JP2003302579A - Sample stage and microscope or measuring instrument using the same - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a sample stage which stabilizes a sample position during sample observation and can smoothly move a sample and a microscope or measuring instrument using this sample stage. <P>SOLUTION: The sample stage is used to be placed on with a sample base 9 and has a sample stage driving mechanism for adjusting the position of the sample base 9 by moving the sample base 9 to a horizontal direction. The sample stage is disposed under the sample base 9 and is provided with a piezo- actuator 1 extending and contracting in a vertical direction. The piezo-actuator 1 is provided with means for holding the actuator in the state of extending the piezo-actuator in an upward direction and means for repeating the extension and contraction. The sample base 9 and the piezo-actuator 1 come into contact with each other in the elongated state of the piezo-actuator 1. <P>COPYRIGHT: (C)2004,JPO

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a sample stage, and more particularly to a sample stage used in a microscope.

[0002]

2. Description of the Related Art Some sample stages of microscopes have a structure for moving a sample in two directions of X and Y in order to adjust the position of the sample. The structure of the sample stage according to the conventional technique will be described with reference to FIG. FIG. 9 is an exploded perspective view of a conventional sample stage. Reference numeral 2 denotes an upper table arranged on the uppermost stage for mounting the sample table. 3 is a middle table arranged under the upper table, and 4 is a lower table arranged under the middle table. These three tables make up the sample stage. A pair of X-axis linear motion bearings 5 are provided on the lower surface of the upper table and the upper surface of the middle table. Then, by rotating the X-direction position adjustment knob 7 provided beside the upper table, the X-axis linear motion bearing 5
The position of is shifted and the position in the X direction can be adjusted. A pair of Y-axis linear motion bearings 6 are provided on the lower surface of the middle table and the upper surface of the lower table. The Y-axis linear motion bearing 6 is provided at a right angle to the X-axis linear motion bearing 5. Then, by turning the Y-direction position adjusting knob 8 provided beside the middle table 3, the position of the Y-axis linear motion bearing 6 is displaced, and the position in the Y-direction can be adjusted. By providing these two linear motion bearings, the sample can be horizontally moved in two directions, and the position can be adjusted. By disposing a microscope on the center of the sample stage, the sample can be observed over almost the entire area of the sample stage.

[0003]

In the conventional sample stage, when the linear motion bearing and the stage components have low rigidity, the floor vibration of the installation environment causes the sample to vibrate during observation, making it difficult to observe. There was a problem. Further, if the rigidity is increased to make it less susceptible to vibration, there is a problem in that the linear motion bearing becomes loose and the sample stage does not move smoothly. Therefore, it is difficult to realize a sample stage that is less likely to be displaced due to external vibration and a sample stage that can move smoothly with one sample stage.

The present invention has been made in order to solve such a problem, and a sample stage in which the sample position is stable during sample observation and the sample can be smoothly moved, and a microscope or measurement using the sample stage. The purpose is to provide a container.

[0005]

A first sample stage according to the present invention is a sample stage for mounting a sample table (for example,
A sample stage 9) according to an embodiment of the present invention, which is a sample stage drive mechanism that moves the sample stage in a horizontal direction to adjust the position of the sample stage (for example, the X-axis in the embodiment of the present invention. Linear motion bearing 5, Y-axis linear motion bearing 6, X-direction position adjustment knob 7 and Y-direction position adjustment knob 8
And a supporting means (for example, the piezo actuator 1 according to the embodiment of the present invention) which is provided under the sample table and partially moves in the vertical direction. The means includes a part of the support means and a part of the support means in a state where the part of the support means is in contact with the sample table in a state where the part of the support means is moved upward, and a part of the support means is It is separated from the sample table. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly.

The second sample stage according to the present invention is a sample stage on which a sample table is mounted (for example, the sample table 9 in the embodiment of the present invention), and the sample table is moved in the horizontal direction. A sample stage drive mechanism for adjusting the position of the sample stage (for example, the X-axis linear motion bearing 5, the Y-axis linear motion bearing 6, the X-direction position adjustment knob 7 and the Y-direction position adjustment knob 8 according to the embodiment of the present invention. Sample stage drive mechanism), an elastic body (for example, the leaf spring 10 according to the embodiment of the present invention) that has a degree of freedom in the vertical direction and fixes the sample stage and the sample stage, and the sample stage And a supporting means (for example, the piezo actuator 1 according to the embodiment of the present invention) which is provided below and a part of which moves in the vertical direction. The supporting means has a part of which moves in the upward direction. In state, and a part between the sample stage is in contact of the support means, in a state where a part thereof is moved downward, in which a part with the sample stage of the support means are separated. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly.

A third sample stage according to the present invention is the second sample stage according to the present invention, characterized in that the elastic body is a leaf spring. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly.

A fourth sample stage according to the present invention is the sample stage according to any one of the first to third aspects of the present invention, in which a control means (a control means for controlling a part of vertical movement operation by the supporting means ( For example, the piezo actuator controller 16) according to the embodiment of the present invention is provided, and this control means includes a first mode in which a part of the supporting means is held in a state of being moved upward and a part of the supporting means is moved up and down. At least the second mode of repeating the movement in the direction is performed, and in the first mode, when a part of the supporting means is moved upward, a part of the supporting means and the sample stage Are in contact with each other, and in the second mode, a part of the supporting means is moved upward,
A part of the supporting means comes into contact with the sample table, and the second
In this mode, when a part of the supporting means is moved downward, the part of the supporting means and the sample stage are separated from each other. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly.

A microscope according to the present invention is a microscope using a fourth sample stage, and is provided with a focus moving means for adjusting a focus shift between the first mode and the second mode. This eliminates the need for readjustment of the focus position and improves operability.

The fifth sample stage according to the present invention is the fourth sample stage according to the present invention, and the sample heights are substantially the same between the first mode and the second mode. As described above, the height is adjusted by the supporting means. This eliminates the need for readjustment of the focus position and improves operability.

A sixth sample stage according to the present invention is the sample stage according to any one of the first to fifth aspects of the present invention, wherein the supporting means is a vertically expanding and contracting means (for example, an embodiment of the present invention. The piezo actuator 1) in 1). As a result, the sample position is stable during sample observation, and the sample can be moved smoothly.

The seventh sample stage according to the present invention is the sample stage according to any one of the fourth to sixth aspects of the present invention, and it is a judging means for judging whether or not the sample stage driving mechanism is in operation ( For example, the electrostatic capacitance detector 14) according to the embodiment of the present invention is provided, and when it is determined that the control unit is operating the sample stage drive mechanism, the second mode is executed, When it is determined that the sample stage drive mechanism is not in operation, the first mode is executed. This stabilizes the sample position during sample observation,
Moreover, the sample can be moved smoothly. Further, the operability can be improved.

An eighth sample stage according to the present invention is the seventh sample stage according to the present invention, wherein the discriminating means discriminates by detecting a change in capacitance of the sample stage drive mechanism. It is characterized by.
As a result, the sample position is stable during sample observation, and the sample can be moved smoothly. Further, the operability can be improved.

A ninth sample stage according to the present invention is the seventh sample stage according to the present invention, wherein the discriminating means discriminates by detecting induction of a commercial power source. . As a result, the sample position is stable during sample observation, and the sample can be moved smoothly. Further, the operability can be improved.

The tenth sample stage according to the present invention is
The seventh sample stage according to the present invention is characterized in that the determining means makes a determination by detecting a change in a current passed through a part of the sample stage driving mechanism. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly. Further, the operability can be improved.

The eleventh sample stage according to the present invention is
The seventh sample stage according to the present invention is characterized in that the determining means performs determination by measuring a stress applied to the sample stage drive mechanism. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly. Further, the operability can be improved.

The twelfth sample stage according to the present invention is
8. The sample stage according to the seventh aspect of the present invention, wherein the discriminating means discriminates by an optical sensor that detects light shielding around the sample stage drive mechanism. To do. As a result, the sample position is stable during sample observation, and the sample can be moved smoothly. Further, the operability can be improved.

The thirteenth sample stage according to the present invention is
The sample stage according to any one of the first to twelfth aspects of the present invention, characterized in that a repetition frequency of a part of the vertical movement of the supporting means is 15 kHz to 30 kHz. This makes it possible to reduce the noise caused by the vertical movement.

The sample stage according to the present invention is preferably used for either a microscope or a measuring instrument.

[0020]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiment 1 of the Invention The structure of the sample stage according to the first embodiment is shown in FIGS.
FIG. 1 is an exploded perspective view of the sample stage according to the first embodiment. 1 is a piezo actuator, 2 is an upper table, 3 is a middle table, 4 is a lower table, 5 is an X-axis linear motion bearing, 6 is a Y-axis linear motion bearing, 7 is an X-direction position adjustment knob, and 8 is a Y-direction position adjustment. Knob, 9 is a sample stand, 11 is a hole, 12 is a long hole, 13 is an opening, and 16 is a piezo actuator controller.

First, the drive mechanism of the sample stage according to the present invention will be described. In the sample stage according to the present invention, the X-axis linear motion bearing 5, the Y-axis linear motion bearing 6, X
A sample stage drive mechanism is composed of the axial position adjustment knob 7 and the Y-axis position adjustment knob 8. The upper table 2 is provided on the uppermost part of the sample stage, and the sample table 9 is placed on the upper table 2.
Put. The sample placed on the sample table 9 is observed from above using a microscope. An intermediate table 3 is arranged below the upper table 2, and a pair of X-axis linear motion bearings 5 are provided on the lower surface of the upper table 2 and the upper surface of the intermediate table 3. An X-direction position adjusting knob 7 for shifting the X-axis linear motion bearing 5 is provided beside the upper table 2.
By turning this X-axis direction position adjustment knob 7 by hand, X
The position of the axial linear motion bearing 5 is displaced, and the upper table 2 can be moved relative to the middle table 3 in the X-axis direction.

A lower table 4 is further arranged below the middle table 3, and a pair of Y-axis linear motion bearings 6 are provided on the lower surface of the middle table 3 and the upper surface of the lower table 4. The Y-axis linear motion bearing 6 is provided at a right angle to the X-axis linear motion bearing 5. A Y-direction position adjusting knob 8 for shifting the Y-axis linear motion bearing 6 is provided beside the intermediate table 3. By turning the Y-axis direction position adjusting knob 8 by hand, the position of the Y-axis linear motion bearing 6 is displaced and the middle table 3 can be moved relative to the lower table 4 in the Y-axis direction.

By thus driving the sample stage, the sample stage 9 has two degrees of freedom in the X and Y directions. Therefore, the position in the plane direction can be adjusted. By disposing a microscope above the center of the sample stage, it is possible to observe almost the entire area of the sample table 9.

Next, the structure of the sample stage having the sample stage drive mechanism and the piezo actuator 1 will be described. One piezo actuator 1, which is an expansion / contraction means, is provided near the center of the lower table. As shown in FIG. 1, through holes are provided in the upper table 2, the middle table 3, and the lower table 4, respectively. The piezo actuator 1 is assembled so as to pass through this through hole. Therefore, the back surface of the sample table 9 arranged on the piezo actuator 1 and the upper table 2 comes into contact with each other.

FIG. 2 shows an exploded enlarged perspective view of the sample stage, which will be described in more detail. A hole 11 having a diameter slightly larger than the diameter of the piezo actuator 1 is provided near the center of the lower table 4. Further, the middle table 3 has an elongated hole portion 1 having a diameter slightly larger than that of the piezo actuator 1.
Two are provided. The long hole 12 is long in the direction in which the middle table 3 moves (Y direction in the present embodiment), and its length is slightly shorter than the length of the sample table 3. Further, the upper table 2 is provided with an opening 13 which is slightly smaller than the sample table 9. With the structure of the sample stage described above, even if the sample moves in the X and Y directions, it is possible to push up the sample table 9 over almost the entire range of the sample table 9.

Next, the vertical expansion and contraction of the piezo actuator 1 and the vertical operation of the sample table 9 will be described. The piezo actuator 1 is a piezoelectric element, and when a voltage is applied, the piezoelectric actuator 1 expands and contracts in the vertical direction according to the voltage. Therefore, the expansion / contraction width and expansion / contraction repetition frequency can be easily set. The operator can apply a voltage to the piezo actuator 1 by using the piezo actuator controller 16. This piezo actuator controller can apply a DC voltage and can adjust the voltage. When a DC voltage of 10 to 20 V is applied to the piezo actuator 1, the tip of the piezo actuator 1 expands and contracts by several μm. 3 (a), 3 (b) and 3 (c) show how the piezo actuator 1 expands and contracts.

FIG. 3A shows a state in which a voltage is applied to the piezo actuator 1. The piezo actuator 1 is in a state of being extended upward due to a force that extends upward due to the voltage. Then, the piezo actuator 1 pushes up the sample table 9, and the sample table 9 and the upper table 2 are held in a separated state. In this state, the sample table 9 is fixed by friction between the contact surface of the actuator 1 and the back surface of the sample table 9. Since the back surface of the sample table 9 and the tip of the piezo actuator 1 are substantially flat, they can be pushed up horizontally.

FIG. 3B shows a state where no voltage is applied to the piezo actuator 1. Since no stretching force is applied to the piezo actuator 1, the piezo actuator 1 is in a contracted state as compared with a state in which a voltage is applied. Therefore, the piezo actuator 1 is not in contact with the sample table 9. Therefore, the sample table 9 is in contact with the upper table 2.

FIG. 3C shows a state in which a voltage lower than the voltage shown in FIG. 3A is applied to the piezo actuator 1. A force extending upward is applied to the piezo actuator 1 so that the piezoelectric actuator 1 is extended upward. However, the force is smaller than the force applied in FIG. 3A and the amount of extension is small, so that the sample table 9 and the upper table 2 are not in a separated state. Therefore, the sample table 9 is in contact with both the piezo actuator 1 and the upper table 2. This state is called the first mode. In the first mode, the sample table 9 is fixed by the frictional force between the contact surface of the actuator 1 and the back surface of the sample table 9 and the frictional force between the back surface of the sample table 9 and the upper stage 2.

At the time of observing the sample with the microscope, a DC voltage is applied to the piezo actuator 1 by using the piezo actuator controller 16, and the first voltage shown in FIG.
Mode. That is, the sample table 9 comes into contact with the piezo actuator 1 and the upper stage 2, and a frictional force is generated between them. Accordingly, the rigidity of the sample stage is low, and even if the sample stage is vibrated due to floor vibration or the like in the installation environment, the sample table 9 is less likely to be vibrated. Further, by making the material of the piezo actuator 1 to have high rigidity such as ceramic, the sample stage 9 becomes more difficult to vibrate. Therefore, the position variation of the sample can be reduced, and the observation can be performed stably.

When adjusting the position of the sample, the applied voltage is set to 0 by using the piezo actuator controller 16.
Switch to V. By doing so, the sample stage 9 and the piezo actuator 1 shown in FIG. 3B are separated from each other. In this state, the piezo actuator 1 and the sample table 9
No friction will occur. Therefore, the sample stage can be moved smoothly, and the sample can be easily positioned. Therefore, by switching the voltage to be applied between the time of observing the sample and the time of adjusting the sample position, it is possible to realize a sample stage in which there is little positional fluctuation due to external vibration and a sample stage that can be moved smoothly in one sample stage.

In this embodiment, the voltage applied at the time of position adjustment is 0V, but the voltage is not limited to 0V, and it is possible to create a state in which the sample stage 9 and the piezo actuator 1 shown in FIG. 3B are separated from each other. Any voltage will do. For example, a low voltage may be applied to give elongation to the extent that no contact is made. Further, an AC voltage having a small amplitude may be applied. The same effect can be obtained also by these.

The sample table 9 at the time of adjusting the sample position is shown in FIG.
Is in the state of. Therefore, the focus position of the microscope hardly changes when the sample position is adjusted. Therefore, the sample table 9 hardly changes in the height direction. Therefore, the position can be easily adjusted while observing the sample, and it is suitable to use for a microscope such as an optical microscope or a measuring instrument.

Since the state of FIG. 3 (c) is observed during sample observation and the state of FIG. 3 (b) is observed during sample position adjustment, the height of the sample table hardly changes. Therefore, there is almost no change in the focus position of the microscope with respect to the sample during sample position adjustment and sample observation, and readjustment of the focus position is not necessary when the stage is moving and when the stage is stationary, thus improving operability.

Embodiment 2 of the present invention. FIG. 4 shows an exploded perspective view of the sample stage according to the second embodiment of the present invention.
1 and 2 are the same as or equivalent to those shown in FIG. 1 or 2, and the description thereof is omitted.

Also in the second embodiment, as in the first embodiment, the X-axis direction position adjustment knob 6 and the Y-axis direction position adjustment knob 8 are provided.
The position of the sample stage can be adjusted in the X and Y directions by manually rotating, and by arranging the microscope on the center of this sample stage, it is possible to observe almost the entire area of the sample table 9.

This is different from the first embodiment in that the sample table 9 is fixed to the upper table 2 by using a leaf spring 10. As shown in FIG. 4, the leaf springs 10 are attached to the four corners of the sample table and fixed to the upper table 2 in the X and Y directions. Further, since the leaf spring 10 is an elastic body, it has a slight degree of freedom in the vertical direction (that is, the Z direction),
The sample table 9 also has a degree of freedom in the Z direction. Therefore, by applying a voltage to the piezo actuator 1 as in the first embodiment, the piezo actuator 1 extends as shown in FIG. 3C and comes into contact with the sample stage 9. Sample table 9
Indicates that a frictional force is generated between the piezo actuator 1 and the upper stage 2. Further, it is in a state of being suppressed by the leaf spring 10.

In the second embodiment, as in the first embodiment, a DC voltage is applied to the piezo actuator 1 to bring the sample table 9 into contact with the sample actuator 1 when observing the sample. Here, FIG.
The state shown in (c) is set as the first mode. Therefore, the sample table 9 is supported from below by the piezo actuator 1 and fixed by frictional force. Further, the state is suppressed by the leaf spring 10 from above. As a result, even if the rigidity of the sample stage is low, the sample stage 9 is less susceptible to the vibration of the sample stage that is received by the floor vibration of the installation environment. Further, by making the material of the piezo actuator 1 to have a high rigidity such as ceramic, the sample stage 9 becomes more difficult to vibrate. Therefore, the position variation of the sample can be reduced in any of the X, Y, and Z directions, and the observation can be stably performed.

At the time of adjusting the sample position, the same effect can be obtained by applying 0 V or a low voltage as in the first embodiment and setting the state of FIG. 3 (b). Therefore, it is suitable to use for a microscope or a measuring instrument.

The sample table 9 is fixed to the upper table 2 by using a leaf spring 10, and the leaf spring 10 has almost no elasticity in the X and Y directions. Therefore, it is possible to suppress the variation of the sample table 9 in the X, Y directions and the rotation direction.

In the present embodiment, since the sample table 9 is fixed by the leaf spring 10, a higher voltage may be applied when observing the sample and the state shown in FIG. 3 (a) may be obtained. In this state, the sample table 9 comes into contact with the piezo actuator 1 and a frictional force is generated therebetween. The state is suppressed by the leaf spring 10 from above. As a result, even if the rigidity of the sample stage is low, the leaf spring 10 absorbs the vibration of the sample stage caused by the floor vibration or the like of the installation environment, and the sample table 9 is less susceptible to the vibration. Also piezo actuator 1
By using a material having high rigidity such as ceramics, the sample table 9 becomes less likely to vibrate. Therefore, the same effect can be obtained. Further, fine adjustment of the voltage is unnecessary.

In the above case, the height of the sample table 9 is different when observing the sample and when adjusting the sample position. Therefore, it is desirable to provide a focus moving means for adjusting the shift of the focus position due to the difference in sample height during observation and during adjustment. For example, the focus of the objective lens may be adjusted during the movement and the adjustment, or the height of the microscope with respect to the sample stage 9 may be adjusted. This eliminates the need for readjustment of focus and improves operability.

Further, since the leaf spring 10 has elasticity in the vertical direction, even if the sample table is tilted and pushed up, the tilt can be absorbed by the expansion and contraction of the individual leaf springs 10 provided at the four corners. This makes it possible to keep the sample table 9 horizontal.

The places and the number of the leaf springs 10 to obtain these effects are not limited to four at the four corners shown in FIG. 4, but at least two or more may be provided at any place. As a result, the tilt when the sample table 9 is lifted can be absorbed, and the sample table 9 can be kept horizontal.

Further, the sample table 9 and the upper table 2 are not limited to being fixed by the leaf spring 10, but may be an elastic body such as a spring or rubber. Further, the position to be fixed does not have to be the upper surface of the sample table 9. Therefore, as shown in FIG. 5, an elastic rubber 15 having an appropriate elastic coefficient may be provided below the sample table 9. As a result, even if the rigidity of the sample stage is not increased, vibration of the sample stage caused by floor vibration of the installation environment, etc.
Is absorbed and the sample table 9 is hard to receive. Therefore, the position variation of the sample can be reduced, and the observation can be performed stably.

Embodiment 3 of the present invention. In the third embodiment of the present invention, the voltage applied at the time of adjusting the sample position in the first and second embodiments is changed. Therefore, the components denoted by the same reference numerals as those shown in FIG. 1, FIG. 2 or FIG. 4 indicate the same or corresponding parts as in FIG. 1, FIG. 2 or FIG. In this embodiment, the piezo actuator controller 16 can apply not only a DC voltage but also an AC voltage, and can adjust its amplitude and frequency.

In the third embodiment, the leaf spring 10 shown in the first embodiment may not be provided, or the leaf spring 10 shown in the second embodiment may be provided. The observation of the sample is the same as that of the above-described embodiment, and thus the description thereof is omitted.

When adjusting the position of the sample, the applied voltage is switched from the DC voltage to the AC voltage by using the piezo actuator controller 16. The piezo actuator 1 repeats expansion and contraction according to the voltage. Therefore, the states of FIG. 3B and FIG. 3C are repeated. This is the second mode. By doing so, Fig. 3 (b)
A state in which the sample table 9 and the piezo actuator 1 are separated from each other occurs. In this state, friction does not occur between the piezo actuator 1 and the sample table 9. Therefore, the sample stage can be moved smoothly, and the sample can be easily positioned. Therefore, by switching the voltage applied during sample observation and sample position adjustment,
A single sample stage can realize a sample stage that is less likely to change in position due to external vibration and a sample stage that can move smoothly.

In the present embodiment, when the amplitude of the alternating voltage is large, the sample table 9 is pushed up as shown in FIG. 3 (a), and the states of FIGS. 3 (a) and 3 (b) are repeated. become. When the frequency of the AC voltage is increased, the up and down movement of the sample table 9 will cause the piezo actuator 1 to move.
It will be later than the stretching operation of. Therefore, when the piezo actuator 1 is contracted, the sample table 9 may not be in contact with the piezo actuator 1 and the upper table 2, that is, may be in a state of floating in the air as shown in FIG. Therefore, the piezo actuator 1 and the sample table 9 repeat the state of FIG. 3D and the state of FIG. 3A. In this case, the state in which FIG. 3A and FIG. 3D are repeated is the second mode. This allows
The amplitude of the AC voltage can be easily adjusted. In order to repeat the state of FIG. 3 (a) and the state of FIG. 3 (d), the frequency of the alternating voltage is set to 15 to 30 kHz here.
z. At this frequency, piezo actuator 1
It is possible to reduce noise caused by expansion and contraction in the vertical direction.

In the above-mentioned embodiment, when the sample is observed, as shown in FIG.
A state where the sample table 9 and the piezo actuator 1 in (d) are separated from each other occurs. Therefore, friction between the piezo actuator 1 and the sample table 9 does not occur. Therefore, if the plate spring 10 is provided, the sample stage can be moved smoothly and the sample can be easily positioned. Therefore, by switching the voltage to be applied between the time of observing the sample and the time of adjusting the sample position, it is possible to realize a sample stage in which there is little positional fluctuation due to external vibration and a sample stage that can be moved smoothly in one sample stage.

In the above case, the height of the sample table 9 is different when observing the sample and when adjusting the sample position. Therefore, it is desirable to provide a focus moving means for adjusting the shift of the focus position due to the difference in sample height during observation and during adjustment. For example, the focus of the objective lens may be adjusted during the movement and the adjustment, or the height of the microscope with respect to the sample stage 9 may be adjusted. This eliminates the need for readjustment of focus and improves operability.

Further, since there is almost no change in the focus position of the microscope with respect to the sample when adjusting the sample position, the sample hardly changes in the height direction. Therefore, the position can be easily adjusted while observing the sample. Therefore, it is suitable to use for a microscope such as an optical microscope.

Fourth Embodiment of the Invention The sample stage according to the fourth embodiment is obtained by improving the operability of the sample stages of the above-described first, second, and third embodiments. In the first, second and third embodiments, the voltage applied to the piezo actuator 1 is switched manually by using the piezo actuator controller 16. Fourth Embodiment
Then, this voltage switching is automatically performed by a detector provided on the sample stage. The sample stage according to the fourth embodiment will be described with reference to FIG. Figure 6
FIG. 4 is an exploded perspective view of the sample stage according to the present embodiment. The components denoted by the same reference numerals as the symbols shown in FIG. 1, FIG. 2 or FIG. 4 are the same as or equivalent to those in FIG. Although FIG. 6 illustrates the sample stage according to the third embodiment provided with the above-mentioned automatic switching means for the applied voltage, the same applies to the case where the sample stage according to the first and second embodiments is provided with the automatic switching means. The effect is obtained.

The fourth embodiment is different in that an electrostatic capacitance detector 14 is provided as a discriminating means. The capacitance detector 14 is connected to the X-direction position adjustment knob 7 and the Y-direction position adjustment knob 8. The capacitance detector 14 is connected to a piezo actuator controller 16. And the piezo actuator controller 16
Is connected to the piezo actuator 1 and applies a voltage.

When adjusting the sample position, the operator manually turns the X-direction position adjustment knob 7 or the Y-direction position adjustment knob 8 to drive the sample stage. During sample observation, the operator releases the X-direction position adjustment knob 7 and the Y-direction position adjustment knob so that the position of the sample table does not change, and the sample stage is stopped. Therefore, the knob comes into contact with the operator's hand during position adjustment, and the knob does not come into contact with the operator's hand during sample observation.

Using the capacitance detector 14, the capacitances of the X-direction position adjustment knob 7 and the Y-direction position adjustment knob are observed. Since the capacitance changes when the operator's hand touches either the X or Y knob, it is possible to determine whether or not the sample stage is driven. This makes it possible to determine whether the sample is being observed or the position is being adjusted. When the operator's hand touches one of the knobs and determines that the position is being adjusted, the piezo actuator controller 16 may apply an AC voltage to the piezo actuator 1. Therefore, the piezo actuator 1 operates in the second mode. On the contrary, when the operator's hand does not touch either knob and it is determined that the sample is being observed, the piezo actuator controller 16 may apply a DC voltage to the piezo actuator 1. Therefore, the piezo actuator 1 operates in the first mode.

This allows the operator to switch between the first mode and the second mode without operating the piezo actuator controller 16. Therefore, it is possible to improve the operability of the sample stage in which the sample position is stable during sample observation and the sample can be moved smoothly. Further, the operability is improved.

When it is determined that the position is adjusted, the piezo actuator controller 16 can apply 0V or a low voltage or an AC voltage with a small amplitude to the piezo actuator 1 as in the first or second embodiment. . As a result, the state shown in FIG. 3B becomes the second mode. Thereby, the same effect can be obtained.

In the present embodiment, when an AC voltage having a large amplitude is applied, the second mode is used, as shown in FIGS.
Repeat (d). Therefore, the height of the sample is different between when the sample is observed and when the position is adjusted, and the focus position shifts. The actuator controller 16 is provided with a circuit for detecting the deviation of the focal position and adjusting the amplitude, frequency, etc. of the applied AC voltage.
In this case, it becomes unnecessary to readjust the focus position when the stage is moving and when the stage is stationary, and the operability is improved.

In FIG. 6, the electrostatic capacity detector 14 is used to automatically switch the voltage, but it is also possible to detect whether the operator's hand and the knob are in contact with each other by another electric method. . For example, induction of a commercial power source may be detected, or a weak current may be applied to the knob to detect a change in current when the operator's hand comes into contact with the knob. The same effect can be exerted even with these.

Further, it may be detected by a detection method other than the above-mentioned electrical detection method. For example, the stress applied to the mechanism of the drive system of the stage may be measured with a strain gauge to determine that the operator is turning the knob when the DC component of the stress increases. Also, an optical sensor such as an area sensor is provided between the operator and the position adjustment knob,
If the light from the sensor is blocked, it can be determined that the position is being adjusted. Alternatively, a door may be provided in front of the position adjustment knob and the determination may be made by opening or closing the door. Similar effects can be exhibited by these methods.

Other Embodiments. In the above-described embodiment, the surface where the piezo actuator 1 comes into contact with the sample table 9 is shown as a flat surface, but it may be a convex spherical surface as shown in FIG. Further, it is desirable that the spherical surface be a gentle convex type. Accordingly, even when the piezo actuator extends while being inclined with respect to the sample table, the inclination can be absorbed and the sample table can be pushed up horizontally. Further, the material of the back surface of the sample table may be tool steel such as SK material having high hardness or stainless steel. Thereby, the deformation of the back surface of the sample table 9 due to the expansion and contraction of the piezo actuator 1 can be suppressed. Similarly, the contact portion at the tip of the piezo actuator 1 may be made of tool steel such as SK material having high hardness or stainless steel. Thereby, the deformation of the tip portion of the piezo actuator 1 can be suppressed and the durability can be improved.

In the above-described embodiment, the expansion / contraction means for pushing up the sample table 9 is a piezo actuator (piezoelectric element), but the same effect can be obtained even if an expansion / contraction member such as a voice coil that expands and contracts electromagnetically is used. You can Further, a mechanism for changing the frequency and amplitude of the voltage applied to the piezo actuator 1 or its AC voltage may be provided so that it can be adjusted according to the weight of the sample. The waveform of the AC voltage may be a sine wave, a rectangular wave, or a sawtooth wave,
Similar effects can be obtained with other waveforms. Further, the same effect can be obtained by superposing the AC voltage and the DC voltage. Further, instead of the expansion / contraction means, a part of the support means may be moved up and down to push up the sample table.

In the above embodiment, only one piezo actuator 1 is provided at the center of the sample stage.
It is also possible to support the sample table 9 at three points as shown in FIG. Accordingly, the height of each piezo actuator 1 is adjusted by controlling the voltage applied to the piezo actuator 1, whereby the horizontal of the sample table 9 can be finely adjusted. Further, in this case, since the piezo actuator 1 does not exist near the center of the sample stage, it is possible to use a transmission microscope. Further, if a plurality of piezo actuators 1 are provided at any place other than the three points shown here, the horizontal can be finely adjusted similarly. If the piezo actuator 1 is not provided near the center of the sample table, it can be used for a transmission microscope.

In the above-mentioned embodiment, the position of the sample is adjusted by the position adjusting knobs in the X and Y directions. However, the position adjustment is not limited to the knob, and the position may be adjusted by using a lever, a knob or a dial. Good. Further, a detector such as a capacitance detector may be provided on these levers, dials, knobs or the like to switch the application of the DC voltage and the AC voltage. Further, the position adjustment is not limited to the right-angled X and Y directions, and the position adjustment may be performed in the plane direction. For example, linear movement bearings may be provided in two directions that are not right angles so that the position can be adjusted. Further, the position may be adjusted in the r and θ directions. In this case, it is useful to use a circular sample or sample stage. Further, it may be a sample stage having a drive mechanism with only one degree of freedom in the X direction or the θ direction.

The sample stage according to the present invention is preferably used for a microscope which is manually adjusted in position. Further, it can be used for any microscope such as an optical microscope, an electron microscope or a laser microscope having a sample stage driving mechanism. It can also be used in a microscope for measuring the size and height of a sample.

The sample stage according to the present invention can also be used in a microscope which automatically moves the sample stage position, for example, a scanning microscope. In this case, a similar effect can be obtained by incorporating a circuit for determining whether the sample stage position is moving or stationary in the drive circuit of the sample stage.

Further, the sample stage according to the present invention can be used not only in a microscope but also in other observation equipment, measurement equipment, analysis equipment, and inspection equipment having a position adjusting function.

[0069]

According to the present invention, it is possible to provide a sample stage in which the sample position is stable during sample observation and the sample can be moved smoothly, and a microscope using the sample stage.

[Brief description of drawings]

FIG. 1 is an exploded perspective view of a sample stage according to a first embodiment of the present invention.

FIG. 2 is an exploded enlarged perspective view of the sample stage according to the first embodiment of the present invention.

3A to 3C are enlarged cross-sectional views of a contact portion between a sample stage and a piezo actuator of a sample stage according to the present invention. FIG. 3A is a diagram showing a state where the piezo actuator is extended and pushed up. Figure 3 (b)
FIG. 6 is a diagram showing a state in which the piezo actuator is contracted. FIG. 3C is a diagram showing a state where the piezo actuator extends and contacts the sample stage. FIG. 3D is a diagram showing a state in which the piezo actuator expands and contracts at a high frequency, and the sample stage floats in the air.

FIG. 4 is an exploded enlarged perspective view of a sample stage according to a second embodiment of the present invention.

FIG. 5 is an enlarged cross-sectional view of a sample stage of another embodiment according to the second exemplary embodiment of the present invention.

FIG. 6 is an exploded perspective view of a sample stage according to a fourth embodiment of the present invention.

FIG. 7 is an enlarged view of a tip end portion of a piezo actuator used in a sample stage according to another embodiment of the present invention.

FIG. 8 is a layout view of a piezo actuator of a sample stage according to another embodiment of the present invention.

FIG. 9 is an exploded perspective view of a sample stage according to a conventional technique.

[Explanation of symbols]

1 Piezo actuator 2 Upper table 3 Medium table 4 lower table 5 X-axis linear motion bearing 6 Y axis linear motion bearing 7 X direction position adjustment knob 8 Y direction position adjustment knob 9 sample table 10 leaf spring 11 holes 12 oblong hole 13 openings 14 Capacitance detector 15 rubber 16 Piezo actuator controller

Claims (17)

[Claims] 1. A sample stage on which a sample stage is mounted, the sample stage driving mechanism for moving the sample stage in a horizontal direction to adjust the position of the sample stage, and a sample stage driving mechanism provided under the sample stage. A part of the support means that moves in the up-down direction, the support means, when a part of the support means is moved upward, a part of the support means is in contact with the sample table, and a part of the support means is lower. A sample stage in which a part of the supporting means and the sample table are separated from each other in a state of being moved in the direction. 2. A sample stage on which a sample stage is mounted, the sample stage driving mechanism for moving the sample stage in a horizontal direction to adjust the position of the sample stage, and having a vertical degree of freedom, An elastic body that fixes the sample stage and the sample stage, and a support unit that is provided below the sample stage and that partially moves in the vertical direction are provided, and the supporting unit has a part that has moved upward. A sample stage in which a part of the supporting means and the sample table are in contact with each other in the state, and a part of the supporting means and the sample table are separated from each other when the part moves downward. 3. The sample stage according to claim 2, wherein the elastic body is a leaf spring. 4. The sample stage according to claim 1, further comprising a control means for controlling a part of the supporting means in a vertical movement operation, the control means being one of the supporting means. At least a first mode of holding the part in a state of moving in the upward direction and a second mode of repeating a part of the supporting means in the vertical direction are executed, and in the first mode, In a state where a part of the supporting means moves upward, a part of the supporting means comes into contact with the sample stage, and in the second mode, when a part of the supporting means moves upward. , A part of the supporting means comes into contact with the sample table, and in the second mode, when the part of the supporting means moves downward, the part of the supporting means and the sample table are separated from each other. The sample stage to be used. 5. A microscope using the sample stage according to claim 4, further comprising a focus moving means for adjusting a focus shift between the first mode and the second mode. 6. The sample stage according to claim 4, further comprising sample height adjusting means for making the sample height substantially the same between the first mode and the second mode. Sample stage. 7. The sample stage according to claim 1, wherein the supporting means is a vertically expanding and contracting means. 8. The sample stage according to claim 7, wherein the expanding and contracting means is a piezoelectric element, and the piezoelectric element is expanded and contracted by applying a voltage to the piezoelectric element. 9. The sample stage according to claim 4, further comprising: a determination unit that determines whether or not the sample stage drive mechanism is in an operating state, wherein the control unit drives the sample stage drive. When it is determined that the mechanism is operating, the second mode is executed, and when it is determined that the sample stage drive mechanism is not operating, the first mode is executed. Sample stage. 10. The sample stage according to claim 9, wherein the determination unit makes a determination by detecting a change in electrostatic capacitance of the sample stage drive mechanism. 11. The sample stage according to claim 9, wherein the discrimination means discriminates by detecting induction of a commercial power source. 12. The sample stage according to claim 9, wherein the determining means makes a determination by detecting a change in a current passed through a part of the sample stage driving mechanism. 13. The sample stage according to claim 9, wherein the judging means makes a judgment by measuring a stress applied to the sample stage driving mechanism. 14. The sample stage according to claim 9, wherein the discriminating means discriminates by an optical sensor for detecting light shielding around the sample stage driving mechanism. 15. The sample stage according to any one of claims 1 to 4 or 6 to 14, wherein a repetition frequency of a part of the vertical movement of the supporting means is 15 kHz to 30 kHz. 16. A microscope using the sample stage according to any one of claims 1 to 4 or 6 to 15. 17. A measuring instrument using the sample stage according to any one of claims 1 to 4 or 6 to 15.