TWI674437B - Microscope collision avoidance architecture - Google Patents

Abstract

An anti-collision structure for a microscope is used to determine whether the distance between the objective lens and the object to be observed is too close when the distance between the objective lens and the object to be observed is adjusted during the operation of the microscope. Prevent personnel's misoperation from colliding the objective lens with the object to be observed due to being too close, so as to reduce the chance of loss caused by the collision or damage of the objective lens or the object to be observed.

Description

Anti-collision structure of microscope

The invention relates to an anti-collision structure, and in particular, to an anti-collision structure for a microscope.

The main function of the microscope is to enlarge and analyze the image. It can enlarge the object image of the small unobservable or difficult to observe object for analysis by the naked eye or other imaging instruments. During the operation of the microscope, the relative distance between the objective lens and the object to be observed needs to be adjusted, and the focal length is adjusted up and down to clear the object image of the object to be observed in the eyepiece. However, in the process of adjusting the relative distance between the objective lens and the object to be observed, collision between the objective lens and the object to be observed often occurs due to human misoperation, which causes damage to the objective lens or the object to be lost.

Therefore, how to avoid the collision between the objective lens and the object to be observed and ensure the normal operation of the microscope has now become a technical issue that the industry is eager to overcome.

In view of the disadvantages of the foregoing prior art, the present invention provides a collision avoidance structure for a microscope. The microscope can magnify the object image of the object to be observed for microscopic observation of the object to be observed. Objective lens for observing the object image. The anti-collision architecture of the microscope of the present invention includes: a rangefinder, an operation module and a processing module. The rangefinder is arranged at the periphery of the image capturing area. It measures the distance between the objective lens and the object to be observed at a measuring point in the image capturing area, and the measuring point is separated from the objective lens by a safe distance. The operation module can perform the ascending or descending operation to make the objective lens and the rangefinder move up and down synchronously. 俾 Adjust the distance between the objective lens and the object to be observed, so that the object to be observed enters the imaging area and the object image of the object to be observed is clear For microscopic observation. The processing module receives the measurement results of the rangefinder and judges whether the distance between the objective lens and the object to be observed is smaller than the safety distance. When the operation module performs a descending operation and the distance between the objective lens and the object to be observed is less than the safe distance, the processing module The module system stops the operation module from performing the lowering operation, and prevents collision between the objective lens and the object to be observed due to too close.

Optionally, in an embodiment of the present invention, the focal length of the objective lens is greater than or equal to the safety distance.

Optionally, in an embodiment of the present invention, the rangefinder is a laser rangefinder or an infrared rangefinder; the rangefinder is disposed obliquely on the outer side of the image capturing area, and the rangefinder is The tilt angle is related to the safety distance.

Optionally, in an embodiment of the present invention, a lifting mechanism is further included. The lifting mechanism is used for lifting the objective lens, and the rangefinder is provided on the lifting mechanism, so that it can move up and down synchronously with the objective lens; the operation module system With the lifting mechanism, the objective lens and the rangefinder are moved synchronously.

Optionally, in an embodiment of the present invention, a stage, an X-axis movement mechanism, and a Y-axis movement mechanism are further included. The stage is arranged below the objective lens for carrying an object to be observed, and the X and Y axis movement mechanisms It is instructed that the stage is moved on the X axis and the Y axis, respectively, so that the object to be observed enters the imaging area.

Optionally, in an embodiment of the present invention, a buzzer is further included, and the buzzer is disposed on the microscope. When the distance between the objective lens and the object to be observed is less than a safe distance, the processing module further causes the buzzer to beep. The device tweets to indicate that the objective lens and the object to be observed are close to each other by a sound, and a collision may occur.

Optionally, in an embodiment of the present invention, the operation module is powered by electricity or manpower.

Optionally, in an embodiment of the present invention, the object to be observed is a probe card for testing whether the electrical function of each wafer on the wafer is normal.

Optionally, in an embodiment of the present invention, when the distance between the objective lens and the object to be observed is smaller than the safety distance, the processing module causes the operation module to perform an ascending operation, so that the objective lens rises and faces away from the object to be observed. Move to prevent collision between the objective lens and the object to be observed due to too close.

Optionally, in an embodiment of the present invention, the objective lens and the measurement point system may be connected to form a first straight line, the rangefinder and the measurement point system may be connected to form a second straight line, and the first and second straight lines intersect and the angle of intersection is less than Ninety degrees.

Compared with the prior art, the anti-collision structure of the microscope of the present invention can determine whether the distance between the objective lens and the object to be observed is too close when the distance between the objective lens and the object to be observed (for example, a probe card) is adjusted during the operation of the microscope. When the objective lens is too close to the object to be observed, the descent of the objective lens is actively stopped, thereby preventing the objective lens and the object to be collided from each other due to being too close, so as to reduce the chance of loss caused by the collision or damage of the objective lens or the object to be observed. When the collision microscope is used to observe the probe card, it can effectively prevent the objective lens and the expensive probe card from colliding due to being too close, causing the objective lens or the probe card to be damaged and suffer major losses.

The following content will be combined with drawings to illustrate the technical content of the present invention through specific embodiments. Those skilled in the art can easily understand other advantages and effects of the present invention from the content disclosed in this specification. The invention can also be implemented or applied by other different specific embodiments. Various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the spirit of the invention. In particular, the proportional relationships and relative positions of the various elements in the drawings are only exemplary, and do not represent the actual status of the implementation of the present invention.

In order to make the disclosure more concise and easy to understand, the same symbols will be used for the same or similar functions in the following descriptions, and the description of the same or equal features will be omitted.

The invention provides a collision avoidance structure for a microscope, which can determine whether the distance between the objective lens and the object to be observed is too close when the distance between the objective lens and the object to be observed is adjusted during the operation of the microscope, and when the objective lens is too close to the object to be observed, the objective It is lowered to prevent the objective lens and the object to be collided from each other due to being too close, so as to reduce the chance of loss caused by the objective lens or the object to be collided and damaged.

In addition, the collision avoidance structure of the microscope of the present invention can also be applied to a microscope in the semiconductor industry, which is used for microscopic observation of an object to be observed, such as a probe card.

For the probe card, during the wafer manufacturing process, the wafers on the wafer test machine often contact the wafers on the wafer through the probes on the probe card to transfer and test the wafers on the wafer. Signal to test whether the electrical function of the integrated circuit of each wafer on the wafer is normal, and eliminate defective electrical defective products before packaging each wafer on the wafer, so as to reduce unnecessary packaging costs for defective products. And increase the yield of finished products.

Because the density of the integrated circuits of each wafer on the wafer will increase with the progress of the integrated circuit process technology, in order to ensure that the probes of the probe card can smoothly contact the integrated circuits of each wafer on the wafer, The probes on the pin cards tend to be thinner and thinner, resulting in expensive probe cards. In addition, the probe of the probe card will wear or contaminate after repeated use. If the probe needle of the probe card is worn and contaminated, it will easily contact the integrated circuit of each wafer on the wafer. Defective, and the probe card is in an unusable state, so that the reliability of the detection result is greatly reduced. In this way, it is known that the detection performance of the probe card will gradually decrease with the number of uses.

In this regard, you can use a microscope to observe the outer shape of the probe needle of the probe card, and judge the degree of wear and contamination of the probe needle, so as to grasp whether the probe card is in a usable state and raise the probe card. Reliability of test results. However, the operation of the microscope often results in a collision between the objective lens and the object to be observed due to a mistaken operation of the person. When the collision avoidance structure of the present invention is used on a microscope, it can effectively prevent personnel's misuse of the microscope and prevent the microscope. The objective lens collides with the object to be observed. Therefore, when the present invention is applied to the microscope for the probe card, the objective lens and the expensive probe card may be prevented from colliding due to being too close, which may cause damage to the objective lens or the probe card. huge loss.

For the technical idea of the anti-collision architecture of the microscope of the present invention, please refer to the disclosure of the drawings in the scheme of this case and the following description:

As shown in FIG. 1, the anti-collision structure of a microscope of the present invention is used for a microscope 1. The microscope 1 can magnify an object image of an object to be observed 2 for microscopic observation of the object 2, wherein the microscope 1 has an objective lens. 11 与 载 台 12。 11 and the carrier 12. The objective lens 11 is composed of an optical element (including a lens), and an object image of the to-be-observed object 2 (for example, a probe card) can be captured in the image capturing area Z, so that the small to-be-observed or difficult-to-see object The object image of 2 is enlarged, and the naked eye or other imaging equipment is used to observe the object 2 to be observed microscopically, and then the state of the object 2 is judged. The stage 12 is arranged below the objective lens 11 for carrying the object 2 to be observed, so as to provide support for the object 2 to be observed.

In the present invention, optionally, the microscope 1 further includes an X-axis moving mechanism 171 and a Y-axis moving mechanism 172, and the X and Y-axis moving mechanisms 171 and 172 can be driven so that the stage 12 is in the X-axis and Y-axis, respectively. The axis moves to drive the object 2 to be moved on the X axis and the Y axis to enter the image capturing area Z, and the objective lens 11 captures the object image of the object 2 from top to bottom.

The anti-collision architecture of the microscope of the present invention includes at least: a rangefinder 13, an operation module 14 and a processing module 15. In addition, in the present invention, a lifting mechanism 16 may be added to the microscope 1, and the rangefinder 13 is provided on the lifting mechanism 16. The elevator 16 can be used to provide synchronous lifting of the objective lens 11 and the rangefinder 13.

The rangefinder 13 is, for example, a laser rangefinder or an infrared rangefinder, and is disposed on the periphery of the imaging area Z to avoid obstruction of the object image of the object to be observed 2 in the imaging area Z. In the present invention, as shown in FIG. 2 to FIG. 3, the rangefinder 13 measures the distance between the objective lens 11 and the object to be observed 2 at a measurement point MP in the image capturing area Z. Preferably, the rangefinder 13 is disposed obliquely and performs a measurement operation on the peripheral side of the imaging area Z. Therefore, the objective lens 11 and the measurement point MP can be connected to form a first straight line L1, and the rangefinder 13 and the measurement point MP are connected. The system can be connected into a second straight line L2, wherein the first and second straight lines L1 and L2 intersect and the intersection angle θ1 is less than ninety degrees, and the inclination angle θ2 of the rangefinder 13 is connected to the first and second straight lines L1 and L1. The intersection angle θ1 of L2 is redundant (that is, θ1 plus θ2 is equal to ninety degrees). As shown in FIG. 2, the measurement point MP and the objective lens 11 are designed to be separated by a safety distance SD, and the inclination angle θ2 of the rangefinder 13 is related to the length of the safety distance SD. The larger the inclination angle θ2 is the safety distance The longer SD is, on the contrary, the smaller the inclination angle θ2 is, the shorter the safety distance SD is. Therefore, in the present invention, the safety distance SD can be adjusted by adjusting the inclination angle θ2.

Furthermore, as shown in FIG. 2, the focal length D1 of the objective lens 11 is greater than the safety distance SD, that is, the distance between the objective lens 11 and the object 2 to be observed is greater than the safety distance SD, and it is difficult to collide. As shown in FIG. 3, the focal distance D1 of the objective lens 11 is equal to the safety distance SD, that is, the measurement point MP has reached the object 2 to be observed with the movement of the objective lens 11, so that the distance between the objective lens 11 and the object 2 is still equal to the safety distance. SD, but still will not cause the objective lens 11 to collide with the object to be observed 2, however, if the distance between the objective lens 11 and the object 2 to be observed is less than the safety distance SD, collision with each other is likely to occur.

The operating module 14 can provide kinetic energy by electric power or human power, and perform an ascending or descending operation to make the objective lens 11 and the rangefinder 13 (measurement point MP) move up and down synchronously, and adjust the distance between the objective lens 11 and the object to be observed 2 , The object 2 to be observed enters the imaging area Z, and the object image of the object 2 to be observed is clear for microscopic observation. In the present invention, the operating module 14 can raise and lower the rangefinder 13 (measurement point MP) synchronously with the objective lens 11 through the lifting mechanism 16, so that at least the separation between the measurement point MP and the objective lens 11 is safe. Distance SD.

The processing module 15 receives the measurement result of the rangefinder 13 and judges whether the distance between the objective lens 11 and the object to be observed 2 is less than the safety distance SD. When the operation module 14 performs a lowering operation, and the objective lens 11 and the object to be observed 2 When the distance is less than the safety distance SD, which means that the objective lens 11 performs the descent and the objective lens 11 is too close to the object 2 to be observed, the processing module 15 actively stops the operation module 14 from performing the descent operation. Observer 2 collided because it was too close. Furthermore, when the distance between the objective lens 11 and the to-be-observed object 2 is smaller than the safety distance SD, the processing module 15 of the present invention can cause the operation module 14 to perform an ascending operation so that the objective lens 11 rises and faces away from the to-be-observed object 2. Move in the direction to prevent the human lens 11 from colliding with the object to be observed too close due to the misoperation.

Preferably, the anti-collision structure of the microscope of the present invention may further include a buzzer 18 provided on the microscope 1. When the distance between the objective lens 11 and the object 2 to be observed is less than the safe distance SD, the processing module 15 may also make a buzzer. The device 18 tweets and makes a sound to indicate that the objective lens 11 and the object to be observed 2 are close to each other and a collision may occur.

In summary, the present invention provides a collision avoidance structure for a microscope, which can determine whether the distance between the objective lens and the object to be observed is too close when the distance between the objective lens and the object to be observed (such as a probe card) is adjusted during the operation of the microscope. And when the objective lens is too close to the object to be observed, the descent of the objective lens is actively stopped to prevent personnel's misoperation from causing the objective lens and the object to be collided due to being too close, so as to reduce the chance of the objective lens or the object to be damaged due to collision damage.

The above-mentioned embodiments only exemplify the principles and effects of the present invention, and are not intended to limit the present invention. Anyone skilled in the art can modify and change the above embodiments without departing from the spirit and scope of the present invention. Therefore, the scope of protection of the rights of the present invention should be as listed in the scope of patent application of the present invention.

1‧‧‧ microscope

11‧‧‧ Objective

12‧‧‧ carrier

13‧‧‧ rangefinder

14‧‧‧operation module

15‧‧‧Processing Module

16‧‧‧Lifting mechanism

171‧‧‧X-axis moving mechanism

172‧‧‧Y-axis moving mechanism

18‧‧‧ Buzzer

2‧‧‧ to be observed

Z‧‧‧Image acquisition area

MP‧‧‧Measuring point

SD‧‧‧Safety distance

θ1‧‧‧ intersection angle

θ2‧‧‧Tilt angle

D1‧‧‧ focal length

D2‧‧‧ focal length

FIG. 1 is a schematic diagram of components of a collision avoidance structure of a microscope according to the present invention.

FIG. 2 is a schematic diagram of a first operation state of a collision avoidance structure of a microscope according to the present invention.

FIG. 3 is a schematic diagram of the second operation state of the collision avoidance structure of the microscope according to the present invention.

Claims (9)

An anti-collision structure for a microscope is used for a microscope. The microscope can magnify an object image of an object to be observed for microscopic observation of the object to be observed. The microscope has an objective lens which is captured in an image capturing area. Taking the object image of the object to be observed, the collision avoidance structure of the microscope includes: a rangefinder, the rangefinder is arranged obliquely at the periphery of the image capturing area, and a measuring point is defined in the image capturing area. The measurement point is separated from the objective lens by a safe distance, and the rangefinder system moves up and down synchronously with the objective lens, so that the measurement point also moves up and down synchronously with the objective lens, so that the distance between the measurement point and the objective lens The safety distance remains fixed; an operation module, which can perform an ascending operation or a descending operation, so that the objective lens can move up and down synchronously with the rangefinder, and adjust the distance between the objective lens and the object to be observed So that the object to be observed enters the imaging area so that the object image of the object to be observed is clear for microscopic observation; and a processing module, the processing module is respectively connected to the operation module and the rangefinder, and Yu Dang de The operating module executes the lowering operation to determine whether the measurement point reaches the object to be observed. When the measuring point reaches the object to be observed, the processing module causes the operation module to stop performing the lowering operation to prevent the objective lens. Collision with the object to be observed due to too close. The anti-collision structure of a microscope according to item 1 of the scope of patent application, wherein the focal length of the objective lens is greater than or equal to the safety distance. The collision avoidance structure of a microscope according to item 1 of the scope of the patent application, wherein the rangefinder is a laser rangefinder or an infrared rangefinder; the rangefinder is disposed obliquely on the outer side of the image capturing area The tilt angle of the rangefinder is related to the safety distance. The anti-collision structure of the microscope according to item 1 of the scope of the patent application, further comprising a lifting mechanism, which is used for lifting the objective lens, and the rangefinder is provided on the lifting mechanism so that it cannot follow The objective lens moves up and down synchronously; the operation module moves the objective lens and the rangefinder up and down synchronously through the lifting mechanism. The collision avoidance structure of the microscope according to item 1 of the scope of patent application, further comprising a buzzer, which is arranged on the microscope. When the measurement point reaches the object to be observed, the processing module further causes the The buzzer sounds to indicate by sound that the objective lens and the object to be observed are close to each other and a collision may occur. The anti-collision structure of the microscope according to item 1 of the scope of patent application, wherein the operation module is powered by electricity or manpower. The anti-collision structure of the microscope according to item 1 of the scope of the patent application, wherein the object to be observed is a probe card for testing whether the electrical function of each wafer on the wafer is normal. The anti-collision structure of the microscope according to item 1 of the scope of patent application, wherein when the measurement point reaches the object to be observed, the processing module causes the operation module to perform the ascending operation, so that the objective lens rises and faces away. The direction of the object to be observed prevents the objective lens from colliding with the object to be observed due to being too close. According to the anti-collision structure of the microscope described in item 1 of the scope of the patent application, wherein the objective lens and the measurement point can be connected to form a first straight line, the rangefinder and the measurement point can be connected to form a second straight line, the first, The second line system intersects and the angle of intersection is less than ninety degrees.