CN111474599A

CN111474599A - Foreign matter detection device for glass substrate and detection method thereof

Info

Publication number: CN111474599A
Application number: CN202010424206.2A
Authority: CN
Inventors: 吴瑞习
Original assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Current assignee: Shenzhen China Star Optoelectronics Semiconductor Display Technology Co Ltd
Priority date: 2020-05-19
Filing date: 2020-05-19
Publication date: 2020-07-31

Abstract

The invention discloses a foreign matter detection device of a glass substrate and a detection method thereof. The detection device comprises an automatic optical inspection module and an alarm unit. The automatic optical inspection module is arranged on an outer frame at an inlet of the array tester and used for detecting whether foreign matters exist on the surface of the glass substrate placed in a channel surrounded by the outer frame. The warning unit is arranged on the array tester and electrically connected with the automatic optical inspection module. When the automatic optical inspection module detects that the size of the foreign matters on the glass substrate exceeds a preset threshold value, the warning unit controls the array tester to stop operating and provides an alarm.

Description

Foreign matter detection device for glass substrate and detection method thereof

Technical Field

The present invention relates to the field of optical inspection, and more particularly to a device and a method for inspecting foreign matter on a glass substrate.

Background

The measurement head of the apparatus is very close to the surface of the glass substrate, and if large particles or micro-objects are larger than 50 microns on the glass substrate, the measurement head may be touched during the test process to cause damage to the measurement head.

The current way to prevent damage to the gauge head scratches is to attach a laser sensor 132 (including a corresponding reflector 134) to the Probe bar 120 of the array tester 100, as shown in fig. 1. As the probe rod 120 moves, the laser sensor 132 first checks the glass surface 110 for large particles. If large particles are present, the array tester 100 will shut down to alarm, notifying personnel to go to the site for inspection and confirmation.

However, the detection accuracy of the laser sensor 132 is greater than 300 μm. If the particle size is in the range of 50 microns to 300 microns, the array tester 100 cannot detect it or can cause damage to the measurement head. In addition, the probe rod 120 moves not only in one axis direction on the plane but also in the vertical axis direction, which causes poor fixing accuracy of the laser sensor 132 and may cause frequent malfunction.

Therefore, it is necessary to provide a device and a method for detecting foreign matters on a glass substrate to solve the problems of the prior art.

Disclosure of Invention

The invention mainly aims to provide a foreign matter detection device of a glass substrate and a detection method thereof, which can solve the problem that a measuring head collides with foreign matters on the glass substrate and prevent the measuring head from being damaged.

In order to achieve the above object, an embodiment of the present invention provides a device for detecting foreign objects on a glass substrate, the device including an automatic optical inspection module, a frame, a detection module and a control module, wherein the frame is arranged at an inlet of an array tester and is used for detecting whether foreign objects exist on the surface of the glass substrate placed in a channel surrounded by the frame; the warning unit is arranged on the array tester and is electrically connected with the automatic optical inspection module; when the automatic optical inspection module detects that the size of the foreign matters on the glass substrate exceeds a preset threshold value, the warning unit controls the array tester to stop operating and provides an alarm.

According to a preferred embodiment of the present invention, the warning unit further provides a position coordinate of the foreign object on the glass substrate.

According to a preferred embodiment of the present invention, the predetermined threshold is 40 μm.

According to a preferred embodiment of the present invention, the number of the automatic optical inspection modules is determined according to the size of the glass substrate or the size of the channel.

According to a preferred embodiment of the present invention, the automatic optical inspection module is disposed on the outer frame above the channel.

The invention also provides a foreign matter detection method of the glass substrate, which comprises the steps of detecting whether foreign matters exist on the surface of the glass substrate in a channel surrounded by an outer frame at the inlet of the array tester through an automatic optical inspection module; and when the size of the foreign matter on the glass substrate is detected to exceed a preset threshold value, controlling the array tester to stop operating and providing an alarm through an alarm unit.

According to a preferred embodiment of the present invention, the position coordinates of the foreign object on the glass substrate are provided by the warning unit.

Compared with the prior art, the foreign matter detection device and the detection method of the glass substrate can detect the foreign matters with the size of more than 40 microns, and the detection precision is superior to that of 300 microns in the prior art. Therefore, the problem that the measuring head collides with foreign matters on the glass substrate can be avoided, and the measuring head is prevented from being damaged.

In order to make the aforementioned and other objects of the present invention more comprehensible, preferred embodiments accompanied with figures are described in detail below:

drawings

FIG. 1 is a schematic diagram of a prior art glass substrate inspection apparatus on an array tester.

Fig. 2 is a schematic view of a foreign matter detection apparatus for a glass substrate according to an embodiment of the present invention.

Fig. 3 is a flowchart of a method for detecting foreign matter on a glass substrate according to an embodiment of the invention.

Detailed Description

The following description of the embodiments refers to the accompanying drawings for illustrating the specific embodiments in which the invention may be practiced. Furthermore, directional phrases used herein, such as, for example, upper, lower, top, bottom, front, rear, left, right, inner, outer, lateral, peripheral, central, horizontal, lateral, vertical, longitudinal, axial, radial, uppermost or lowermost, etc., refer only to the orientation of the attached drawings. Accordingly, the directional terms used are used for explanation and understanding of the present invention, and are not used for limiting the present invention.

Referring to fig. 2, fig. 2 is a schematic view of a foreign object detection apparatus for a glass substrate according to an embodiment of the invention. The first embodiment of the present invention provides a device for detecting foreign matter on a display glass substrate, which comprises an automatic optical inspection module 400 and an alarm unit 160. In one embodiment of the present invention, the Orobao array tester 100 is used as a device for testing the overall performance of a product. Products to be inspected, such as glass substrates 300, are delivered into the array tester 100 by a robotic arm 200 external to the apparatus. The frame 140 on one side of the array tester 100 has an inlet, and the frame 140 surrounds the inlet and forms a channel. The automatic optical inspection module 400 is disposed on the housing 140 at the entrance of the array tester 100, and can detect whether foreign objects, such as particles or micro-objects, exist on the surface of the glass substrate 300 passing through the channel. In this embodiment, the automated optical inspection module 400 is mounted on the housing 140 above the entrance of the passageway. The number of automated optical inspection modules 400 is generally determined according to the size of the glass substrate 300 or the size of the channel entrance. The alarm unit 160 is disposed on the array tester 100 and electrically connected to the automatic optical inspection module 400, and can provide an alarm, provide the position coordinates of the foreign object on the glass substrate 300, and send a signal to the array tester 100 to stop the operation. When the size of the foreign object on the surface of the glass substrate 300 detected by the automatic optical inspection module 400 exceeds a predetermined threshold, for example, 40 μm, during the process of transferring the glass substrate 300 into the array tester 100, the alarm unit 160 will send an alarm and send a signal to stop the operation of the array tester 400 after receiving the detection result of the automatic optical inspection module 300, so as to prevent the probe from hitting the foreign object. In addition, the warning unit 160 can provide the position coordinates of the foreign object on the surface of the glass substrate 300, so as to facilitate the subsequent removal of the foreign object. The predetermined threshold is the accuracy that the automated optical inspection module 400 can detect, and in this embodiment, the accuracy of the automated optical inspection module 400 can be up to 40 microns. That is, foreign matter of 40 μm or more can be detected.

Referring to fig. 3, fig. 3 is a flowchart illustrating a method for detecting a foreign object on a glass substrate according to an embodiment of the invention. S10, detecting whether there is foreign matter on the surface of the glass substrate in the channel surrounded by the outer frame at the entrance of the array tester; and S20, when the size of the foreign matter on the glass substrate is detected to exceed the preset threshold value, controlling the array tester to stop running and providing an alarm.

When the size of the foreign matters exceeds a preset threshold value, for example 40 microns, the warning unit can receive the detection result of the automatic optical inspection module, send out an alarm and send out a signal to stop the operation of the array tester, and prevent the measuring head from impacting the foreign matters. In addition, the warning unit can also provide the position coordinates of the foreign matters on the surface of the glass substrate, so that the foreign matters can be removed later.

The present invention has been described in relation to the above embodiments, which are only exemplary of the implementation of the present invention. It must be noted that the disclosed embodiments do not limit the scope of the invention. Rather, modifications and equivalent arrangements included within the spirit and scope of the claims are included within the scope of the invention.

Claims

1. A foreign matter detection device for a glass substrate, comprising:

the automatic optical inspection module is arranged on an outer frame at an inlet of the array tester and used for detecting whether foreign matters exist on the surface of the glass substrate placed in a channel surrounded by the outer frame; and

the warning unit is arranged on the array tester and is electrically connected with the automatic optical inspection module;

when the automatic optical inspection module detects that the size of the foreign matters on the glass substrate exceeds a preset threshold value, the warning unit controls the array tester to stop operating and provides an alarm.

2. The detection device of claim 1, wherein: the warning unit also provides position coordinates of the foreign matters on the glass substrate.

3. The detection device of claim 1, wherein: the predetermined threshold is 40 microns.

4. The detection device of claim 1, wherein: the number of the automatic optical inspection modules is determined according to the size of the glass substrate or the size of the channel.

5. The detection device of claim 1, wherein: the automatic optical inspection module is arranged on the outer frame above the channel.

6. A method for detecting a foreign substance on a glass substrate, comprising:

detecting whether foreign matters exist on the surface of the glass substrate in a channel surrounded by an outer frame at the inlet of the array tester through an automatic optical inspection module; and

when the size of the foreign matter on the glass substrate is detected to exceed a preset threshold value, the array tester is controlled to stop operating through the warning unit and an alarm is provided.

7. The detection method according to claim 6, characterized in that: the method further comprises the step of providing position coordinates of the foreign matters on the glass substrate through the warning unit.

8. The detection method according to claim 6, characterized in that: the predetermined threshold is 40 microns.