TWM614272U - On-line detection and needle clearing device for probe card - Google Patents

Abstract

An online detection and needle cleaning device for probe cards includes a moving mechanism, a detection module and a cleaning module. The detection module and the cleaning module are arranged on the carrying part of the moving mechanism. The detection module can be driven by the moving mechanism to move the detection module to the probe card to detect the probes of the probe card; the cleaning module can be moved by Driven by the moving mechanism, the cleaning module is moved to the probe card for needle cleaning. As a result, the probe can be detected and the needle clearing action can be performed without removing the probe card.

Description

On-line detection and needle clearing device for probe card

This creation relates to an online inspection and needle cleaning device, especially an online inspection and needle cleaning device for probe cards used to improve the current cleaning process of wafer testing.

The semiconductor production process includes wafer manufacturing and packaging testing. In these two links, wafer testing (CP, Circuit Probing) and finished product testing (FT, Final Test) need to be completed respectively. In wafer testing, a probe is used with a testing machine for testing. The probe card is fixed on the probe tester and contacts the wafer. The tester provides electrical signals through the probes on the probe card to test the wafer. After repeated tests, the probes on the probe card may be contaminated and dirty, resulting in poor contact. The traditional method is to remove the probe card for maintenance, and then reinstall it on a prober for setup after the maintenance is completed, which is time-consuming and labor-intensive in operation.

The technical problem to be solved by this creation is to provide an on-line detection and needle clearing device for the probe card in view of the shortcomings of the existing technology, which can detect the probe and perform the needle clearing action without removing the probe card. .

In order to solve the above-mentioned technical problems, the present invention provides an online detection and needle clearing device for probe cards, which is set in a needle tester, the needle tester has a test head, and a probe card is installed on the test head. The probe card has a plurality of probes, and the online detection and needle clearing device includes: a moving mechanism, the moving mechanism has a bearing part; a detection module, the detection module is arranged on the bearing part of the moving mechanism, the detection The module can be driven by the moving mechanism to move the detection module to the probe card for detecting the probe of the probe card; and a cleaning module, the cleaning module being arranged on the carrier of the moving mechanism The cleaning module can be driven by the moving mechanism to move the cleaning module to the probe card, and the cleaning module can be used for needle cleaning.

Preferably, the probes are exposed at the bottom of the probe card, the cleaning module can move to the bottom of the probe card, and the cleaning module can perform needle cleaning upwards.

Preferably, the carrying part of the moving mechanism is provided with a dust collecting device.

The beneficial effect of this creation is that the online detection and needle cleaning device for the probe card provided by this creation, the detection module and the cleaning module are arranged on the carrying part of the moving mechanism, and the detection module can be driven by the moving mechanism to make The detection module moves to the probe card to detect the probes of the probe card. The cleaning module can also be driven by the moving mechanism to move the cleaning module to the probe card for needle cleaning. Therefore, this creation can perform on-line detection and needle cleaning of the probe without removing the probe card. The operation is simple and easy, and the maintenance of the probe is simpler and more convenient.

In order to further understand the features and technical content of this creation, please refer to the following detailed descriptions and drawings about this creation. However, the drawings provided are only for reference and explanation, and are not used to limit this creation.

The following are specific specific examples to illustrate the implementation manners disclosed in this creation, and those skilled in the art can understand the advantages and effects of this creation from the content disclosed in this specification. This creation can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of this creation. In addition, the drawings of this creation are merely schematic illustrations, and are not depicted in actual size, and are stated in advance. The following implementations will further describe the related technical content of this creation in detail, but the disclosed content is not intended to limit the scope of protection of this creation. In addition, the term "or" used in this document may include any one or a combination of more of the associated listed items depending on the actual situation.

[First Embodiment]

Please refer to FIG. 1. This creation provides an online detection and needle clearing device for probe cards, which is set in a probe 100. The online detection and needle clearing device is preferably movably set in the probe 100. Machine 100, but not limited. The probe tester 100 has a test head 101, and a probe card 102 is mounted on the test head 101. The probe card 102 has a plurality of probes 103, and the probes 103 can be exposed at the bottom of the probe card 102, The probes 103 can be in contact with the wafer, and the tester provides electrical signals through the probes 103 on the probe card 102 to test the wafer. The online detection and needle cleaning device includes a moving mechanism 1, a detection module 2 and a laser module 3.

The moving mechanism 1 may be a mechanical arm or various existing transmission mechanisms. The type and structure of the moving mechanism 1 are not limited. The moving mechanism 1 may be a three-axis moving mechanism, that is, the moving mechanism 1 can perform X-axis, Y-axis and Z-axis movement control. The moving mechanism 1 can be connected to a control host 4, and the control host 4 can be arranged on one side of the needle measuring machine 100, so that the control host 4 can be used to control the movement of the moving mechanism 1. The moving mechanism 1 has a bearing portion 11 that can be located at one end of the moving mechanism 1, the bearing portion 11 forms a free end, and the bearing portion 11 can be located at the end of the moving mechanism 1 away from the control host 4. The moving mechanism 1 can perform three-axis movement control, so that the carrying portion 11 can move to a predetermined position, so as to drive the detection module 2 and the laser module 3 to move to the probe card 102. Generally, the movement of the moving mechanism 1 can be driven by a power source such as a motor, a pneumatic cylinder or a hydraulic cylinder (the figure is omitted), and can be matched with an appropriate sensor (the figure is omitted) to enable the carrying portion 11 of the moving mechanism 1 Accurately move to a predetermined position, that is, the carrying portion 11 of the moving mechanism 1 can drive the detection module 2 and the laser module 3 to move to the probe card 102 for detection and needle clearing. After the needle clearing is completed, the carrying portion 11 of the moving mechanism 1 can also drive the detection module 2 and the laser module 3 to move away from the probe card 102, and then move the entire moving mechanism 1 out of the needle measuring machine 100. The operation of the probe card 102 to test the wafer is hindered.

The detection module 2 is arranged on the carrying portion 11 of the moving mechanism 1. The detection module 2 can be driven by the moving mechanism 1, so that the detection module 2 can be moved to the probe card 102, so as to determine whether the probe 103 is dirty In this embodiment, the detection module 2 can be moved below the probe card 102. The structure of the detection module 2 is not limited. The detection module 2 can be a camera, and the camera can be used to capture an image of the probe 103 of the probe card 102 for judgment based on the analysis of the optical identification result. The detection module 2 can also be other detection devices, such as electrical detection (auxiliary) devices, so as to make judgments based on the analysis of electrical test results.

The detection module 2 can be driven by the moving mechanism 1 to move to the bottom of the probe card 102 to detect the probe 103 of the probe card 102 in a non-contact or contact manner, and determine whether the probe 103 of the probe card 102 is touched or not. Sticky and dirty. For example, when the detection module 2 is a camera, the detection module 2 can detect the probe 103 of the probe card 102 in a non-contact manner. When the detection module 2 is an electrical detection device, the detection module 2 can pass through The probe 103 of the probe card 102 is tested in a contact or non-contact manner with the electrical measurement function of the testing machine.

The laser module 3 (cleaning module) is arranged on the carrying portion 11 of the moving mechanism 1. Preferably, the laser module 3 is close to the detection module 2. The level of detection module 2 and laser module 3 is not limited, detection module 2 and laser module 3 can be set at the same level, detection module 2 and laser module 3 can also be set at Different levels, that is, the level set by the laser module 3 can be equal to, higher than, or lower than the level set by the detection module 2.

The laser module 3 can be driven by the moving mechanism 1, so that the laser module 3 can move the probe card 102. In this embodiment, the laser module 3 can be moved below the probe card 102, etc. . The detection module 2 and the laser module 3 can also be electrically connected to the control host 4 so as to use the control host 4 to control operations. The laser module 3 can emit laser light toward the probe 103 of the probe card 102. In this embodiment, the laser module 3 can emit laser light upward so that the laser light irradiates the needle to be cleared. The probe 103, so that the dirt on the probe 103 can be removed. Specifically, when the detection module 2 detects that the probe 103 is stained and dirty, the laser module 3 can be used to emit laser light, thereby performing a needle cleaning action.

In addition, after the laser module 3 performs the needle clearing, the detection module 2 can be used to detect the probe 103 to determine whether the probe 103 is indeed cleared. If the clearing is not completed, continue. The laser module 3 is used to perform the needle clearing action until the probe 103 is indeed cleared, and then the next probe 103 detection and the needle clearing action are performed to complete the detection of the probes 103 in sequence And the movement of clearing the needle.

The detection module 2 and laser module 3 of this creation can be moved to the probe card 102 by the moving mechanism 1, so the probe 103 can be inspected and cleaned online without removing the probe card 102. Needle action. The creative laser module 3 can use laser pulses to irradiate the surface of the probe 103 to instantly evaporate the dirt on the surface of the probe 103, quickly and effectively remove the dirt on the surface of the probe 103, and control the appropriate laser pulse power and action time , It will not damage the metal material of the probe 103.

[Second Embodiment]

Please refer to FIG. 2. In another embodiment of the present creation, a dust collecting device 5 can also be provided on the carrying portion 11 of the moving mechanism 1, and the dust collecting device 5 can be close to the detection module 2 and the laser module 3 The type and structure of the dust collecting device 5 are not limited. The dust collecting device 5 can be various existing dust collecting devices. The dust collecting device 5 can collect dirt and metal chips by means of suction or blowing. The dust collecting device 5 can be used to collect the dirt and metal shavings dropped during the needle cleaning process of the laser module 3, so as to avoid causing internal pollution of the needle measuring machine 100. In addition, in other embodiments, the laser module 3 can also be a cleaning module in the form of a plasma module, etc., so that the needle cleaning action can be performed by a plasma method. The structure of the cleaning module of the present invention is not limited.

[Beneficial effects of the embodiment]

The beneficial effect of this creation is that the online detection and needle cleaning device for the probe card provided by this creation, the detection module and the cleaning module are arranged in the carrying part of the moving mechanism, and the detection module can be driven by the moving mechanism to make The detection module is moved to the probe card, or in conjunction with the electrical test result of the testing machine, is used to detect the probe of the probe card. The cleaning module can also be driven by the moving mechanism to move the cleaning module to the probe card. Used to clear the needle. Therefore, this creation can perform on-line detection and needle cleaning of the probe without removing the probe card. The operation is simple and easy, and the maintenance of the probe is simpler and more convenient.

Furthermore, in this creation, a dust collecting device can be installed on the carrying part of the moving mechanism, and the dust collecting device can be used to collect the dirt and metal shavings dropped during the cleaning process of the cleaning module, so as to avoid causing the inside of the needle measuring machine. Pollution.

The content disclosed above is only a preferred and feasible embodiment of this creation, and does not limit the scope of patent application for this creation. Therefore, all equivalent technical changes made using this creation specification and schematic content are included in the application for this creation. Within the scope of the patent.

1: mobile organization 11: Bearing Department 2: Detection module 3: Laser module 4: Control host 5: Dust collection device 100: Needle testing machine 101: Test head 102: Probe card 103: Probe

Figure 1 is a schematic diagram of the on-line detection and needle cleaning device created for the probe card.

Fig. 2 is a schematic diagram of another embodiment of the on-line detection and needle cleaning device created for probe cards.

1: mobile organization

11: Bearing Department

2: Detection module

3: Laser module

4: Control host

100: Needle testing machine

101: Test head

102: Probe card

103: Probe

Claims (10)

An on-line detection and needle clearing device for probe cards, which is set in a needle tester, the needle tester has a test head, a probe card is installed on the test head, the probe card has a plurality of probes, the On-line detection and needle cleaning devices include: A moving mechanism, the moving mechanism having a carrying portion; A detection module, the detection module is arranged on the carrying part of the moving mechanism, the detection module can be driven by the moving mechanism, so that the detection module can be moved to the probe card to detect the probe card Probe; and A cleaning module, the cleaning module is arranged on the carrying part of the moving mechanism, the cleaning module can be driven by the moving mechanism to move the cleaning module to the probe card, and the cleaning module can be used to perform Needle clearing action. The online detection and needle cleaning device for a probe card according to claim 1, wherein the probes are exposed at the bottom of the probe card, the cleaning module can be moved to the bottom of the probe card, the The cleaning module can clean the needle upwards. The online detection and needle clearing device for a probe card according to claim 1, wherein the moving mechanism is connected to a control host, and the bearing portion is located at an end of the moving mechanism away from the control host. According to claim 1, the online detection and needle clearing device for a probe card, wherein the moving mechanism is a three-axis moving mechanism. The online detection and needle clearing device for a probe card according to claim 1, wherein the detection module is a camera or an electrical detection device. The online detection and needle clearing device for a probe card according to claim 1, wherein the detection module detects the probe of the probe card in a non-contact or contact manner. The online detection and needle cleaning device for a probe card according to claim 1, wherein the cleaning module is close to the detection module. The online detection and needle cleaning device for probe cards according to claim 1, wherein a dust collecting device is provided on the carrying part of the moving mechanism. The online detection and needle cleaning device for a probe card according to claim 8, wherein the dust collecting device is close to the detection module and the cleaning module. The online detection and needle cleaning device for a probe card according to claim 1, wherein the cleaning module is a laser module or a plasma module.

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