lens. Of the light from the transmitted illumination light source 91 that has entered the substrate 6, the light that has passed through the substrate 6 enters the CCD camera 79 through the same optical path as the reflected light. That is, the transmitted light transmitted through the substrate 6 from the transmitted illumination light source 91 is the objective lens 62, the lens 61, the beam splitter 60, the beam splitter 74, the polarizing plate 75, the mirror 76, the lens 77, and the lens 78. Through the CCD camera 79. Thereby, a transmission image can be observed. When the reflected image is captured, only the LED light source 71 is turned on, and when the transmitted image is captured, only the transmitted illumination light source 91 is turned on. Defects are detected based on the transmission image or reflection image thus captured. When detecting a defect, the stage 7 is supported by the damping rod 21. Therefore, it is possible to observe in a state where vibration is reduced, and it is possible to perform a stable inspection.

  Next, a correction optical system for correcting defects will be described. The inspection head 35 is further provided with a pulse laser light source 81 and a beam shaping mechanism 82 as a correction optical system. The laser light emitted from the pulse laser light source 81 enters the beam shaping mechanism 82. The beam shaping mechanism 82 is provided with an XY-θ slit, and the laser light shaped by the beam shaping mechanism 82 for shaping the incident laser light into a spot shape corresponding to the defect is reflected by the beam splitter 74, and the beam The light is reflected by the splitter 60, refracted by the lens 61, and enters the objective lens 62. The objective lens 62 condenses the incident laser light and enters the substrate 6. At this time, the laser beam spot is shaped into a shape corresponding to the defect by the beam shaping mechanism. Thereby, defects, such as a foreign material, can be removed and a defect can be corrected.

  In this way, the optical system can be shared by setting the optical axes of a part of the observation optical system, the confocal optical system, and the correction optical system to the same optical axis. In this case, only the observation LED light source 71 or the transmitted illumination light source 91 is turned on during observation, only the lamp light source is turned on during height measurement, and only the pulse laser light source 81 is turned on during correction. In any case, since the vibration is reduced by the damping rod 21, it is possible to more accurately detect the defect, measure the height, and correct the defect.

Note that the configuration of the inspection head 35 according to the present embodiment is not limited to that shown in FIG. 5, and an optical system for performing inspection may be provided in the head. For example, a detector may be provided on the head provided below the stage 7 to provide an inspection head, and a transmission illumination light source may be provided on the head provided above the stage 7. In this case, transmitted illumination light is irradiated from above the stage 7, and transmitted light transmitted through the substrate 6 under the stage 7 is detected. Further, the damping rod 21 according to the present invention may be used in an inspection apparatus that is not provided with a correction optical system, and may further be used in a defect correction apparatus having a defect correction repair. In the above description, the example using the damping rod 21 has been described. However, the damping member is not limited to the rod-shaped member. For example, a wide blade shape can be used. The color filter substrate may be provided with a color filter, and may be a display panel such as a liquid crystal display panel, for example.
Embodiment 2 of the Invention

  The defect correction apparatus according to the present embodiment will be described with reference to FIG. FIG. 6 is an enlarged side view showing the configuration of the damping rod 21 in the defect correcting device. In the first embodiment, the drive mechanism 22 and the damping rod 21 are attached to the gantry 31, but in this embodiment, the drive mechanism 22 is attached to the light source head 37. Note that the description of the configuration is omitted as in the first embodiment.

  In the present embodiment, the damping rod 21 and the drive mechanism 22 are provided in the light source head 37 as shown in FIG. That is, the vibration control rod 21 moves along with the movement of the transmitted illumination light source. Since the damping rod 21 arranged in the vicinity of the transmitted illumination light source moves together with the light source head, the damping rod 21 is brought into contact with the stage 7 in the vicinity of the observation point. Here, while the light source head 37 is moving, the damping rod 21 may be in the lowered state and separated from the stage 7. When the movement is completed and the light source head 37 and the inspection head 35 are arranged at the observation point, the driving mechanism 22 may be driven to bring the damping rod 21 into contact with the stage 7. Alternatively, the light source head 37 may be moved in a state where an air gap is formed between the damping rod 21 d and the mount 31 by ejecting air using the tip portion of the damping rod 21 as an air pad. In this case, the stage 7 is supported by the damping rod while the stage 7 and the damping rod 21 are separated from each other. For this reason, it is not necessary to move the vibration control rod up and down, and the light source head 37 can be moved while the stage 7 is supported. In this way, by providing the damping rod 21 in the light source head 37, the vicinity of the observation point is supported by the damping rod 21. Therefore, the vibration of the substrate 6 at the observation point can be reduced, and the inspection can be performed more accurately. The damping rod 21 may not be attached to the light source head 37 as long as the damping rod 21 is provided so as to be movable together with the light source head 37.

  Furthermore, it is preferable that the damping rod 21 is provided with a damping rod 21d that contacts the upper surface of the gantry 31 in addition to the damping rod 21c that contacts the lower surface of the stage 7. Thereby, the stage 7 can be supported by the light source head 37 supported by the gantry 31. That is, the stage 7 is supported on the gantry 31 via the light source head 37. Thereby, rigidity can be improved more and the stage 7 can be stabilized even when the rigidity of the movable rail 36 is insufficient. The damping rod 21c and the damping rod 21d may be moved up and down synchronously by one drive mechanism 22. The damping rod 21d that is in contact with the gantry 31 may also be separated from the gantry 31 during movement, and may be brought into contact with the gantry 31 after the movement is completed. Alternatively, the light source head 37 may be moved in a state in which the tip of the gantry 31 is an air pad and a minute gap is formed between the damping rod 21d and the gantry 31 by jetting air. In addition, you may make it contact not the mount 31 but the fixed mount 27 and the damping rod 21d. Moreover, you may provide the damper 23 in the lower end of the damping rod 21d. Furthermore, it is preferable that the transmitted illumination light source 91 is sandwiched between the damping rods 21.

  The vibration control rod 21 and the drive mechanism 22 may be attached to the movable rail 36 instead of the light source head 37. This will be described with reference to FIG. A damping rod attachment portion 39 is attached to the movable rail 36. The damping rod mounting portion 39 is fixed to the movable rail 36 and moves with the movement of the movable rail 36. Here, the light source head 37 is provided on one side surface of the movable rail 36, and the damping rod mounting portion 39 is provided on the opposite side surface. Thereby, the light source head 37 can be moved without interfering with the damping rod mounting portion 39. In addition to the damping rod 21e that contacts the lower surface of the stage 7, the damping rod attachment portion 39 may be provided with a damping rod 21f that contacts the upper surface of the gantry 31.

For example, the damping rod mounting portion 39 is provided near the center of the movable rail in the X direction. Thereby, it can prevent that an observation point and the damping rod 21 leave | separate a fixed distance or more. Therefore, the vibration of the observation point can be reduced.
Embodiment 3 of the Invention

  A correction apparatus according to the present embodiment will be described with reference to FIG. In the present embodiment, an acoustic vibration canceller 41 is attached to reduce vibration. The description of the same configuration as that of the above-described embodiment is omitted. In the present embodiment, an acoustic vibration canceller 41 is attached to the fixed base 27. The acoustic vibration canceller 41 is an acoustic speaker, vibrates air based on an input signal, and outputs a damping sound wave. Furthermore, a vibration sensor 42 is provided in the correction device. The vibration sensor 42 is arranged near the sound source arranged in the vicinity of the defect correcting device. For example, it is preferable to arrange in the vicinity of the air outlet of the temperature controller, in the vicinity of the compressor, or in the vicinity of a vacuum pump or the like. The vibration sensor 42 outputs a detection signal based on the detected vibration magnitude. The output from the vibration sensor 42 is inverted in phase by the phase inverter 43 and output to the acoustic vibration canceller 41. The acoustic vibration canceller 41 applies inverted sound to the stage 7. As a result, a vibration suppression sound wave obtained by inverting the vibration of the stage 7 is output, and the vibration from the sound source can be canceled. Thereby, vibration can be reduced.

  Furthermore, since the acoustic vibration canceller 41 is attached to the fixed base 27 installed in a building or the like, the vibration of the acoustic vibration canceller 41 can be efficiently transmitted to the stage 7. Further, by attaching the acoustic vibration canceller 41 to the fixed base 27 and outputting the sound wave for vibration suppression from below the stage, vibration can be reduced without increasing the size of the apparatus. Here, the gantry 31 is provided in a lattice shape. Therefore, even when the acoustic vibration canceller 41 is attached to the fixed base 27 under the base 31, the vibration suppression sound wave propagates to the stage 7 through the base 31. In addition, you may reduce a vibration using the acoustic vibration canceller 41 with the damping rod 21 shown in Embodiment 1-3. Thereby, vibration can be reduced and an inspection can be performed accurately.

It is a top view which shows the whole structure of the defect correction apparatus concerning Embodiment 1 of this invention. It is a side view which shows the structure in the position of the inspection head of the defect correction apparatus concerning Embodiment 1 of this invention. It is a side view which shows the structure in the position of the damping rod of the defect correction apparatus concerning Embodiment 1 of this invention. It is a side view which shows operation | movement of the damping rod of the defect correction apparatus concerning Embodiment 1 of this invention. It is a figure which shows the structure of the test | inspection head and light source head of the defect correction apparatus concerning this invention. It is a side view which shows the structure of the damping rod of the defect correction apparatus concerning Embodiment 2 of this invention. It is a side view which shows the structure of the other damping rod of the defect correction apparatus concerning Embodiment 2 of this invention. It is a side view which shows the structure of the defect correction apparatus concerning Embodiment 3 of this invention.

Explanation of symbols

6 substrate, 7 stage, 21 damping rod, 22 drive mechanism, 23 damper,
27 fixed frame, 31 frame, 32 Y rail, 33 frame, 34 X rail,
35 inspection head, 36 movable rail, 37 light source head,
51 lamp light source, 52 lens, 53 slit, 54 mirror, 55 lens,
56 beam splitter, 57 scanning mirror, 58 lens,
59 beam splitter, 60 beam splitter, 61 lens, 62 objective lens,
65 lens, 66 slit, 67 CCD camera, 71 LED light source,
72 lens, 73 polarizing plate, 74 beam splitter, 75 polarizing plate, 76 mirror, 77 lens, 78 lens, 79 CCD camera, 81 pulse laser light source,
82 Beam shaping mechanism, 91 Transmitted illumination light source

Claims (7)

A stage on which the color filter substrate is placed;
A frame that supports the periphery of the stage;
A vibration damping member arranged to be able to move up and down below the stage so as to support the stage;
A movable rail disposed under the stage and movably provided;
The damping member includes a first damping member, and a second damping member disposed at a different position in the moving direction of the first damping member and the movable rail,
When the movable rail moves to a position corresponding to the first damping member, the first damping member is lowered, and the second damping member of the color filter substrate that supports the stage. Stage device. A stage on which the color filter substrate is placed;
A movable rail disposed under the stage and provided to be movable;
A stage device for a color filter substrate, comprising: a vibration damping member that is arranged to be movable up and down below the stage so as to support the stage and is attached to the movable rail so as to move together with the movable rail. A drive head attached to the movable rail and provided to be movable along the movable rail;
The stage apparatus according to claim 2, wherein the damping member is provided so as to move together with the drive head.   The stage device according to claim 1, wherein a damper is provided at a tip of the vibration damping member. A fixed mount placed under the stage;
A vibration sensor for detecting vibration;
A phase inverter that reverses the phase of the output vibration from the vibration sensor;
5. The stage device for a color filter substrate according to claim 1, further comprising a vibration canceller that is attached to the fixed mount and outputs a sound wave below the stage based on vibration from the phase inverter. A fixed mount;
A stage disposed on the fixed base and on which a color filter substrate is placed;
A vibration sensor for detecting vibration;
A phase inverter that reverses the phase of the output vibration from the vibration sensor;
A stage device for a color filter substrate, comprising: a vibration canceller that is attached to the fixed base and outputs a sound wave under the stage based on vibration from the phase inverter. A stage apparatus according to any one of claims 1 to 6,
An inspection apparatus for a color filter substrate, comprising: an inspection head movably provided with respect to the stage apparatus.

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