TWM578383U - Microscope collision avoidance architecture - Google Patents

Abstract

An microscope collision avoidance architecture can be used to determine whether the distance between an objective lens and an object to be observed is too close, and actively stops the objective lens from falling when the objective lens is too close to the object to be observed. Therefore, the present invention can avoid the damage caused by the collision of the objective lens or the object to be observed.

Description

Microscope collision avoidance architecture

This creation is about an anti-collision architecture, in detail, about an anti-collision architecture for a microscope.

Press, the main function of the microscope is to enlarge the image and analyze the image, and the object image of the object to be observed which is not observable or difficult to observe can be enlarged for microscopic observation by the naked eye or other imaging instruments. When the microscope is operated, it is necessary to adjust the relative distance between the objective lens and the object to be observed, and adjust the focal length up and down to clear the object image of the object to be observed in the eyepiece. However, during the adjustment of the relative distance between the objective lens and the object to be observed, collisions between the objective lens and the object to be observed often occur due to human error, causing damage to the objective lens or the object to be observed.

Therefore, how to avoid collision between the objective lens and the object to be observed, and to ensure the normal operation of the microscope, has become a technical issue that the industry is currently trying to overcome.

In view of the above-mentioned shortcomings of the prior art, the present invention provides a microscope anti-collision structure for a microscope, which can magnify an object image of an object to be observed for microscopic observation of an object to be observed, and the microscope has a view in the image capturing area. Observe the objective lens of the object image. Microscope anti-collision architecture package Including: range finder, operation module and processing module. The range finder is disposed on the periphery of the image capturing area, and the measuring point in the image capturing area measures the distance between the objective lens and the object to be observed, and the measuring point is separated from the objective lens by a safe distance. The operation module can perform the ascending operation or the descending operation to make the objective lens and the range finder move up and down in synchronization, and adjust the distance between the objective lens and the object to be observed, so that the object to be observed enters the image capturing area to make the object image of the object to be observed clear. For microscopic observation. The processing module is connected to the range finder to receive the measurement result of the range finder, and according to whether the distance between the objective lens and the object to be observed is less than a safety distance, when the operation module performs the lowering operation, and the objective lens and the object to be observed When the distance is less than the safety distance, the processing module is connected to the range finder to stop the operation module from performing the lowering operation, and to prevent the objective lens from colliding with the object to be observed because it is too close.

Alternatively, in an embodiment of the present creation, the focal length of the objective lens is greater than or equal to the safety distance.

Optionally, in an embodiment of the present invention, the range finder is a laser range finder or an infrared range finder; the range finder is obliquely disposed on a peripheral side of the image capturing area, and the range finder The angle of inclination is related to the safety distance.

Optionally, in an embodiment of the present invention, the lifting mechanism is further configured to be used for lifting and lowering the objective lens, and the distance measuring device is disposed on the lifting mechanism, and the lifting device can be moved up and down in synchronization with the objective lens; By means of the lifting mechanism, the objective lens and the range finder are moved up and down in synchronization.

Optionally, in an embodiment of the present invention, the platform further includes a stage, an X-axis moving mechanism and a Y-axis moving mechanism. The stage is disposed under the objective lens for carrying the object to be observed, and the X and Y axis moving mechanisms. The stage is moved on the X-axis and the Y-axis, respectively, so that the object to be observed enters the image capturing area.

Optionally, in an embodiment of the present invention, a buzzer is further disposed on the microscope, and when the distance between the objective lens and the object to be observed is less than a safe distance, the processing module also makes a buzzer The device screams to cause collision by the sound indicating that the objective lens and the object to be observed are close to each other.

Alternatively, in an embodiment of the present creation, the operating module provides kinetic energy from electricity or manpower.

Alternatively, in an embodiment of the present invention, the object to be observed is a probe card that tests whether the electrical function of each wafer on the wafer is normal.

Optionally, in an embodiment of the present invention, when the distance between the objective lens and the object to be observed is less than a safe distance, the processing module causes the operation module to perform a rising operation to raise the objective lens away from the object to be observed. Move, 俾 prevent the objective lens from colliding with the object to be observed because it is too close.

Optionally, in an embodiment of the present invention, the objective lens and the measuring point system may be connected to a first straight line, and the distance measuring instrument and the measuring point system may be connected to a second straight line, and the first and second straight lines intersect and the angle of intersection is less than Ninety degrees.

Compared with the prior art, the microscope anti-collision architecture of the present invention can determine whether the distance between the objective lens and the object to be observed is too close when the distance between the objective lens and the object to be observed (for example, the probe card) is adjusted by the microscope operation. When the objective lens is too close to the object to be observed, the objective lens is actively stopped to prevent the objective lens from colliding with each other due to the proximity of the object to be observed, so as to reduce the chance of loss of the objective lens or the object to be observed, thereby preventing the loss of the objective lens. When the microscope is used to observe the probe card, it can effectively prevent the objective lens from colliding with the expensive probe card because it is too close, which causes the objective lens or the probe card to be damaged and suffers a great loss.

1‧‧‧Microscope

11‧‧‧ Objective lens

12‧‧‧ stage

13‧‧‧ Rangefinder

14‧‧‧Operating module

15‧‧‧Processing module

16‧‧‧ Lifting mechanism

171‧‧‧X-axis moving mechanism

172‧‧‧Y-axis moving mechanism

18‧‧‧ buzzer

2‧‧‧Sensitives

Z‧‧‧ image capture area

MP‧‧‧measuring point

SD‧‧‧Safe distance

θ 1‧‧‧

θ 2‧‧‧ tilt angle

D1‧‧•focal length

D2‧‧•focal length

Figure 1 is a schematic diagram of the components of the microscope collision avoidance architecture of the present invention.

Figure 2 is a schematic view of the first operational state of the microscope collision avoidance architecture of the present invention.

Figure 3 is a schematic view of the second operational state of the microscope collision avoidance architecture of the present invention.

The following content will be described in conjunction with the drawings, and the technical contents of the present invention will be described by a specific embodiment. Those skilled in the art can easily understand other advantages and effects of the present invention by the contents disclosed in the present specification. This creation can also be implemented or applied by other different embodiments. The details of the present specification can also be modified and changed without departing from the spirit of the present invention. In particular, the proportional relationship and relative position of the various elements in the drawings are for exemplary purposes only and are not representative of actual implementation of the present invention.

In the following, the same or similar functions will be described with the same reference numerals, and the description of the same or equivalent features will be omitted.

The present invention provides a microscope anti-collision structure, which can determine whether the distance between the objective lens and the object to be observed is too close when the microscope is operated to adjust the distance between the objective lens and the object to be observed, and actively stop the objective lens when the objective lens is too close to the object to be observed. Decrease, and prevent the objective lens from colliding with each other due to the proximity of the object to be observed, so as to reduce the chance of loss caused by the collision of the objective lens or the object to be observed.

In addition, the microscope collision avoidance architecture of the present invention can also be applied to a microscope of the semiconductor industry for microscopic observation of an object to be observed such as a probe card.

For the probe card, in the manufacturing process of the wafer, the probes on the probe card are often contacted on the wafer testing machine to contact each wafer on the wafer to test the wafers on the wafer. Signal to test whether the electrical function of the integrated circuit of each wafer on the wafer is normal, and the crystal on the wafer Eliminate defective products with poor electrical function before packaging, to reduce unnecessary packaging costs for defective products, and increase the yield of finished products.

Due to the intensive circuit of each wafer on the wafer, it will increase with the advancement of integrated circuit processing technology. In order to ensure that the probe of the probe card can smoothly contact the integrated circuit of each wafer on the wafer, The probe on the needle card has a tendency to become thinner and thinner, resulting in an expensive probe card. In addition, the probe of the probe card may wear or contaminate the needle after repeated use, and the probe needle of the probe card may be in contact with the integrated circuit of each wafer on the wafer if it is worn and contaminated. Poor, and the probe card is in an unusable state, so that the reliability of the detection result is greatly reduced. Thus, it can be seen that the detection performance of the probe card gradually decreases with the number of uses.

In this regard, the microscope can be used to observe the shape of the probe needle of the probe card, and the probe needle is judged to be worn and contaminated, so as to grasp whether the probe card is in a state of being used, and the probe card is lifted. The reliability of the test results. However, the operation of the microscope often causes the objective lens to collide too close to the object to be observed due to the erroneous operation of the person, and the microscope collision avoidance structure of the present invention can effectively prevent the operator from mishandling the microscope while preventing the microscope from being used on the microscope. The objective lens collides with the object to be observed. Therefore, when the microscope is used to observe the microscope of the probe card, it is also possible to avoid collision between the objective lens and the expensive probe card due to the proximity of the probe card, which causes the objective lens or the probe card to be damaged and suffers. huge loss.

For the technical idea of the collision avoidance architecture of the present invention, please refer to the disclosure of each figure in the drawing of the present invention and the following description: as shown in FIG. 1, the microscope collision avoidance architecture of the present invention is used for the microscope 1, The microscope 1 can magnify the object image of the object to be observed 2 for microscopic observation of the object to be observed 2, wherein the microscope 1 has an objective lens 11 and a stage 12. The objective lens 11 is composed of an optical element (including a lens) and can be in the image capturing area Z. The object image of the object to be observed 2 (for example, a probe card) is taken internally to enlarge the object image of the object to be observed 2 which is slightly unobservable or difficult to observe, and is used for microscopic observation of the object to be observed by the naked eye or other imaging instruments. Then, the state of the object 2 to be observed is determined. The stage 12 is disposed below the objective lens 11 for carrying the object to be observed 2 to provide support for the object 2 to be observed.

In the present creation, optionally, the microscope 1 further has an X-axis moving mechanism 171 and a Y-axis moving mechanism 172, and the X and Y-axis moving mechanisms 171 and 172 are driven to cause the stage 12 to be respectively on the X-axis and the Y-axis. The shaft moves to drive the object to be observed 2 to move on the X-axis and the Y-axis to enter the image-taking area Z, and the objective lens 11 captures the object image of the object to be observed 2 from top to bottom.

The microscope collision avoidance architecture of the present invention includes at least a range finder 13, an operation module 14 and a processing module 15. Further, in the present creation, an elevating mechanism 16 may be additionally provided in the microscope 1, and the range finder 13 is provided in the elevating mechanism 16. The lift 16 series can be used to provide synchronous lifting of the objective lens 11 and the range finder 13.

The range finder 13 is, for example, a laser range finder or an infrared range finder, and is disposed at the periphery of the image capturing area Z to prevent occlusion of the object image of the object 2 to be observed in the image capturing area Z. In the present creation, as shown in FIGS. 2 to 3, the range finder 13 measures the distance between the objective lens 11 and the object to be observed 2 at the measurement point MP in the image capturing area Z. Preferably, the range finder 13 is tilted to perform a measurement operation on the peripheral side of the image capturing area Z. Therefore, the objective lens 11 and the measuring point MP can be connected to the first straight line L1, and the range finder 13 and the measuring point MP The first and second straight lines L1 and L2 intersect and the angle of intersection θ 1 is less than ninety degrees, and the tilt angle θ 2 of the range finder 13 is connected to the first and second straight lines. The angle of intersection θ 1 of L1 and L2 is mutually exclusive (i.e., θ 1 plus θ 2 is equal to ninety degrees). As shown in FIG. 2, the measuring point MP and the objective lens 11 are designed to be separated by a safety distance SD, and the inclination angle θ 2 of the range finder 13 is proportional to the length of the safety distance SD. Off, the larger the inclination angle θ 2 is, the longer the safety distance SD is. On the contrary, the smaller the inclination angle θ 2 is, the shorter the safety distance SD is. Therefore, in the present creation, the safety distance can be adjusted by adjusting the inclination angle θ 2 . SD.

Furthermore, as shown in FIG. 2, the focal length D1 of the objective lens 11 is greater than the safety distance SD, that is, the distance between the objective lens 11 and the object to be observed 2 is greater than the safety distance SD and is less likely to collide. As shown in FIG. 3, the focal length D1 of the objective lens 11 is equal to the safety distance SD, that is, the measurement point MP has reached the object 2 to be observed with the movement of the objective lens 11, so that the distance between the objective lens 11 and the object to be observed 2 is still equal to the safety distance. SD, and the objective lens 11 does not collide with the object to be observed 2, but if the distance between the objective lens 11 and the object to be observed 2 is smaller than the safety distance SD, collision is likely to occur between them.

The operation module 14 can provide kinetic energy by electric power or human power, and perform a rising operation or a lowering operation to move the objective lens 11 and the range finder 13 (measuring point MP) to move up and down, and adjust the distance between the objective lens 11 and the object to be observed 2 , the object to be observed 2 enters the image capturing area Z, and the object image of the object to be observed 2 is made clear for microscopic observation. In the present invention, the operation module 14 can cause the range finder 13 (measurement point MP) to be raised and lowered synchronously following the objective lens 11 by the lifting mechanism 16, so that the measurement point MP and the objective lens 11 are at least separated from each other. Distance SD.

The processing module 15 is connected to the range finder to receive the measurement result of the range finder 13 and determine whether the distance between the objective lens 11 and the object to be observed 2 is less than the safety distance SD, and when the operation module 14 performs the lowering operation, and When the distance between the objective lens 11 and the object to be observed 2 is less than the safety distance SD, the objective lens 11 is lowered and the objective lens 11 is too close to the object to be observed 2, and the processing module 15 is connected to the range finder to actively operate the operation module 14 The lowering operation is stopped, and the objective lens 11 is prevented from continuing to fall and collides with the object 2 to be observed too close. Moreover, the processing module 15 of the present invention can also cause the operation module 14 to perform a rising operation when the distance between the objective lens 11 and the object to be observed 2 is less than the safety distance SD, so that the objective lens 11 rises and faces away from the object to be observed 2 The direction of movement prevents the objective lens 11 from colliding with the object to be observed 2 due to human error.

Preferably, the microscope collision avoidance structure of the present invention may further include a buzzer 18 disposed on the microscope 1. When the distance between the objective lens 11 and the object to be observed 2 is less than the safety distance SD, the processing module 15 may also beep. The sound of the sound is sounded to indicate that the objective lens 11 and the object to be observed 2 are close to each other and a collision may occur.

In summary, the present invention provides a microscope anti-collision structure, which can determine whether the distance between the objective lens and the object to be observed is too close when the distance between the objective lens and the object to be observed (for example, the probe card) is adjusted by the microscope operation. When the objective lens is too close to the object to be observed, the objective lens is actively stopped, and the erroneous operation of the object is prevented from colliding with the object to be observed, so as to reduce the chance of loss of the objective lens or the object to be observed.

The above embodiments are merely illustrative of the principles and effects of the present invention and are not intended to limit the present invention. Any person skilled in the art can modify and change the above embodiments without departing from the spirit and scope of the present invention. Therefore, the scope of protection of this creation should be as listed in the scope of patent application for this creation.

Claims (9)

A microscope anti-collision structure is used for a microscope, which can magnify an object image of an object to be observed for microscopic observation of the object to be observed. The microscope has an objective lens which is attached to an image capturing area. Taking the object image of the object to be observed, the microscope anti-collision structure includes: a range finder, the range finder is disposed at a periphery of the image capturing area, and the objective lens is measured at a measuring point in the image capturing area a distance from the object to be observed, and the measuring point is separated from the objective lens by a safe distance; and an operation module, the operation module can perform a rising operation or a lowering operation to make the objective lens and the ranging Simultaneously moving up and down, adjusting the distance between the objective lens and the object to be observed, so that the object to be observed enters the image capturing area to make the object image of the object to be observed clear for microscopic observation; and a processing module, The processing module is connected to the range finder to receive the measurement result of the range finder, and according to whether the distance between the objective lens and the object to be observed is less than the safety distance, when the operation module performs the lowering operation, and The objective lens and the When the observation distance of less than the safety distance, the processing module connected to the operating system module, enabling the operation module to perform the lowering operation is stopped, serve to prevent the object to be observed with the objective lens due to the collision is too close. The microscope collision avoidance structure of claim 1, wherein the objective lens has a focal length greater than or equal to the safety distance. The microscope collision avoidance structure according to claim 1, wherein the range finder is a laser range finder or an infrared range finder; the range finder is obliquely disposed on a peripheral side of the image capturing area. And the tilt angle of the range finder is related to the safety distance. The microscope collision avoidance structure of claim 1, further comprising a lifting mechanism for lifting the objective lens, the range finder being disposed on the lifting mechanism, capable of following The objective lens is moved up and down synchronously; the operation module is configured to move the objective lens up and down in synchronization with the range finder by the lifting mechanism. The microscope collision avoidance structure according to claim 1, further comprising a buzzer disposed on the microscope, when the distance between the objective lens and the object to be observed is less than the safety distance, the processing The module also causes the buzzer to beep to indicate that the objective lens and the object to be observed are close to each other by an audible sound, and a collision may occur. The microscope collision avoidance structure according to claim 1, wherein the operation module provides kinetic energy by electric power or human power. The microscope collision avoidance structure according to claim 1, wherein the object to be observed is a probe card for testing whether the electrical function of each wafer on the wafer is normal. The microscope collision avoidance structure of claim 1, wherein when the distance between the objective lens and the object to be observed is less than the safety distance, the processing module causes the operation module to perform the rising operation, so that the The objective lens rises and moves away from the object to be observed, and prevents the objective lens from colliding with the object to be observed because it is too close. The microscope collision avoidance structure according to claim 1, wherein the objective lens and the measuring point system are connected to form a first straight line, and the distance measuring instrument and the measuring point system can be connected to form a second straight line, the first The second straight line intersects and the angle of intersection is less than ninety degrees.