JP4578383B2 - Panel member inspection apparatus and panel member inspection program applied thereto - Google Patents

Description

  The present invention relates to an inspection device for a panel member such as a glass substrate.

Panel members such as glass substrates are used in FPDs (flat panel displays) such as plasma displays, liquid crystal displays, and organic EL displays, and the thickness of the panel member is almost entirely covered in the manufacturing process. It is necessary to perform a quality inspection such as measuring optical constants, transmittance, etc., and inspecting for the presence or absence of defects. Prior to this, only one type of quality inspection equipment was installed in one inspection device, and as the panel members increased in size, the area occupied by the inspection device in the factory was an issue. there were. At that time, an inspection apparatus as shown in Patent Document 1 is used. This type of inspection apparatus, for example, places a panel member automatically taken out from a cassette on a measurement stage and measures it with one type of inspection apparatus. Later, it is configured to return to the cassette. For this reason, when measuring with another inspection apparatus, it was necessary to transport it again and measure. That is, each time measurement is performed with one type of inspection device, it is necessary to designate a measurement recipe every time and carry it every time. As a result, the number of times of conveyance increases, and there is a problem of rubbing that occurs during conveyance and generation of scratches and particles that may occur as a result. In particular, recently, as referred to as the 6th and 7th generations, the panel members accompanying the increase in the size of the FPD have increased in size (1850 mm x 1500 mm in the 6th generation, 2200 mm x 1900 mm in the 7th generation). Therefore, it is required to reduce the above-mentioned problems that occur during conveyance by reducing the number of conveyances.
JP-A-2005-233928

  The present invention has been made paying attention to such problems, and the main purpose is to effectively suppress the adhesion of scratches and dirt by reducing the number of times the panel member is conveyed while performing multiple quality inspections. Another object of the present invention is to provide an excellent panel member inspection apparatus capable of improving the processing throughput by reducing the transport time and the number of times the operator is restrained.

That is, the panel member inspection apparatus according to the present invention is configured to perform a plurality of inspection recipes performed on a panel member in a single loading / unloading process until the panel member is loaded from a predetermined storage location and unloaded. An apparatus for mounting the panel member; a plurality of different inspection devices each capable of executing the plurality of inspection recipes; and a plurality of inspection devices to be executed according to the plurality of inspection recipes to be executed. A movement control unit that controls relative movement between a table and the inspection device, and an inspection recipe execution control unit that performs control for causing a corresponding inspection device to execute a plurality of inspection recipes to be executed, for different inspection device, and the film thickness inspection device for thickness inspection recipe execution of measuring the thickness of the panel member, the sheet resistance test recipe execution of measuring the sheet resistance of the panel member Sequence by the sheet resistance testing equipment, the inspection recipe execution control unit, after allowed to perform the thickness inspection recipe to the thickness inspection device, operated so as to execute the sheet resistance inspection recipe to the sheet resistance testing equipment Thus, the film thickness measurement value obtained in the film thickness inspection recipe can be used in the sheet resistance inspection recipe.

  If this is the case, measurement is performed by each inspection device mounted on the panel member inspection apparatus during a single loading / unloading process, so that scratches or particles that may occur as a result of transportation are generated. Can be effectively suppressed. Further, since it is not necessary to carry out the conveyance a plurality of times, it is possible to shorten the whole conveyance time for executing a plurality of inspection recipes and to reduce the number of times the operator is restrained.

  In other words, while performing multiple quality inspections, it is possible to effectively suppress the attachment of scratches and dirt by reducing the number of times the panel member is conveyed, and the processing throughput is reduced by shortening the conveying time and reducing the number of operator restraints. An excellent panel member inspection apparatus that can be improved can be provided.

Moreover , it comprises a film thickness inspection apparatus for executing a film thickness inspection recipe for measuring the film thickness of the panel member, and a sheet resistance inspection apparatus for executing a sheet resistance inspection recipe for measuring the sheet resistance of the panel member, In the film thickness inspection recipe, the inspection recipe execution control unit is operated to cause the sheet resistance inspection device to execute the sheet resistance inspection recipe after the film thickness inspection device executes the film thickness inspection recipe. If the obtained film thickness measurement value is made available in the sheet resistance inspection recipe, for example, compared with what measures the sheet resistance value of the panel member after inputting the film thickness in advance before measurement, A more reliable sheet resistance value of the panel member can be obtained.

  A film strain inspection device for executing a film strain inspection recipe for measuring the film distortion of the panel member; and a film thickness inspection device for executing a film thickness inspection recipe for measuring the film thickness of the panel member, The recipe execution control unit is obtained by the film strain inspection recipe by causing the film thickness inspection apparatus to execute the film thickness inspection recipe after causing the film strain inspection apparatus to execute the film strain inspection recipe. If the measured film strain value can be used in the film thickness inspection recipe, for example, the optical characteristics of the film change due to the strain in the film, but the strain inspection apparatus is optimal for strain measurement such as Raman spectroscopy. Since the film thickness measured by a film thickness inspection device such as an ellipsometer can be corrected using the film strain actual measurement value measured in step 1, the film thickness measurement result can be given high reliability.

  If the inspection recipe to be executed is received by the inspection recipe receiving unit that receives the designation of the inspection recipe, the inspection device can be made to execute a desired inspection recipe. At this time, if the inspection recipe reception unit is configured using an inspection recipe reception screen in which the inspection recipe designation and the execution order thereof can be edited, the convenience of the operator can be improved.

As a desirable aspect of the present invention, the panel mounting table is provided on a base having a substantially rectangular shape so as to be movable in the longitudinal direction of the base, and on the base so as to extend perpendicular to the longitudinal direction of the base. A portal-shaped head support is provided, and a plurality of inspection device support heads for mounting each inspection device can be moved individually or integrally in a direction perpendicular to the longitudinal direction of the base. It is configured so as to be supported, and the movement control unit controls the relative movement between the panel mounting table and the inspection device supporting head.

To effectively perform the quality inspection of the panel member has a thickness testing equipment for thickness inspection recipe execution of measuring the thickness of the panel member, the sheet resistance test recipe for measuring the sheet resistance of the panel member Sheet resistance inspection device for execution, film strain inspection device for executing film strain inspection recipe for measuring film distortion of the panel member, and cleaning degree for executing cleaning degree inspection recipe for measuring the degree of cleaning of the panel member It is preferable that at least two or more inspection devices of the inspection devices are respectively attached to the inspection device support heads provided corresponding to the respective inspection devices.

  As described above, according to the panel member inspection apparatus of the present invention, during each loading / unloading process, measurement is performed by each inspection device mounted on the panel member inspection apparatus, so that rubbing that occurs during transport and the results thereof Generation | occurrence | production of the flaw and particle | grains etc. which may occur can be suppressed effectively. Further, since it is not necessary to carry out the conveyance a plurality of times, it is possible to shorten the whole conveyance time for executing a plurality of inspection recipes and to reduce the number of times the operator is restrained.

  In other words, while performing multiple quality inspections, it is possible to effectively suppress the attachment of scratches and dirt by reducing the number of times the panel member is conveyed, and the processing throughput is reduced by shortening the conveying time and reducing the number of operator restraints. An excellent panel member inspection apparatus that can be improved can be provided.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  The panel member inspection apparatus 1 according to the present embodiment can perform a quality inspection corresponding to a panel member (not shown) such as a sixth-generation or seventh-generation glass substrate used in an FPD, for example. As shown in FIGS. 1 and 2, the base 2 is a rectangular plate installed on the floor, and the base 2 is provided so as to be movable in the horizontal longitudinal direction (hereinafter also referred to as the X-axis direction). A panel mounting table 3, a gate-shaped head support 4 provided on the base 2 so as to be orthogonal to the longitudinal direction, and a horizontal direction (hereinafter referred to as Y-axis direction) perpendicular to the longitudinal direction by the head support 4 And an inspection device support head 5 supported so as to be movable in the vertical direction (hereinafter also referred to as Z-axis direction), and a plurality of different inspection devices 6 attached to the inspection device support head 5. Yes. Then, by the movement of the panel mounting table 3 and the movement of the inspection equipment support head 5, the quality of the flat panel member such as a glass substrate placed on the panel mounting board 3 can be inspected by the inspection equipment 6. It is.

  Next, each part will be described with reference to FIGS.

  The base 2 includes a plate-shaped base body 21 having a size of about 4900 mm in the X-axis direction and about 2300 mm in the Y-axis direction, and a plurality of base support legs 22 that can extend and contract to support the base body 21. The base body 21 can be kept horizontal by adjusting the length of each base support leg 22 regardless of the unevenness of the floor.

  The panel mounting table 3 mounts a panel member such as a glass substrate to be inspected on the upper surface thereof, and is supported by a rail member 23 provided on the base body 21 so as to be slidable in the X-axis direction.

  The head support 4 is fixed to one end portion in the longitudinal direction of the base 2, and a pair of leg members 41 erected from each long side portion of the base body 21, and the upper ends of the leg members 41 along the Y-axis direction. And a pair of horizontal members 42 horizontally mounted.

  The inspection device support head 5 is supported by a rail base member 43 provided on the upper surface of the horizontal member 42 so as to be slidable in the X-axis direction, and supported by the head base portion 51 so as to be slidable in the vertical direction. The head main body 52 is provided. In the present embodiment, the head main body 52 includes five types of inspection devices 6 each capable of executing a plurality of inspection recipes. Specifically, as shown in FIG. The ellipsometer 6b, the Raman spectrometer 6c (not shown in FIG. 1), the four-probe meter 6d, and the contact angle meter 6e are attached in a replaceable manner. In FIG. 2, each inspection device 6 is schematically illustrated, and each placement location is also schematically illustrated.

  The optical interference type film thickness meter 6a measures by the optical interference method, can execute a film thickness inspection recipe for measuring the film thickness of the panel member, and corresponds to the film thickness inspection apparatus of the present invention. To do.

  The ellipsometer 6b measures by the ellipso method, and corresponds to the film thickness inspection apparatus of the present invention, like the optical interference film thickness meter 6a.

  The Raman spectrometer 6c performs measurement by Raman spectroscopy, can execute a film distortion inspection recipe for measuring the film distortion of the panel member, and corresponds to a film distortion inspection apparatus of the present invention.

  The four-probe meter 6d performs measurement by a four-probe method, can execute a sheet resistance inspection recipe for measuring the sheet resistance of the panel member, and corresponds to a resistance inspection device of the present invention.

  The contact angle meter 6e performs measurement by a droplet method, can execute a cleanliness inspection recipe for measuring the cleanliness of the panel member, and corresponds to the cleanliness inspection apparatus of the present invention.

  In this embodiment, the panel member inspection apparatus 1 includes a base 2 (general dimensions (X × Y × Z) 4900 mm × 2300 mm × 900 mm) to which the panel mounting table 3 is attached, an inspection device support head 5, and a movable carriage. 9 (to be described later) and a head support 4 with an inspection device 6 (schematic dimensions (X × Y × Z) 1600 mm × 3000 mm × 2000 mm) that can be divided into two parts, and the base 2 and the head support 4 Between them, a positioning mechanism 7 for performing relative positioning when connecting them is provided.

  Further, in this embodiment, the movable carriage 9 is connected to the lower end of the leg member 41 in advance, and the head support 4 is moved approximately to a predetermined coupling position with respect to the base 2 without using a crane or the like. It is constituted so that it can be made. More specifically, the movable carriage 9 includes a columnar carriage main body 92 and wheels 93 extending in the X-axis direction. Since the lower half inner half of the leg member 41 of the head support 4 is placed on the base body 21, the movable carriage 9 supports the outer half of the leg member 41, and the approximate position to the predetermined coupling position is obtained. When moving, the moving carriage 9 passes through the outside of the base 2 without interfering with the base 2, and the head support 4 can be moved in the X-axis direction with respect to the base 2.

  In addition, the movable carriage 9 is provided with a jack-up mechanism 91 using, for example, a screw structure in advance, and the head support 4 is supported by the movable carriage 9 via the jack-up mechanism 91 so as to be movable up and down. ing. The jack up mechanism 91 first lifts the head support 4 to some extent, moves it to a predetermined coupling position, and then moves the head support 4 downward so that it can be placed on the base 2.

  In the present embodiment, as shown in FIG. 3, the inspection recipe receiving unit 8a that receives designation of a plurality of inspection recipes to be executed, and the panel mounting table 3 according to the plurality of inspection recipes to be executed. A movement control unit 8b that controls relative movement with the inspection device 6, an inspection recipe execution control unit 8c that performs control for causing the corresponding inspection device 6 to execute a plurality of inspection recipes to be executed, and panel mounting A panel member that is configured to be movable between the table 3 and a cassette that can accommodate a plurality of panel members (corresponding to the “predetermined accommodation location” of the present invention, not shown) and that is designated by an operation or the like is conveyed. And a transfer command output unit 8d for outputting a predetermined transfer command to a robot (not shown). As shown in FIG. 4, the inspection recipe receiving unit 8a is configured by using an inspection recipe receiving screen G in which the specification of the inspection recipe and the execution order thereof can be edited.

  The inspection recipe reception screen G is provided at the center of the screen and is provided with an inspection recipe execution designation area Ga in which an inspection recipe to be executed and its execution order can be input, and is provided on the right side of the screen and includes an “Unload cassette” button Gb1, “ Operation buttons Gb such as “Select all slots” button Gb2, “Wafers” button Gb3, “Start” button Gb4, “Urgent” button Gb5, “Cancel” button Gb6, “Pause” button Gb7, “Abort” button Gb8, etc. The information input display area Gc is provided in the left area and can input and display cassette information, wafer information, and the like.

  The inspection recipe execution designation area Ga is configured in a table format so that an inspection recipe to be executed can be designated for each panel member that can be stored in the cassette. For example, in FIG. 4, three inspection recipes are set for the panel member of the slot (15). The inspection recipe name is described as MRM: \ NewRecipe in the order of execution, the second is MRM: \ NewRecipe2, the third is DP2: \ Kisyu2 \ Hinsyu1 \ Jikken \ 42inch new, but is not limited to this. For example, the first is a film thickness inspection recipe, the second is a resistance inspection recipe, and the third is a cleaning inspection inspection recipe.

  Among the operation buttons Gb, the “Unload cassette” button Gb1 is a button for accepting an instruction to stop conveying the panel member from the cassette. The “Select all slots” button Gb2 is a button for receiving a command designated by all panel members accommodated in the cassette. The “Start” button Gb4 is a button for receiving an instruction to start execution of the inspection recipe. The “Cancel” button Gb6 is a button for accepting an instruction to stop execution of the inspection recipe. The “Pause” button Gb7 is a button for accepting an instruction to suspend or resume execution of the inspection recipe.

  Although not shown, the inspection recipe reception screen G is used to set the measurement points of the panel member. Thereby, for example, the entire area of the upward surface of the panel member placed on the panel placement table 3 can be measured at a predetermined pitch or the like.

  The inspection recipe receiving unit 8a, the movement control unit 8b, the inspection recipe execution control unit 8c, and the conveyance command output unit 8d are the external storage device 102 such as the CPU 101 and the hard disk, the internal memory 103, the display 104, the mouse and the keyboard shown in FIG. The computer CP having the input means 105 such as the communication interface 106 for communicating with the robot plays a role, and the panel member inspection program stored in a predetermined area of the external storage device 102 or the internal memory 103 Is interpreted and executed by the CPU 101, and this computer CP functions as an inspection recipe receiving unit 8a, a movement control unit 8b, an inspection recipe execution control unit 8c, and a conveyance command output unit 8d. It is constituted as follows. In this embodiment, when the panel mounting table 3 and the inspection device 6 are in a predetermined relative positional relationship set for each inspection recipe, each inspection recipe can be executed. The predetermined relative positional relationship set for each inspection recipe is stored in the internal memory 103. Therefore, when the movement control unit 8b controls the relative movement between the panel mounting table 3 and the inspection device 6 in accordance with each inspection recipe, the predetermined relative position stored with reference to the internal memory 103 is referred to. The relative movement of the panel mounting table 3 and the inspection device 6 is controlled so as to be related. Further, the respective positions of the panel mounting table 3 and the inspection device 6 are obtained from movement control amounts of stepping motors (not shown) that move them in the X-axis, Y-axis, and Z-axis directions. It can be appropriately changed depending on the embodiment, such as measurement with a non-contact type position sensor.

  Next, operation | movement of the panel member inspection apparatus 1 of this embodiment is demonstrated using flowcharts etc. FIG.

  As shown in FIG. 6, first, when a plurality of inspection recipes and their execution order are specified for one panel member (panel member) using the inspection recipe reception screen G, the inspection recipe is designated as an inspection recipe specification command. Accepted by the accepting unit 8a (step S101). Then, the conveyance command output unit 8d outputs a conveyance command for conveying the panel member designated by the inspection recipe designation command from the cassette and placing it on the panel mounting table 3 to the robot (step S102). . When the robot finishes placing the panel member on the panel mounting table 3 (step S103), the movement control unit 8b receives the inspection recipe to be executed first (hereinafter referred to as “inspection recipe 1”) received by the inspection recipe receiving unit 8a. The relative movement between the panel mounting table 3 and the inspection device 6 is controlled (step S104). When the panel mounting table 3 and the inspection device 6 are positioned at appropriate positions where the inspection recipe 1 can be executed by the movement control unit 8b, the inspection recipe execution control unit 8c executes the inspection recipe 1 on the corresponding inspection device 6. Control for making this happen is performed (step S105). When the execution of the inspection recipe 1 is completed (step S106), steps S104 and S105 are performed in order to execute the next inspection recipe. In this way, when the execution of the last inspection recipe is completed (step S106), the transfer command output unit 8d outputs a transfer command for returning the panel member to the cassette (step S107).

  Therefore, according to the present embodiment configured as described above, the measurement is performed by each inspection device 6 mounted on the panel member inspection apparatus 1 during a single loading / unloading process. It is possible to effectively suppress the occurrence of scratches and particles that may result. Further, since it is not necessary to carry out the conveyance a plurality of times, it is possible to shorten the conveyance time as a whole for the execution of a plurality of inspection recipes and to reduce the number of times the operator is restrained.

  In other words, while performing multiple quality inspections, it is possible to effectively suppress the attachment of scratches and dirt by reducing the number of times the panel member is conveyed, and the processing throughput is reduced by shortening the conveying time and reducing the number of operator restraints. It is possible to provide an excellent panel member inspection apparatus 1 that can be improved.

  In addition, since the inspection recipe to be executed is received by the inspection recipe receiving unit 8a that receives the designation of the inspection recipe, the inspection device 6 can execute a desired inspection recipe. In addition, since the inspection recipe receiving unit 8a is configured using an inspection recipe reception screen G in which the inspection recipe designation and the execution order thereof can be edited, it is convenient for the operator.

  In addition, since various inspection instruments 6 include an optical interference film thickness meter 6a, an ellipsometer 6b, a Raman spectrometer 6c, a four-probe meter 6d, and a contact angle meter 6e, it is multifaceted. The quality inspection of the panel member can be performed effectively.

  The present invention is not limited to the above embodiment. For example, when the inspection recipe execution control unit 8c executes a predetermined combination of inspection recipes regardless of the inspection recipe execution order received by the inspection recipe reception unit 8a, the order can be fixed. Specifically, the inspection recipe execution controller 8c operates to cause the four-probe meter 6d to execute the resistance inspection recipe after causing the optical interference film thickness meter 6a or the ellipsometer 6b to execute the film thickness inspection recipe. By doing so, the actual film thickness value obtained by the film thickness inspection recipe can be used in the resistance inspection recipe. In this way, for example, a more reliable resistance value of the panel member can be obtained as compared with the case of measuring the resistance value of the panel member after inputting the film thickness in advance before the measurement.

  In addition, the inspection recipe execution control unit 8c is operated to cause the optical spectrometer thickness meter 6a or the ellipsometer 6b to execute the film thickness inspection recipe after causing the Raman spectrometer 6c to execute the film distortion inspection recipe. The film strain actual measurement value obtained by the film strain inspection recipe can be used in the film thickness inspection recipe. In this way, for example, the optical characteristics of the film change due to the strain in the film, but measurement is performed with the optical interference type film thickness meter 6a or the ellipsometer 6b using the actual film strain value measured with the Raman spectrometer 6c. Therefore, high reliability can be given to the film thickness measurement result.

  In addition, the inspection device 6 is not limited to the above-described one, and performs, for example, a quality inspection of a panel member such as a light transmittance inspection device 6 capable of executing a light transmittance inspection recipe for measuring the light transmittance of the panel member. Various types of inspection devices 6 that can be used can be used. In the present embodiment, the number of inspection devices 6 is five, but the number is not limited to this, and can be appropriately changed according to the embodiment.

  Further, the configuration of the inspection recipe reception screen is not limited to this embodiment.

  Further, in the present embodiment, the panel member inspection apparatus 1 is configured to be split into two parts, the base 2 and the head support body 4, but it may not be splittable. Further, the dimensions of each part such as the size of the base are not limited to those of the present embodiment.

  In addition, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

  According to the present invention, while performing a plurality of quality inspections, it is possible to effectively suppress the adhesion of scratches and dirt by reducing the number of times the panel member is transported, and further, processing by shortening the transport time and reducing the number of operator restraints. It is possible to provide an excellent panel member inspection apparatus that can improve the throughput.

1 is an overall perspective view of a panel member inspection apparatus according to an embodiment of the present invention (however, a computer is schematically shown). The enlarged view which expands and shows the principal part of the panel member test | inspection apparatus in the same embodiment typically. The function block diagram in the panel member test | inspection apparatus in the embodiment. The figure which shows the display mode in the panel member test | inspection apparatus in the same embodiment. The apparatus block diagram in the panel member inspection apparatus in the embodiment. The flowchart which shows operation | movement of the panel member inspection apparatus in the same embodiment.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Panel member inspection apparatus 2 ... Base 3 ... Panel mounting base 4 ... Head support 5 ... Inspection equipment support head 6 ... Inspection equipment 6a ..Thickness inspection equipment (optical interference type film thickness meter)
6b ... Film thickness inspection equipment (Ellipsometer)
6c ... Film strain inspection equipment (Raman spectrometer)
6d ... Resistance test equipment (four probe meter)
6e ... Cleanliness inspection equipment (contact angle meter)
8a ... Inspection recipe receiving unit 8b ... Movement control unit 8c ... Inspection recipe execution control unit G ... Inspection recipe receiving screen

Claims (7)

A device configured to perform a plurality of inspection recipes to be performed on a panel member in a single loading / unloading process until the panel member is loaded from a predetermined storage location and unloaded,
A panel mounting table for mounting the panel member;
A plurality of different inspection devices each capable of executing the plurality of inspection recipes;
In accordance with a plurality of inspection recipes to be executed, a movement control unit that controls relative movement between the panel mounting table and the inspection device,
An inspection recipe execution control unit that performs control for causing a corresponding inspection device to execute a plurality of inspection recipes to be executed;
The different inspection devices are a film thickness inspection device for executing a film thickness inspection recipe for measuring the film thickness of the panel member, and a sheet resistance inspection device for executing a sheet resistance inspection recipe for measuring the sheet resistance of the panel member. Yes,
The film thickness inspection recipe is operated by causing the sheet resistance inspection device to execute the sheet resistance inspection recipe after causing the film thickness inspection device to execute the film thickness inspection recipe. The panel member inspection apparatus characterized in that the film thickness actual measurement value obtained in (1) can be used in the sheet resistance inspection recipe. A film strain inspection device for executing a film strain inspection recipe for measuring the film distortion of the panel member, and a film thickness inspection device for executing a film thickness inspection recipe for measuring the film thickness of the panel member,
The film distortion inspection recipe is operated by causing the film thickness inspection apparatus to execute the film thickness inspection recipe after causing the film distortion inspection apparatus to execute the film distortion inspection recipe. The panel member inspection apparatus according to claim 1, wherein the film strain actual measurement value obtained in (1) can be used in the film thickness inspection recipe.   The panel member inspection apparatus according to claim 1, wherein the inspection recipe to be executed is received by an inspection recipe receiving unit that receives designation of an inspection recipe.   4. The panel member inspection apparatus according to claim 3, wherein the inspection recipe reception unit is configured by using an inspection recipe reception screen capable of editing inspection recipe designation and execution order. The panel mounting table is provided on a base having a substantially rectangular shape so as to be movable in the longitudinal direction of the base, and a head support body having a gate shape is formed on the base so as to straddle perpendicularly to the longitudinal direction of the base. Further, the head support is configured to support a plurality of inspection device support heads for mounting each inspection device individually or integrally so as to be movable in a direction perpendicular to the longitudinal direction of the base,
The panel member inspection apparatus according to any one of claims 1 to 4, wherein the movement control unit controls relative movement between the panel mounting table and the inspection device support head. And the film thickness inspection device for thickness inspection recipe execution of measuring the thickness of the panel member, and the sheet resistance testing equipment for sheet resistance test recipe for execution of measuring the sheet resistance of the panel member, the film of the panel member At least two different inspection devices of a film strain inspection device for executing a film strain inspection recipe for measuring strain and a cleaning degree inspection device for executing a cleaning degree inspection recipe for measuring the degree of cleaning of the panel member 6. The panel member inspection apparatus according to claim 5, wherein the inspection apparatus support head is attached to each inspection apparatus support head provided corresponding to each inspection apparatus. A plurality of inspection recipes to be performed on a panel member are configured to be performed in a single loading / unloading process until the panel member is loaded and unloaded from a predetermined storage location, and the panel member is placed thereon And a panel member inspection apparatus comprising a plurality of different inspection devices capable of respectively executing the plurality of inspection recipes,
According to a plurality of inspection recipes to be executed, a function as a movement control unit that controls relative movement between the panel mounting table and the inspection device;
A function of an inspection recipe execution control unit that performs control for causing a corresponding inspection device to execute a plurality of inspection recipes to be executed is displayed on the computer.
The different inspection devices are a film thickness inspection device for executing a film thickness inspection recipe for measuring the film thickness of the panel member, and a sheet resistance inspection device for executing a sheet resistance inspection recipe for measuring the sheet resistance of the panel member. Yes,
The film thickness inspection recipe is operated by causing the sheet resistance inspection device to execute the sheet resistance inspection recipe after causing the film thickness inspection device to execute the film thickness inspection recipe. The panel member inspection program characterized in that the film thickness actual measurement value obtained in (1) can be used in the sheet resistance inspection recipe.