KR101218531B1

KR101218531B1 - Inspection apparatus for glass substrate

Info

Publication number: KR101218531B1
Application number: KR1020100081706A
Authority: KR
Inventors: 마사노부 이에다; 유우이찌 시모다
Original assignee: 가부시키가이샤 히다치 하이테크놀로지즈
Priority date: 2009-09-24
Filing date: 2010-08-24
Publication date: 2013-01-03
Also published as: KR20110033023A; JP2011069655A; JP5380225B2; CN102033067A

Abstract

The objective of this invention is providing the inspection apparatus of the glass substrate which can reduce the deformation | transformation at the time of apparatus division, and a vibration, and can test with high precision.
The present invention provides an inspection stage for loading a glass substrate, an optical unit for irradiating inspection light to the glass substrate, and receiving scattered light scattered by foreign matter on the surface or inside of the glass substrate, the inspection stage and In the glass substrate inspection apparatus which has the base which has the drive part which moves at least one of the said optical parts, and the leg part which mounts the said base, WHEREIN: The at least said base among the said base and the said inspection stage is divided into multiple in the said moving direction, The leg portion is characterized in that it is composed of a rigid body.

Description

Glass Substrate Inspection Equipment {INSPECTION APPARATUS FOR GLASS SUBSTRATE}

TECHNICAL FIELD This invention relates to the glass substrate test | inspection apparatus used for manufacture of a display panel, etc., and especially relates to the glass substrate test | inspection apparatus suitable for inspecting the surface flaw and a foreign material of a glass substrate.

The manufacture of TFT (Thin Film Transistor) substrates, color filter substrates, substrates for plasma display panels, substrates for organic EL (Electroluminescence) display panels and the like of liquid crystal display devices used as display panels is carried out on a glass substrate by photolithography. It is performed by forming a pattern in the. In that case, when defects, such as a flaw and a foreign material, exist in the surface or inside of a glass substrate, a pattern will not be formed satisfactorily and it will become a cause of a defect. For this reason, inspection of defects, such as a surface flaw and a foreign material, of a glass substrate is performed using a defect inspection apparatus.

Currently, enlargement of a glass substrate advances and production of the 10th generation glass substrate (2850 mm x 3050 mm) is planned. The enlargement of the test | inspection apparatus accompanying this is also essential. If the inspection apparatus is enlarged, it is necessary to make the apparatus into a divided structure from the relation of manufacturability and transportation.

As a dividing structure of such an apparatus, a method of dividing a base frame into three in an exposure apparatus for a display substrate has been proposed (Patent Document 1).

Japanese Patent Application Publication No. 2007-65588

When the inspection apparatus is divided, the rigidity of the apparatus is lowered, the vibration of the division unit is synthesized, and a problem arises that the deformation and the vibration become large. When deformation | transformation and a vibration become large, there exists a possibility that the inspection precision of a glass substrate may reduce.

However, in the apparatus disclosed in the patent document 1, such a problem is not considered.

This invention is made | formed in view of such a problem, and an object of this invention is to provide the inspection apparatus of the glass substrate which can reduce the deformation | transformation and vibration at the time of apparatus division | segmentation, and can inspect with high precision.

In order to achieve the above object, the present invention provides an inspection stage for loading a glass substrate, and an inspection light for irradiating inspection glass onto the glass substrate, and the inspection light receiving scattered light scattered by foreign matter on the surface or inside of the glass substrate. A glass substrate inspection apparatus having a base, a base having a driving unit for moving at least one of the inspection stage and the optical unit, and a leg for installing the base, wherein at least the base of the base and the inspection stage is moved. The first feature is that the leg portion is divided into a plurality of directions, and the leg portion is formed of a rigid body.

Moreover, in order to achieve the said objective, in addition to a 1st characteristic, what provided the said leg part in the corner part of each base divided | segmented is a 2nd characteristic.

Moreover, in order to achieve the said objective, in addition to a 1st or 2nd characteristic, it is a 3rd characteristic that the said expectation divided into N [integer] division | segmentation, and the inspection stage N-1 division.

Moreover, in order to achieve the said objective, in addition to a 3rd characteristic, Nth base which is one end side of the said N division is a standby position of the said optical part, and M (<= N-1, integer) th of the said divided | segmented inspection stages The fourth feature is that the length of the moving direction of the inspection stage is shorter than the length of the moving direction of the M-th base.

Finally, in order to achieve the above object, in addition to the fourth feature, the fifth feature is that N is three.

According to this invention, the deformation | transformation and vibration at the time of device division | segmentation can be reduced, and the inspection apparatus of the glass substrate which can be inspected with high precision can be provided.

1 is a perspective view of a glass substrate inspection device according to an embodiment of the present invention.
It is a side view of the glass substrate test | inspection apparatus which is embodiment of this invention seen from the direction of arrow AA in FIG.
FIG. 3 is another side view of the glass substrate inspection device according to the embodiment of the present invention as seen from the direction of arrow B in FIG. 1. FIG.
4 shows a lower frame of the base frame.
5 is a side view of a leg portion of the glass substrate inspection device according to the embodiment of the present invention.
It is another side view of the leg part of the glass substrate inspection apparatus which is embodiment of this invention seen from the direction of arrow C in FIG.
FIG. 7 is a side view corresponding to FIG. 5 of a leg portion of a conventional glass substrate inspection apparatus. FIG.

The whole structure of the glass substrate test | inspection apparatus 100 which is embodiment of this invention is shown in FIGS. FIG. 1: shows the perspective view of the glass substrate test | inspection apparatus which is this embodiment, FIG. 2 shows the side view of the glass substrate test | inspection apparatus which is this embodiment seen from the direction of arrow AA in FIG. 1, and FIG. 3 is FIG. Another side view of the glass substrate test | inspection apparatus which is this embodiment seen from the direction of arrow B is shown.

The glass substrate test | inspection apparatus 100 which is this embodiment is largely distinguished, and the base frame 1, the test | inspection stage 2, the optical part 3, the leg part 20 (refer FIG. 2), and the control part which controls these ( 40).

In this embodiment, as shown in FIG. 2, FIG. 3, the base frame 1 is made into the three division structure of the frames 1a, 1b, and 1c, and the inspection stage is made into the two division structure of 2a and 2b. . As shown in FIG. 3, the optical part 3 has a structure of a sentence shape, and the optical microscope part 30 (refer FIG. 1) which performs detailed inspection with three optical heads 4a, 4b, and 4c. ) In addition, the leg part 20 is provided in plurality in the corner part of the lower frame mentioned later (in this embodiment, one side 6 pieces, 12 pieces in total).

The division position was determined as follows in consideration of workability. That is, the inspection stage 2a, 2b divided | segmented into 2, the length of the X direction shown in FIG. 2 is shorter than the length of the X direction of divided base frame 1a, 1b, and the inspection stage 2a is In the base frame 1a, the inspection stage 2b is divided so as to be transported in the state mounted on the base frame 1b, and the optical unit 3 is mounted on the base frame 1c. In addition, at the time of inspection, the base frame 1c is also the standby position of the optical part 3.

The base frames 1a, 1b, 1c are each composed of the upper frames 1au, 1bu, 1cu and the lower frames 1ad, 1bd, 1cd. As shown by reference numerals 1ad and 1bd in FIG. 4, the lower frame has a grid-like skeleton formed in a square outer frame, and both end sides on which the leg portion 20 is mounted are a thin lattice. In addition, each lower frame is firmly fixed to each other by a bolt or the like. By this structure, this glass substrate test | inspection apparatus improves rigidity.

On the other hand, the upper frame (1au, 1cu) of the upper frame has a U-shape, the frame (1bu) is the frame is arranged only on both sides. This structure enables the inspection stages 2a and 2b to move inside the frames 1a, 1b and 1c.

In the base frame, the linear guide rails 5a and 5b (see FIG. 3) for moving the inspection stage 2 in the X direction are provided in the lower frames 1ad, 1bd and 1cd. Linear guide rails 6a and 6b are attached to upper frame 1au, 1bu, 1cu in lower frame 1ad. Moreover, the linear guide rails 7a and 7b for moving the optical part 3 in the outer side of the linear guide rails 6a and 6b are provided in upper frame 1au, 1bu, 1cu in parallel. The linear guide rails 6a, 6b, 7a, and 7b are divided similarly to the base frame over the whole base frame 1b, 1c. The dividing positions of the linear guide rails 6a, 6b, 7a, and 7b are shifted from the dividing positions of the base frame in order to reduce rattling at the dividing portions.

As illustrated in FIG. 2, the inspection stages 2a and 2b have the configuration of the stage bases 9a and 9b, the support pillars 10a and 10b, and the stages 11a and 11b, respectively. There are a plurality of support pillars 10a and 10b in each inspection stage, and in this embodiment, six are provided in the inspection stage 2a and four in the inspection stage 2b. Each of the stage base 9 and the stage 11 moves the slide movers 15a, 15b, 16a, and 16b corresponding to the respective linear guide rails moving on the linear guide rails 5a, 5b, 6a, and 6b. Have a plurality. Here, as shown in FIG. 2, as for the slide movers 15a and 15b of the test | inspection stage 2b which moves on the linear guide rails 5a and 5b, the test | inspection stage 2b is the test | inspection position of the upper-right end of a figure. When it comes to, it is provided so that it may not enter the area | region of the base frame 1a, it avoids moving a joint, and reduces the generation factor of vibration even a little.

As shown in FIG. 1, the surface inspection is performed putting the glass substrate P on the stage 11 (inspection stage 2). The surface precision of each stage 11a, 11b is performed by the height adjustment of the support column 10a, 10b in the up-down direction, and the surface precision between stage 11a, 11b is divided | segmented in the inspection position 2a, 2b. The attached plate 13 is mounted, and height adjustment is performed using a level adjustment screw.

The moving method of the test | inspection stage 2 in such a structure is demonstrated below. As shown in FIG. 4, the inspection stage drive part 12 is provided in the center of the lower frame 1ad of the base frame 1a. The inspection stage driver 12 is a ball screw 12b, a stage drive motor 12m for rotating the ball screw, and a nut 12n (see Fig. 2) fixed to the stage base 9a of the inspection stage 2a. It is composed. Accordingly, with the rotation of the ball screw 12b driven by the stage drive motor 12m, the nut 12n moves in the X direction, and the inspection stage 2a moves on the linear guide rails 6a and 6b. . Since the inspection stage 2b is fixed to the inspection stage 2a integrally, the inspection stage 2b moves on the linear guide rails 6a and 6b and the rails 5a and 5b with the movement of the inspection stage 2a. And the position encoder (not shown) installed in the test | inspection stage 2 is read out, and the control apparatus 40 controls the test | inspection stage 2 to a desired position.

The optical unit 3 is in the X direction by the optical unit X driver 8 and in the Y direction by the optical unit Y driver 18 (see Fig. 1) in the optical head 4a, 4b, 4c and the optical microscope unit. Move (30). The optical part X drive part 8 is provided in the side part of the upper frame 1au, 1bu, 1cu of the base frame of the right side of the paper surface. The optical part X drive part 8 is comprised from the ball screw 8b, the stage drive motor 8m which rotates a ball screw, and the nut 8n fixed to the optical part 3, as shown in FIG. . With the movement of this nut 8n, the slide movers 17a and 17b of the optical part 3 move on the linear guide rails 7a and 7b to an X direction, and the optical part 3 whole is a X direction Go to.

On the other hand, the optical unit Y driver 18 includes optical head drivers 18a and 18b (not shown) for independently moving each of the optical heads 4a, 4b, and 4c in the Y direction as shown in FIG. 18c]. Each configuration basically has the same configuration as the optical unit X driver.

The optical microscope unit 30 is for conducting a more detailed inspection when necessary to find scratches or foreign substances by the optical head, and has an optical microscope driver (not shown) to move in the Y direction similarly to the optical head.

As described above, the inspection stage 2 and the optical portion 3 are moved in the X direction, and the optical heads 4a, 4b, 4c are moved in the Y direction, and the glass substrate P is scanned in a rectangular shape. The surface of the glass substrate is scratched and foreign matter is inspected. The inspection is performed by irradiating inspection light onto the surface or inside of the glass substrate and receiving scattered scattered light. At this time, each of the optical heads 4a, 4b, and 4c inspects a range obtained by dividing the glass substrate surface in three directions in the Y direction. Therefore, the optical heads 4a, 4b and 4c are arranged at equidistant distances (see Fig. 3) corresponding to the three divisions so that the entire surface can be finally inspected. In addition, only the recessed part of the board | substrate stage 2 shown in FIG. 1 can inspect the surface and the inside of a glass substrate. Therefore, when scanning is completed once, a glass substrate will be shift | deviated and the remainder will be scanned and inspected.

In such a glass substrate test | inspection apparatus, a deformation | transformation of a frame and a vibration generate | occur | produce by the movement of the test | inspection stage 2a, 2b or the optical part 3. As shown in FIG. 5 and 6 show an apparatus leg 20 having a vibration suppression structure according to the present embodiment, FIG. 5 shows one side view of the leg of the glass substrate inspection apparatus according to the present embodiment, and FIG. 6 is shown in FIG. 5. The other side view of the leg part seen from the direction of arrow C is shown.

The leg part 20 is equipped with the level pad 21, the base 22, the block 23, and the connection base 24. As shown in FIG. The components of the leg are all made of rigid bodies such as stainless steel. In each role, the level pad 21 adjusts the height of the base 22, and the block 23 mainly damps.

In the conventional apparatus having no divided structure, as shown in FIG. 7, there is a pad 25 to be compatible with the bottom under the level pad 21, and the block 25 supporting the pad 25 and the frame 23 is provided. ) Was dampened by using rubber (elastic material). However, in the apparatus having the divided structure as in the present embodiment, since the rigidity of the connecting portion is low, the settling of the rubber of the leg portion encourages deformation of the frame at the connecting portion. Moreover, each divided part vibrates inherently, respectively, and generate | occur | produces big vibration as a whole. As a result, it turned out that the deformation | transformation at the time of an inspection operation | movement, and a vibration are larger than before, and lead to deterioration of the inspection precision of a glass substrate.

Therefore, the pad 25 of the leg part which used the conventional rubber | gum is removed, and the block 23 is comprised from stainless steel (rigid body), and the structure of a leg part becomes close to a rigid body. Moreover, the number of leg parts 20 is increased and the leg parts are provided in the corner part of a base frame. As a result, the base frames 1a, 1b, and 1c were able to be brought close to the deformed body and the vibrating body integral with the bottom surface.

According to this embodiment demonstrated above, by setting it as a division | segmentation structure, the deformation | transformation and vibration of the apparatus by the lack of rigidity in a connection part can be suppressed, and the fall of the inspection precision of a glass substrate can be reduced.

1: expectation frame
2: inspection stage
3: optical part
4: optical head
5, 6, 7: linear guide rail
8: optical unit X driving unit
9: stage base
10: support pillar
11: stage
12: inspection stage drive unit
13: plate
15, 16, 17: slipper
18: optical unit Y drive unit
20: leg
21: level pad
22: base
23: block
24: connection base
25: pad
40: control unit
100: glass substrate inspection device

Claims

An inspection stage for loading a glass substrate, an inspection portion for irradiating inspection light to the glass substrate, and an inspection portion for receiving scattered light scattered from the surface or inside of the glass substrate, and at least one of the inspection stage and the optical portion. In the glass substrate inspection apparatus which has the base which has a drive part to move, and the leg part which provides the said base,
At least the base of the base and the inspection stage is divided into a plurality in a moving direction, and the leg part is made of a rigid body,
The leg portion has a level portion which is in contact with the bottom surface and is adjustable in height, a connection base to the base, a base portion provided on the level portion, and a block provided between the connection base and the base portion, Glass substrate inspection device.

An inspection stage for loading a glass substrate, an inspection portion for irradiating inspection light to the glass substrate, and an inspection portion for receiving scattered light scattered from the surface or inside of the glass substrate, and at least one of the inspection stage and the optical portion. In the glass substrate inspection apparatus which has the base which has a drive part to move, and the leg part which provides the said base,
At least the base of the base and the inspection stage is divided into a plurality in a moving direction, and the leg part is made of a rigid body,
The said base | substrate was divided into N (integer) division, and the said inspection stage was divided into N-1, The glass substrate test | inspection apparatus characterized by the above-mentioned.

The said board | substrate part was provided in the corner part of each base divided | segmented, The glass substrate test | inspection apparatus of Claim 1 characterized by the above-mentioned.

The said board | substrate part was provided in the corner part of each base divided | segmented, The glass substrate test | inspection apparatus of Claim 2 characterized by the above-mentioned.

The Nth base, which is one end side of the N division, is a standby position of the optical unit, and the movement of the M (≤ N-1, integer) th inspection stage among the divided inspection stages. The length of the direction is shorter than the length of the movement direction of the Mth base, The glass substrate inspection apparatus characterized by the above-mentioned.

N is 3, The glass substrate inspection apparatus of Claim 5 characterized by the above-mentioned.

The glass substrate inspection apparatus according to claim 2 or 4, wherein each of the divided sections includes inspection stage surface precision adjusting means for adjusting surface precision of the inspection stage.

The said divided inspection stage has the stage base which moves the said base, the stage which mounts the said glass substrate, and the connection part which connects the said stage base and the said stage, respectively, The said inspection stage surface precision adjustment And means means for adjusting the height of the connecting portion.

The glass substrate test | inspection apparatus of Claim 2 or 4 provided with the means to adjust the surface precision between the said divided inspection stages.